{"id":2550,"date":"2025-09-13T09:09:50","date_gmt":"2025-09-13T09:09:50","guid":{"rendered":"https:\/\/casnewmaterials.com\/?p=2550"},"modified":"2025-08-13T05:43:18","modified_gmt":"2025-08-13T05:43:18","slug":"sics-key-role-in-led-manufacturing-excellence","status":"publish","type":"post","link":"https:\/\/sicarbtech.com\/ko\/sics-key-role-in-led-manufacturing-excellence\/","title":{"rendered":"LED \uc81c\uc870 \uc6b0\uc218\uc131\uc5d0\uc11c SiC\uc758 \ud575\uc2ec \uc5ed\ud560"},"content":{"rendered":"<h1>LED \uc81c\uc870 \uc6b0\uc218\uc131\uc5d0\uc11c SiC\uc758 \ud575\uc2ec \uc5ed\ud560<\/h1>\n<h2>\uc18c\uac1c \uc18c\uac1c: LED \uae30\uc220\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \ube5b\ub098\ub294 \ubd80\uc0c1<\/h2>\n<p>\uc2e4\ub9ac\ucf58\uacfc \ud0c4\uc18c\uc758 \ud654\ud569\ubb3c\uc778 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)\ub294 \ub6f0\uc5b4\ub09c \ubb3c\ub9ac\uc801, \ud654\ud559\uc801 \ud2b9\uc131\uc73c\ub85c \uc798 \uc54c\ub824\uc9c4 \uac15\ub825\ud55c \ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc18c\uc7ac\uc785\ub2c8\ub2e4. \ub6f0\uc5b4\ub09c \uacbd\ub3c4, \ub192\uc740 \uc5f4\uc804\ub3c4\uc728, \ub6f0\uc5b4\ub09c \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131, \uc6b0\uc218\ud55c \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc744 \uc9c0\ub2cc SiC\ub294 \uae4c\ub2e4\ub85c\uc6b4 \uc0b0\uc5c5 \ubd84\uc57c\uc5d0\uc11c \ud2c8\uc0c8 \uc2dc\uc7a5\uc744 \uac1c\ucc99\ud574 \uc654\uc2b5\ub2c8\ub2e4. \ucd5c\uadfc \uba87 \ub144 \ub3d9\uc548 \ud6a8\uc728\uc131, \uc131\ub2a5, \uc218\uba85\uc758 \ud55c\uacc4\ub97c \ub04a\uc784\uc5c6\uc774 \ub6f0\uc5b4\ub118\ub294 \ubc1c\uad11 \ub2e4\uc774\uc624\ub4dc(LED) \uc0b0\uc5c5\uc740 \uc810\uc810 \ub354 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub85c \ub208\uc744 \ub3cc\ub9ac\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub354 \ubc1d\uace0 \uc548\uc815\uc801\uc774\uba70 \uc5d0\ub108\uc9c0 \ud6a8\uc728\uc801\uc778 \uc870\uba85 \uc194\ub8e8\uc158\uc744 \ub04a\uc784\uc5c6\uc774 \ucd94\uad6c\ud558\uba74\uc11c \uc5c4\uaca9\ud55c \uc81c\uc870 \uacf5\uc815\uc744 \uacac\ub514\uace0 LED \uc7a5\uce58\uc758 \uc791\ub3d9 \ud2b9\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\ub294 \uc18c\uc7ac\uc758 \ud544\uc694\uc131\uc774 \uac15\uc870\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. SiC\uc758 \uace0\uc720\ud55c \ud2b9\uc131 \uc870\ud569\uc740 \uc774\ub7ec\ud55c \uacfc\uc81c\ub97c \ud574\uacb0\ud558\uace0 \ucc28\uc138\ub300 LED \uae30\uc220\uc744 \uc704\ud55c \uae30\ubc18\uc744 \ub9c8\ub828\ud558\ub294 \ub370 \uc774\uc0c1\uc801\uc778 \ud6c4\ubcf4\uc785\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc744 \uc704\ud55c \uacac\uace0\ud55c \uae30\ud310 \uc5ed\ud560\ubd80\ud130 \uace0\ucd9c\ub825 LED\uc5d0\uc11c \ud0c1\uc6d4\ud55c \uc5f4 \uad00\ub9ac\ub97c \uac00\ub2a5\ud558\uac8c \ud558\ub294 \uac83\uae4c\uc9c0, LED\uc758 \uc6b0\uc218\uc131\uc744 \ucd94\uad6c\ud558\ub294 \ub370 \uc5c6\uc5b4\uc11c\ub294 \uc548 \ub420 \uc18c\uc7ac\uc784\uc774 \uc785\uc99d\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \ucc44\ud0dd\uc740 \ud604\ub300 \uc870\uba85 \ubc0f \ub514\uc2a4\ud50c\ub808\uc774 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uc99d\uac00\ud558\ub294 \uc218\uc694\ub97c \ucda9\uc871\ud560 \uc218 \uc788\ub294 \uc18c\uc7ac\ub85c\uc758 \uc911\ucd94\uc801\uc778 \uc804\ud658\uc744 \uc758\ubbf8\ud558\uba70, \ub354 \ubc1d\uace0 \uc9c0\uc18d \uac00\ub2a5\ud55c \ubbf8\ub798\ub97c \uc57d\uc18d\ud569\ub2c8\ub2e4.<\/p>\n<h2>\ud575\uc2ec \uc560\ud50c\ub9ac\ucf00\uc774\uc158: LED \uc81c\uc870 \uacf5\uc815\uc5d0\uc11c SiC\uac00 \ube5b\uc744 \ubc1c\ud558\ub294 \ubd84\uc57c<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \ub2e4\uc7ac\ub2e4\ub2a5\ud55c \ud2b9\uc131 \ub355\ubd84\uc5d0 LED \uc81c\uc870 \uc0dd\ud0dc\uacc4\uc5d0\uc11c \uc5ec\ub7ec \uac00\uc9c0 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \uc218\ud589\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uac01 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \ud2b9\uc815 SiC \ud2b9\uc131\uc744 \ud65c\uc6a9\ud558\uc5ec \ud6a8\uc728\uc131, \ub0b4\uad6c\uc131 \ubc0f \uc804\ubc18\uc801\uc778 \uc7a5\uce58 \uc131\ub2a5\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>\uae30\ud310 \uc7ac\ub8cc\ub85c\uc11c\uc758 SiC:<\/strong> LED \ubd80\ubb38\uc5d0\uc11c SiC\uc758 \uac00\uc7a5 \uc911\uc694\ud55c \uc751\uc6a9 \ubd84\uc57c \uc911 \ud558\ub098\ub294 \uc9c8\ud654 \uac08\ub968(GaN)\uc758 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc744 \uc704\ud55c \uae30\ud310\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \uac83\uc785\ub2c8\ub2e4. GaN-on-SiC LED\ub294 \ud2b9\ud788 \uace0\uc804\ub825 \ubc0f \uace0\uc8fc\ud30c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc120\ud638\ub429\ub2c8\ub2e4. \uae30\uc874 \uc0ac\ud30c\uc774\uc5b4 \uae30\ud310\uacfc \ube44\uad50\ud588\uc744 \ub54c SiC\ub294 GaN\uacfc \uaca9\uc790\uac00 \ub354 \ubc00\uc811\ud558\uac8c \uc77c\uce58\ud558\uc5ec \uc5d0\ud53c\ud0dd\uc15c \uce35\uc758 \uacb0\ud568\uc744 \uc904\uc774\uace0 LED \ud6a8\uc728\uacfc \uc218\uba85\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4. \ub610\ud55c \uc5f4\uc804\ub3c4\uc728\uc774 \ub192\uc544 LED\uc758 \ud65c\uc131 \uc601\uc5ed\uc5d0\uc11c \uc9c1\uc811 \uc5f4\uc744 \ub354 \ud6a8\uacfc\uc801\uc73c\ub85c \ubc29\ucd9c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uace0\uc804\ub825 LED \uc5f4 \uad00\ub9ac\uc758 SiC:<\/strong> LED\uac00 \ub354\uc6b1 \uac15\ub825\ud574\uc9d0\uc5d0 \ub530\ub77c \uc131\ub2a5\uc744 \uc720\uc9c0\ud558\uace0 \uc870\uae30 \uace0\uc7a5\uc744 \ubc29\uc9c0\ud558\ub824\uba74 \ubc1c\uc0dd\ub418\ub294 \uc5f4\uc744 \uad00\ub9ac\ud558\ub294 \uac83\uc774 \ubb34\uc5c7\ubcf4\ub2e4 \uc911\uc694\ud569\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \ub6f0\uc5b4\ub09c \uc5f4 \uc804\ub3c4\uc131(\uace0\ud488\uc9c8 \ub2e8\uacb0\uc815\uc758 \uacbd\uc6b0 400W\/mK\ub97c \ucd08\uacfc\ud558\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc74c)\uc740 \uace0\ud718\ub3c4 LED(HB-LED) \ud328\ud0a4\uc9c0\uc758 \ubc29\uc5f4\ud310, \ud788\ud2b8 \uc2a4\ud504\ub808\ub354 \ubc0f \uc11c\ube0c\ub9c8\uc6b4\ud2b8\uc5d0 \ud0c1\uc6d4\ud55c \uc18c\uc7ac\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c SiC \ubd80\ud488\uc740 LED \uce69\uc5d0\uc11c \uc5f4\uc744 \ud6a8\uc728\uc801\uc73c\ub85c \ubc30\ucd9c\ud558\uc5ec \ub354 \ub192\uc740 \uad6c\ub3d9 \uc804\ub958\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc778 \uc791\ub3d9\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>MOCVD\/HVPE \uc6d0\uc790\ub85c\uc6a9 SiC \ubd80\ud488:<\/strong> LED \uc5d0\ud53c\ud0dd\uc2dc \uce35\uc744 \uc131\uc7a5\uc2dc\ud0a4\ub294 \ub370 \uc0ac\uc6a9\ub418\ub294 \uae08\uc18d-\uc720\uae30 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(MOCVD) \ubc0f \uc218\uc18c\ud654\ubb3c \uae30\uc0c1 \uc5d0\ud53c\ud0dd\uc2dc(HVPE) \uacf5\uc815\uc740 \ub9e4\uc6b0 \ub192\uc740 \uc628\ub3c4\uc640 \ubd80\uc2dd\uc131 \ud654\ud559 \ud658\uacbd\uc744 \uc218\ubc18\ud569\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc, \ud2b9\ud788 \uace0\uc21c\ub3c4 \uc18c\uacb0 \ud0c4\ud654\uaddc\uc18c(SSiC) \ub610\ub294 CVD \ud0c4\ud654\uaddc\uc18c(\uc885\uc885 \ud0c4\ud0c8\ub968 \uce74\ubc14\uc774\ub4dc, TaC\ub85c \ucf54\ud305\ub428)\ub294 \uc911\uc694\ud55c \ub9ac\uc561\ud130 \uad6c\uc131 \uc694\uc18c\uc5d0 \uad11\ubc94\uc704\ud558\uac8c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4:\n<ul>\n<li><strong>\uc11c\uc149\ud130\/\uc6e8\uc774\ud37c \uce90\ub9ac\uc5b4:<\/strong> \uc131\uc7a5\ud558\ub294 \ub3d9\uc548 \uc6e8\uc774\ud37c\uc5d0 \uade0\uc77c\ud55c \uc628\ub3c4 \ubd84\ud3ec\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc0e4\uc6cc\ud5e4\ub4dc:<\/strong> \uc6e8\uc774\ud37c\uc5d0 \uade0\uc77c\ud55c \uac00\uc2a4 \ubd84\ud3ec\uac00 \uc774\ub8e8\uc5b4\uc9c0\ub3c4\ub85d \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ub77c\uc774\ub108 \ubc0f \ucc54\ubc84:<\/strong> \uc6d0\uc790\ub85c \uc11d\uc601\uc744 \ubcf4\ud638\ud558\uace0 \uae68\ub057\ud55c \ucc98\ub9ac \ud658\uacbd\uc744 \uc720\uc9c0\ud558\uc138\uc694.<\/li>\n<\/ul>\n<p>            SiC\uc758 \ub192\uc740 \uc5f4 \uc548\uc815\uc131, \ub0b4\ud654\ud559\uc131 \ubc0f \uae30\uacc4\uc801 \uac15\ub3c4\ub294 \uc774\ub7ec\ud55c \uc911\uc694\ud55c MOCVD \ubd80\ud488\uc758 \uc218\uba85\uacfc \uacf5\uc815 \uc77c\uad00\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.\n        <\/li>\n<li><strong>\ud2b9\uc218 LED \ubaa8\ub4c8 \ubc0f \uad11\ud559 \ubd84\uc57c\uc758 SiC:<\/strong> \uc77c\ubd80 \ud2c8\uc0c8 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c\ub294 SiC\uc758 \uad11\ud559\uc801 \ud2b9\uc131\uc774\ub098 \uadf9\ud55c \ud658\uacbd(\uc608: \uace0\uc628, \ubc29\uc0ac\uc120)\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \ub2a5\ub825\uc73c\ub85c \uc778\ud574 \ud2b9\uc218 LED \ubaa8\ub4c8\uc5d0 \uc0ac\uc6a9\ub418\uac70\ub098 \ubcf4\ud638 \uad11\ud559 \uc5b4\uc148\ube14\ub9ac\uc758 \uad6c\uc131 \uc694\uc18c\ub85c \uc0ac\uc6a9\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uacb0\ub860: \uae4c\ub2e4\ub85c\uc6b4 \uc5f4 \ud658\uacbd\uc5d0\uc11c \ub9de\ucda4\ud615 \ud0c4\ud654\uaddc\uc18c\uc758 \uc9c0\uc18d\uc801\uc778 \uac00\uce58 <em>\uc0b0\uc5c5\uc6a9 SiC \ubd80\ud488<\/em> \uc774\ub7ec\ud55c \ubd84\uc57c\uc5d0\uc11c LED \ud488\uc9c8, \uc81c\uc870 \uc218\uc728, \uc790\ub3d9\ucc28 \ud5e4\ub4dc\ub77c\uc774\ud2b8, \uc0b0\uc5c5\uc6a9 \uc870\uba85, \ub300\ud615 \ub514\uc2a4\ud50c\ub808\uc774\uc640 \uac19\uc740 \uae4c\ub2e4\ub85c\uc6b4 \uc2dc\uc7a5\uc744 \uc704\ud55c \ubcf4\ub2e4 \uacac\uace0\ud558\uace0 \ud6a8\uc728\uc801\uc778 \uc870\uba85 \uc194\ub8e8\uc158\uc744 \uc0dd\uc0b0\ud560 \uc218 \uc788\ub294 \ub2a5\ub825 \ud5a5\uc0c1\uc73c\ub85c \uc9c1\uacb0\ub429\ub2c8\ub2e4.<\/p>\n<h2>\ub9de\ucda4\ud615\uc758 \uc774\uc810: LED\uc758 \uc6b0\uc218\uc131\uc744 \uc704\ud574 \ub9de\ucda4\ud615 SiC\uac00 \uc911\uc694\ud55c \uc774\uc720<\/h2>\n<p>\ud45c\uc900 SiC \ubd80\ud488\uc740 \ub2e4\uc591\ud55c \uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ub418\uc9c0\ub9cc, LED \uc81c\uc870\uc758 \ubcf5\uc7a1\ud558\uace0 \uc9c4\ud654\ud558\ub294 \uc694\uad6c \uc0ac\ud56d\uc73c\ub85c \uc778\ud574 \uc810\uc810 \ub354 \ub2e4\uc74c\uacfc \uac19\uc740 \uc694\uad6c \uc0ac\ud56d\uc774 \ud544\uc694\ud558\uac8c \ub418\uc5c8\uc2b5\ub2c8\ub2e4 <strong>\ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc194\ub8e8\uc158<\/strong>. \uae30\uc131 \ubd80\ud488\uc740 \ud2b9\uc218\ud55c LED \uc124\uacc4 \ubc0f \ucca8\ub2e8 \uc81c\uc870 \uacf5\uc815\uc5d0 \ud56d\uc0c1 \ucd5c\uc801\uc758 \uc131\ub2a5\uc744 \uc81c\uacf5\ud558\uac70\ub098 \uc801\ud569\ud558\uc9c0 \uc54a\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud2b9\uc815 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\uac8c SiC \ubd80\ud488\uc744 \ub9de\ucda4 \uc81c\uc791\ud558\uba74 \ub2e4\uc591\ud55c \uc774\uc810\uc744 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\ucd5c\uc801\ud654\ub41c \uc5f4 \uc131\ub2a5:<\/strong> \ub9de\ucda4\ud615 SiC \ubc29\uc5f4\ud310\uacfc \uc2a4\ud504\ub808\ub354\ub294 \ud2b9\uc815 LED \uce69 \ub610\ub294 \ubaa8\ub4c8 \ub808\uc774\uc544\uc6c3\uc758 \uc5f4 \ubc29\ucd9c\uc744 \uadf9\ub300\ud654\ud558\ub294 \ud615\uc0c1\uc73c\ub85c \uc124\uacc4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \uc811\ud569\ubd80 \uc628\ub3c4\ub97c \ub0ae\ucd94\uace0, \uad11 \ucd9c\ub825\uc744 \ub192\uc774\uba70, \uc0c9 \uc548\uc815\uc131\uc744 \uac1c\uc120\ud558\uace0, LED \uc218\uba85\uc744 \ud06c\uac8c \uc5f0\uc7a5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud5a5\uc0c1\ub41c \uae30\uacc4\uc801 \uc548\uc815\uc131\uacfc \ucc29\uc6a9\uac10:<\/strong> \ud2b9\uc815 \ucc54\ubc84 \ud06c\uae30\uc640 \uc6e8\uc774\ud37c \ud06c\uae30\uc5d0 \ub9de\uac8c \uc124\uacc4\ub41c \ub9de\ucda4\ud615 SiC \uc11c\uc149\ud130, \uc0e4\uc6cc\ud5e4\ub4dc \ubc0f \ub77c\uc774\ub108\ub294 MOCVD \ubc18\uc751\uae30\uc5d0\uc11c \uc644\ubcbd\ud55c \ub9de\ucda4, \uade0\uc77c\ud55c \uac00\uc5f4 \ubc0f \ucd5c\uc801\uc758 \uac00\uc2a4 \ud750\ub984 \uc5ed\ud559\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc815\ubc00\ub3c4\ub294 \uc99d\ucc29 \uade0\uc77c\uc131\uc744 \uac1c\uc120\ud558\uace0 \uc785\uc790 \ubc1c\uc0dd\uc744 \uc904\uc5ec LED \uc6e8\uc774\ud37c \uc218\uc728\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/li>\n<li><strong>\ub9de\ucda4\ud615 \uc804\uae30\uc801 \ud2b9\uc131:<\/strong> SiC \uae30\ud310\uc758 \uacbd\uc6b0 \ud2b9\uc815 \ub3c4\ud551 \uc218\uc900(\uc608: \uc218\uc9c1 \uc804\ub958 \ud750\ub984\uc758 \uacbd\uc6b0 n\ud615) \ub610\ub294 \uc800\ud56d\ub960(\uc608: \ud2b9\uc815 \ub514\ubc14\uc774\uc2a4 \uc544\ud0a4\ud14d\ucc98\uc758 \uacbd\uc6b0 \ubc18\uc808\uc5f0)\uae4c\uc9c0 \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 LED \uc124\uacc4\uc790\ub294 \ub514\ubc14\uc774\uc2a4 \ud2b9\uc131\uc744 \ubbf8\uc138 \uc870\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc6b0\uc218\ud55c \ud654\ud559\uc801 \ubd88\ud65c\uc131 \ubc0f \uc21c\ub3c4:<\/strong> \ubbfc\uac10\ud55c MOCVD \uacf5\uc815\uc5d0\uc11c \uc624\uc5fc\uc744 \ucd5c\uc18c\ud654\ud558\ub294 \ub370 \uc911\uc694\ud55c \uc21c\ub3c4 \uc81c\uc5b4\uac00 \uac00\ub2a5\ud55c \ud2b9\uc815 \ub4f1\uae09\uc758 SiC\ub97c \uc0ac\uc6a9\ud558\uc5ec \ub9de\ucda4\ud615 SiC \ubd80\ud488\uc744 \uc81c\uc870\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. TaC\uc640 \uac19\uc740 \ucf54\ud305\ub3c4 \ub450\uaed8\uc640 \uc801\uc6a9 \ubc94\uc704\ub97c \ub9de\ucda4\ud654\ud558\uc5ec \ubcf4\ud638 \uae30\ub2a5\uc744 \uadf9\ub300\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud5a5\uc0c1\ub41c \uad11\uc6d0 \ucd94\ucd9c:<\/strong> \ud2b9\uc815 LED \uc124\uacc4\uc758 \uacbd\uc6b0, SiC \uae30\ud310 \ub610\ub294 \ud328\ud0a4\uc9c0 \uad6c\uc131 \uc694\uc18c\uc758 \ubaa8\uc591\uacfc \ud45c\uba74 \ud2b9\uc131\uc744 \ub9de\ucda4\ud654\ud558\uc5ec \uad11 \ucd94\ucd9c \ud6a8\uc728\uc744 \uac1c\uc120\ud558\uace0 \uc804\uccb4 \ub8e8\uba58 \ucd9c\ub825\uc744 \ub354\uc6b1 \ub192\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud504\ub85c\uc138\uc2a4\ubcc4 \ub514\uc790\uc778:<\/strong> LED \uc81c\uc870\uc5c5\uccb4\ub294 \uc885\uc885 \uace0\uc720\ud55c \uacf5\uc815 \uc870\uac74\uc774\ub098 \uc7a5\ube44\ub97c \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub9de\ucda4\ud615 SiC \uad6c\uc131 \uc694\uc18c\ub294 \uc774\ub7ec\ud55c \ub3c5\uc810\uc801\uc778 \uc124\uc815\uc5d0 \uc6d0\ud65c\ud558\uac8c \ud1b5\ud569\ub418\ub3c4\ub85d \uc124\uacc4\ud558\uc5ec \uc804\ubc18\uc801\uc778 \uacf5\uc815 \ud6a8\uc728\uc131\uc744 \ub192\uc774\uace0 \uac00\ub3d9 \uc911\ub2e8 \uc2dc\uac04\uc744 \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\ud22c\uc790 \ub300\uc0c1 <em>\ub9de\ucda4\ud615 SiC \uc81c\uc791<\/em> \ub294 LED \uc81c\uc870\uc5c5\uccb4\uac00 \uc131\ub2a5 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\uace0, \uc81c\uc870 \uc218\uc728\uc744 \uac1c\uc120\ud558\uba70, \uacbd\uc7c1\uc774 \uce58\uc5f4\ud55c \uc2dc\uc7a5\uc5d0\uc11c \uc81c\ud488\uc744 \ucc28\ubcc4\ud654\ud560 \uc218 \uc788\ub3c4\ub85d \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \uce58\uc218, \uc7ac\ub8cc \ub4f1\uae09, \ud45c\uba74 \ub9c8\uac10 \ubc0f \uae30\ud0c0 \uc911\uc694\ud55c \ud30c\ub77c\ubbf8\ud130\ub97c \uc9c0\uc815\ud560 \uc218 \uc788\ub294 \uae30\ub2a5\uc744 \ud1b5\ud574 SiC \ubd80\ud488\uc774 LED\uc758 \uc6b0\uc218\uc131\uc774\ub77c\ub294 \uc804\ubc18\uc801\uc778 \ubaa9\ud45c\uc5d0 \ucd5c\ub300\ud55c \uae30\uc5ec\ud560 \uc218 \uc788\ub3c4\ub85d \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<h2>\uc870\uba85 \uc120\ud0dd: LED \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uad8c\uc7a5\ub418\ub294 SiC \ub4f1\uae09 \ubc0f \uc720\ud615<\/h2>\n<p>LED \uc81c\uc870\uc5d0\uc11c \uc131\ub2a5\uacfc \ube44\uc6a9 \ud6a8\uc728\uc131\uc744 \ucd5c\uc801\ud654\ud558\ub824\uba74 \uc801\uc808\ud55c \ub4f1\uae09\uc758 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub97c \uc120\ud0dd\ud558\ub294 \uac83\uc774 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4. \ub2e4\uc591\ud55c SiC \uc720\ud615\uc740 \uace0\uc720\ud55c \ud2b9\uc131 \ud504\ub85c\ud30c\uc77c\uc744 \uc81c\uacf5\ud558\ubbc0\ub85c LED \uc0dd\uc0b0 \uccb4\uc778 \ub0b4\uc758 \ud2b9\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<table>\n<thead>\n<tr>\n<th>SiC \ub4f1\uae09\/\uc720\ud615<\/th>\n<th>\uc8fc\uc694 \uc18d\uc131<\/th>\n<th>\uc8fc\uc694 LED \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<th>\uace0\ub824 \uc0ac\ud56d<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>N\ud615 \ub2e8\uacb0\uc815 SiC \uc6e8\uc774\ud37c(\uc608: 4H-SiC, 6H-SiC)<\/strong><\/td>\n<td>\ub192\uc740 \uc5f4\uc804\ub3c4\uc728, GaN\uacfc\uc758 \uc6b0\uc218\ud55c \uaca9\uc790 \uc77c\uce58, \uc804\uae30 \uc804\ub3c4\uc131, \uace0\uc21c\ub3c4.<\/td>\n<td>GaN \uc5d0\ud53c\ud0dd\uc2dc\uc6a9 \uae30\ud310(\ud2b9\ud788 \uc218\uc9c1 LED \uad6c\uc870, UV LED \ubc0f \uc77c\ubd80 \uace0\ucd9c\ub825 \uccad\uc0c9\/\ub179\uc0c9 LED\uc6a9).<\/td>\n<td>\uc0ac\ud30c\uc774\uc5b4\uc5d0 \ube44\ud574 \ub192\uc740 \ube44\uc6a9, \uacb0\ud568 \ubc00\ub3c4(\ubbf8\uc138 \ud30c\uc774\ud504, \uc804\uc704)\uac00 \uc911\uc694\ud55c \ud30c\ub77c\ubbf8\ud130\uc785\ub2c8\ub2e4. \ub354 \ud070 \uc9c1\uacbd(\uc608: 100mm, 150mm)\uc758 \uac00\uc6a9\uc131 \ud5a5\uc0c1.<\/td>\n<\/tr>\n<tr>\n<td><strong>\ubc18\uc808\uc5f0(SI) \ub2e8\uacb0\uc815 SiC \uc6e8\uc774\ud37c<\/strong><\/td>\n<td>\ub192\uc740 \uc5f4\uc804\ub3c4\uc728, \ub192\uc740 \uc804\uae30 \uc800\ud56d\ub960(&gt;10<sup>5<\/sup> \uc624\uba54\uac00;&amp;\ubbf8\ub3c4\ud2b8;cm), \uace0\uc21c\ub3c4.<\/td>\n<td>\uace0\uc8fc\ud30c GaN \ub514\ubc14\uc774\uc2a4\uc6a9 \uae30\ud310(\uc608: \ubcf5\uc7a1\ud55c LED \ub514\uc2a4\ud50c\ub808\uc774 \ub610\ub294 \ud1b5\uc2e0 \uc2dc\uc2a4\ud15c \uad6c\ub3d9\uc744 \uc704\ud55c HEMT). \uc9c1\uc811 \ubc1c\uad11\uc5d0\ub294 \ub35c \uc77c\ubc18\uc801\uc774\uc9c0\ub9cc \uc804\uc790 \uc7a5\uce58\ub97c \uc9c0\uc6d0\ud558\ub294 \ub370 \uc911\uc694\ud569\ub2c8\ub2e4. \uc804\uae30 \uc808\uc5f0\uc774 \ud544\uc694\ud55c LED \uad6c\uc870\uc758 \ud2b9\uc815 R&#038;D\uc5d0\ub3c4 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/td>\n<td>\ube44\uc6a9\uacfc \uacb0\ud568 \ubc00\ub3c4\ub294 N\ud615\uacfc \ube44\uc2b7\ud55c \ubb38\uc81c\uc785\ub2c8\ub2e4. SI \ud2b9\uc131\uc744 \ub2ec\uc131\ud558\uae30 \uc704\ud574 \ubc14\ub098\ub4d0 \ub3c4\ud551 \ub610\ub294 \ub0b4\uc7ac\uc801 \uace0\uc21c\ub3c4 \ubc29\ubc95\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>\uace0\uc21c\ub3c4 \uc18c\uacb0 SiC(SSiC)<\/strong><\/td>\n<td>\ub6f0\uc5b4\ub09c \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc131, \uace0\uc628\uc5d0\uc11c\uc758 \ub192\uc740 \uac15\ub3c4, \uace0\uc21c\ub3c4(\uc77c\ubc18\uc801\uc73c\ub85c 99% \uc774\uc0c1), \uc6b0\uc218\ud55c \ud654\ud559\uc801 \ubd88\ud65c\uc131.<\/td>\n<td>MOCVD\/HVPE \ubc18\uc751\uae30 \uad6c\uc131\ud488: \uc11c\uc149\ud130, \uc0e4\uc6cc\ud5e4\ub4dc, \ucc54\ubc84 \ub77c\uc774\ub108, \ub3c4\uac00\ub2c8. \uace0\uc628 \ucc98\ub9ac \uc7a5\ube44\uc758 \uad6c\uc870\uc801 \uad6c\uc131 \uc694\uc18c.<\/td>\n<td>\uacbd\ub3c4\ub85c \uc778\ud574 \uae30\uacc4 \uac00\uacf5\uc774 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \ubbf8\uc138 \uc785\uc790 SSiC\ub294 \ub354 \ub098\uc740 \ud45c\uba74 \ub9c8\uac10\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ub2e4\uacf5\uc131\uc744 \ucd5c\uc18c\ud654\ud574\uc57c \ud569\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>\ubc18\uc751 \uacb0\ud569 SiC(RBSiC\/SiSiC)<\/strong><\/td>\n<td>\uc6b0\uc218\ud55c \uc5f4\uc804\ub3c4\uc728, \ub192\uc740 \ub0b4\ub9c8\ubaa8\uc131, \uc6b0\uc218\ud55c \uae30\uacc4\uc801 \uac15\ub3c4, SSiC\ubcf4\ub2e4 \uc0c1\ub300\uc801\uc73c\ub85c \ub0ae\uc740 \uc81c\uc870 \ube44\uc6a9. \uc720\ub9ac \uc2e4\ub9ac\ucf58 \ud568\uc720(\uc77c\ubc18\uc801\uc73c\ub85c 8~15%).<\/td>\n<td>\uc6a9\uad11\ub85c\uc758 \uad6c\uc870 \ubd80\ud488, \uadf9\ub3c4\uc758 \uc21c\ub3c4\uac00 \uc8fc\uc694 \uad00\uc2ec\uc0ac\uac00 \uc544\ub2cc \uc77c\ubd80 MOCVD \ubd80\ud488, \uad00\ub828 \uae30\uacc4\uc758 \ub9c8\ubaa8 \ubd80\ud488.<\/td>\n<td>\uc720\ub9ac \uc2e4\ub9ac\ucf58\uc774 \uc874\uc7ac\ud558\uba74 \uc2e4\ub9ac\ucf58\uc774 \ubc18\uc751\ud560 \uc218 \uc788\ub294 \ub9e4\uc6b0 \ub192\uc740 \uc628\ub3c4(&gt;1350&deg;C)\uc640 \ubd80\uc2dd\uc131\uc774 \uac15\ud55c \ud658\uacbd\uc5d0\uc11c \uc0ac\uc6a9\uc774 \uc81c\ud55c\ub429\ub2c8\ub2e4. \uc21c\ub3c4\uac00 \uc911\uc694\ud55c \uacbd\uc6b0 \ud65c\uc131 LED \ub808\uc774\uc5b4\uc640 \uc9c1\uc811 \uc811\ucd09\ud558\ub294 \ub370 \uc801\ud569\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>CVD SiC(\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 SiC)<\/strong><\/td>\n<td>\ucd08\uace0\uc21c\ub3c4(&gt;99.999%), \uc6b0\uc218\ud55c \ub0b4\ud654\ud559\uc131, \uc6b0\uc218\ud55c \uc5f4 \uc548\uc815\uc131\uc73c\ub85c \ucee8\ud3ec\uba40 \ucf54\ud305\uc744 \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/td>\n<td>\ud751\uc5f0 \ub610\ub294 SSiC MOCVD \uad6c\uc131 \uc694\uc18c\uc758 \ubcf4\ud638 \ucf54\ud305(\uc885\uc885 TaC\uc758 \uc911\uac04\uce35\uc73c\ub85c \uc0ac\uc6a9\ub428), \uace0\uc21c\ub3c4 \uc11c\uc149\ud130 \uc0c1\ud310.<\/td>\n<td>\uc77c\ubc18\uc801\uc73c\ub85c \ucf54\ud305\uc73c\ub85c \uc0ac\uc6a9\ub418\uac70\ub098 \ub300\ub7c9 \uad6c\uc870\ubb3c\ubcf4\ub2e4\ub294 \ub354 \uc791\uc740 \uace0\ubd80\uac00\uac00\uce58 \uad6c\uc131 \uc694\uc18c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uace0\ube44\uc6a9 \uc81c\ud488\uc785\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>\ub2e4\uacf5\uc131 SiC<\/strong><\/td>\n<td>\uc81c\uc5b4\ub41c \ub2e4\uacf5\uc131, \ub192\uc740 \ud45c\uba74\uc801, \uc6b0\uc218\ud55c \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131.<\/td>\n<td>\ud2b9\uc815 \uc720\ud615\uc758 \ud654\ud559 \uc13c\uc11c \ub610\ub294 \ubc18\uc751\uae30\ub97c \uc704\ud55c \uac00\uc2a4 \ud655\uc0b0\uce35\uc5d0\uc11c \uc0c8\ub86d\uac8c \ub5a0\uc624\ub974\ub294 \uc751\uc6a9 \ubd84\uc57c\ub85c, \ub9de\ucda4\ud654\ud560 \uacbd\uc6b0 \uace0\uae09 \uc5f4 \uad00\ub9ac \uac1c\ub150\uc5d0 \uc7a0\uc7ac\uc801\uc73c\ub85c \uc0ac\uc6a9\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc544\uc9c1 \uc8fc\ub958 LED \uc18c\uc7ac\ub294 \uc544\ub2c8\uc9c0\ub9cc \uad00\ub828 \uacf5\uc815 \uc7a5\ube44\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/td>\n<td>\uae30\uacc4\uc801 \uac15\ub3c4\ub294 \uace0\ubc00\ub3c4 SiC\ubcf4\ub2e4 \ub0ae\uc2b5\ub2c8\ub2e4. \ud2b9\uc131\uc740 \uae30\uacf5 \ud06c\uae30\uc640 \ubd84\ud3ec\uc5d0 \ub530\ub77c \ud06c\uac8c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\uc120\ud0dd\uc740 \uc131\ub2a5 \uc694\uad6c \uc0ac\ud56d, \uacf5\uc815 \ud638\ud658\uc131 \ubc0f \uc608\uc0b0 \uac04\uc758 \uc2e0\uc911\ud55c \uade0\ud615\uc5d0 \ub2ec\ub824 \uc788\uc2b5\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, \uace0\ud488\uc9c8 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc744 \uc704\ud574\uc11c\ub294 \ub2e8\uacb0\uc815 SiC \uc6e8\uc774\ud37c\uac00 \ud544\uc218\uc801\uc774\uc9c0\ub9cc, \uacac\uace0\uc131\uacfc \uc5f4\uc801 \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uace0\uc21c\ub3c4 SSiC\uac00 MOCVD \ucc54\ubc84 \ud558\ub4dc\uc6e8\uc5b4\uc758 \uc8fc\ub825 \uc81c\ud488\uc785\ub2c8\ub2e4. \uc219\ub828\ub41c \uc804\ubb38\uac00\uc640\uc758 \uc0c1\ub2f4 <em>\uae30\uc220 \uc138\ub77c\ubbf9 \uacf5\uae09\uc5c5\uccb4<\/em> \ub294 LED \uc81c\uc870\uc5c5\uccb4\uac00 \ud2b9\uc815 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\ub294 \ucd5c\uc801\uc758 SiC \ub4f1\uae09\uc744 \uc120\ud0dd\ud560 \uc218 \uc788\ub3c4\ub85d \uc548\ub0b4\ud569\ub2c8\ub2e4.<\/p>\n<h2>\ube5b\uc744 \uc704\ud55c \uc124\uacc4: LED \uc81c\uc870\uc5d0\uc11c \ub9de\ucda4\ud615 SiC\ub97c \uc704\ud55c \uc8fc\uc694 \uace0\ub824 \uc0ac\ud56d<\/h2>\n<p>LED \uc81c\uc870\ub97c \uc704\ud55c \ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488\uc758 \uc124\uacc4 \ub2e8\uacc4\ub294 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ucd5c\uc885 \uc81c\ud488\uc774 \ubaa8\ub4e0 \uc131\ub2a5, \uc81c\uc870 \uac00\ub2a5\uc131 \ubc0f \ube44\uc6a9 \ubaa9\ud45c\ub97c \ucda9\uc871\ud560 \uc218 \uc788\ub3c4\ub85d LED \uc5d4\uc9c0\ub2c8\uc5b4\uc640 SiC \uc7ac\ub8cc \uc804\ubb38\uac00 \uac04\uc758 \ud611\uc5c5\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uba87 \uac00\uc9c0 \uc8fc\uc694 \uace0\ub824 \uc0ac\ud56d\uc774 \uc791\uc6a9\ud569\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\uc5d0\ud53c\ud0dd\uc2dc\uc6a9 SiC \uc6e8\uc774\ud37c \uc124\uacc4:<\/strong>\n<ul>\n<li><strong>\uc9c1\uacbd \ubc0f \ub450\uaed8:<\/strong> \ud45c\uc900 \uc6e8\uc774\ud37c \uc9c1\uacbd(\uc608: 50mm, 75mm, 100mm, 150mm)\uc774 \uc77c\ubc18\uc801\uc774\uc9c0\ub9cc \ud2b9\uc815 \uc5f0\uad6c\ub098 \uc7a5\ube44\uc5d0\ub294 \ub9de\ucda4\ud615 \ub450\uaed8 \ub610\ub294 \ube44\ud45c\uc900 \uc9c1\uacbd\uc774 \ud544\uc694\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub450\uaed8\ub294 \uae30\uacc4\uc801 \uac15\ub3c4\uc640 \uc5f4 \uc9c8\ub7c9\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/li>\n<li><strong>\uacb0\uc815 \ubc29\ud5a5:<\/strong> \ud2b9\uc815 \uacb0\uc815\uba74(\uc608: \uc628\ucd95, \uc624\ud504\ucd95 4H-SiC)\uc744 \uc120\ud0dd\ud558\uba74 GaN \ud544\ub984 \ud488\uc9c8\uc744 \ucd5c\uc801\ud654\ud558\uace0 \uacb0\ud568\uc744 \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc624\ud504\ucef7 \uac01\ub3c4\uc640 \ubc29\ud5a5\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc81c\uc791 \ub77c\uc778 \uae30\ub2a5 \ubc0f \uc7a5\uce58 \uae30\uacc4\uc801\/\uc5f4\uc801 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\ucda5\ub2c8\ub2e4.<\/strong> \ucd1d \ub450\uaed8 \ubcc0\ud654(TTV), \ubcf4\uc6b0, \ud728 \ubc0f \ud45c\uba74 \uac70\uce60\uae30\uc640 \uac19\uc740 \ub9e4\uac1c\ubcc0\uc218\ub85c \uc815\uc758\ub429\ub2c8\ub2e4. '\uc5d0\ud53c \ub808\ub514' \ud45c\uba74\uc774 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uac00\uc7a5\uc790\ub9ac \ud504\ub85c\ud544:<\/strong> \uc624\ub9ac\uc5d4\ud14c\uc774\uc158 \ud50c\ub7ab \ub610\ub294 \ub178\uce58\ub294 \uc790\ub3d9\ud654\ub41c \uc6e8\uc774\ud37c \ucc98\ub9ac \ubc0f \uacb0\uc815\ud559\uc801 \uc815\ub82c\uc744 \uc704\ud574 \uc0b0\uc5c5 \ud45c\uc900(\uc608: SEMI)\uc5d0 \ub530\ub77c \uc124\uacc4\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>SiC \ud788\ud2b8 \uc2a4\ud504\ub808\ub354 \ubc0f \uc11c\ube0c\ub9c8\uc6b4\ud2b8 \uc124\uacc4:<\/strong>\n<ul>\n<li><strong>\uc9c0\uc624\uba54\ud2b8\ub9ac \ubc0f \uc5f4 \uacbd\ub85c:<\/strong> LED \uce69\uc5d0\uc11c \ub2e4\uc74c \ub2e8\uacc4\uc758 \ub0c9\uac01\uae4c\uc9c0 \uac00\uc7a5 \uc9e7\uace0 \ud6a8\uc728\uc801\uc778 \uc5f4 \uacbd\ub85c\ub97c \uc81c\uacf5\ud558\ub3c4\ub85d \ubaa8\uc591\uc744 \ucd5c\uc801\ud654\ud574\uc57c \ud569\ub2c8\ub2e4. \uc5f4 \ubaa8\ub378\ub9c1\uc5d0\ub294 \uc720\ud55c \uc694\uc18c \ubd84\uc11d(FEA)\uc774 \uc790\uc8fc \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\ud45c\uba74 \ud3c9\ud0c4\ub3c4 \ubc0f \ub9c8\uac10:<\/strong> LED \uce69\uacfc \ud6c4\uc18d \ubc29\uc5f4\ud310\uacfc\uc758 \uc5f4 \uc811\ucd09\uc744 \uc6d0\ud65c\ud558\uac8c \ud558\ub294 \ub370 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \ub2e4\uc774 \uc5b4\ud0dc\uce58\uba3c\ud2b8\uc5d0 \ub300\ud55c \uae08\uc18d\ud654 \ud638\ud658\uc131\ub3c4 \uc911\uc694\ud55c \uc694\uc18c\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\ud1b5\ud569 \uae30\ub2a5:<\/strong> \uc870\ub9bd\uc774 \uc6a9\uc774\ud558\ub3c4\ub85d \uad6c\uba4d, \ucc44\ub110 \ub610\ub294 \ud2b9\uc815 \uc7a5\ucc29 \uae30\ub2a5\uc744 \ud1b5\ud569\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>SiC MOCVD\/HVPE \ubd80\ud488 \uc124\uacc4:<\/strong>\n<ul>\n<li><strong>\uac00\uc2a4 \ud750\ub984 \uc5ed\ud559:<\/strong> \uc0e4\uc6cc\ud5e4\ub4dc\uc640 \uac00\uc2a4 \uc778\uc81d\ud130\uc758 \uacbd\uc6b0, \uade0\uc77c\ud55c \uc804\uad6c\uccb4 \ubd84\ud3ec\ub97c \uc704\ud574 \uad6c\uba4d \ud328\ud134, \ud06c\uae30, \uac01\ub3c4\ub97c \uc138\uc2ec\ud558\uac8c \uc124\uacc4\ud569\ub2c8\ub2e4. \uc804\uc0b0 \uc720\uccb4 \uc5ed\ud559(CFD) \ubaa8\ub378\ub9c1\uc774 \uc790\uc8fc \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc628\ub3c4 \uade0\uc77c\uc131:<\/strong> \uc11c\uc149\ud130 \uc124\uacc4(\ud3ec\ucf13 \uae4a\uc774, \uc804\uccb4 \ud615\uc0c1, \uc7ac\ub8cc \uade0\uc77c\uc131)\ub294 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \uc911\uc5d0 \uc6e8\uc774\ud37c \uc628\ub3c4\ub97c \uc77c\uad00\ub418\uac8c \uc720\uc9c0\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uae30\uacc4\uc801 \ubb34\uacb0\uc131 \ubc0f \uc5f4 \uc2a4\ud2b8\ub808\uc2a4:<\/strong> \ubd80\ud488\uc740 \uade0\uc5f4\uc774\ub098 \ub4a4\ud2c0\ub9bc \uc5c6\uc774 \ubc18\ubcf5\uc801\uc778 \uc5f4 \uc21c\ud658\uc744 \uacac\ub38c\uc57c \ud569\ub2c8\ub2e4. \ubcbd \ub450\uaed8, \ud544\ub81b, \ub0a0\uce74\ub85c\uc6b4 \ubaa8\uc11c\ub9ac \ubc29\uc9c0 \ub4f1\uc740 \uc751\ub825 \uc9c0\uc810\uc744 \uad00\ub9ac\ud558\ub294 \ud575\uc2ec \uc124\uacc4 \uc694\uc18c\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\uc138\ucc99 \ubc0f \uc720\uc9c0 \uad00\ub9ac \uc6a9\uc774\uc131:<\/strong> \ud45c\uba74\uc740 \ub9e4\ub044\ub7ec\uc6cc\uc57c \ud558\uba70, \ubd80\ud488 \uc218\uba85\uc744 \uc5f0\uc7a5\ud558\uace0 \uacf5\uc815 \uc21c\ub3c4\ub97c \uc720\uc9c0\ud558\uae30 \uc704\ud574 \uce68\uc804\ubb3c\uc744 \uc27d\uac8c \uc81c\uac70\ud560 \uc218 \uc788\ub3c4\ub85d \uc124\uacc4\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc7ac\ub8cc \ud638\ud658\uc131:<\/strong> SiC \ub4f1\uae09 \ubc0f \ubaa8\ub4e0 \ucf54\ud305\uc774 \uacf5\uc815 \uac00\uc2a4(\uc608: \uc554\ubaa8\ub2c8\uc544, TMGa, TMIn, TEAl) \ubc0f \uc628\ub3c4\uc640 \ud638\ud658\ub418\ub294\uc9c0 \ud655\uc778\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\ud6a8\uacfc\uc801\uc778 <em>\ub9de\ucda4\ud615 SiC \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1<\/em> \ub294 \uc18c\uc7ac\uc758 \uc131\ub2a5\uacfc \ud55c\uacc4\ub294 \ubb3c\ub860 LED \uc81c\uc870 \uacf5\uc815\uc758 \ubcf5\uc7a1\uc131\uc5d0 \ub300\ud55c \uae4a\uc740 \uc774\ud574\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc9c0\uc2dd\uc774 \ud48d\ubd80\ud55c \uacf5\uae09\uc5c5\uccb4\uc640\uc758 \ud611\uc5c5\uc744 \ud1b5\ud574 \ucc98\uc74c\ubd80\ud130 \uc131\ub2a5, \uc81c\uc870 \uac00\ub2a5\uc131 \ubc0f \ube44\uc6a9 \ud6a8\uc728\uc131\uc5d0 \ub9de\uac8c \uc124\uacc4\ub97c \ucd5c\uc801\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>\uc815\ubc00\ub3c4\uac00 \uc911\uc694\ud569\ub2c8\ub2e4: LED SiC\uc758 \uacf5\ucc28, \ud45c\uba74 \ub9c8\uac10 \ubc0f \uce58\uc218 \uc815\ud655\ub3c4<\/h2>\n<p>LED \uc81c\uc870, \ud2b9\ud788 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488\uc744 \ub2e4\ub8f0 \ub54c \uc815\ubc00\ub3c4\ub294 \ub2e8\uc21c\ud55c \ubaa9\ud45c\uac00 \uc544\ub2c8\ub77c \uae30\ubcf8\uc801\uc778 \uc694\uad6c \uc0ac\ud56d\uc785\ub2c8\ub2e4. SiC \ubd80\ud488, \ud2b9\ud788 \uc6e8\uc774\ud37c\uc640 MOCVD \ubd80\ud488\uc758 \uce58\uc218 \uc815\ud655\ub3c4, \uacf5\ucc28 \ubc0f \ud45c\uba74 \ub9c8\uac10\uc740 LED \ub514\ubc14\uc774\uc2a4 \uc218\uc728, \uc131\ub2a5 \ubc0f \uc2e0\ub8b0\uc131\uc5d0 \uc9c1\uc811\uc801\uc774\uace0 \uc911\ub300\ud55c \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>\uc5c4\uaca9\ud55c \uce58\uc218 \uacf5\ucc28\uc758 \uc911\uc694\uc131:<\/strong>\n<ul>\n<li><strong>SiC \uc6e8\uc774\ud37c:<\/strong> \uc9c1\uacbd, \ub450\uaed8, \ucd1d \ub450\uaed8 \ubcc0\ud654(TTV), \ubcf4\uc6b0, \ud728\uacfc \uac19\uc740 \ud30c\ub77c\ubbf8\ud130\ub294 \ubbf8\ud06c\ub860 \ub2e8\uc704\ub85c \uc81c\uc5b4\ud574\uc57c \ud569\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, \uade0\uc77c\ud55c \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uacfc \ud6c4\uc18d \uc18c\uc790 \ucc98\ub9ac\ub97c \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 100mm SiC \uc6e8\uc774\ud37c\uc758 \uacbd\uc6b0 5 &amp; \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130\uc758 TTV\uac00 \ud544\uc694\ud55c \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uc790\ub3d9\ud654\ub41c \ud578\ub4e4\ub9c1 \uc2dc\uc2a4\ud15c\uc5d0\uc11c\ub294 \uc815\ud655\ud55c \uc9c1\uacbd\uacfc \ud3c9\uba74\/\ub178\uce58 \uce58\uc218\uac00 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>MOCVD \uad6c\uc131 \uc694\uc18c:<\/strong> \uc11c\uc149\ud130 \ud3ec\ucf13\uc758 \uae4a\uc774\uc640 \uce21\uba74 \uce58\uc218\uac00 \uc815\ud655\ud574\uc57c \uc6e8\uc774\ud37c\uac00 \uade0\uc77c\ud55c \uac00\uc5f4\uc744 \uc704\ud574 \uc62c\ubc14\ub974\uac8c \ub193\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc0e4\uc6cc\ud5e4\ub4dc \uad6c\uba4d\uc758 \uc9c1\uacbd\uacfc \ud53c\uce58\ub294 \uac00\uc2a4 \ud750\ub984\uc744 \uc81c\uc5b4\ud558\uae30 \uc704\ud574 \uc815\ud655\ud574\uc57c \ud569\ub2c8\ub2e4. \uc11c\ub85c \ub2e4\ub978 SiC \ubd80\ud488 \uac04 \ub610\ub294 SiC\uc640 \uc11d\uc601 \uc81c\ud488 \uac04\uc758 \uacb0\ud569 \ud45c\uba74\uc740 \uc801\uc808\ud55c \ubc00\ubd09 \ubc0f \uc870\ub9bd\uc744 \uc704\ud574 \uc5c4\uaca9\ud55c \uacf5\ucc28\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub9e4\uc6b0 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74 \ub9c8\uac10\uc758 \uc911\uc694\uc131:<\/strong>\n<ul>\n<li><strong>Epi-Ready SiC \uc6e8\uc774\ud37c:<\/strong> \uc774\ub294 \uc544\ub9c8\ub3c4 \uac00\uc7a5 \uc911\uc694\ud55c \ud45c\uba74 \ub9c8\uac10 \uc694\uac74\uc77c \uac83\uc785\ub2c8\ub2e4. GaN \uc5d0\ud53c\ud0dd\uc2dc\uc5d0 \uc0ac\uc6a9\ub418\ub294 SiC \uc6e8\uc774\ud37c\uc758 \ud65c\uc131\uba74\uc740 \ub9e4\uc6b0 \ub9e4\ub044\ub7fd\uace0 \ud45c\uba74 \uc544\ub798\uc5d0 \uc190\uc0c1\uc774 \uc5c6\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uc774\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP)\ub97c \ud1b5\ud574 \ub2ec\uc131\ub429\ub2c8\ub2e4. \ud45c\uba74 \uac70\uce60\uae30(Ra) \uac12\uc740 \uc885\uc885 \uc639\uc2a4\ud2b8\ub86c \ubc94\uc704(\uc608: Ra &lt; 0.5nm \ub610\ub294 \uc2ec\uc9c0\uc5b4 &lt; 0.2nm)\ub85c \uc9c0\uc815\ub429\ub2c8\ub2e4. \uae68\ub057\ud55c \ud45c\uba74\uc740 GaN \uc131\uc7a5 \uc911 \ud575 \ud615\uc131 \uacb0\ud568\uc744 \ucd5c\uc18c\ud654\ud558\uc5ec \ub354 \ub192\uc740 \ud488\uc9c8\uc758 \uc5d0\ud53c\ud0dd\uc15c \uce35\uacfc \ub354 \ub098\uc740 \uc131\ub2a5\uc758 LED\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4.<\/li>\n<li><strong>MOCVD \uad6c\uc131 \uc694\uc18c:<\/strong> \uc11c\uc149\ud130\uc640 \ub77c\uc774\ub108\uc758 \ud45c\uba74\uc774 \ub9e4\ub044\ub7ec\uc6b0\uba74 \uc785\uc790 \ubd80\ucc29\uc774 \uc904\uc5b4\ub4e4\uace0 \uc138\uc815 \uacf5\uc815\uc774 \ub354 \ud6a8\uacfc\uc801\uc774\uc5b4\uc11c \ub354 \uae68\ub057\ud55c \uacf5\uc815 \ud658\uacbd\uacfc LED \uc6e8\uc774\ud37c\uc758 \uacb0\ud568 \uac10\uc18c\ub85c \uc774\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ubc29\uc5f4\ud310\/\uc2a4\ud504\ub808\ub354:<\/strong> \ud3c9\ud3c9\ud558\uace0 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74(\ubc18\ub4dc\uc2dc \uc5d0\ud53c \ub808\ub514 \ud45c\uc900\uc740 \uc544\ub2d8)\uc740 LED \ub2e4\uc774\uc640 SiC \ud788\ud2b8 \uc2a4\ud504\ub808\ub354 \uc0ac\uc774\uc758 \uc5f4 \uc778\ud130\ud398\uc774\uc2a4 \uc800\ud56d\uc744 \ucd5c\uc18c\ud654\ud558\ub294 \ub370 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. Ra \uac12\uc740 \uc870\ub9bd \uacf5\uc815\uc5d0 \ub530\ub77c 0.1~0.8 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130 \ubc94\uc704\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub2ec\uc131 \uac00\ub2a5\ud55c \uc815\ubc00 \uae30\ub2a5:<\/strong><br \/>\n            \uace0\uae09 SiC \uac00\uacf5 \ubc0f \ub9c8\uac10 \uae30\uc220\uc744 \ud1b5\ud574 \ub180\ub77c\uc6b4 \uc815\ubc00\ub3c4\ub97c \uad6c\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\ud3c9\ud0c4\ub3c4:<\/strong> \uc6e8\uc774\ud37c\uc758 \uacbd\uc6b0, \ud3c9\ud0c4\ub3c4\ub97c 100mm \ub610\ub294 150mm \uc9c1\uacbd\uc5d0\uc11c \uc218 \ubbf8\ud06c\ub860 \uc774\ub0b4\ub85c \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub354 \uc791\uc740 \ubd80\ud488\uc758 \uacbd\uc6b0 \ub354 \uc5c4\uaca9\ud55c \ud3c9\ud0c4\ub3c4\ub97c \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud3c9\ud589\ub3c4:<\/strong> \ub9c8\ucc2c\uac00\uc9c0\ub85c \ud45c\uba74 \uac04\uc758 \ud3c9\ud589\ub3c4\ub3c4 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130 \uc218\uc900\uae4c\uc9c0 \uc720\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uce58\uc218 \uc815\ud655\ub3c4:<\/strong> \ubcf5\uc7a1\ud55c SiC \ubd80\ud488\uc758 \uacbd\uc6b0 \ud06c\uae30\uc640 \ud615\uc0c1\uc5d0 \ub530\ub77c 0.01mm ~ 0.05mm\uc758 \uacf5\ucc28\ub85c \uac00\uacf5\ud560 \uc218 \uc788\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\ub2e4\uc74c\uc744 \ucd94\uad6c\ud569\ub2c8\ub2e4 <em>\uc815\ubc00 SiC \uac00\uacf5<\/em> \ubc0f \ub9c8\uac10 \ucc98\ub9ac\ub294 LED \uc81c\uc870\uc5d0\uc11c \uacf5\uc815 \uc81c\uc5b4 \uac1c\uc120, \uc218\uc728 \ud5a5\uc0c1, \uc6b0\uc218\ud55c \ub514\ubc14\uc774\uc2a4 \ud2b9\uc131\uc73c\ub85c \uc9c1\uacb0\ub429\ub2c8\ub2e4. \uacf5\uae09\uc5c5\uccb4\ub294 \uc774\ub7ec\ud55c \uc911\uc694\ud55c \ud30c\ub77c\ubbf8\ud130\ub97c \uac80\uc99d\ud560 \uc218 \uc788\ub294 \ucca8\ub2e8 \uacc4\uce21 \uc7a5\ube44\ub97c \ubcf4\uc720\ud558\uc5ec \ubaa8\ub4e0 \ubd80\ud488\uc774 LED \uc0b0\uc5c5\uc758 \uc5c4\uaca9\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294\uc9c0 \ud655\uc778\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h2>\uad11\ucc44 \uac1c\uc120: LED\uc758 SiC \ubd80\ud488\uc744 \uc704\ud55c \ud544\uc218 \ud6c4\ucc98\ub9ac \uacfc\uc815<\/h2>\n<p>\uc6d0\uc2dc \ub610\ub294 \uc18c\uacb0\/\uc131\uc7a5 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \uc77c\ubc18\uc801\uc73c\ub85c LED \uc81c\uc870\uc5d0 \uc9c1\uc811 \uc0ac\uc6a9\ud558\uae30 \uc704\ud55c \uc5c4\uaca9\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uc9c0 \ubabb\ud569\ub2c8\ub2e4. \ud2b9\ud788 \uc6e8\uc774\ud37c\uc640 \uc911\uc694\ud55c MOCVD \ubd80\ud488\uc758 \uacbd\uc6b0 SiC \uc18c\uc7ac\ub97c \uae30\ub2a5\uc131 \uace0\uc131\ub2a5 \ubd80\ud488\uc73c\ub85c \ubcc0\ud658\ud558\ub824\uba74 \uc77c\ub828\uc758 \uc815\ubc00\ud55c \ud6c4\ucc98\ub9ac \ub2e8\uacc4\uac00 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>\uadf8\ub77c\uc778\ub529 \ubc0f \ub7a9\ud551:<\/strong>\n<ul>\n<li><strong>\ubaa9\uc801:<\/strong> \ucd08\uae30 \uc131\ud615 \ubc0f \ud3c9\ud0c4\ud654 \ub2e8\uacc4\uc785\ub2c8\ub2e4. \uc5f0\uc0ad\uc740 \uc5f0\ub9c8 \ud720\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc911\uc694\ud55c \uc7ac\ub8cc\ub97c \uc81c\uac70\ud558\uace0 \uae30\ubcf8 \ud615\uc0c1\uacfc \ub450\uaed8\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4. \ub798\ud551\uc740 SiC \ubd80\ud488\uacfc \ud3c9\ud310 \uc0ac\uc774\uc5d0 \uc5f0\ub9c8 \uc785\uc790 \uc2ac\ub7ec\ub9ac\ub97c \uc0ac\uc6a9\ud558\uc5ec \ud6e8\uc52c \ub354 \ubbf8\uc138\ud55c \uce58\uc218 \uc81c\uc5b4, \ud3c9\ud589\ub3c4 \ubc0f \ud3c9\ud0c4\ub3c4\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> SiC \uc6e8\uc774\ud37c(\ubd88\uc5d0\uc11c \uc2ac\ub77c\uc774\uc2a4\ud55c \ud6c4)\uc640 \uac00\uacf5\ub41c MOCVD \ubd80\ud488 \ubaa8\ub450 \uc774\ub7ec\ud55c \uacf5\uc815\uc744 \uac70\uccd0 \ubaa9\ud45c \uce58\uc218\ub97c \ub2ec\uc131\ud558\uace0 \ud6c4\uc18d \uc5f0\ub9c8\ub97c \uc704\ud55c \ud45c\uba74\uc744 \uc900\ube44\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ud3f4\ub9ac\uc2f1(\uae30\uacc4 \ubc0f \ud654\ud559 \uae30\uacc4 &#8211; CMP):<\/strong>\n<ul>\n<li><strong>\ubaa9\uc801:<\/strong> \uc5f0\ub9c8\ub294 \ub9e4\uc6b0 \ub9e4\ub044\ub7fd\uace0 \uc190\uc0c1 \uc5c6\ub294 \ud45c\uba74\uc744 \ub9cc\ub4dc\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.\n<ul>\n<li><em>\ub2e4\ub2e8\uacc4 \uc5f0\ub9c8 \uacf5\uc815\uc740 \uac70\uc6b8\uacfc \uac19\uc740 \ucd08\ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74\uc744 \ub2ec\uc131\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/em> \uc810\uc810 \ub354 \ubbf8\uc138\ud55c \ub2e4\uc774\uc544\ubaac\ub4dc \uc2ac\ub7ec\ub9ac \ub610\ub294 \ud328\ub4dc\ub97c \uc0ac\uc6a9\ud558\uc5ec \ud45c\uba74 \uac70\uce60\uae30\ub97c \uc904\uc785\ub2c8\ub2e4.<\/li>\n<li><em>\ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP):<\/em> \uc774 \ub2e8\uacc4\ub294 SiC \uc6e8\uc774\ud37c\uc758 \ucd5c\uc885 \ub2e8\uacc4\uc785\ub2c8\ub2e4. \ud654\ud559\uc801 \uc5d0\uce6d\uacfc \uae30\uacc4\uc801 \ub9c8\ubaa8\ub97c \uacb0\ud569\ud558\uc5ec \uc6d0\uc790 \ub2e8\uc704\ub85c \ud3c9\ud3c9\ud558\uace0 \uae68\ub057\ud55c '\uc5d0\ud53c \uc900\ube44' \ud45c\uba74\uc744 \uc0dd\uc131\ud558\uc5ec \uc774\uc804 \ub2e8\uacc4\uc5d0\uc11c \uc720\ubc1c\ub41c \ud45c\uba74 \uc190\uc0c1\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> CMP\ub294 GaN \uc5d0\ud53c\ud0dd\uc2dc\uc6a9 SiC \uae30\ud310\uc5d0 \uc5c6\uc5b4\uc11c\ub294 \uc548 \ub420 \ud544\uc218 \uc694\uc18c\uc785\ub2c8\ub2e4. \uae30\uacc4\uc801 \uc5f0\ub9c8\ub294 \uadf9\ub3c4\uc758 \ub9e4\ub044\ub7ec\uc6c0\uc774 \ud544\uc694\ud558\uc9c0\ub9cc \uc6e8\uc774\ud37c\uc758 \uc6d0\uc790 \uc218\uc900\uc5d0\ub294 \uc801\ud569\ud558\uc9c0 \uc54a\uc740 \ud788\ud2b8 \uc2a4\ud504\ub808\ub354\ub098 MOCVD \ubd80\ud488\uacfc \uac19\uc740 \ub2e4\ub978 \ubd80\ud488\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uac00\uc7a5\uc790\ub9ac \uc5f0\ub9c8\/\ubaa8\ub530\uae30:<\/strong>\n<ul>\n<li><strong>\ubaa9\uc801:<\/strong> SiC \uc6e8\uc774\ud37c\uc758 \ub0a0\uce74\ub85c\uc6b4 \ubaa8\uc11c\ub9ac\ub97c \ub465\uae00\uac8c \ub610\ub294 \ube44\uc2a4\ub4ec\ud558\uac8c \ub9cc\ub4ed\ub2c8\ub2e4. \uc774\ub807\uac8c \ud558\uba74 \uc6e8\uc774\ud37c\uc758 \uae30\uacc4\uc801 \uac15\ub3c4\uac00 \uc99d\uac00\ud558\uc5ec \ucde8\uae09 \ubc0f \ucc98\ub9ac \uc911\uc5d0 \uce69\ud551\uc774\ub098 \uade0\uc5f4\uc774 \ubc1c\uc0dd\ud560 \uc704\ud5d8\uc774 \uc904\uc5b4\ub4ed\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> \ubaa8\ub4e0 SiC \uc6e8\uc774\ud37c\uc5d0 \ub300\ud55c \ud45c\uc900 \uc808\ucc28.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub808\uc774\uc800 \uc2a4\ud06c\ub77c\uc774\ube59, \ub4dc\ub9b4\ub9c1 \ub610\ub294 \ub2e4\uc774\uc2f1:<\/strong>\n<ul>\n<li><strong>\ubaa9\uc801:<\/strong> \uc815\ubc00\ud55c \ud53c\ucc98 \uc0dd\uc131, \uc6e8\uc774\ud37c \uc2f1\uade4\ub808\uc774\uc158(SiC \uc790\uccb4\uac00 \ud65c\uc131 \uc18c\uc790\uc778 \uacbd\uc6b0 \ub610\ub294 \ub354 \ud070 \uc6e8\uc774\ud37c\uc5d0\uc11c \ub354 \uc791\uc740 SiC \uae30\ud310 \uc0dd\uc131) \ub610\ub294 \ubcf5\uc7a1\ud55c \ubd80\ud488 \uc131\ud615\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ub808\uc774\uc800\ub294 \ub2e8\ub2e8\ud55c SiC\ub97c \uace0\uc815\ubc00\ub85c \uac00\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> SiC \uae30\ubc18 \ub514\ubc14\uc774\uc2a4 \ub2e4\uc774\uc2f1, SiC \uc778\ud130\ud3ec\uc800 \ub610\ub294 \ud788\ud2b8 \uc2a4\ud504\ub808\ub354\uc758 \uad00\ud1b5 \uad6c\uba4d \uc0dd\uc131 \ub610\ub294 MOCVD \ubd80\ud488\uc758 \ubcf5\uc7a1\ud55c \ud328\ud134\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uace0\uae09 \uccad\uc18c \ud504\ub85c\uc138\uc2a4:<\/strong>\n<ul>\n<li><strong>\ubaa9\uc801:<\/strong> \uc5d0\ud53c\ud0dd\uc2dc \ub610\ub294 \uace0\uc628 \uc6a9\uad11\ub85c \uc791\uc5c5\uacfc \uac19\uc740 \uc911\uc694\ud55c \uacf5\uc815\uc5d0 \ub4e4\uc5b4\uac00\uae30 \uc804\uc5d0 SiC \ud45c\uba74\uc5d0\uc11c \ubbf8\ub9bd\uc790 \uc624\uc5fc, \uc720\uae30 \uc794\ub958\ubb3c, \uae08\uc18d \ubd88\uc21c\ubb3c \ubc0f \uc5f0\ub9c8 \uc2ac\ub7ec\ub9ac\uc758 \ud754\uc801\uc744 \ubaa8\ub450 \uc81c\uac70\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> \ud2b9\ud788 \uc6e8\uc774\ud37c\uc5d0\ub294 \ub2e4\ub2e8\uacc4 RCA\ud615 \uc138\uc815, \uc194\ubca4\ud2b8 \uc138\uc815, \ud53c\ub77c\ub0d0 \uc5d0\uce6d(\ub9e4\uc6b0 \uc8fc\uc758\ud574\uc11c \uc0ac\uc6a9)\uc774 \uc790\uc8fc \uc0ac\uc6a9\ub429\ub2c8\ub2e4. MOCVD \ubd80\ud488\uc758 \uccad\uacb0\ub3c4 \ub610\ud55c \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ucf54\ud305(\uc608: \ud0c4\ud0c8 \uce74\ubc14\uc774\ub4dc, TaC, \uc5f4\ubd84\ud574 \uc9c8\ud654 \ubd95\uc18c, PBN):<\/strong>\n<ul>\n<li><strong>\ubaa9\uc801:<\/strong> \uc5f4\uc545\ud55c \ud658\uacbd\uc5d0\uc11c\uc758 \uc131\ub2a5 \ud5a5\uc0c1. SiC MOCVD \ubd80\ud488(\uc608: \uc11c\uc149\ud130)\uc758 TaC \ucf54\ud305\uc740 \uace0\uc628\uc5d0\uc11c \ubd80\uc2dd\uc131 \uc804\uad6c\uccb4 \uac00\uc2a4(\uc608: \uc554\ubaa8\ub2c8\uc544, \uae08\uc18d \uc720\uae30\ubb3c)\uc5d0 \ub300\ud55c \uc800\ud56d\uc131\uc744 \ud06c\uac8c \uac1c\uc120\ud558\uc5ec \ubd80\ud488 \uc218\uba85\uc744 \uc5f0\uc7a5\ud558\uace0 \uc624\uc5fc\uc744 \uc904\uc785\ub2c8\ub2e4. PBN \ucf54\ud305\uc740 \uc6b0\uc218\ud55c \uc720\uc804\uccb4 \ud2b9\uc131\uacfc \uace0\uc628 \uc548\uc815\uc131\uc744 \uc81c\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> MOCVD \ubc0f \uae30\ud0c0 \ubc18\ub3c4\uccb4 \uacf5\uc815 \uc7a5\ube44\uc758 SiC \uc11c\uc149\ud130, \ud788\ud130 \uc18c\uc790 \ubc0f \ub77c\uc774\ub108\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\uc774\ub7ec\ud55c \uac01 <em>SiC \ubd80\ud488 \ub9c8\uac10<\/em> \ub2e8\uacc4\uc5d0\ub294 \ud2b9\uc218 \uc7a5\ube44, \uc81c\uc5b4 \ud658\uacbd, \uc2ec\ub3c4 \uc788\ub294 \uacf5\uc815 \uc9c0\uc2dd\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \ud6c4\ucc98\ub9ac\uc758 \ud488\uc9c8\uc740 SiC \ubd80\ud488\uc758 \uae30\ub2a5, \uc2e0\ub8b0\uc131, \uc218\uba85\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\uba70 \uad81\uadf9\uc801\uc73c\ub85c LED \uc0dd\uc0b0\uc758 \ud488\uc9c8\uacfc \uc218\uc728\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<h2>\ub3c4\uc804 \uacfc\uc81c \ud0d0\uc0c9: LED \uc0dd\uc0b0\uc5d0\uc11c SiC\ub85c \uc7a5\uc560\ubb3c \uadf9\ubcf5\ud558\uae30<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 LED \uc81c\uc870\uc5d0 \uc0c1\ub2f9\ud55c \uc774\uc810\uc744 \uc81c\uacf5\ud558\uc9c0\ub9cc, \uc774\ub97c \ucc44\ud0dd\ud558\ub294 \ub370 \uc5b4\ub824\uc6c0\uc774 \uc5c6\ub294 \uac83\uc740 \uc544\ub2d9\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc7a5\uc560\ubb3c\uc744 \uc774\ud574\ud558\uace0 \uc774\ub97c \uc644\ud654\ud558\uae30 \uc704\ud55c \uc9c0\uc18d\uc801\uc778 \ub178\ub825\uc744 \uae30\uc6b8\uc774\ub294 \uac83\uc740 SiC \uae30\uc220\uc744 \ud6a8\uacfc\uc801\uc73c\ub85c \ud65c\uc6a9\ud558\uace0\uc790 \ud558\ub294 \uc81c\uc870\uc5c5\uccb4\uc5d0\uac8c \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>SiC \uc6e8\uc774\ud37c \ube44\uc6a9:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> \ub2e8\uacb0\uc815 SiC \uc6e8\uc774\ud37c, \ud2b9\ud788 \uacb0\ud568 \ubc00\ub3c4\uac00 \ub0ae\uc740 \uc6e8\uc774\ud37c\ub294 \uae30\uc874 \uc0ac\ud30c\uc774\uc5b4 \ub610\ub294 \uc2e4\ub9ac\ucf58 \uae30\ud310\ubcf4\ub2e4 \ud6e8\uc52c \ube44\uc309\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ube44\uc6a9\uc740 \ud2b9\ud788 \uac00\uaca9\uc5d0 \ub9e4\uc6b0 \ubbfc\uac10\ud55c \uc2dc\uc7a5\uc5d0\uc11c \uc77c\ubd80 LED \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uc7a5\ubcbd\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \ud604\uc7ac \uc9c4\ud589 \uc911\uc778 \uc5f0\uad6c\ub294 \ubd88 \ud06c\uae30\ub97c \ub298\ub9ac\uace0, \uc131\uc7a5 \uc2dc\uac04\uc744 \ub2e8\ucd95\ud558\uba70, \uc218\uc728\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\uae30 \uc704\ud574 SiC \uacb0\uc815 \uc131\uc7a5 \uae30\uc220(\uc608: \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1 \ubc0f PVT)\uc744 \uac1c\uc120\ud558\ub294 \ub370 \ucd08\uc810\uc744 \ub9de\ucd94\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub354 \ud070 \uc9c1\uacbd\uc758 \uc6e8\uc774\ud37c(\uc608: 150mm \ubc0f 200mm\ub85c\uc758 \uac1c\ubc1c)\ub85c\uc758 \uc804\ud658\uc740 \ub2e8\uc704 \uba74\uc801\ub2f9 \ube44\uc6a9\uc744 \uc904\uc774\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4. \ud14c\uc2a4\ud2b8 \uc6e8\uc774\ud37c \ub610\ub294 \ub354\ubbf8 \uc6e8\uc774\ud37c\uc758 \uc7ac\ud65c\uc6a9 \ubc0f \uc7ac\uc5f0\ub9c8\ub3c4 \ube44\uc6a9\uc744 \uc808\uac10\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>SiC \uae30\ud310\uc758 \uacb0\ud568 \ubc00\ub3c4:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504(\uc911\uacf5 \ucf54\uc5b4 \ub098\uc0ac \uc804\uc704), \ub098\uc0ac\uc0b0 \ub098\uc0ac \uc804\uc704(TSD), \uae30\uc800\uba74 \uc804\uc704(BPD), SiC \uae30\ud310\uc758 \uc801\uce35 \uacb0\ud568\uacfc \uac19\uc740 \uacb0\ud568\uc740 GaN \uc5d0\ud53c\ud0dd\uc15c \uce35\uc73c\ub85c \uc804\ud30c\ub418\uc5b4 LED \uc131\ub2a5, \uc2e0\ub8b0\uc131 \ubc0f \uc218\uc728\uc5d0 \ubd80\uc815\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \uacb0\ud568 \ubc00\ub3c4\ub97c \uc904\uc774\ub294 \ub370 \uc0c1\ub2f9\ud55c \uc9c4\uc804\uc774 \uc788\uc5c8\uc2b5\ub2c8\ub2e4. \ud5a5\uc0c1\ub41c \uacb0\uc815 \uc131\uc7a5 \uacf5\uc815 \uc81c\uc5b4, \uc0c8\ub85c\uc6b4 \uc131\uc7a5 \ud654\ud559 \ubb3c\uc9c8, \uacb0\ud568 \ucc28\ub2e8 \uc5d0\ud53c\ud0dd\uc15c \uc778\ud130\ub808\uc774\uc5b4\uc640 \uac19\uc740 \uae30\uc220\uc774 \uc9c0\uc18d\uc801\uc73c\ub85c \uac1c\ubc1c\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uacf5\uae09\uc5c5\uccb4\uc758 \uc5c4\uaca9\ud55c \ud488\uc9c8 \uad00\ub9ac\uc640 \uc6e8\uc774\ud37c \ub9e4\ud551\uc740 \uacb0\ud568 \uc218\uc900\uc5d0 \ub530\ub77c \uc6e8\uc774\ud37c\ub97c \uc2dd\ubcc4\ud558\uace0 \ub4f1\uae09\uc744 \ub9e4\uae30\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>SiC \uac00\uacf5 \ubc0f \ud3f4\ub9ac\uc2f1\uc758 \ubcf5\uc7a1\uc131:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \uc54c\ub824\uc9c4 \uc18c\uc7ac \uc911 \uac00\uc7a5 \ub2e8\ub2e8\ud55c \uc18c\uc7ac(\ubaa8\uc2a4 \uacbd\ub3c4 \uc57d 9.25)\ub85c \uac00\uacf5, \uc5f0\uc0ad, \uc5f0\ub9c8\uac00 \ub9e4\uc6b0 \uc5b4\ub835\uace0 \uc2dc\uac04\uc774 \ub9ce\uc774 \uc18c\uc694\ub429\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud2b9\uc218 \ub2e4\uc774\uc544\ubaac\ub4dc \ud234\ub9c1, \uacac\uace0\ud55c \uae30\uacc4, \uc804\ubb38 \uc9c0\uc2dd\uc774 \ud544\uc694\ud558\uba70 \uac00\uacf5 \ube44\uc6a9\uacfc \ub9ac\ub4dc \ud0c0\uc784\uc774 \uc99d\uac00\ud569\ub2c8\ub2e4. \ud2b9\ud788 \uc6d0\uc790 \ub2e8\uc704\ub85c \ub9e4\ub044\ub7fd\uace0 \uc190\uc0c1 \uc5c6\ub294 '\uc5d0\ud53c \ub808\ub514' \ud45c\uba74\uc744 \uad6c\ud604\ud558\ub294 \uac83\uc740 \ub9e4\uc6b0 \uae4c\ub2e4\ub85c\uc6b4 \uc791\uc5c5\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> SiC\uc5d0 \uc801\ud569\ud55c \uace0\uae09 \uc5f0\uc0ad \ud720, \ub798\ud551 \ud50c\ub808\uc774\ud2b8 \ubc0f \uc5f0\ub9c8 \uc2ac\ub7ec\ub9ac \uac1c\ubc1c. CMP \uacf5\uc815 \ucd5c\uc801\ud654. \uc131\ud615 \ubc0f \ub2e4\uc774\uc2f1\uc744 \uc704\ud55c \ub808\uc774\uc800 \ubcf4\uc870 \uac00\uacf5 \ub610\ub294 \uae30\ud0c0 \uc0c8\ub85c\uc6b4 \uae30\uc220 \uc0ac\uc6a9. \ud45c\uba74 \ud488\uc9c8\uacfc \ud45c\uba74 \uc544\ub798 \uc190\uc0c1\uc744 \ubaa8\ub2c8\ud130\ub9c1\ud558\uae30 \uc704\ud55c \ucd5c\ucca8\ub2e8 \uacc4\uce21\uc5d0 \ub300\ud55c \ud22c\uc790.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc5f4\ud33d\ucc3d \ubd88\uc77c\uce58(CTE):<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> SiC\uc758 CTE\ub294 \uc0ac\ud30c\uc774\uc5b4\ubcf4\ub2e4 GaN\uc5d0 \ub354 \uac00\uae5d\uc9c0\ub9cc \uc5ec\uc804\ud788 \ubd88\uc77c\uce58\uac00 \uc874\uc7ac\ud569\ub2c8\ub2e4. \uc774\ub294 \ud2b9\ud788 \ub514\ubc14\uc774\uc2a4 \uc791\ub3d9 \ub610\ub294 \uc81c\uc870 \uc2dc \uc628\ub3c4 \uc21c\ud658 \uc911\uc5d0 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc5d0 \uc751\ub825\uc744 \uc720\ubc1c\ud558\uc5ec \uc6e8\uc774\ud37c \ubcf4\uc6b0, \uade0\uc5f4 \ub610\ub294 \ub514\ubc14\uc774\uc2a4 \uc218\uba85 \uac10\uc18c\ub85c \uc774\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\ub978 \ud3ec\uc7a5\uc7ac\uc640\uc758 \ubd88\uc77c\uce58\ub3c4 \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4 \uad6c\uc870\uc758 \uc2e0\uc911\ud55c \uc124\uacc4, \uc2a4\ud2b8\ub808\uc778 \uc644\ud654 \uc778\ud130\ub808\uc774\uc5b4 \uc0ac\uc6a9, \uc131\uc7a5 \uc870\uac74 \ucd5c\uc801\ud654. \ud328\ud0a4\uc9d5\uc758 \uacbd\uc6b0, CTE \ucc28\uc774\ub97c \uc218\uc6a9\ud558\uac70\ub098 \uc911\uac04 CTE \uac12\uc744 \uac00\uc9c8 \uc218 \uc788\ub294 \uc801\uc808\ud55c \ub2e4\uc774 \ubd80\ucc29 \uc7ac\ub8cc\uc640 \uc11c\ube0c\ub9c8\uc6b4\ud2b8\ub97c \uc120\ud0dd\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uacf5\uae09\ub9dd \uc81c\uc57d \ubc0f \ud45c\uc900\ud654:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> \uae4c\ub2e4\ub85c\uc6b4 LED \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud55c \uace0\ud488\uc9c8\uc758 \ub300\uad6c\uacbd SiC \uc6e8\uc774\ud37c \uacf5\uae09\ub9dd\uc740 \ub54c\ub54c\ub85c \uc18c\uc218\uc758 \uc8fc\uc694 \uae00\ub85c\ubc8c \uacf5\uae09\uc5c5\uccb4\ub85c \uc778\ud574 \ud0c0\uc774\ud2b8\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c \ubaa8\ub4e0 \uacf5\uae09\uc5c5\uccb4\uc758 \uc0ac\uc591\uc774 \uc644\uc804\ud788 \ud45c\uc900\ud654\ub418\uc5b4 \uc788\uc9c0 \uc54a\uc740 \uacbd\uc6b0\ub3c4 \ubb38\uc81c\uac00 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \uac00\ub2a5\ud55c \uacbd\uc6b0 \uacf5\uae09\uc6d0\uc744 \ub2e4\uac01\ud654\ud569\ub2c8\ub2e4. \ud3c9\ud310\uc774 \uc88b\uc740 \uacf5\uae09\uc5c5\uccb4\uc640\uc758 \uae34\ubc00\ud55c \ud611\ub825 \ubc0f \uc7a5\uae30 \uacc4\uc57d. \uc6e8\uc774\ud37c \uc0ac\uc591\uc758 \ud45c\uc900\ud654\ub97c \uc704\ud55c \uc5c5\uacc4\uc758 \ub178\ub825. \uc9c0\uc5ed \uc81c\uc870 \ud5c8\ube0c\uc758 \ucd9c\ud604\ub3c4 \uacf5\uae09 \uc548\uc815\ud654\uc5d0 \ub3c4\uc6c0\uc774 \ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\uc774\ub7ec\ud55c \uacfc\uc81c\ub97c \ud574\uacb0\ud558\ub824\uba74 SiC \uc7ac\ub8cc \uc0dd\uc0b0, \uacf5\uc815 \uae30\uc220 \ubc0f \ub514\ubc14\uc774\uc2a4 \uc124\uacc4\uc5d0 \ub300\ud55c \uc9c0\uc18d\uc801\uc778 \ud601\uc2e0\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubcf5\uc7a1\uc131\uc744 \uc774\ud574\ud558\ub294 \uc219\ub828\ub41c SiC \uc804\ubb38\uac00\uc640 \ud611\ub825\ud558\ub294 \uac83\uc740 SiC\ub97c LED \uc81c\uc870 \uc6cc\ud06c\ud50c\ub85c\uc5d0 \uc131\uacf5\uc801\uc73c\ub85c \ud1b5\ud569\ud558\ub294 \ub370 \uc788\uc5b4 \ud575\uc2ec\uc785\ub2c8\ub2e4.<\/p>\n<h2>\uc870\uba85 \ud30c\ud2b8\ub108 \uc120\ud0dd\ud558\uae30: LED \uc694\uad6c \uc0ac\ud56d\uc5d0 \uc801\ud569\ud55c SiC \uacf5\uae09\uc5c5\uccb4 \uc120\ud0dd\ud558\uae30<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uacf5\uae09\uc5c5\uccb4\ub97c \uc120\ud0dd\ud558\ub294 \uac83\uc740 LED \uc81c\ud488 \ubc0f \uc81c\uc870 \uacf5\uc815\uc758 \ud488\uc9c8, \uc131\ub2a5, \ube44\uc6a9 \ud6a8\uc728\uc131\uc5d0 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\ub294 \uc911\uc694\ud55c \uacb0\uc815\uc785\ub2c8\ub2e4. LED \uc0b0\uc5c5\uc5d0 \uc0ac\uc6a9\ub418\ub294 SiC \ubd80\ud488\uc758 \ud2b9\uc218\ud55c \ud2b9\uc131\uc744 \uace0\ub824\ud560 \ub54c, \uc9c0\uc2dd\uacfc \uc5ed\ub7c9\uc744 \uac16\ucd98 \uacf5\uae09\uc5c5\uccb4\uc640 \ud611\ub825\ud558\ub294 \uac83\uc774 \ubb34\uc5c7\ubcf4\ub2e4 \uc911\uc694\ud569\ub2c8\ub2e4. \uc8fc\uc694 \ud3c9\uac00 \uae30\uc900\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud3ec\ud568\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\uae30\uc220 \uc804\ubb38 \uc9c0\uc2dd\uacfc \uacbd\ud5d8:<\/strong> \uacf5\uae09\uc5c5\uccb4\ub294 \uacb0\uc815 \uc131\uc7a5, \uc18c\uacb0 \uacf5\uc815, \uae30\uacc4 \uac00\uacf5 \ubc0f \uc5f0\ub9c8\ub97c \ud3ec\ud568\ud55c SiC \uc7ac\ub8cc \uacfc\ud559\uc5d0 \ub300\ud55c \uae4a\uc740 \uc774\ud574\uac00 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uacb0\uc815\uc801\uc73c\ub85c, SiC \uae30\ud310\uc758 GaN \uc5d0\ud53c\ud0dd\uc2dc \uc694\uad6c \uc0ac\ud56d\ubd80\ud130 MOCVD \ubc18\uc751\uae30 \ub0b4\uc758 \uac00\ud639\ud55c \uc870\uac74\uae4c\uc9c0 LED \uc81c\uc870\uc758 \ud2b9\uc815 \uc694\uad6c \uc0ac\ud56d\ub3c4 \uc774\ud574\ud574\uc57c \ud569\ub2c8\ub2e4. \uc720\uc0ac\ud55c \ucca8\ub2e8 \uae30\uc220 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 SiC\ub97c \uacf5\uae09\ud55c \uac80\uc99d\ub41c \uc2e4\uc801\uc744 \ubcf4\uc720\ud558\uace0 \uc788\ub294\uc9c0 \uc0b4\ud3b4\ubcf4\uc138\uc694.<\/li>\n<li><strong>\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uae30\ub2a5:<\/strong> LED \uc0b0\uc5c5\uc740 \uc885\uc885 \uace0\uc720\ud55c \uc0ac\uc591\uc5d0 \ub9de\ucd98 \ubd80\ud488\uc744 \ud544\uc694\ub85c \ud569\ub2c8\ub2e4. \ucd5c\uace0 \uc218\uc900\uc758 \uacf5\uae09\uc5c5\uccb4\ub294 \uad11\ubc94\uc704\ud55c <a href=\"https:\/\/sicarbtech.com\/ko\/customizing-support\/\">\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uc9c0\uc6d0<\/a>\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6e8\uc774\ud37c, MOCVD \ubd80\ud488 \ub610\ub294 \uc5f4 \uad00\ub9ac \uad6c\uc131 \uc694\uc18c\uc758 \uce58\uc218, \uacf5\ucc28, \ud45c\uba74 \ub9c8\uac10, \uc7ac\ub8cc \ub4f1\uae09 \ubc0f \uae30\ud0c0 \uc911\uc694\ud55c \ub9e4\uac1c \ubcc0\uc218\ub97c \uc815\uc758\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc7ac\ub8cc \ud488\uc9c8 \ubc0f \uc77c\uad00\uc131:<\/strong> \uacf5\uae09\uc5c5\uccb4\ub294 \uc6d0\uc790\uc7ac \ubc0f \uc81c\uc870 \uacf5\uc815\uc5d0 \ub300\ud55c \uc5c4\uaca9\ud55c \ud488\uc9c8 \uad00\ub9ac\ub97c \uc785\uc99d\ud574\uc57c \ud569\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \uc778\uc99d\ub41c \uc21c\ub3c4 \uc218\uc900, \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4(\ub2e8\uacb0\uc815\uc758 \uacbd\uc6b0), \uc77c\uad00\ub41c \ubc30\uce58 \uac04 \ud2b9\uc131\uc744 \uac16\ucd98 SiC \ub4f1\uae09\uc744 \uc81c\uacf5\ud558\ub294 \uac83\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uc7ac\ub8cc \ub370\uc774\ud130\uc2dc\ud2b8, \uc778\uc99d(\uc608: ISO 9001) \ubc0f \ud488\uc9c8 \uad00\ub9ac \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud55c \uc99d\uac70\ub97c \uc694\uccad\ud558\uc138\uc694.<\/li>\n<li><strong>\uc81c\uc870 \uc6a9\ub7c9 \ubc0f \ud655\uc7a5\uc131:<\/strong> \uacf5\uae09\uc5c5\uccb4\uac00 \ud604\uc7ac \ubb3c\ub7c9 \uc218\uc694\ub97c \ucda9\uc871\ud560 \uc218 \uc788\ub294 \uc81c\uc870 \ub2a5\ub825\uacfc \uc0dd\uc0b0 \uc694\uad6c\uac00 \uc99d\uac00\ud568\uc5d0 \ub530\ub77c \ud655\uc7a5\ud560 \uc218 \uc788\ub294 \ub2a5\ub825\uc744 \uac16\ucd94\uace0 \uc788\ub294\uc9c0 \ud655\uc778\ud558\uc138\uc694. \ud504\ub85c\ud1a0\ud0c0\uc785\uacfc \ub300\ub7c9 \uc8fc\ubb38 \ubaa8\ub450\uc5d0 \ub300\ud55c \uc0dd\uc0b0 \uc2dc\uc124, \uc7a5\ube44, \ub9ac\ub4dc \ud0c0\uc784\uc5d0 \ub300\ud574 \ubb38\uc758\ud558\uc138\uc694.<\/li>\n<li><strong>\uace0\uae09 \uacc4\uce21 \ubc0f \ud488\uc9c8 \ubcf4\uc99d:<\/strong> \uc911\uc694\ud55c SiC \ud2b9\uc131\uc744 \uc815\ud655\ud558\uac8c \uce21\uc815\ud558\uace0 \uac80\uc99d\ud558\ub294 \ub2a5\ub825\uc740 \ud0c0\ud611\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uacf5\uae09\uc5c5\uccb4\ub294 \ud45c\uba74 \uac70\uce60\uae30(\uc608: AFM), \ud3c9\ud0c4\ub3c4(\uc608: \uac04\uc12d \uce21\uc815), \uacb0\ud568 \ubc00\ub3c4(\uc608: XRT, \uce78\ub378\ub77c), \uacb0\uc815\ud559\uc801 \ubc30\ud5a5(\uc608: XRD) \ubc0f \uce58\uc218 \uc815\ud655\ub3c4\ub97c \ud2b9\uc131\ud654\ud558\ub294 \uace0\uae09 \uacc4\uce21 \ub3c4\uad6c\uc5d0 \uc561\uc138\uc2a4\ud560 \uc218 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc5f0\uad6c \uac1c\ubc1c \ucd08\uc810:<\/strong> R&amp;D\uc5d0 \uc804\ub150\ud558\ub294 \uacf5\uae09\uc5c5\uccb4\ub294 \ud601\uc2e0\uc801\uc778 \uc194\ub8e8\uc158\uc744 \uc81c\uacf5\ud558\uace0 \ub2e4\uc74c\uacfc \uac19\uc774 \uc9c4\ud654\ud558\ub294 \uc7ac\ub8cc\uc5d0 \ub300\ud55c \uc5c5\uacc4 \uc694\uad6c \uc0ac\ud56d\ubcf4\ub2e4 \uc55e\uc11c \ub098\uac08 \uac00\ub2a5\uc131\uc774 \ub192\uc2b5\ub2c8\ub2e4 <em>\ucca8\ub2e8 SiC \uc138\ub77c\ubbf9<\/em>.<\/li>\n<\/ul>\n<p>\uc774\ub7ec\ud55c \ub9e5\ub77d\uc5d0\uc11c SiC \uc81c\uc870\uc758 \uae00\ub85c\ubc8c \ud658\uacbd\uc744 \uace0\ub824\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \uc911\uad6d \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ub9de\ucda4\ud615 \ubd80\ud488 \uc81c\uc870\uc758 \ud5c8\ube0c\ub294 \uc911\uad6d \uc6e8\uc774\ud321\uc2dc\uc5d0 \uc704\uce58\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uc9c0\uc5ed\uc5d0\ub294 40\uac1c \uc774\uc0c1\uc758 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc0dd\uc0b0 \uae30\uc5c5\uc774 \uc788\uc2b5\ub2c8\ub2e4<\/p>","protected":false},"excerpt":{"rendered":"<p>LED \uc81c\uc870\uc5d0\uc11c SiC\uc758 \ud575\uc2ec \uc5ed\ud560 \uc6b0\uc218\uc131 \uc18c\uac1c: LED \uae30\uc220\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \ube5b\ub098\ub294 \ubd80\uc0c1 \uc2e4\ub9ac\ucf58\uacfc \ud0c4\uc18c\uc758 \ud654\ud569\ubb3c\uc778 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)\ub294 \ub6f0\uc5b4\ub09c \ubb3c\ub9ac\uc801, \ud654\ud559\uc801 \ud2b9\uc131\uc73c\ub85c \uc798 \uc54c\ub824\uc9c4 \uac15\ub825\ud55c \ucca8\ub2e8 \uc138\ub77c\ubbf9 \uc18c\uc7ac\uc785\ub2c8\ub2e4. \ub180\ub77c\uc6b4 \uacbd\ub3c4, \ub192\uc740 \uc5f4\uc804\ub3c4\uc728, \ub6f0\uc5b4\ub09c \uc5f4\ucda9\uaca9 \uc800\ud56d\uc131, \uc6b0\uc218\ud55c \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc744 \uc9c0\ub2c8\uace0 \uc788\uc73c\uba70 &#8230;<\/p>","protected":false},"author":3,"featured_media":2355,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_gspb_post_css":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-2550","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized"],"acf":{"en_gb-title":"","en_gb-meta":"","ja-title":"","ja-meta":"","ja-content":"","ko-title":"","ko-meta":"","ko-content":"","nl-title":"","nl-meta":"","nl-content":"","es-title":"","es-meta":"","es-content":"","ru-title":"","ru-meta":"","ru-content":"","tr-title":"","tr-meta":"","tr-content":"","pl-title":"","pl-meta":"","pl-content":"","pt-title":"","pt-meta":"","pt-content":"","de-title":"","de-meta":"","de-content":"","fr-title":"","fr-meta":"","fr-content":""},"taxonomy_info":{"category":[{"value":1,"label":"Uncategorized"}]},"featured_image_src_large":["https:\/\/sicarbtech.com\/wp-content\/uploads\/2025\/05\/Custom-Silicon-Carbide-Products-17_1-1.jpg",1024,1024,false],"author_info":{"display_name":"yiyunyinglucky","author_link":"https:\/\/sicarbtech.com\/ko\/author\/yiyunyinglucky\/"},"comment_info":0,"category_info":[{"term_id":1,"name":"Uncategorized","slug":"uncategorized","term_group":0,"term_taxonomy_id":1,"taxonomy":"category","description":"","parent":0,"count":793,"filter":"raw","cat_ID":1,"category_count":793,"category_description":"","cat_name":"Uncategorized","category_nicename":"uncategorized","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2550","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/comments?post=2550"}],"version-history":[{"count":2,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2550\/revisions"}],"predecessor-version":[{"id":4966,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2550\/revisions\/4966"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media\/2355"}],"wp:attachment":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media?parent=2550"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/categories?post=2550"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/tags?post=2550"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}