{"id":2540,"date":"2025-08-24T09:11:44","date_gmt":"2025-08-24T09:11:44","guid":{"rendered":"https:\/\/casnewmaterials.com\/?p=2540"},"modified":"2025-08-13T00:58:55","modified_gmt":"2025-08-13T00:58:55","slug":"semiconductor-evolution-fueled-by-sic-technology","status":"publish","type":"post","link":"https:\/\/sicarbtech.com\/ko\/semiconductor-evolution-fueled-by-sic-technology\/","title":{"rendered":"SiC \uae30\uc220\ub85c \ucd09\uc9c4\ub418\ub294 \ubc18\ub3c4\uccb4 \uc9c4\ud654"},"content":{"rendered":"<h1>SiC \uae30\uc220\ub85c \ucd09\uc9c4\ub418\ub294 \ubc18\ub3c4\uccb4 \uc9c4\ud654<\/h1>\n<p>\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc740 \ub354 \uc791\uace0, \ub354 \ube60\ub974\uace0, \ub354 \ud6a8\uc728\uc801\uc778 \uc804\uc790 \uae30\uae30\uc5d0 \ub300\ud55c \ub04a\uc784\uc5c6\ub294 \uc218\uc694\uc5d0 \ud798\uc785\uc5b4 \ub04a\uc784\uc5c6\uc774 \uc9c4\ud654\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uae30\uc874\uc758 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \uae30\uc220\uc774 \uc774\ub860\uc801 \ud55c\uacc4\uc5d0 \ub2e4\ub2e4\ub974\uba74\uc11c \uc131\ub2a5\uc758 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\ub294 \uc0c8\ub85c\uc6b4 \uc18c\uc7ac\uac00 \ub4f1\uc7a5\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uadf8 \uc911\uc5d0\uc11c\ub3c4 \ud0c4\ud654\uaddc\uc18c(SiC)\ub294 \ud2b9\ud788 \uace0\uc804\ub825, \uace0\uc8fc\ud30c, \uace0\uc628 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \ud601\uc2e0\uc801\uc778 \uc18c\uc7ac\ub85c \ub450\uac01\uc744 \ub098\ud0c0\ub0b4\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ube14\ub85c\uadf8 \uac8c\uc2dc\ubb3c\uc5d0\uc11c\ub294 \ud604\uc7ac \uc9c4\ud589 \uc911\uc778 \ubc18\ub3c4\uccb4 \uc9c4\ud654\uc5d0\uc11c SiC\uc758 \uc911\ucd94\uc801\uc778 \uc5ed\ud560\uc744 \uc0b4\ud3b4\ubcf4\uace0, \uadf8 \uc7a5\uc810\uacfc \uc751\uc6a9 \ubd84\uc57c, \ub9de\ucda4\ud615 SiC \ubd80\ud488 \uc18c\uc2f1 \uc2dc \uace0\ub824\ud574\uc57c \ud560 \uc0ac\ud56d\uc744 \uc790\uc138\ud788 \uc0b4\ud3b4\ubd05\ub2c8\ub2e4.<\/p>\n<h2>\ubcc0\ud654\ud558\ub294 \ubc18\ub3c4\uccb4 \ud658\uacbd<\/h2>\n<p>\uc218\uc2ed \ub144 \ub3d9\uc548 \uc2e4\ub9ac\ucf58(Si)\uc740 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \ud655\uc2e4\ud55c \uc8fc\ub825 \uc18c\uc7ac\uc600\uc2b5\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \uc804\uae30 \uc790\ub3d9\ucc28\ubd80\ud130 5G \uc778\ud504\ub77c, \uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc2dc\uc2a4\ud15c\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \ucd5c\uc2e0 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uc804\ub825 \ubc00\ub3c4, \uc791\ub3d9 \uc8fc\ud30c\uc218, \uc5f4\uc545\ud55c \ud658\uacbd \uc870\uac74\uc774 \uc99d\uac00\ud558\uba74\uc11c \uc2e4\ub9ac\ucf58\uc758 \ud55c\uacc4\uac00 \ub4dc\ub7ec\ub098\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58\uc758 \ud56d\ubcf5 \uc804\uc555, \uc5f4 \uc804\ub3c4\uc131, \uc804\uc790 \uc774\ub3d9\uc131 \ub4f1\uc758 \ud30c\ub77c\ubbf8\ud130\uac00 \uc2e4\ud604 \uac00\ub2a5\ud55c \ucd5c\ub300\uce58\uae4c\uc9c0 \ud655\uc7a5\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc0c1\ud669\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub85c \ub300\ud45c\ub418\ub294 \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d(WBG) \ubc18\ub3c4\uccb4\uac00 \ub4f1\uc7a5\ud588\uc2b5\ub2c8\ub2e4. SiC\ub294 \ubc18\ub3c4\uccb4 \ub514\ubc14\uc774\uc2a4\uc758 \ud68d\uae30\uc801\uc778 \uc131\ub2a5 \ud5a5\uc0c1\uc73c\ub85c \uc9c1\uc811 \uc5f0\uacb0\ub418\ub294 \uc6b0\uc218\ud55c \uc7ac\ub8cc \ud2b9\uc131\uc744 \uc81c\uacf5\ud558\uc5ec \uc804\ub825 \uc804\uc790 \ubc0f \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc2dc\uc2a4\ud15c\uc758 \uc0c8\ub85c\uc6b4 \uc2dc\ub300\ub97c \uc608\uace0\ud569\ub2c8\ub2e4. SiC\ub85c\uc758 \uc804\ud658\uc740 \ub2e8\uc21c\ud55c \uc810\uc9c4\uc801 \uc5c5\uadf8\ub808\uc774\ub4dc\uac00 \uc544\ub2c8\ub77c \uc218\ub9ce\uc740 \uc0b0\uc5c5 \ubd84\uc57c\uc5d0\uc11c \uc644\uc804\ud788 \uc0c8\ub85c\uc6b4 \uae30\ub2a5\uacfc \ud6a8\uc728\uc131\uc744 \uac00\ub2a5\ud558\uac8c \ud558\ub294 \uadfc\ubcf8\uc801\uc778 \ubcc0\ud654\uc785\ub2c8\ub2e4.<\/p>\n<h2>SiC\uac00 \ubc18\ub3c4\uccb4\uc758 \ud310\ub3c4\ub97c \ubc14\uafb8\ub294 \uc774\uc720<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uac00 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \ub450\uac01\uc744 \ub098\ud0c0\ub0b4\ub294 \uac83\uc740 \uc6b0\uc5f0\uc774 \uc544\ub2c8\ub77c \uae30\uc874 \uc2e4\ub9ac\ucf58\uc744 \ud6e8\uc52c \ub2a5\uac00\ud558\ub294 \uc18c\uc790 \uc131\ub2a5\uc744 \uac00\ub2a5\ud558\uac8c \ud558\ub294 \ud0c1\uc6d4\ud55c \uc7ac\ub8cc \ud2b9\uc131 \ub355\ubd84\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc7a5\uc810\uc740 \ucc28\uc138\ub300 \uc804\ub825 \uc804\uc790 \uc7a5\uce58\uc640 \uace0\uc131\ub2a5 \uc2dc\uc2a4\ud15c\uc744 \uac1c\ubc1c\ud558\ub824\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\uc640 \uc124\uacc4\uc790\uc5d0\uac8c \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>\ub354 \ub192\uc740 \ud56d\ubcf5 \uc804\uae30\uc7a5:<\/strong> SiC\ub294 \uc2e4\ub9ac\ucf58\ubcf4\ub2e4 \uc57d 10\ubc30 \ub192\uc740 \ud56d\ubcf5 \uc804\uae30\uc7a5\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c SiC \ub514\ubc14\uc774\uc2a4\ub294 \ud6e8\uc52c \ub354 \uc587\uc740 \uce35\uc5d0\uc11c \ud6e8\uc52c \ub354 \ub192\uc740 \uc804\uc555\uc744 \ucc28\ub2e8\ud560 \uc218 \uc788\uc5b4 \ub514\ubc14\uc774\uc2a4 \ud06c\uae30\uac00 \uc791\uc544\uc9c0\uace0 \uc8fc\uc5b4\uc9c4 \uc804\uc555 \uc815\uaca9\uc5d0 \ub300\ud55c \uc628\uc0c1\ud0dc \uc800\ud56d\uc774 \ub0ae\uc544\uc9d1\ub2c8\ub2e4. \uc774\ub294 \uace0\uc804\uc555 \uc804\ub825 \ubcc0\ud658 \ubc0f \ubd84\ubc30\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ub6f0\uc5b4\ub09c \uc5f4 \uc804\ub3c4\uc131:<\/strong> SiC\ub294 \uc2e4\ub9ac\ucf58\ubcf4\ub2e4 \uc5f4\uc804\ub3c4\uc728\uc774 \uc57d 3\ubc30 \ub354 \ub192\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c SiC \ub514\ubc14\uc774\uc2a4\ub294 \uc5f4\uc744 \ub354 \ud6a8\uacfc\uc801\uc73c\ub85c \ubc29\ucd9c\ud560 \uc218 \uc788\uc5b4 \ubd80\ud53c\uac00 \ud070 \ub0c9\uac01 \uc2dc\uc2a4\ud15c \uc5c6\uc774\ub3c4 \ub354 \ub192\uc740 \uc628\ub3c4\uc640 \uc804\ub825 \ubc00\ub3c4\uc5d0\uc11c \uc791\ub3d9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131\uc740 \uc548\uc815\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\uace0 \uc2dc\uc2a4\ud15c \ud06c\uae30\uc640 \ube44\uc6a9\uc744 \uc904\uc5ec\uc90d\ub2c8\ub2e4.<\/li>\n<li><strong>\ub354 \ub113\uc740 \ubc34\ub4dc\uac2d:<\/strong> SiC\ub294 \uc2e4\ub9ac\ucf58\ubcf4\ub2e4 \ubc34\ub4dc\uac2d\uc774 \uc57d 3\ubc30 \ub354 \ub113\uc2b5\ub2c8\ub2e4(\uc608: 4H-SiC\uc758 \uacbd\uc6b0 ~3.2eV \ub300 Si\uc758 \uacbd\uc6b0 1.1eV). \uc774\ub807\uac8c \ub354 \ub113\uc740 \ubc34\ub4dc\uac2d\uc740 \ud2b9\ud788 \uace0\uc628\uc5d0\uc11c \ub204\uc124 \uc804\ub958\ub97c \ub0ae\ucd94\uace0 \uc2e4\ub9ac\ucf58\uc758 \uc77c\ubc18\uc801\uc778 \ud55c\uacc4\uc778 150\u00b0C\uc5d0 \ube44\ud574 200\u00b0C\ub97c \ucd08\uacfc\ud558\ub294 \ub354 \ub192\uc740 \uc791\ub3d9 \uc628\ub3c4\ub97c \ud5c8\uc6a9\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ub354 \ub192\uc740 \uc804\uc790 \ud3ec\ud654 \ub4dc\ub9ac\ud504\ud2b8 \uc18d\ub3c4:<\/strong> SiC\ub294 \uc2e4\ub9ac\ucf58\uc758 \uc57d 2\ubc30\uc5d0 \ub2ec\ud558\ub294 \ud3ec\ud654 \uc804\uc790 \ub4dc\ub9ac\ud504\ud2b8 \uc18d\ub3c4\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131 \ub355\ubd84\uc5d0 SiC \ub514\ubc14\uc774\uc2a4\ub294 \ub354 \ub192\uc740 \uc2a4\uc704\uce6d \uc8fc\ud30c\uc218\uc5d0\uc11c \uc791\ub3d9\ud560 \uc218 \uc788\uc5b4 \uc804\ub825 \ucee8\ubc84\ud130 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc218\ub3d9 \ubd80\ud488(\uc778\ub355\ud130, \ucee4\ud328\uc2dc\ud130)\uc744 \ub354 \uc791\uac8c \ub9cc\ub4e4 \uc218 \uc788\uc5b4 \uc804\ub825 \ubc00\ub3c4\ub97c \ub192\uc774\uace0 \uc2dc\uc2a4\ud15c \ubd80\ud53c\ub97c \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud5a5\uc0c1\ub41c \ubc29\uc0ac\uc120 \uacbd\ub3c4:<\/strong> SiC\ub294 \uc6d0\uc790 \uacb0\ud569\uc774 \uac15\ud558\uae30 \ub54c\ubb38\uc5d0 \uc2e4\ub9ac\ucf58\uc5d0 \ube44\ud574 \ubcf8\uc9c8\uc801\uc73c\ub85c \ubc29\uc0ac\uc120 \uc190\uc0c1\uc5d0 \ub300\ud55c \ub0b4\uc131\uc774 \uac15\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c SiC \ub514\ubc14\uc774\uc2a4\ub294 \ubc29\uc0ac\uc120 \ub0b4\uc131\uc774 \uc911\uc694\ud55c \ud56d\uacf5\uc6b0\uc8fc, \ubc29\uc704 \ubc0f \uc6d0\uc790\ub825 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub9e4\uc6b0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uc774\ub7ec\ud55c \ubcf8\uc9c8\uc801\uc778 \uc774\uc810\uc740 \ud2b9\ud788 \uae4c\ub2e4\ub85c\uc6b4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c SiC \ub514\ubc14\uc774\uc2a4\uac00 \uc2e4\ub9ac\ucf58 \ub514\ubc14\uc774\uc2a4\ubcf4\ub2e4 \ub354 \uc791\uace0, \ub354 \ube60\ub974\uace0, \ub354 \ud6a8\uc728\uc801\uc774\uace0, \ub354 \uc548\uc815\uc801\uc77c \uc218 \uc788\uc74c\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. \uc774\ub294 \uc2dc\uc2a4\ud15c \ube44\uc6a9 \uc808\uac10, \uc5d0\ub108\uc9c0 \ud6a8\uc728\uc131 \ud5a5\uc0c1, \uc81c\ud488 \uc218\uba85 \uc5f0\uc7a5 \ub4f1 \uc870\ub2ec \uad00\ub9ac\uc790\uc640 \uae30\uc220 \uad6c\ub9e4\uc790\uc5d0\uac8c \uc2e4\uc9c8\uc801\uc778 \uc774\uc810\uc73c\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4.<\/p>\n<h2>\ubc18\ub3c4\uccb4 \uc5d0\ucf54\uc2dc\uc2a4\ud15c\uc758 \uc8fc\uc694 SiC \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \uc6b0\uc218\ud55c \ud2b9\uc131\uc740 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \ub2e4\uc591\ud55c \uc751\uc6a9 \ubd84\uc57c\ub97c \uac1c\ucc99\ud558\uc5ec \ud601\uc2e0\uacfc \ud6a8\uc728\uc131 \ud5a5\uc0c1\uc744 \uc8fc\ub3c4\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc5d4\uc9c0\ub2c8\uc5b4\uc640 \uc870\ub2ec \uc804\ubb38\uac00\uac00 \uc7ac\ub8cc\ub97c \ud3c9\uac00\ud560 \ub54c \uc774\ub7ec\ud55c \uad6c\uccb4\uc801\uc778 \uc0ac\uc6a9 \uc0ac\ub840\ub97c \uc774\ud574\ud558\uba74 SiC\uc758 \uac00\uce58 \uc81c\uc548\uc744 \uac15\uc870\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>SiC \uae30\uc220\uc740 \uba87 \uac00\uc9c0 \uc8fc\uc694 \uc601\uc5ed\uc5d0\uc11c \ud601\uc2e0\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\uc804\ub825 \uc804\uc790:<\/strong> \uc774\ub294 SiC\uc758 \uac00\uc7a5 \uc911\uc694\ud55c \uc601\uc5ed\uc785\ub2c8\ub2e4.\n<ul>\n<li><strong>\uc778\ubc84\ud130 \ubc0f \ubcc0\ud658\uae30:<\/strong> \uc804\uae30 \uc790\ub3d9\ucc28(EV)\uc758 \ud2b8\ub799\uc158 \uc778\ubc84\ud130, \uc628\ubcf4\ub4dc \ucda9\uc804\uae30(OBC), DC-DC \ucee8\ubc84\ud130\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. SiC\ub294 \ub354 \ub192\uc740 \ud6a8\uc728\uc744 \uad6c\ud604\ud558\uc5ec \uc804\uae30\ucc28 \uc8fc\ud589 \uac70\ub9ac\ub97c \ub298\ub9ac\uace0 \ucda9\uc804 \uc18d\ub3c4\ub97c \ub192\uc785\ub2c8\ub2e4. \ud0dc\uc591\uad11 \uc778\ubc84\ud130\uc640 \ud48d\ub825 \ud130\ube48 \ucee8\ubc84\ud130\ub3c4 SiC\uc758 \ud6a8\uc728\uc131\uacfc \uc804\ub825 \ubc00\ub3c4\uc758 \uc774\uc810\uc744 \ub204\ub9b4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58:<\/strong> \uc0b0\uc5c5\uc6a9 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58, \uc11c\ubc84 \ud31c PSU \ubc0f \ud1b5\uc2e0 \uc815\ub958\uae30\ub294 SiC\ub97c \ud65c\uc6a9\ud558\uc5ec \uc5d0\ub108\uc9c0 \uc18c\ube44\ub97c \uc904\uc774\uace0 \ud3fc \ud329\ud130\ub97c \uc18c\ud615\ud654\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ubaa8\ud130 \ub4dc\ub77c\uc774\ube0c:<\/strong> \uc0b0\uc5c5\uc6a9 \ubaa8\ud130\uc6a9 SiC \uae30\ubc18 \uac00\ubcc0 \uc8fc\ud30c\uc218 \ub4dc\ub77c\uc774\ube0c(VFD)\ub294 \ub354 \ub098\uc740 \uc81c\uc5b4\uc640 \uc5d0\ub108\uc9c0 \uc808\uac10\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ubb34\uc120 \uc8fc\ud30c\uc218(RF) \uc7a5\uce58:<\/strong>\n<ul>\n<li><strong>\ub808\uc774\ub354 \uc2dc\uc2a4\ud15c:<\/strong> SiC\uc758 \ub192\uc740 \uc804\ub825 \ubc00\ub3c4\uc640 \uc5f4 \uc804\ub3c4\uc131\uc740 \uad70\uc6a9 \ub808\uc774\ub354 \ubc0f \ud1b5\uc2e0 \uc2dc\uc2a4\ud15c\uc758 \uace0\uc804\ub825 RF \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\ubb34\uc120 \ud1b5\uc2e0:<\/strong> \uae30\uc9c0\uad6d \uc99d\ud3ed\uae30 \ubc0f \uae30\ud0c0 RF \uad6c\uc131 \uc694\uc18c\ub294 \uace0\uc8fc\ud30c\uc218\uc5d0\uc11c SiC\uc758 \uc131\ub2a5\uc744 \ud65c\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uace0\uc628 \uc804\uc790 \uc81c\ud488:<\/strong>\n<ul>\n<li><strong>\ud56d\uacf5\uc6b0\uc8fc \ubc0f \ubc29\uc704:<\/strong> \uadf9\ud55c\uc758 \uc628\ub3c4 \ud658\uacbd\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \ud56d\uacf5\uae30 \ubc0f \ubc29\uc704 \uc2dc\uc2a4\ud15c\uc758 \uc5d4\uc9c4 \uc81c\uc5b4, \uc561\ucd94\uc5d0\uc774\ud130 \ubc0f \uc13c\uc11c.<\/li>\n<li><strong>\uc11d\uc720 \ubc0f \uac00\uc2a4 \ud0d0\uc0ac:<\/strong> \ub2e4\uc6b4\ud640 \uc2dc\ucd94 \uc7a5\ube44\uc640 \uc13c\uc11c\uc5d0\ub294 \uace0\uc628\uacfc \uace0\uc555\uc744 \uacac\ub51c \uc218 \uc788\ub294 \uc804\uc790 \uc7a5\uce58\uac00 \ud544\uc694\ud558\uba70, SiC\uac00 \ud0c1\uc6d4\ud55c \uc131\ub2a5\uc744 \ubc1c\ud718\ud558\ub294 \ubd84\uc57c\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc790\ub3d9\ucc28(\ud30c\uc6cc\ud2b8\ub808\uc778 \uadf8 \uc774\uc0c1):<\/strong> \uc804\uae30\ucc28\uac00 \uc8fc\uc694 \ub3d9\ub825\uc774\uc9c0\ub9cc, SiC\ub294 \uac15\ub825\ud55c \uc804\ub825 \uad00\ub9ac\uac00 \ud544\uc694\ud55c \ub2e4\ub978 \uc790\ub3d9\ucc28 \uc2dc\uc2a4\ud15c\uc5d0\uc11c\ub3c4 \uc0ac\uc6a9\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc0b0\uc5c5\uc6a9 \ub09c\ubc29 \ubc0f \uc6a9\uc811:<\/strong> \uace0\ucd9c\ub825 SiC \uc7a5\uce58\ub294 \uc720\ub3c4 \uac00\uc5f4 \uc2dc\uc2a4\ud15c\uacfc \uace0\uae09 \uc6a9\uc811 \uc7a5\ube44\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>LED \uc870\uba85:<\/strong> LED \uc790\uccb4\ub294 GaN-on-SiC \ub610\ub294 \uae30\ud0c0 \uc18c\uc7ac\ub97c \uc0ac\uc6a9\ud558\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc9c0\ub9cc, \uace0\uc804\ub825 LED \uc2dc\uc2a4\ud15c\uc6a9 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58 \ubc0f \ub4dc\ub77c\uc774\ubc84\ub294 \ud6a8\uc728\uc131\uacfc \uc218\uba85\uc744 \uac1c\uc120\ud558\uae30 \uc704\ud574 SiC \ubd80\ud488\uc758 \uc774\uc810\uc744 \ud65c\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\ub2e4\uc74c \ud45c\uc5d0\ub294 \uba87 \uac00\uc9c0 \uc8fc\uc694 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uacfc \ud65c\uc6a9\ub41c SiC\uc758 \uc774\uc810\uc774 \uc694\uc57d\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4:<\/p>\n<table>\n<thead>\n<tr>\n<th>\uc751\uc6a9 \ubd84\uc57c<\/th>\n<th>\uad6c\uccb4\uc801\uc778 \uc0ac\uc6a9 \uc0ac\ub840<\/th>\n<th>SiC\uc758 \uc8fc\uc694 \uc774\uc810 \ud65c\uc6a9<\/th>\n<th>\uc81c\uc870\uc5c5\uccb4\ub97c \uc704\ud55c \uc774\uc810<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc804\ub825 \uc804\uc790<\/td>\n<td>EV \ud2b8\ub799\uc158 \uc778\ubc84\ud130, \uc628\ubcf4\ub4dc \ucda9\uc804\uae30<\/td>\n<td>\uace0\ud6a8\uc728, \uace0\ucd9c\ub825 \ubc00\ub3c4, \uace0\uc628 \uc791\ub3d9<\/td>\n<td>\uc790\ub3d9\ucc28, \uc7ac\uc0dd \uc5d0\ub108\uc9c0<\/td>\n<\/tr>\n<tr>\n<td>\uc804\ub825 \uc804\uc790<\/td>\n<td>\ud0dc\uc591\uad11 \uc778\ubc84\ud130, \ud48d\ub825 \ud130\ube48 \ucee8\ubc84\ud130<\/td>\n<td>\uace0\ud6a8\uc728, \ub0c9\uac01 \ud544\uc694\uc131 \uac10\uc18c, \uc218\uba85 \uc5f0\uc7a5<\/td>\n<td>\uc7ac\uc0dd \uc5d0\ub108\uc9c0<\/td>\n<\/tr>\n<tr>\n<td>\uc804\ub825 \uc804\uc790<\/td>\n<td>\uc0b0\uc5c5\uc6a9 \ubaa8\ud130 \ub4dc\ub77c\uc774\ube0c<\/td>\n<td>\uc5d0\ub108\uc9c0 \uc808\uc57d, \uc815\ubc00\ud55c \uc81c\uc5b4, \uacac\uace0\ud568<\/td>\n<td>\uc0b0\uc5c5 \uc81c\uc870<\/td>\n<\/tr>\n<tr>\n<td>RF \ub514\ubc14\uc774\uc2a4<\/td>\n<td>\ub808\uc774\ub354 \uc2dc\uc2a4\ud15c, \uae30\uc9c0\uad6d \uc99d\ud3ed\uae30<\/td>\n<td>\uace0\ucd9c\ub825, \uace0\uc8fc\ud30c, \uc5f4 \uc548\uc815\uc131<\/td>\n<td>\ud56d\uacf5\uc6b0\uc8fc, \ubc29\uc704, \ud1b5\uc2e0<\/td>\n<\/tr>\n<tr>\n<td>\uace0\uc628 \uc804\uc790 \uc81c\ud488<\/td>\n<td>\ub2e4\uc6b4\ud640 \ub4dc\ub9b4\ub9c1 \uc13c\uc11c, \uc5d4\uc9c4 \ucee8\ud2b8\ub864<\/td>\n<td>\ub192\uc740 \uc791\ub3d9 \uc628\ub3c4, \ubc29\uc0ac\uc120 \uacbd\ub3c4<\/td>\n<td>\uc11d\uc720 \ubc0f \uac00\uc2a4, \ud56d\uacf5\uc6b0\uc8fc, \uc6d0\uc790\ub825 \uc5d0\ub108\uc9c0<\/td>\n<\/tr>\n<tr>\n<td>\ubc18\ub3c4\uccb4 \uc81c\uc870<\/td>\n<td>\uc6e8\uc774\ud37c \ucc99, \uc11c\uc149\ud130, \ub9c1<\/td>\n<td>\uace0\uc21c\ub3c4, \uc5f4 \uade0\uc77c\uc131, \ud654\ud559\uc801 \ubd88\ud65c\uc131, \ub0b4\uad6c\uc131<\/td>\n<td>\ubc18\ub3c4\uccb4<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\uc774\ub7ec\ud55c \ub2e4\uc591\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ud658\uacbd\uc740 \uc218\ub9ce\uc740 \ucca8\ub2e8 \uc0b0\uc5c5\uc5d0\uc11c \ud604\ub300 \uc804\uc790\uc81c\ud488\uc744 \ubc1c\uc804\uc2dc\ud0a4\ub294 \ub370 \uc788\uc5b4 SiC\uc758 \ub2e4\uc7ac\ub2e4\ub2a5\ud568\uacfc \uc911\uc694\ud55c \uc5ed\ud560\uc744 \uac15\uc870\ud569\ub2c8\ub2e4.<\/p>\n<h2>\uc7ac\ub8cc \ud2b9\uc131: \ubc18\ub3c4\uccb4 \uc21c\ub3c4\ub97c \uc704\ud55c SiC \ub4f1\uae09<\/h2>\n<p>\ud2b9\ud788 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc758 \uae4c\ub2e4\ub85c\uc6b4 \uc694\uac74\uacfc \uad00\ub828\ud558\uc5ec \ubaa8\ub4e0 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uac00 \ub611\uac19\uc774 \ub9cc\ub4e4\uc5b4\uc9c0\ub294 \uac83\uc740 \uc544\ub2d9\ub2c8\ub2e4. SiC\uc758 \ud2b9\uc815 \uacb0\uc815 \uad6c\uc870(\ud3f4\ub9ac\ud0c0\uc785)\uc640 \uc21c\ub3c4 \uc218\uc900\uc740 \ub2e4\uc591\ud55c \ubc18\ub3c4\uccb4 \uc751\uc6a9 \ubd84\uc57c\uc5d0 \ub300\ud55c \uc801\ud569\uc131\uc744 \uacb0\uc815\ud558\ub294 \uc911\uc694\ud55c \uc694\uc18c\uc785\ub2c8\ub2e4. \uc870\ub2ec \uad00\ub9ac\uc790\uc640 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uc774\ub7ec\ud55c \ucc28\uc774\uc810\uc744 \uc774\ud574\ud558\ub294 \uac83\uc774 \uc62c\ubc14\ub978 \uc18c\uc7ac\ub97c \uc870\ub2ec\ud558\ub294 \ub370 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p>\ubc18\ub3c4\uccb4 \uc7a5\uce58\uc640 \uad00\ub828\ub41c \uc8fc\uc694 SiC \ud3f4\ub9ac\ud0c0\uc785\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>4H-SiC:<\/strong> \ub2e4\ub978 \ud3f4\ub9ac\ud0c0\uc785\uc5d0 \ube44\ud574 \ub354 \ub192\uc740 \uc804\uc790 \uc774\ub3d9\ub3c4\uc640 \ub4f1\ubc29\uc131 \ud2b9\uc131 \ub4f1 \uc6b0\uc218\ud55c \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \ud604\uc7ac \uc804\ub825 \uc804\uc790 \ub514\ubc14\uc774\uc2a4\uc5d0\uc11c \uac00\uc7a5 \ub9ce\uc774 \uc0ac\uc6a9\ub418\ub294 \ud3f4\ub9ac\ud0c0\uc785\uc785\ub2c8\ub2e4. \uc774\ub294 \uc628\uc800\ud56d\uc774 \ub0ae\uace0 \uc804\ubc18\uc801\uc778 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc774 \ud5a5\uc0c1\ub41c\ub2e4\ub294 \uc758\ubbf8\ub85c \ud574\uc11d\ub429\ub2c8\ub2e4. \uace0\uc804\uc555 MOSFET\uacfc \uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc\uc5d0 \uc8fc\ub85c \uc0ac\uc6a9\ub418\ub294 \uc18c\uc7ac\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>6H-SiC:<\/strong> \uc5ed\uc0ac\uc801\uc73c\ub85c 6H-SiC\ub294 \ub354 \uc77c\ubc18\uc801\uc774\uace0 \uace0\ud488\uc9c8\ub85c \uc131\uc7a5\ud558\uae30\uac00 \ub354 \uc26c\uc6e0\uc2b5\ub2c8\ub2e4. 4H-SiC\ubcf4\ub2e4 \uc804\uc790 \uc774\ub3d9\ub3c4\uac00 \ub0ae\uc9c0\ub9cc, \ud2b9\uc815 \uace0\uc8fc\ud30c \uc7a5\uce58\uc640 GaN \uc5d0\ud53c\ud0dd\uc2dc \uae30\ud310 \ub4f1 \uc77c\ubd80 \ud2b9\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc5ec\uc804\ud788 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>3C-SiC(\uc785\ubc29 SiC):<\/strong> \uc774 \ud3f4\ub9ac\ud0c0\uc785\uc740 SiC \ud3f4\ub9ac\ud0c0\uc785 \uc911 \uc804\uc790 \uc774\ub3d9\ub3c4\uac00 \uac00\uc7a5 \ub192\uc73c\uba70 \uc774\ub860\uc801\uc73c\ub85c \uc2e4\ub9ac\ucf58 \uae30\ud310\uc5d0\uc11c \uc131\uc7a5\ud560 \uc218 \uc788\uc5b4 \uc7a0\uc7ac\uc801\uc73c\ub85c \ube44\uc6a9\uc744 \uc808\uac10\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ub300\ud615 Si \uc6e8\uc774\ud37c\uc5d0\uc11c \uace0\ud488\uc9c8\uc758 \uacb0\ud568 \uc5c6\ub294 3C-SiC\ub97c \ub2ec\uc131\ud558\ub294 \uac83\uc740 \uc5ec\uc804\ud788 \uc911\uc694\ud55c \uacfc\uc81c\ub85c \ub0a8\uc544 \uc788\uc5b4 \uc8fc\ub958 \uc804\ub825 \uc7a5\uce58\uc5d0 \ub300\ud55c \uc0c1\uc5c5\uc801 \ucc44\ud0dd\uc744 \uc81c\ud55c\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub860\uc801\uc73c\ub85c \uc720\ub9dd\ud55c \uc7a5\uc810\uc73c\ub85c \uc778\ud574 \uc5f0\uad6c\ub294 \uacc4\uc18d\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\ud3f4\ub9ac\ud0c0\uc785 \uc678\uc5d0\ub3c4 \uc21c\ub3c4\uac00 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4. \ud2b9\ud788 \uae30\ud310\uacfc \uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ubc18\ub3c4\uccb4 \ub4f1\uae09 SiC\ub294 \ub9e4\uc6b0 \ub192\uc740 \uc21c\ub3c4(\ub300\uac1c 99.999% \uc774\uc0c1)\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc624\uc5fc \ubb3c\uc9c8\uc740 \uc6d0\uce58 \uc54a\ub294 \uc804\uc790 \uc0c1\ud0dc\ub97c \uc720\ubc1c\ud558\uace0 \uacb0\ud568 \ubc00\ub3c4\ub97c \ub192\uc774\uba70 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uacfc \uc2e0\ub8b0\uc131\uc744 \uc800\ud558\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubc8c\ud06c \uacb0\uc815 \uc131\uc7a5\uc744 \uc704\ud55c \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1(PVT)\uacfc \uc5d0\ud53c\ud0dd\uc2dc\ub97c \uc704\ud55c \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \ub4f1 \ubc18\ub3c4\uccb4 \ub4f1\uae09 SiC\uc758 \uc81c\uc870 \uacf5\uc815\uc740 \uc774\ub7ec\ud55c \uc21c\ub3c4 \uc218\uc900\uc744 \ub2ec\uc131\ud558\uae30 \uc704\ud574 \uc138\uc2ec\ud558\uac8c \uc81c\uc5b4\ub429\ub2c8\ub2e4.<\/p>\n<p>\ubc18\ub3c4\uccb4 \ub4f1\uae09 SiC\uc758 \uc8fc\uc694 \uace0\ub824 \uc0ac\ud56d\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\uacb0\uc815 \ud488\uc9c8 \ud3c9\uac00:<\/strong> \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504\ub294 \uc911\uacf5 \ucf54\uc5b4 \ub098\uc0ac \uc774\ud0c8\ub85c SiC \ub514\ubc14\uc774\uc2a4\uc5d0\uc11c \uce58\uba85\uc801\uc778 \uacb0\ud568\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub300\uba74\uc801 \ub514\ubc14\uc774\uc2a4\uc758 \uace0\uc218\uc728 \uc81c\uc870\ub97c \uc704\ud574\uc11c\ub294 \ub0ae\uc740 MPD(\uc774\uc0c1\uc801\uc73c\ub85c\ub294 0)\uac00 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uae30\uc800\uba74 \ud0c8\uad6c(BPD) \ubc00\ub3c4:<\/strong> BPD\ub294 SiC \ub514\ubc14\uc774\uc2a4\uc5d0\uc11c \uc591\uadf9\uc131 \uc131\ub2a5 \uc800\ud558\ub97c \uc77c\uc73c\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc0c1\ub2f9\ud55c R&amp;D \ub178\ub825\uc774 SiC \uae30\ud310\uacfc \uc5d0\ud53c\ub808\uc774\uc5b4\uc5d0\uc11c BPD \ubc00\ub3c4\ub97c \uc904\uc774\ub294 \ub370 \uc9d1\uc911\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc81c\uc791 \ub77c\uc778 \uae30\ub2a5 \ubc0f \uc7a5\uce58 \uae30\uacc4\uc801\/\uc5f4\uc801 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\ucda5\ub2c8\ub2e4.<\/strong> \ud6c4\uc18d \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uacfc \ub514\ubc14\uc774\uc2a4 \uc81c\uc791\uc744 \uc704\ud574\uc11c\ub294 \ud45c\uba74 \uc190\uc0c1\uc744 \ucd5c\uc18c\ud654\ud55c \uc6d0\uc790\uc801\uc73c\ub85c \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc774\ub97c \uc704\ud574\uc11c\ub294 \uc815\ubc00\ud55c \uc5f0\ub9c8 \ubc0f \uc138\uc815 \uae30\uc220\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ub3c4\ud551 \uade0\uc77c\uc131:<\/strong> \uc804\ub3c4\uc131 SiC \uae30\ud310\uacfc \uc5d0\ud53c\ub808\uc774\uc5b4\uc758 \uacbd\uc6b0, \uc77c\uad00\ub41c \uc18c\uc790 \ud2b9\uc131\uc744 \uc704\ud574\uc11c\ub294 \ub3c4\ud380\ud2b8(n\ud615\uc758 \uacbd\uc6b0 \uc9c8\uc18c, p\ud615\uc758 \uacbd\uc6b0 \uc54c\ub8e8\ubbf8\ub284 \ub4f1)\uc758 \uade0\uc77c\ud55c \ubd84\ud3ec\uac00 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uae30\uc220 \uad6c\ub9e4\uc790\ub294 SiC \uacf5\uae09\uc5c5\uccb4\uac00 \ub300\uc0c1 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud544\uc694\ud55c \ud2b9\uc815 \ud3f4\ub9ac\ud0c0\uc785, \uc21c\ub3c4 \ubc0f \uacb0\ud568 \ud2b9\uc131\uc744 \uac16\ucd98 \uc18c\uc7ac\ub97c \uc81c\uacf5\ud560 \uc218 \uc788\ub294\uc9c0 \ud655\uc778\ud574\uc57c \ud569\ub2c8\ub2e4. \uc774\ub97c \uc704\ud574\uc11c\ub294 \uc0c1\uc138\ud55c \uc7ac\ub8cc \uc0ac\uc591\uc11c \ubc0f \ud488\uc9c8 \uc778\uc99d\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<h2>\uc81c\uc870 \uc7a5\uc560\ubb3c \uadf9\ubcf5\ud558\uae30: SiC \uc6e8\uc774\ud37c \uc0dd\uc0b0<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uac00 \uc6d0\uc790\uc7ac\uc5d0\uc11c \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c\ub85c \uc644\uc131\ub418\uae30\uae4c\uc9c0\uc758 \uc5ec\uc815\uc740 \uae30\uc220\uc801 \ub09c\uc81c\ub85c \uac00\ub4dd \ucc28 \uc788\uc2b5\ub2c8\ub2e4. SiC\uc758 \ud2b9\uc131\uc740 \ub9e4\uc6b0 \ubc14\ub78c\uc9c1\ud558\uc9c0\ub9cc, \uace0\uc720\uc758 \uacbd\ub3c4\uc640 \ud654\ud559\uc801 \uc548\uc815\uc131\uc73c\ub85c \uc778\ud574 \uae30\uc874 \uc2e4\ub9ac\ucf58\ubcf4\ub2e4 \uacf5\uc815\uc774 \ud6e8\uc52c \ub354 \ubcf5\uc7a1\ud558\uace0 \ube44\uc6a9\uc774 \ub9ce\uc774 \ub4ed\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc7a5\uc560\ubb3c\uc744 \uc774\ud574\ud558\ub294 \uac83\uc740 \uace0\ud488\uc9c8 SiC \uc6e8\uc774\ud37c\uc758 \uac00\uce58\uc640 \ub9ac\ub4dc \ud0c0\uc784\uc744 \ud3c9\uac00\ud558\ub294 \ub370 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p>\uc8fc\uc694 \uc81c\uc870 \uacfc\uc81c\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\uc218\uc815 \uc131\uc7a5(\ubd80\uc6b8 \uc0dd\uc0b0):<\/strong>\n<ul>\n<li><strong>\uace0\uc628:<\/strong> SiC\ub294 \ub300\uae30\uc555\uc5d0\uc11c \ub179\uc9c0 \uc54a\uace0 \uc2b9\ud654\ub418\uae30 \ub54c\ubb38\uc5d0 2000\u00b0C \uc774\uc0c1\uc758 \uc131\uc7a5 \uc628\ub3c4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4(\uc77c\ubc18\uc801\uc73c\ub85c \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1 &amp;8211; PVT\ub97c \ud1b5\ud574). \uc548\uc815\uc801\uc774\uace0 \uade0\uc77c\ud55c \uace0\uc628\uc744 \uc720\uc9c0\ud558\ub294 \uac83\uc740 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\uc758 \uc8fc\uc694 \uacfc\uc81c\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\uacb0\ud568 \uc81c\uc5b4:<\/strong> \ubd88 \uc131\uc7a5 \uc911 \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504, \ub098\uc0ac \uc804\uc704, \uc801\uce35 \uacb0\ud568\uacfc \uac19\uc740 \uacb0\uc815\ud559\uc801 \uacb0\ud568\uc744 \uc81c\uc5b4\ud558\ub294 \uac83\uc740 \ub9e4\uc6b0 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uacb0\ud568\uc740 \ub514\ubc14\uc774\uc2a4 \uc218\uc728\uacfc \uc131\ub2a5\uc5d0 \uc2ec\uac01\ud55c \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ub290\ub9b0 \uc131\uc7a5\ub960:<\/strong> SiC \uacb0\uc815 \uc131\uc7a5\uc740 \ub290\ub9b0 \uacf5\uc815\uc73c\ub85c \ucc98\ub9ac\ub7c9\uc744 \uc81c\ud55c\ud558\uace0 \ube44\uc6a9 \uc0c1\uc2b9\uc758 \uc6d0\uc778\uc774 \ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\ub3c4\ud310\ud2b8 \uc778\ucf54\ud37c\ub808\uc774\uc158:<\/strong> \uc131\uc7a5 \uacfc\uc815\uc5d0\uc11c \uade0\uc77c\ud558\uace0 \uc81c\uc5b4\ub41c \ub3c4\ud551(n\ud615 \ub610\ub294 p\ud615)\uc744 \ub2ec\uc131\ud558\ub294 \uac83\uc740 \uace0\uc628\uc774 \uc218\ubc18\ub418\uae30 \ub54c\ubb38\uc5d0 \ubcf5\uc7a1\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc6e8\uc774\ud37c \uc2ac\ub77c\uc774\uc2f1 \ubc0f \uc131\ud615:<\/strong>\n<ul>\n<li><strong>\uacbd\ub3c4:<\/strong> SiC\ub294 \uac00\uc7a5 \ub2e8\ub2e8\ud55c \ud569\uc131 \uc18c\uc7ac \uc911 \ud558\ub098\uc774\uae30 \ub54c\ubb38\uc5d0(\ubaa8\uc2a4 \uacbd\ub3c4 9.0~9.5) \uc6e8\uc774\ud37c\ub85c \ubd88\uc744 \uc2ac\ub77c\uc774\uc2a4\ud55c \ud6c4 \ubaa8\uc591\uc744 \ub9cc\ub4e4\uae30\uac00 \ub9e4\uc6b0 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \ub2e4\uc774\uc544\ubaac\ub4dc\uac00 \ud568\uce68\ub41c \uc640\uc774\uc5b4 \ud1b1\uacfc \uc5f0\uc0ad \uacf5\uad6c\uac00 \ud544\uc694\ud558\uc9c0\ub9cc, \uc774\ub294 \ube68\ub9ac \ub9c8\ubaa8\ub418\uc5b4 \ube44\uc6a9\uc774 \uc99d\uac00\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc7ac\ub8cc \ub0ad\ube44:<\/strong> \uc2ac\ub77c\uc774\uc2a4 \ubc0f \uc5f0\uc0ad \uacf5\uc815\uc740 \uc0c1\ub2f9\ud55c \uc7ac\ub8cc \uc190\uc2e4(\ucee4\ud504 \uc190\uc2e4)\uc744 \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ud3f4\ub9ac\uc2f1 \ubc0f \ud3c9\ud0c4\ud654:<\/strong>\n<ul>\n<li><strong>\uc6d0\uc790\ucc98\ub7fc \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74 \uad6c\ud604\ud558\uae30:<\/strong> \uc5d0\ud53c\ud0dd\uc2dc\uc5d0 \ud544\uc694\ud55c \uc190\uc0c1 \uc5c6\ub294 \uc6d0\uc790\uc801\uc73c\ub85c \ud3c9\ud3c9\ud55c \ud45c\uba74\uc744 \ub9cc\ub4dc\ub294 \uac83\uc740 \uae30\uacc4\uc801 \uc5f0\ub9c8, \ub798\ud551, \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP)\ub97c \ud3ec\ud568\ud558\ub294 \ub2e4\ub2e8\uacc4 \uacf5\uc815\uc785\ub2c8\ub2e4. \uac01 \ub2e8\uacc4\ub294 \uc774\uc804 \ub2e8\uacc4\uc5d0\uc11c \ubc1c\uc0dd\ud55c \ud45c\uba74 \uc190\uc0c1\uc744 \uc81c\uac70\ud558\uae30 \uc704\ud574 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ud45c\uba74 \uac70\uce60\uae30:<\/strong> \ub300\uc0c1 \ud45c\uba74 \uac70\uce60\uae30\ub294 \ub300\uac1c \uc639\uc2a4\ud2b8\ub86c \ubc94\uc704(\uc608: &lt;0.5nm RMS)\uc5d0 \uc18d\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5:<\/strong>\n<ul>\n<li><strong>\uace0\ud488\uc9c8 \ub808\uc774\uc5b4:<\/strong> \ub514\ubc14\uc774\uc2a4 \uc81c\uc791\uc744 \uc704\ud574\uc11c\ub294 SiC \uae30\ud310 \uc704\uc5d0 \uacb0\ud568 \ubc00\ub3c4\uac00 \ub0ae\uc740 \uc587\uace0 \uc815\ubc00\ud558\uac8c \ub3c4\ud551\ub41c SiC \uc5d0\ud53c\ud0dd\uc15c \uce35\uc744 \uc131\uc7a5(\uc77c\ubc18\uc801\uc73c\ub85c \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29\ubc95(CVD)\uc744 \ud1b5\ud574)\uc2dc\ud0a4\ub294 \uac83\uc774 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ub300\ud615 \uc6e8\uc774\ud37c\uc5d0\uc11c \ud654\ud559\ub7c9\ub860\uacfc \uade0\uc77c\uc131\uc744 \uc720\uc9c0\ud558\ub294 \uac83\uc740 \uc5b4\ub824\uc6b4 \uc77c\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\ub4dc\ub9ac\ud504\ud2b8 \ub808\uc774\uc5b4 \ub450\uaed8 \ubc0f \ub3c4\ud551 \uc81c\uc5b4:<\/strong> \uc804\ub825 \ub514\ubc14\uc774\uc2a4\uc758 \uacbd\uc6b0 \uc6d0\ud558\ub294 \ud56d\ubcf5 \uc804\uc555\uacfc \uc628\uc800\ud56d\uc744 \ub2ec\uc131\ud558\ub824\uba74 \ub4dc\ub9ac\ud504\ud2b8 \uce35\uc758 \ub450\uaed8\uc640 \ub3c4\ud551 \ub18d\ub3c4\ub97c \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ube44\uc6a9:<\/strong> \ubcf5\uc7a1\ud55c \uacf5\uc815, \ud2b9\uc218 \uc7a5\ube44, \ub192\uc740 \uc5d0\ub108\uc9c0 \uc18c\ube44, \ub290\ub9b0 \uc131\uc7a5\ub960, \uc7ac\ub8cc \uacbd\ub3c4\uc758 \uc870\ud569\uc73c\ub85c \uc778\ud574 SiC \uc6e8\uc774\ud37c\ub294 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ubcf4\ub2e4 \ud6e8\uc52c \ub354 \ube44\uc309\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \uc9c0\uc18d\uc801\uc778 R&amp;D\uc640 \uaddc\ubaa8\uc758 \uacbd\uc81c\ub85c \uc778\ud574 \uc774\ub7ec\ud55c \ube44\uc6a9\uc774 \uc810\ucc28 \uc904\uc5b4\ub4e4\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uc774\ub7ec\ud55c \uacfc\uc81c\ub97c \uadf9\ubcf5\ud558\ub824\uba74 \uc7ac\ub8cc \uacfc\ud559, \uacb0\uc815 \uc131\uc7a5, \uc815\ubc00 \uae30\uacc4 \ubc0f \ud654\ud559 \uacf5\uc815\uc5d0 \ub300\ud55c \uc0c1\ub2f9\ud55c \uc804\ubb38 \uc9c0\uc2dd\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. SiC \uc6e8\uc774\ud37c \uc0dd\uc0b0 \uc804\ubb38 \uae30\uc5c5\ub4e4\uc740 \uacb0\uc815 \ud488\uc9c8 \uac1c\uc120, \uc6e8\uc774\ud37c \uc9c1\uacbd \uc99d\uac00(\ud604\uc7ac 200mm\ub97c \ud5a5\ud574 \ub098\uc544\uac00\uace0 \uc788\uc74c), \uacb0\ud568 \ubc00\ub3c4 \uac10\uc18c, \uc81c\uc870 \ube44\uc6a9 \uc808\uac10\uc744 \uc704\ud574 R&amp;D\uc5d0 \ub9c9\ub300\ud55c \ud22c\uc790\ub97c \ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uae30\uc220 \uad6c\ub9e4\uc790\uc758 \uacbd\uc6b0 \uc774\ub7ec\ud55c \uc81c\uc870 \ubcf5\uc7a1\uc131\uc744 \ud574\uacb0\ud558\ub294 \ub370 \uc788\uc5b4 \uac15\ub825\ud55c \uc2e4\uc801\uc744 \ubcf4\uc720\ud55c \uacf5\uae09\uc5c5\uccb4\uc640 \ud611\ub825\ud558\ub294 \uac83\uc774 \uace0\ud488\uc9c8 \uc6e8\uc774\ud37c\uc758 \uc548\uc815\uc801\uc778 \uacf5\uae09\uc744 \ubcf4\uc7a5\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h2>SiC\ub85c \ucc28\uc138\ub300 \ubc18\ub3c4\uccb4 \ub514\ubc14\uc774\uc2a4 \uc124\uacc4\ud558\uae30<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub85c\uc758 \uc804\ud658\uc740 \ubc18\ub3c4\uccb4 \ub514\ubc14\uc774\uc2a4 \uc124\uacc4\uc758 \uc0c8\ub85c\uc6b4 \uc9c0\ud3c9\uc744 \uc5f4\uc5b4 \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \uc2e4\ub9ac\ucf58\uc758 \uc131\ub2a5 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\ub294 \ubd80\ud488\uc744 \ub9cc\ub4e4 \uc218 \uc788\uac8c \ud574\uc90d\ub2c8\ub2e4. \uadf8\ub7ec\ub098 SiC\uc758 \uace0\uc720\ud55c \ud2b9\uc131\uc744 \ud6a8\uacfc\uc801\uc73c\ub85c \ud65c\uc6a9\ud558\ub824\uba74 \uc124\uacc4 \ub2e8\uacc4\uc5d0\uc11c \uc2e0\uc911\ud55c \uace0\ub824\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc5d4\uc9c0\ub2c8\uc5b4\ub294 SiC\uc758 \uc7a5\uc810\uacfc \ud2b9\uc815 \ud2b9\uc131\uc744 \ubaa8\ub450 \uace0\ub824\ud558\uc5ec \uc811\uadfc \ubc29\uc2dd\uc744 \uc870\uc815\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p>SiC \uae30\ubc18 \ubc18\ub3c4\uccb4 \ub514\ubc14\uc774\uc2a4\uc758 \uc8fc\uc694 \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\uc5f4 \uad00\ub9ac \uc804\ub7b5:<\/strong>\n<ul>\n<li>SiC\ub294 \uc5f4 \uc804\ub3c4\uc131\uc774 \ub6f0\uc5b4\ub098\uc9c0\ub9cc, \ub2ec\uc131 \uac00\ub2a5\ud55c \uc804\ub825 \ubc00\ub3c4\uac00 \ub192\uae30 \ub54c\ubb38\uc5d0 \ud6a8\uacfc\uc801\uc778 \uc5f4 \ubc29\ucd9c\uc774 \uc5ec\uc804\ud788 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4. \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d\uc5d0\ub294 \ub2e4\uc774 \uc811\ucc29 \uc7ac\ub8cc, \uae30\ud310 \uc120\ud0dd, \uc804\uccb4 \ud328\ud0a4\uc9c0 \uc124\uacc4\uac00 \ud3ec\ud568\ub418\uc5b4 \ud65c\uc131 SiC \ub514\ubc14\uc774\uc2a4\ub85c\ubd80\ud130 \ud6a8\uc728\uc801\uc778 \uc5f4 \uacbd\ub85c\ub97c \ud655\ubcf4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li>\ub354 \ub192\uc740 \uc811\ud569 \uc628\ub3c4\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uae30\ub2a5\uc740 \ub0c9\uac01 \uc2dc\uc2a4\ud15c\uc744 \ub2e8\uc21c\ud654\ud560 \uc218 \uc788\uc9c0\ub9cc \uc804\uccb4 \ubaa8\ub4c8\uc758 \uc2e0\ub8b0\uc131 \ubc0f \uc218\uba85 \uacc4\uc0b0\uc744 \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ubc84 \uc124\uacc4(SiC MOSFET\uc6a9):<\/strong>\n<ul>\n<li>SiC MOSFET\uc740 \uc2e4\ub9ac\ucf58 IGBT \ub610\ub294 MOSFET\uc5d0 \ube44\ud574 \ub2e4\ub978 \uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ube0c \uc804\uc555 \ub808\ubca8(\uc608: \ucd5c\ub300 \ud5a5\uc0c1\uc744 \uc704\ud574 \ub354 \ub192\uc740 \uc591\uc758 \uc804\uc555, \ub54c\ub85c\ub294 \uac15\ub825\ud55c \ud134\uc624\ud504\ub97c \uc704\ud574 \uc74c\uc758 \uc804\uc555)\uc774 \ud544\uc694\ud55c \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4.<\/li>\n<li>SiC \ub514\ubc14\uc774\uc2a4\uc758 \uc2a4\uc704\uce6d \uc18d\ub3c4\uac00 \ube68\ub77c\uc9c0\ub824\uba74 \uae30\uc0dd \uc778\ub355\ud134\uc2a4\uac00 \ub0ae\uace0 \uac8c\uc774\ud2b8 \ucee4\ud328\uc2dc\ud134\uc2a4\ub97c \ube60\ub974\uac8c \ucda9\uc804 \ubc0f \ubc29\uc804\ud560 \uc218 \uc788\ub294 \ub192\uc740 \ud53c\ud06c \uc804\ub958\ub97c \uc81c\uacf5\ud560 \uc218 \uc788\ub294 \uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ubc84\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774\ub294 \uc2a4\uc704\uce6d \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4.<\/li>\n<li>\ubd88\ud3ec\ud654(Desat) \uac10\uc9c0 \ubc0f \ub2e8\ub77d \ubcf4\ud638\uc640 \uac19\uc740 \ubcf4\ud638 \uae30\ub2a5\uc740 SiC\uc758 \ud2b9\uc131\uc5d0 \ub9de\uac8c \ucd5c\uc801\ud654\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub808\uc774\uc544\uc6c3 \ubc0f \uae30\uc0dd \uad00\ub9ac:<\/strong>\n<ul>\n<li>SiC \ub514\ubc14\uc774\uc2a4\uc758 \ub192\uc740 \uc2a4\uc704\uce6d \uc18d\ub3c4(dV\/dt \ubc0f dI\/dt)\ub294 \ub514\ubc14\uc774\uc2a4 \ud328\ud0a4\uc9c0 \ubc0f \uc8fc\ubcc0 \ud68c\ub85c\uc758 \uae30\uc0dd \uc778\ub355\ud134\uc2a4 \ubc0f \ucee4\ud328\uc2dc\ud134\uc2a4 \ubb38\uc81c\ub97c \uc545\ud654\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub85c \uc778\ud574 \uc804\uc555 \uc624\ubc84\uc288\ud2b8, \ub9c1\uc789 \ubc0f EMI \ubb38\uc81c\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li>\uc2e0\uc911\ud55c \ub808\uc774\uc544\uc6c3, \ub8e8\ud504 \uc778\ub355\ud134\uc2a4 \ucd5c\uc18c\ud654, \uc801\uc808\ud55c \ub514\ucee4\ud50c\ub9c1 \ucee4\ud328\uc2dc\ud130 \uc0ac\uc6a9\uc740 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \uc9c1\uc811 \uacb0\ud569 \uad6c\ub9ac(DBC) \uae30\ud310 \ubc0f \ub2e4\uc911 \uce69 \ubaa8\ub4c8\uc744 \ud3ec\ud568\ud55c \uace0\uae09 \ud328\ud0a4\uc9d5 \uc194\ub8e8\uc158\uc774 \uc885\uc885 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc7a5\uce58 \ubcd1\ub82c\ud654:<\/strong>\n<ul>\n<li>\uace0\uc804\ub958 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uc5ec\ub7ec \uac1c\uc758 SiC \ub514\ubc14\uc774\uc2a4\ub97c \ubcd1\ub82c\ub85c \uc5f0\uacb0\ud574\uc57c \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. SiC MOSFET\uc758 \uc591\uc758 \uc628\uc800\ud56d \uacc4\uc218\ub294 \uc804\ub958 \uacf5\uc720\uc5d0 \ub3c4\uc6c0\uc774 \ub418\uc9c0\ub9cc, \uc5f4 \ud3ed\uc8fc\ub97c \ubc29\uc9c0\ud558\uace0 \uade0\ud615 \uc7a1\ud78c \uc804\ub958 \ubd84\ubc30\ub97c \ubcf4\uc7a5\ud558\ub824\uba74 \uc5ec\uc804\ud788 \uc2e0\uc911\ud55c \uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ube0c \uc124\uacc4\uc640 \ub300\uce6d \ub808\uc774\uc544\uc6c3\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ubcf8\uccb4 \ub2e4\uc774\uc624\ub4dc \ud2b9\uc131(SiC MOSFET):<\/strong>\n<ul>\n<li>SiC MOSFET\uc758 \uace0\uc720 \ubc14\ub514 \ub2e4\uc774\uc624\ub4dc\ub294 \uc2e4\ub9ac\ucf58 MOSFET \ubc14\ub514 \ub2e4\uc774\uc624\ub4dc\uc640\ub294 \ub2e4\ub978 \ud2b9\uc131\uc744 \uac00\uc9c0\uba70, \uc885\uc885 \ub354 \ub192\uc740 \uc21c\ubc29\ud5a5 \uc804\uc555 \uac15\ud558\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uc77c\ubd80 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud558\uc9c0\ub9cc \uc7a6\uc740 \ud504\ub9ac\ud720\ub9c1\uc774 \ud544\uc694\ud55c \ub2e4\ub978 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c\ub294 \ub354 \ub098\uc740 \uc131\ub2a5\uc744 \uc704\ud574 \uc678\ubd80 SiC \uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc\ub97c \uacf5\ub3d9 \ud328\ud0a4\uc9d5\ud558\uac70\ub098 \ubcd1\ub82c\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li>\ucd5c\uc2e0 \uc138\ub300\uc758 SiC MOSFET\uc740 \ud5a5\uc0c1\ub41c \ubc14\ub514 \ub2e4\uc774\uc624\ub4dc \uc131\ub2a5\uc744 \ud2b9\uc9d5\uc73c\ub85c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uace0\uc628 \uae30\ub2a5 \ud65c\uc6a9\ud558\uae30:<\/strong>\n<ul>\n<li>\uc124\uacc4\ub294 175\u00b0C \ub610\ub294 200\u00b0C \uc774\uc0c1\uc758 \uc811\ud569 \uc628\ub3c4\uc5d0\uc11c \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud558\ub294 SiC\uc758 \uae30\ub2a5\uc744 \ud65c\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \ub0c9\uac01 \uc2dc\uc2a4\ud15c\uc758 \ud06c\uae30\uc640 \ube44\uc6a9\uc744 \uc904\uc774\uac70\ub098 \ub354 \uc5f4\uc545\ud55c \uc8fc\ubcc0 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc791\ub3d9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc8fc\ubcc0 \uad6c\uc131 \uc694\uc18c\uc640 \ud3ec\uc7a5\uc7ac\ub3c4 \uc774\ub7ec\ud55c \uc628\ub3c4\uc5d0 \ub9de\ub294 \ub4f1\uae09\uc744 \ubc1b\uc544\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ube44\uc6a9 \ub300 \uc131\ub2a5 \uc808\ucda9:<\/strong>\n<ul>\n<li>SiC \ub514\ubc14\uc774\uc2a4\ub294 \uc6b0\uc218\ud55c \uc131\ub2a5\uc744 \uc81c\uacf5\ud558\uc9c0\ub9cc \uc77c\ubc18\uc801\uc73c\ub85c \uc2e4\ub9ac\ucf58 \ub514\ubc14\uc774\uc2a4\ubcf4\ub2e4 \ub354 \ube44\uc309\ub2c8\ub2e4. \uc124\uacc4\uc790\ub294 \ubd80\ud488 \ube44\uc6a9\uc744 \uc815\ub2f9\ud654\ud558\uae30 \uc704\ud574 \uc804\uccb4 \uc2dc\uc2a4\ud15c \uc218\uc900\uc758 \uc774\uc810(\uc608: \ub0c9\uac01 \uac10\uc18c, \ub354 \uc791\uc740 \uc218\ub3d9 \uc18c\uc790, \ub354 \ub192\uc740 \ud6a8\uc728\uc131)\uc744 \ud3c9\uac00\ud574\uc57c \ud569\ub2c8\ub2e4. \ub9ce\uc740 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc2dc\uc2a4\ud15c \uc218\uc900\uc758 \uc808\uac10 \ud6a8\uacfc\uac00 \ub514\ubc14\uc774\uc2a4 \ube44\uc6a9 \uc0c1\uc2b9\ubcf4\ub2e4 \ub354 \ud07d\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>SiC\ub85c \uc131\uacf5\uc801\uc73c\ub85c \uc124\uacc4\ud558\ub824\uba74 \ub514\ubc14\uc774\uc2a4, \ud328\ud0a4\uc9c0, \uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ubc84 \ubc0f \uc804\uccb4 \uc2dc\uc2a4\ud15c \ud1a0\ud3f4\ub85c\uc9c0 \uac04\uc758 \uc0c1\ud638 \uc791\uc6a9\uc744 \uace0\ub824\ud558\ub294 \uc804\uccb4\uc801\uc778 \uc811\uadfc \ubc29\uc2dd\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uacbd\ud5d8\uc774 \ud48d\ubd80\ud55c SiC \ubd80\ud488 \uc81c\uc870\uc5c5\uccb4\uc640 \ud611\ub825\ud558\uba74 \uc131\ub2a5\uacfc \uc548\uc815\uc131\uc744 \uadf9\ub300\ud654\ud558\uae30 \uc704\ud574 \uc124\uacc4\ub97c \ucd5c\uc801\ud654\ud558\ub294 \ub370 \uc720\uc6a9\ud55c \uc778\uc0ac\uc774\ud2b8\uc640 \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc9c0\uc6d0\uc744 \uc81c\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>\ubc18\ub3c4\uccb4\uc6a9 SiC\uc5d0\uc11c \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc758 \uc5ed\ud560<\/h2>\n<p>\ud45c\uc900 \uae30\uc131 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488\uc740 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \ub9ce\uc740 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uc9c0\ub9cc, \ucd5c\uc801\ud654\ub41c \uc131\ub2a5, \uace0\uc720\ud55c \ud3fc \ud329\ud130 \ubc0f \uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcc4 \ud2b9\uc131\uc744 \ucd94\uad6c\ud558\ub824\uba74 \ub9de\ucda4\ud615 SiC \uc194\ub8e8\uc158\uc774 \ud544\uc694\ud55c \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uc5d4\uc9c0\ub2c8\uc5b4\uc640 \uc124\uacc4\uc790\ub294 \ub9de\ucda4\ud654\ub97c \ud1b5\ud574 SiC \ud2b9\uc131\uacfc \ud615\uc0c1\uc744 \uc815\ud655\ud55c \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\uac8c \uc870\uc815\ud558\uc5ec \ud6a8\uc728\uc131\uacfc \uacbd\uc7c1 \uc6b0\uc704\ub97c \ub354\uc6b1 \ub192\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \ud2b9\ud788 \ud2b9\uc218 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44 \ubd80\ud488(\ucc99, \ub9c1, \uc11c\uc149\ud130)\uacfc \ucca8\ub2e8 \uc18c\uc790 \uae30\ud310 \ub610\ub294 \uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4\uc5d0 \ud574\ub2f9\ub429\ub2c8\ub2e4.<\/p>\n<p>\ubc18\ub3c4\uccb4 \ubd84\uc57c\uc5d0\uc11c \ub9de\ucda4\ud615 SiC \uc194\ub8e8\uc158\uc758 \uc774\uc810\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\ucd5c\uc801\ud654\ub41c \uc131\ub2a5:<\/strong> \ub9de\ucda4\ud615 \ub3c4\ud551 \ud504\ub85c\ud30c\uc77c, \ud2b9\uc815 \uacb0\uc815 \ubc29\ud5a5 \ub610\ub294 \uace0\uc720\ud55c \uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4 \uad6c\uc870\ub97c \uc124\uacc4\ud558\uc5ec \ud2b9\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \ud56d\ubcf5 \uc804\uc555, \uc628 \uc800\ud56d \ub610\ub294 \uc2a4\uc704\uce6d \uc18d\ub3c4\uc640 \uac19\uc740 \ub514\ubc14\uc774\uc2a4 \ud2b9\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud2b9\uc815 \uc9c0\uc624\uba54\ud2b8\ub9ac \ubc0f \ud3fc \ud329\ud130:<\/strong> \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\ub294 SiC \uc11c\uc149\ud130, \uc6e8\uc774\ud37c \ucc99 \ub610\ub294 \uc5d0\uc9c0 \ub9c1\uacfc \uac19\uc740 \ubd80\ud488\uc774 \uc815\ud655\ud55c \uce58\uc218\uc5d0 \ub9de\uc544\uc57c \ud558\ub294 \ubcf5\uc7a1\ud55c \uc7a5\ube44\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4. \ub9de\ucda4\ud615 \uc81c\uc791\uc740 \uc644\ubcbd\ud55c \ud1b5\ud569\uacfc \ucd5c\uc801\uc758 \uc5f4 \ub610\ub294 \ud50c\ub77c\uc988\ub9c8 \uade0\uc77c\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ud5a5\uc0c1\ub41c \uc5f4 \uad00\ub9ac:<\/strong> \ub9de\ucda4\ud615 SiC \ud788\ud2b8 \uc2a4\ud504\ub808\ub354 \ub610\ub294 \uae30\ud310\uc740 \ud2b9\uc815 \ub450\uaed8\uc640 \ud45c\uba74 \ub9c8\uac10\uc73c\ub85c \uc124\uacc4\ud558\uc5ec \uace0\uc804\ub825 \ubaa8\ub4c8\uc758 \uc5f4 \ubc29\ucd9c\uc744 \uadf9\ub300\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ub2e4\ub978 \uc7ac\ub8cc\uc640\uc758 \ud1b5\ud569:<\/strong> \ub9de\ucda4\ud615 SiC \ubd80\ud488\uc740 \ub2e4\ub978 \uc7ac\ub8cc\uc640\uc758 \uacb0\ud569 \ub610\ub294 \ud1b5\ud569\uc744 \uc704\ud574 \uc124\uacc4\ud560 \uc218 \uc788\uc5b4 \ubcf5\uc7a1\ud55c \ubaa8\ub4c8 \uc5b4\uc148\ube14\ub9ac\ub97c \uc6a9\uc774\ud558\uac8c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc7ac\ub8cc \uc21c\ub3c4 \ub610\ub294 \ud2b9\uc815 \ub4f1\uae09 \ud5a5\uc0c1:<\/strong> \uc77c\ubd80 \ucca8\ub2e8 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\ub294 \ub354 \ub192\uc740 \uc21c\ub3c4 \uc218\uc900\uc774\ub098 \uc77c\ubc18\uc801\uc73c\ub85c \ud45c\uc900 \uc81c\ud488\uc73c\ub85c \uc81c\uacf5\ub418\uc9c0 \uc54a\ub294 \ud2b9\uc815 SiC \ud3f4\ub9ac\ud0c0\uc785\uc774 \ud544\uc694\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub9de\ucda4\ud615 \uc0dd\uc0b0\uc740 \uc774\ub7ec\ud55c \ud2c8\uc0c8 \uc694\uad6c \uc0ac\ud56d\uc744 \ud574\uacb0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\ub9de\ucda4\ud615 \uc194\ub8e8\uc158\uc5d0 \ub300\ud55c \uc218\uc694\uac00 \uc99d\uac00\ud568\uc5d0 \ub530\ub77c \uc804\ubb38 \uacf5\uae09\uc5c5\uccb4\uac00 \ub4f1\uc7a5\ud588\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc804\ubb38\uc131\uc744 \uc704\ud55c \uc911\uc694\ud55c \uae00\ub85c\ubc8c \ud5c8\ube0c\ub294 \ub2e4\uc591\ud55c \uaddc\ubaa8\uc758 40\uac1c \uc774\uc0c1\uc758 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc0dd\uc0b0 \uae30\uc5c5\uc774 \uc788\ub294 \uc911\uad6d \uc6e8\uc774\ud321\uc2dc\uc5d0 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uae30\uc5c5\ub4e4\uc740 \uc911\uad6d \uc804\uccb4 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc0dd\uc0b0\ub7c9\uc758 80% \uc774\uc0c1\uc744 \ucd1d\uccb4\uc801\uc73c\ub85c \ucc28\uc9c0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uc5ed\ub3d9\uc801\uc778 \uc0dd\ud0dc\uacc4\uc5d0\uc11c \uc2dc\uce74\ube0c \ud14c\ud06c\ub294 \ub450\uac01\uc744 \ub098\ud0c0\ub0b4\uace0 \uc788\uc2b5\ub2c8\ub2e4. 2015\ub144\ubd80\ud130 \ucca8\ub2e8 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc0dd\uc0b0 \uae30\uc220\uc744 \ub3c4\uc785\ud558\uace0 \uad6c\ud604\ud558\ub294 \ub370 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud574\uc654\uc73c\uba70, \ud604\uc9c0 \uae30\uc5c5\uc774 \ub300\uaddc\ubaa8 \uc0dd\uc0b0\uacfc \uae30\uc220 \ubc1c\uc804\uc744 \ub2ec\uc131\ud558\ub294 \ub370 \ud070 \ub3c4\uc6c0\uc744 \uc8fc\uc5c8\uc2b5\ub2c8\ub2e4. \uae4a\uc740 \ucc38\uc5ec\ub97c \ud1b5\ud574 \uc774 \uc911\uc694\ud55c SiC \uc0b0\uc5c5 \ud5c8\ube0c\uc758 \ucd9c\ud604\uacfc \uc9c0\uc18d\uc801\uc778 \ubc1c\uc804\uc744 \ubaa9\uaca9\ud558\uace0 \uae30\uc5ec\ud560 \uc218 \uc788\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc911\uad6d\uacfc\ud559\uc6d0(\uc6e8\uc774\ud321) \ud601\uc2e0\ub2e8\uc9c0\uc758 \uc0b0\ud558\uc5d0 \uc911\uad6d\uacfc\ud559\uc6d0 \uad6d\uac00\uae30\uc220\uc774\uc804\uc13c\ud130\uc640 \uae34\ubc00\ud788 \ud611\ub825\ud558\uc5ec \uc6b4\uc601\ub418\ub294 Sicarb Tech\ub294 \uc911\uad6d\uacfc\ud559\uc6d0\uc758 \ub9c9\uac15\ud55c \uacfc\ud559 \uae30\uc220 \uc5ed\ub7c9\uc744 \ud65c\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\uc74c\uc744 \uc704\ud55c \uac15\ub825\ud55c \ud50c\ub7ab\ud3fc\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. <a href=\"https:\/\/sicarbtech.com\/ko\/customizing-support\/\">siC \uc81c\ud488 \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5<\/a>\ub294 \ub2e4\uc591\ud55c SiC \ubd80\ud488\uc758 \ub9de\ucda4\ud615 \uc0dd\uc0b0\uc744 \uc804\ubb38\uc73c\ub85c \ud558\ub294 \ucd5c\uace0 \uc218\uc900\uc758 \uc804\ubb38 \ud300\uc758 \uc9c0\uc6d0\uc744 \ubc1b\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub2f9\uc0ac\uc758 \uc804\ubb38 \uc9c0\uc2dd\uc740 \uc7ac\ub8cc \uacfc\ud559, \uacf5\uc815 \uacf5\ud559, \uc124\uacc4 \ucd5c\uc801\ud654, \uc138\uc2ec\ud55c \uce21\uc815 \ubc0f \ud3c9\uac00 \uae30\uc220\uc744 \uc544\uc6b0\ub985\ub2c8\ub2e4. \uc6d0\uc790\uc7ac\uc5d0\uc11c \uc644\uc81c\ud488\uc5d0 \uc774\ub974\ub294 \uc774\ub7ec\ud55c \ud1b5\ud569 \uc811\uadfc \ubc29\uc2dd\uc744 \ud1b5\ud574 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5 \ubc0f \uadf8 \ubc16\uc758 \ub2e4\uc591\ud55c \ubcf5\uc7a1\ud55c \ub9de\ucda4\ud615 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uc5ec \uace0\ud488\uc9c8\uc758 \ube44\uc6a9 \uacbd\uc7c1\ub825 \uc788\ub294 \uc194\ub8e8\uc158\uc744 \ubcf4\uc7a5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>SiC \ubd80\ud488\uc758 \ud488\uc9c8 \ubcf4\uc99d \ubc0f \ud14c\uc2a4\ud2b8<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ub514\ubc14\uc774\uc2a4\uc758 \ud0c1\uc6d4\ud55c \uc131\ub2a5 \ud2b9\uc131\uc740 \uae30\ubcf8 \uc7ac\ub8cc\uc640 \ubd80\ud488\uc774 \uc5c4\uaca9\ud55c \ud488\uc9c8 \uae30\uc900\uc744 \ucda9\uc871\ud574\uc57c\ub9cc \uc2e4\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubbf8\uc138\ud55c \uacb0\ud568\ub3c4 \ub514\ubc14\uc774\uc2a4 \uace0\uc7a5\uc774\ub098 \uc131\ub2a5 \uc800\ud558\ub85c \uc774\uc5b4\uc9c8 \uc218 \uc788\ub294 \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0, \uac15\ub825\ud55c \ud488\uc9c8 \ubcf4\uc99d(QA)\uacfc \ud3ec\uad04\uc801\uc778 \ud14c\uc2a4\ud2b8 \ud504\ub85c\ud1a0\ucf5c\uc740 \ud0c0\ud611\ud560 \uc218 \uc5c6\ub294 \ud544\uc218 \uc694\uc18c\uc785\ub2c8\ub2e4. \uc870\ub2ec \uad00\ub9ac\uc790\uc640 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 SiC \uc81c\uc870 \uacf5\uc815 \uc804\ubc18\uc5d0 \uac78\uccd0 \ud488\uc9c8 \uad00\ub9ac\uc5d0 \ub300\ud55c \ud655\uace0\ud55c \uc758\uc9c0\ub97c \ubcf4\uc5ec\uc8fc\ub294 \uacf5\uae09\uc5c5\uccb4\ub97c \uc6b0\uc120\uc21c\uc704\uc5d0 \ub450\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p>\ubc18\ub3c4\uccb4 \ub4f1\uae09 SiC \uad6c\uc131 \uc694\uc18c\uc5d0 \ub300\ud55c QA \ubc0f \ud14c\uc2a4\ud2b8\uc758 \uc8fc\uc694 \uce21\uba74\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\uc7ac\ub8cc \ud2b9\uc131\ud654:<\/strong>\n<ul>\n<li><strong>\ud3f4\ub9ac\ud0c0\uc785 \ud655\uc778:<\/strong> \ub77c\ub9cc \ubd84\uad11\ubc95 \ub610\ub294 X\uc120 \ud68c\uc808(XRD)\uacfc \uac19\uc740 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc62c\ubc14\ub978 SiC \ud3f4\ub9ac\ud0c0\uc785(\uc608: 4H-SiC, 6H-SiC)\uc744 \ud655\uc778\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc21c\ub3c4 \ubd84\uc11d:<\/strong> \uae00\ub85c\uc6b0 \ubc29\uc804 \uc9c8\ub7c9 \ubd84\uc11d\ubc95(GDMS) \ub610\ub294 \uc774\ucc28 \uc774\uc628 \uc9c8\ub7c9 \ubd84\uc11d\ubc95(SIMS)\uc73c\ub85c \ubbf8\ub7c9 \uc6d0\uc18c \ubd88\uc21c\ubb3c\uc744 \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc800\ud56d\ub960 \ub9e4\ud551:<\/strong> 4\uc810 \ud504\ub85c\ube0c \uce21\uc815 \ub610\ub294 \uc640\uc804\ub958 \ubc29\ubc95\uc744 \ud1b5\ud574 \uc6e8\uc774\ud37c \uc804\uccb4\uc758 \uc800\ud56d \ubd84\ud3ec\ub97c \ub9e4\ud551\ud558\uc5ec \ub3c4\ud551 \uade0\uc77c\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uacb0\ud568 \uce21\uc815:<\/strong>\n<ul>\n<li><strong>\uacb0\uc815 \ud488\uc9c8 \ud3c9\uac00:<\/strong> KOH \uc5d0\uce6d \ud6c4 \uc790\ub3d9\ud654\ub41c \uad11\ud559 \uac80\uc0ac \ub610\ub294 \uad11\ubc1c\uad11(PL) \ub9e4\ud551 \ub610\ub294 X-\uc120 \uc9c0\ud615\ub3c4(XRT)\uc640 \uac19\uc740 \ube44\ud30c\uad34 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504\ub97c \uce74\uc6b4\ud2b8\ud558\uace0 \ub9e4\ud551\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc804\uc704 \ubc00\ub3c4:<\/strong> \uae30\uc800\uba74 \ud0c8\uad6c(BPD) \ubc0f \ub098\uc0ac\uc0b0 \ud0c8\uad6c(TSD)\uc640 \uac19\uc740 \ub2e4\ub978 \ud0c8\uad6c\ub97c \uc815\ub7c9\ud654\ud558\uae30 \uc704\ud574 \uc720\uc0ac\ud55c \uae30\uc220(\uc5d0\uce6d, PL, XRT)\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc2a4\ub808\ub529 \ub098\uc0ac \uc804\uc704(TSD), \uc2a4\ub808\ub529 \uc5d0\uc9c0 \uc804\uc704(TED) \ubc0f \uae30\uc800\uba74 \uc804\uc704(BPD)\ub3c4 \ubaa8\ub2c8\ud130\ub9c1\ud558\uace0 \uc81c\uc5b4\ud569\ub2c8\ub2e4.<\/strong> PL \uc774\ubbf8\uc9d5\uc740 \ud2b9\ud788 \uc5d0\ud544\ub808\uc774\uc5b4\uc758 \uc2a4\ud0dc\ud0b9 \uacb0\ud568\uc744 \uc2dd\ubcc4\ud558\ub294 \ub370 \ud6a8\uacfc\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc9c0\ud45c\uba74 \ubc0f \uc9c0\ud45c\ud558 \ud488\uc9c8 \ud3c9\uac00:<\/strong>\n<ul>\n<li><strong>\ud45c\uba74 \uac70\uce60\uae30:<\/strong> \uc6d0\uc790\ud604\ubbf8\uacbd(AFM)\uc740 \ud45c\uba74 \uac70\uce60\uae30\ub97c \uc639\uc2a4\ud2b8\ub86c \ub610\ub294 \ub098\ub178\ubbf8\ud130 \ub2e8\uc704\ub85c \uce21\uc815\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ud45c\uba74 \uc624\uc5fc:<\/strong> \ucd1d\ubc18\uc0ac X-\uc120 \ud615\uad11(TXRF) \ub610\ub294 \uc99d\uae30\uc0c1 \ubd84\ud574(VPD) \ud6c4 ICP-MS\ub85c \ud45c\uba74 \uae08\uc18d \uc624\uc5fc \ubb3c\uc9c8\uc744 \uac80\ucd9c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud6c4\uc18d \uc5d0\ud53c\ud0dd\uc2dc \uc131\uc7a5\uc744 \uc704\ud574 \ucd5c\uc18c\ud654\ud574\uc57c \ud569\ub2c8\ub2e4.<\/strong> \ub2e8\uba74 \ud22c\uacfc\uc804\uc790\ud604\ubbf8\uacbd(TEM) \ub610\ub294 \ud2b9\uc218 \uc5d0\uce6d\uacfc \uac19\uc740 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uba74 \uc5f0\ub9c8 \ub610\ub294 \uc5f0\ub9c8\ub85c \uc778\ud55c \uc190\uc0c1 \uce35\uc744 \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc774\ub7ec\ud55c \ud3c9\uba74 \uacb0\ud568\uc740 \uc7a5\uce58 \uc131\ub2a5\uc5d0\ub3c4 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/strong>\n<ul>\n<li>\uc790\ub3d9 \uacc4\uce21 \ub3c4\uad6c\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6e8\uc774\ud37c \uc9c1\uacbd, \ub450\uaed8, \ubcf4\uc6b0, \ud728 \ubc0f \uc0ac\uc774\ud2b8 \ud3c9\ud0c4\ub3c4\ub97c \uc815\ubc00\ud558\uac8c \uce21\uc815\ud569\ub2c8\ub2e4.<\/li>\n<li>\ub9de\ucda4\ud615 \uad6c\uc131 \uc694\uc18c\uc758 \uacbd\uc6b0 CMM(\uc88c\ud45c \uce21\uc815\uae30) \ub610\ub294 \uad11\ud559 \ud504\ub85c\ud30c\uc77c \uce21\uc815\uc73c\ub85c \uc911\uc694\ud55c \uce58\uc218\uc640 \uacf5\ucc28\ub97c \ud655\uc778\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4 \ud2b9\uc131\ud654:<\/strong>\n<ul>\n<li><strong>\ub450\uaed8 \uade0\uc77c\uc131:<\/strong> \ud478\ub9ac\uc5d0 \ubcc0\ud658 \uc801\uc678\uc120 \ubd84\uad11\ubc95(FTIR) \ub610\ub294 \ubd84\uad11\ud559\uc801 \ud0c0\uc6d0 \uce21\uc815\ubc95.<\/li>\n<li><strong>\ub3c4\ud551 \ub18d\ub3c4 \ubc0f \uade0\uc77c\uc131:<\/strong> \ucee4\ud328\uc2dc\ud134\uc2a4-\uc804\uc555(CV) \uce21\uc815, SIMS.<\/li>\n<li><strong>\ud45c\uba74 \ubaa8\ud3f4\ub85c\uc9c0:<\/strong> \ub178\ub9c8\ub974\uc2a4\ud0a4 \ud604\ubbf8\uacbd, AFM.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc804\uae30 \ud14c\uc2a4\ud2b8(\uc644\uc131\ub41c \uc7a5\uce58 \ub610\ub294 \ud14c\uc2a4\ud2b8 \uad6c\uc870\ubb3c\uc6a9):<\/strong>\n<ul>\n<li>\ud56d\ubcf5 \uc804\uc555, \uc628 \uc0c1\ud0dc \uc800\ud56d, \ub204\uc124 \uc804\ub958, \uc784\uacc4 \uc804\uc555\uacfc \uac19\uc740 \ud30c\ub77c\ubbf8\ud130\uc5d0 \ub300\ud55c \uc628-\uc6e8\uc774\ud37c \ud504\ub85c\ube59.<\/li>\n<li>\uc2a4\uc704\uce6d \ud2b9\uc131\uc744 \ud3c9\uac00\ud558\uae30 \uc704\ud55c \ub3d9\uc801 \ud14c\uc2a4\ud2b8.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ud504\ub85c\uc138\uc2a4 \uc81c\uc5b4 \ubc0f \ucd94\uc801\uc131:<\/strong>\n<ul>\n<li>\uc81c\uc870 \uc804\ubc18\uc5d0 \uac78\uce5c \ud1b5\uacc4\uc801 \uacf5\uc815 \uad00\ub9ac(SPC).<\/li>\n<li>\uc6d0\uc790\uc7ac\ubd80\ud130 \uc644\uc81c\ud488\uae4c\uc9c0 \ub85c\ud2b8 \ucd94\uc801\uc131.<\/li>\n<li>\uc5c5\uacc4 \ud45c\uc900 \uc900\uc218(\uc608: \uc6e8\uc774\ud37c\uc5d0 \ub300\ud55c SEMI \ud45c\uc900).<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 SiC \uacf5\uae09\uc5c5\uccb4\ub294 \ucca8\ub2e8 \uacc4\uce21 \uc7a5\ube44\uc5d0 \ub9c9\ub300\ud55c \ud22c\uc790\ub97c \ud558\uace0 \uc5c4\uaca9\ud55c QA \uc2dc\uc2a4\ud15c\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. \ub610\ud55c \uc81c\ud488\uc5d0 \ub300\ud55c \ud3ec\uad04\uc801\uc778 \ub370\uc774\ud130 \uc2dc\ud2b8, \uc801\ud569\uc131 \uc778\uc99d\uc11c \ubc0f \uc0c1\uc138\ud55c \ud14c\uc2a4\ud2b8 \ubcf4\uace0\uc11c\ub97c \uc81c\uacf5\ud560 \uc218 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4. \ub9de\ucda4\ud615 \uad6c\uc131 \uc694\uc18c\uc758 \uacbd\uc6b0 \uc911\uc694\ud55c \ub9e4\uac1c\ubcc0\uc218\uc640 \uac80\uc0ac \ubc29\ubc95\uc744 \uc694\uc57d\ud55c \ud488\uc9c8 \uacc4\ud68d\uc744 \uacf5\ub3d9\uc73c\ub85c \uac1c\ubc1c\ud558\ub294 \uac83\uc774 \ub3c4\uc6c0\uc774 \ub418\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \ucd5c\uc885 SiC \uc81c\ud488\uc774 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ubc0f \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc5d0 \ub300\ud55c \uae4c\ub2e4\ub85c\uc6b4 \uc694\uad6c \uc0ac\ud56d\uc744 \uc77c\uad00\ub418\uac8c \ucda9\uc871\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>\ubbf8\ub798 \ud2b8\ub80c\ub4dc: \ubc18\ub3c4\uccb4\uc758 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\ub294 SiC<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uac00 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5\uc740 \uc774\ubbf8 \ub9c9\ub300\ud558\uc9c0\ub9cc, \uc774 \uae30\uc220\uc740 \uc544\uc9c1 \uc815\uccb4\ub418\uc5b4 \uc788\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc9c0\uc18d\uc801\uc778 \uc5f0\uad6c\uc640 \uac1c\ubc1c\uc744 \ud1b5\ud574 SiC \uae30\ub2a5\uc758 \ud55c\uacc4\ub97c \uc9c0\uc18d\uc801\uc73c\ub85c \ub113\ud600\uac00\uace0 \uc788\uc73c\uba70, \ud5a5\ud6c4 \uba87 \ub144 \ub3d9\uc548 \ub354\uc6b1 \ud765\ubbf8\ub85c\uc6b4 \ubc1c\uc804\uc744 \uc57d\uc18d\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ubc18\ub3c4\uccb4, \uc790\ub3d9\ucc28, \ud56d\uacf5\uc6b0\uc8fc, \uc5d0\ub108\uc9c0 \ubd84\uc57c\uc758 \uae30\uc5c5\uc774\ub77c\uba74 \uc774\ub7ec\ud55c \ud2b8\ub80c\ub4dc\ub97c \ud30c\uc545\ud558\ub294 \uac83\uc774 \ubbf8\ub798\ub97c \ub300\ube44\ud55c \uc124\uacc4\uc640 \uacbd\uc7c1 \uc6b0\uc704 \uc720\uc9c0\ub97c \uc704\ud574 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p>SiC \uae30\uc220\uc758 \uc8fc\uc694 \ubbf8\ub798 \ud2b8\ub80c\ub4dc\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\ub354 \ud070 \uc6e8\uc774\ud37c \uc9c1\uacbd:<\/strong> 150mm(6\uc778\uce58)\uc5d0\uc11c 200mm(8\uc778\uce58) SiC \uc6e8\uc774\ud37c\ub85c\uc758 \uc804\ud658\uc774 \uc21c\uc870\ub86d\uac8c \uc9c4\ud589\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc6e8\uc774\ud37c\uac00 \ucee4\uc9c0\uba74 \ub2e4\uc774\ub2f9 \ube44\uc6a9\uc774 \ud06c\uac8c \uac10\uc18c\ud558\uc5ec SiC \ub514\ubc14\uc774\uc2a4\uc758 \uc2e4\ub9ac\ucf58 \ub300\ube44 \uacbd\uc81c\uc801 \uacbd\uc7c1\ub825\uc774 \ub192\uc544\uc9d1\ub2c8\ub2e4. 300mm(12\uc778\uce58) SiC \uc6e8\uc774\ud37c\uc758 \uc2e4\ud604 \uac00\ub2a5\uc131\ub3c4 \uc5f0\uad6c \uc911\uc774\uc9c0\ub9cc, \uc774\ub294 \uc0c1\ub2f9\ud55c \uae30\uc220\uc801 \uacfc\uc81c\ub97c \uc548\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud06c\ub9ac\uc2a4\ud0c8 \ud488\uc9c8 \uac1c\uc120 \ubc0f \uacb0\ud568 \uac10\uc18c:<\/strong> SiC \uae30\ud310\uacfc \uc5d0\ud53c\ub808\uc774\uc5b4\uc758 \uacb0\ud568 \ubc00\ub3c4(\ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504, BPD, TSD)\ub97c \uc904\uc774\ub294 \ub370 \uc8fc\ub85c \ucd08\uc810\uc744 \ub9de\ucd94\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uacb0\ud568 \ubc00\ub3c4\uac00 \ub0ae\uc544\uc9c0\uba74 \ub514\ubc14\uc774\uc2a4 \uc218\uc728\uc774 \ub192\uc544\uc9c0\uace0, \uc2e0\ub8b0\uc131\uc774 \ud5a5\uc0c1\ub418\uba70, \ub354 \ud06c\uace0 \uac15\ub825\ud55c SiC \uce69\uc744 \uc81c\uc870\ud560 \uc218 \uc788\uac8c \ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uace0\uae09 \uc5d0\ud53c\ud0dd\uc2dc \uae30\uc220:<\/strong> \uc0c8\ub85c\uc6b4 \uc804\uad6c\uccb4\uc640 \ubc18\uc751\uae30 \uc124\uacc4\ub97c \ud3ec\ud568\ud55c CVD \uacf5\uc815\uc758 \ud601\uc2e0\uc740 \ub354 \ube60\ub978 \uc131\uc7a5 \uc18d\ub3c4, \ub300\ud615 \uc6e8\uc774\ud37c\uc5d0 \ub300\ud55c \uade0\uc77c\uc131 \ud5a5\uc0c1, \ub3c4\ud551 \ud504\ub85c\ud30c\uc77c\uacfc \uce35 \ub450\uaed8\uc5d0 \ub300\ud55c \ubcf4\ub2e4 \uc815\ubc00\ud55c \uc81c\uc5b4\ub97c \ubaa9\ud45c\ub85c \ud569\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \ucd08\uace0\uc555 \ub514\ubc14\uc774\uc2a4(&gt;10kV)\ub97c \uc704\ud55c \ub354 \ub450\uaebc\uc6b4 \ub4dc\ub9ac\ud504\ud2b8 \ub808\uc774\uc5b4 \uac1c\ubc1c\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc0c8\ub85c\uc6b4 \ub514\ubc14\uc774\uc2a4 \uad6c\uc870:<\/strong>\n<ul>\n<li><strong>SiC \ud2b8\ub80c\uce58 MOSFET:<\/strong> \ud3c9\uba74\ud615 SiC MOSFET\uc774 \uc77c\ubc18\uc801\uc774\uc9c0\ub9cc, \ud2b8\ub80c\uce58 \uac8c\uc774\ud2b8 \uad6c\uc870\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4<\/li>\n<\/ul>\n<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>SiC \uae30\uc220\uc774 \uc774\ub044\ub294 \ubc18\ub3c4\uccb4 \uc9c4\ud654 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc740 \ub354 \uc791\uace0, \ub354 \ube60\ub974\uace0, \ub354 \ud6a8\uc728\uc801\uc778 \uc804\uc790 \uae30\uae30\uc5d0 \ub300\ud55c \ub04a\uc784\uc5c6\ub294 \uc218\uc694\uc5d0 \ud798\uc785\uc5b4 \ub04a\uc784\uc5c6\uc774 \uc9c4\ud654\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uae30\uc874\uc758 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \uae30\uc220\uc774 \uc774\ub860\uc801 \ud55c\uacc4\uc5d0 \ub2e4\ub2e4\ub974\uba74\uc11c \uc131\ub2a5\uc758 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\ub294 \uc0c8\ub85c\uc6b4 \uc18c\uc7ac\uac00 \ub4f1\uc7a5\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uadf8 \uc911\uc5d0\uc11c\ub3c4 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)\uac00 \ub450\uac01\uc744 \ub098\ud0c0\ub0b4\uace0 \uc788\uc2b5\ub2c8\ub2e4;<\/p>","protected":false},"author":3,"featured_media":2348,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_gspb_post_css":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-2540","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized"],"acf":{"en_gb-title":"","en_gb-meta":"","ja-title":"","ja-meta":"","ja-content":"","ko-title":"","ko-meta":"","ko-content":"","nl-title":"","nl-meta":"","nl-content":"","es-title":"","es-meta":"","es-content":"","ru-title":"","ru-meta":"","ru-content":"","tr-title":"","tr-meta":"","tr-content":"","pl-title":"","pl-meta":"","pl-content":"","pt-title":"","pt-meta":"","pt-content":"","de-title":"","de-meta":"","de-content":"","fr-title":"","fr-meta":"","fr-content":""},"taxonomy_info":{"category":[{"value":1,"label":"Uncategorized"}]},"featured_image_src_large":["https:\/\/sicarbtech.com\/wp-content\/uploads\/2025\/05\/Custom-Silicon-Carbide-Products-10_1-1.jpg",1024,1024,false],"author_info":{"display_name":"yiyunyinglucky","author_link":"https:\/\/sicarbtech.com\/ko\/author\/yiyunyinglucky\/"},"comment_info":20,"category_info":[{"term_id":1,"name":"Uncategorized","slug":"uncategorized","term_group":0,"term_taxonomy_id":1,"taxonomy":"category","description":"","parent":0,"count":795,"filter":"raw","cat_ID":1,"category_count":795,"category_description":"","cat_name":"Uncategorized","category_nicename":"uncategorized","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2540","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/comments?post=2540"}],"version-history":[{"count":3,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2540\/revisions"}],"predecessor-version":[{"id":4935,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2540\/revisions\/4935"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media\/2348"}],"wp:attachment":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media?parent=2540"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/categories?post=2540"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/tags?post=2540"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}