{"id":2538,"date":"2025-08-26T09:11:34","date_gmt":"2025-08-26T09:11:34","guid":{"rendered":"https:\/\/casnewmaterials.com\/?p=2538"},"modified":"2025-08-13T00:59:27","modified_gmt":"2025-08-13T00:59:27","slug":"sic-powering-electronics-industry-innovations","status":"publish","type":"post","link":"https:\/\/sicarbtech.com\/ko\/sic-powering-electronics-industry-innovations\/","title":{"rendered":"SiC: \uc804\uc790 \uc0b0\uc5c5 \ud601\uc2e0\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4."},"content":{"rendered":"

SiC: \uc804\uc790 \uc0b0\uc5c5 \ud601\uc2e0\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/h1>\n

\uc18c\uac1c \uc18c\uac1c: \ud604\ub300 \uc804\uc790 \uc81c\ud488\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \uc911\ucd94\uc801\uc778 \uc5ed\ud560<\/h2>\n

\ube60\ub974\uac8c \uc9c4\ud654\ud558\ub294 \uc804\uc790 \uc0b0\uc5c5\uc758 \ud658\uacbd\uc5d0\uc11c \ub354 \ub192\uc740 \uc804\ub825 \ubc00\ub3c4, \ub354 \ub192\uc740 \ud6a8\uc728\uc131, \uadf9\ud55c \uc870\uac74\uc5d0\uc11c \ub6f0\uc5b4\ub09c \uc131\ub2a5\uc744 \uc81c\uacf5\ud560 \uc218 \uc788\ub294 \uc18c\uc7ac\uc5d0 \ub300\ud55c \ud0d0\uad6c\ub294 \ub04a\uc784\uc5c6\uc774 \uacc4\uc18d\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58(Si)\uacfc \ud0c4\uc18c(C)\ub85c \uad6c\uc131\ub41c \ud654\ud569\ubb3c \ubc18\ub3c4\uccb4 \uc18c\uc7ac\uc778 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)\ub294 \ud2b9\ud788 \uc804\ub825 \uc804\uc790 \ubc0f \uace0\uc8fc\ud30c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ud601\uc2e0\uc801\uc778 \uae30\uc220\ub85c \ubd80\uc0c1\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uae30\uc874 \uc2e4\ub9ac\ucf58\uc744 \ud6e8\uc52c \ub2a5\uac00\ud558\ub294 \ub6f0\uc5b4\ub09c \ubb3c\ub9ac\uc801 \ubc0f \uc804\uc790\uc801 \ud2b9\uc131\uc73c\ub85c \uc790\ub3d9\ucc28, \uc7ac\uc0dd \uc5d0\ub108\uc9c0, \uc0b0\uc5c5 \uc81c\uc870, \ud1b5\uc2e0 \ub4f1 \ub2e4\uc591\ud55c \ubd84\uc57c\uc5d0\uc11c \ud68d\uae30\uc801\uc778 \ud601\uc2e0\uc758 \uae30\ubc18\uc744 \ub9c8\ub828\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub354 \uc791\uace0 \uc5d0\ub108\uc9c0 \ud6a8\uc728\uc801\uc774\uba70 \uacac\uace0\ud55c \uc804\uc790 \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud55c \uc218\uc694\uac00 \uc99d\uac00\ud568\uc5d0 \ub530\ub77c SiC\ub294 \ub354 \uc774\uc0c1 \ud2c8\uc0c8 \uc18c\uc7ac\uac00 \uc544\ub2c8\ub77c \ucc28\uc138\ub300 \uc804\uc790 \uc81c\ud488\uc758 \uae30\ubcf8 \uad6c\uc131 \uc694\uc18c\ub85c \uc790\ub9ac \uc7a1\uc558\uc2b5\ub2c8\ub2e4. \uc774 \ubb38\uc11c\uc5d0\uc11c\ub294 \uc804\uc790 \uc0b0\uc5c5\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \ub2e4\uac01\uc801\uc778 \uc5ed\ud560\uacfc \uadf8 \uc751\uc6a9 \ubd84\uc57c, \ub9de\ucda4\ud615 SiC \uc194\ub8e8\uc158\uc758 \uc7a5\uc810, \uc8fc\uc694 \uc124\uacc4 \ubc0f \uc81c\uc870 \uace0\ub824 \uc0ac\ud56d, \uc774\ub7ec\ud55c \ucca8\ub2e8 \uc18c\uc7ac\ub97c \uc804\ub7b5\uc801\uc73c\ub85c \uc870\ub2ec\ud558\ub294 \ubc29\ubc95\uc744 \uc0b4\ud3b4\ubd05\ub2c8\ub2e4. \ub2e4\uc74c\uacfc \uac19\uc740 \uae30\ub2a5\uc5d0 \ub300\ud55c \uc774\ud574 \ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc81c\ud488<\/strong> \ub294 \uae30\uc220 \ubc1c\uc804\uc758 \ucd5c\uc804\uc120\uc5d0 \uc11c\uace0\uc790 \ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4, \uc870\ub2ec \uad00\ub9ac\uc790, \uae30\uc220 \uad6c\ub9e4\uc790\uc5d0\uac8c \uc810\uc810 \ub354 \uc911\uc694\ud574\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

SiC\uc758 \uc911\uc694\uc131\uc740 \ub113\uc740 \ubc34\ub4dc\uac2d, \ub192\uc740 \uc5f4\uc804\ub3c4\uc728, \ub192\uc740 \ud30c\uad34 \uc804\uae30\uc7a5 \uac15\ub3c4, \ub192\uc740 \uc804\uc790 \ud3ec\ud654 \uc18d\ub3c4\uc5d0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131 \ub355\ubd84\uc5d0 SiC \uae30\ubc18 \ub514\ubc14\uc774\uc2a4\ub294 \uc2e4\ub9ac\ucf58\uc5d0 \ube44\ud574 \ud6e8\uc52c \ub354 \ub192\uc740 \uc804\uc555, \uc628\ub3c4, \uc2a4\uc704\uce6d \uc8fc\ud30c\uc218\uc5d0\uc11c \uc791\ub3d9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \uc5d0\ub108\uc9c0 \uc190\uc2e4 \uac10\uc18c, \ubd80\ud488 \ud06c\uae30 \ucd95\uc18c, \ub0c9\uac01 \uc694\uad6c \uc0ac\ud56d \uac10\uc18c, \uc2dc\uc2a4\ud15c \uc2e0\ub8b0\uc131 \ud5a5\uc0c1\uacfc \uac19\uc740 \uc2e4\uc9c8\uc801\uc778 \uc774\uc810\uc73c\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4 SiC \uc804\ub825 \uc7a5\uce58<\/strong> \uadf8\ub9ac\uace0 SiC \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong> \ud601\uc2e0\uc758 \ud575\uc2ec \uc6d0\ub3d9\ub825\uc785\ub2c8\ub2e4.<\/p>\n

\ud6a8\uc728\uc131 \ud5a5\uc0c1: \uc804\uc790 \uc0b0\uc5c5\uc5d0\uc11c SiC\uc758 \uc8fc\uc694 \uc751\uc6a9 \ubd84\uc57c<\/h2>\n

\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \uc6b0\uc218\ud55c \ud2b9\uc131\uc740 \ub2e4\uc591\ud55c \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc131\ub2a5\uacfc \ud6a8\uc728\uc131\uc758 \uc0c8\ub85c\uc6b4 \uc9c0\ud3c9\uc744 \uc5f4\uc5c8\uc2b5\ub2c8\ub2e4. \uc5c5\uacc4\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uac00 \uc81c\uacf5\ud558\ub294 \uc0c1\ub2f9\ud55c \uc2dc\uc2a4\ud15c \uc218\uc900\uc758 \uc774\uc810\uc744 \uc778\uc2dd\ud558\uba74\uc11c \ub3c4\uc785\uc774 \ube60\ub974\uac8c \uac00\uc18d\ud654\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc8fc\uc694 \ud65c\uc6a9 \ubd84\uc57c \uace0\uc804\ub825 \uc804\uc790 \uc81c\ud488 SiC<\/strong> \ud3ec\ud568:<\/p>\n

    \n
  • \uc804\ub825 \uc804\uc790:<\/strong> \uc774\ub294 SiC\uc758 \uac00\uc7a5 \uc911\uc694\ud55c \uc601\uc5ed\uc785\ub2c8\ub2e4. \uc0b0\uc5c5\uc6a9 \ubaa8\ud130 \ub4dc\ub77c\uc774\ube0c, \ubb34\uc815\uc804 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58(UPS), \uc5ed\ub960 \ubcf4\uc815(PFC) \ud68c\ub85c \ub4f1\uc774 \uc5ec\uae30\uc5d0 \ud574\ub2f9\ud569\ub2c8\ub2e4. SiC MOSFET\uacfc SiC \uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc\ub294 \ud6e8\uc52c \ub354 \ub192\uc740 \uc2a4\uc704\uce6d \uc8fc\ud30c\uc218\ub97c \uad6c\ud604\ud558\uc5ec \uc218\ub3d9 \ubd80\ud488(\uc778\ub355\ud130 \ubc0f \ucee4\ud328\uc2dc\ud130)\uc744 \uc904\uc774\uace0 \uc804\ub825 \uc190\uc2e4\uc744 \uc904\uc774\uba70 \uc804\uccb4 \uc2dc\uc2a4\ud15c\uc744 \uc18c\ud615\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n
  • \uc804\uae30 \uc790\ub3d9\ucc28(EV):<\/strong> SiC \uae30\uc220\uc740 \uc804\uae30\ucc28 \uc0b0\uc5c5\uc5d0 \ud601\uba85\uc744 \uc77c\uc73c\ud0a4\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uae30\uc220\uc740 \ud2b8\ub799\uc158 \uc778\ubc84\ud130, \uc628\ubcf4\ub4dc \ucda9\uc804\uae30(OBC), DC-DC \ucee8\ubc84\ud130\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ud2b8\ub799\uc158 \uc778\ubc84\ud130\uc758 \uacbd\uc6b0 SiC\ub97c \uc0ac\uc6a9\ud558\uba74 \ud6a8\uc728\uc131\uc774 \ub192\uc544\uc838 \ucc28\ub7c9 \uc8fc\ud589 \uac70\ub9ac\ub97c \ub298\ub9ac\uac70\ub098 \ubc30\ud130\ub9ac \ud329 \ud06c\uae30\ub97c \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. OBC \ubc0f DC-DC \ucee8\ubc84\ud130\uc5d0\uc11c SiC\ub294 \ucda9\uc804 \uc2dc\uac04\uc744 \ub2e8\ucd95\ud558\uace0 \ubb34\uac8c\uc640 \ubd80\ud53c\ub97c \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc218\uc694 \uc804\uae30 \uc790\ub3d9\ucc28 SiC<\/strong> \uad6c\uc131 \uc694\uc18c\ub294 SiC \uc2dc\uc7a5\uc758 \uc8fc\uc694 \ub3d9\uc778\uc785\ub2c8\ub2e4.<\/li>\n
  • \uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc2dc\uc2a4\ud15c:<\/strong> \ud0dc\uc591 \uad11 \ubc1c\uc804(PV) \uc778\ubc84\ud130\uc640 \ud48d\ub825 \ud130\ube48 \ucee8\ubc84\ud130\ub294 SiC\uc758 \uc5c4\uccad\ub09c \uc774\uc810\uc744 \ub204\ub9ac\uace0 \uc788\uc2b5\ub2c8\ub2e4. SiC \uae30\ubc18 \uc778\ubc84\ud130\uc758 \ud6a8\uc728\uc774 \ub192\ub2e4\ub294 \uac83\uc740 \ud0dc\uc591\uad11 \ud328\ub110\uc774\ub098 \ud48d\ub825 \ud130\ube48\uc5d0\uc11c \ub354 \ub9ce\uc740 \uc804\uae30\ub97c \uc218\ud655\ud560 \uc218 \uc788\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. \ub610\ud55c \ub354 \ub192\uc740 \uc804\uc555\uc5d0\uc11c \uc791\ub3d9\ud560 \uc218 \uc788\uc5b4 \ub300\uaddc\ubaa8 \uc7ac\uc0dd \uc5d0\ub108\uc9c0 \ubc1c\uc804\uc18c\uc758 \uc2dc\uc2a4\ud15c \uc544\ud0a4\ud14d\ucc98\ub97c \uac04\uc18c\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc7ac\uc0dd \uc5d0\ub108\uc9c0 SiC \uc778\ubc84\ud130<\/strong> \ub294 \uadf8\ub9ac\ub4dc \uc548\uc815\uc131\uacfc \ud6a8\uc728\uc131\uc744 \uac1c\uc120\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n
  • \ubb34\uc120 \uc8fc\ud30c\uc218(RF) \uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> SiC, \ud2b9\ud788 \ubc18\uc808\uc5f0 SiC \uae30\ud310\uc740 \uc9c8\ud654 \uac08\ub968(GaN)-\uc628-SiC \uace0\uc804\uc790 \uc774\ub3d9\uc131 \ud2b8\ub79c\uc9c0\uc2a4\ud130(HEMT)\uc640 \uac19\uc740 \uace0\ucd9c\ub825, \uace0\uc8fc\ud30c RF \uc7a5\uce58\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc7a5\uce58\ub294 5G \uae30\uc9c0\uad6d, \ub808\uc774\ub354 \uc2dc\uc2a4\ud15c, \uc704\uc131 \ud1b5\uc2e0 \ubc0f \uc804\uc790\uc804 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc0ac\uc6a9\ub418\uba70, \ub192\uc740 \uc804\ub825 \ubc00\ub3c4\uc640 \uc5f4 \uc548\uc815\uc131\uc774 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n
  • \uace0\uc628 \uc804\uc790 \uc81c\ud488:<\/strong> SiC\ub294 300\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4(\ub54c\ub85c\ub294 \ud6e8\uc52c \ub192\uc740 \uc628\ub3c4)\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc788\uae30 \ub54c\ubb38\uc5d0 \uc11d\uc720 \ubc0f \uac00\uc2a4 \uc0b0\uc5c5\uc758 \ub2e4\uc6b4\ud640 \uc2dc\ucd94, \ud56d\uacf5 \uc6b0\uc8fc \uc5d4\uc9c4 \uc81c\uc5b4, \uc0b0\uc5c5 \uacf5\uc815 \ubaa8\ub2c8\ud130\ub9c1\uacfc \uac19\uc740 \uc5f4\uc545\ud55c \ud658\uacbd\uc5d0 \ubc30\uce58\ub418\ub294 \uc804\uc790 \uc7a5\uce58\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n

    SiC\uc758 \uc601\ud5a5\uc740 \ub2e4\uc74c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uba85\ud655\ud558\uac8c \uc785\uc99d\ub429\ub2c8\ub2e4:<\/p>\n\n\n\n\n\n\n\n\n\n\n
    \uc751\uc6a9 \ubd84\uc57c<\/th>\n\uc8fc\uc694 SiC \uc774\uc810<\/th>\n\ud2b9\uc815 \ub514\ubc14\uc774\uc2a4\/\uc0ac\uc6a9 \uc0ac\ub840<\/th>\n<\/tr>\n<\/thead>\n
    \uc804\ub825 \ubcc0\ud658 \ubc0f \uad00\ub9ac<\/td>\n\ud6a8\uc728\uc131 \ud5a5\uc0c1, \ud06c\uae30\/\ubb34\uac8c \uac10\uc18c, \ub0c9\uac01 \ud544\uc694\uc131 \uac10\uc18c<\/td>\n\uc2a4\uc704\uce58 \ubaa8\ub4dc \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58(SMPS), AC-DC \uc815\ub958\uae30, DC-AC \uc778\ubc84\ud130, \uc0b0\uc5c5\uc6a9 \ubaa8\ud130 \ub4dc\ub77c\uc774\ube0c<\/td>\n<\/tr>\n
    \uc804\uae30 \uc790\ub3d9\ucc28 &038; \uc6b4\uc1a1<\/td>\n\uc8fc\ud589\uac70\ub9ac \uc99d\uac00, \ucda9\uc804 \uc18d\ub3c4 \ud5a5\uc0c1, \ud30c\uc6cc\ud2b8\ub808\uc778 \ubd80\ud53c \uac10\uc18c<\/td>\n\ud2b8\ub799\uc158 \uc778\ubc84\ud130, \uc628\ubcf4\ub4dc \ucda9\uc804\uae30(OBC), DC-DC \ucee8\ubc84\ud130, \ucca0\ub3c4 \ud2b8\ub799\uc158 \uc2dc\uc2a4\ud15c<\/td>\n<\/tr>\n
    \uc7ac\uc0dd \uc5d0\ub108\uc9c0 &038; \uadf8\ub9ac\ub4dc \uc778\ud504\ub77c<\/td>\n\ud5a5\uc0c1\ub41c \uc5d0\ub108\uc9c0 \uc218\ud655, \ub354 \ub192\uc740 \uc804\ub825 \ubc00\ub3c4, \uadf8\ub9ac\ub4dc \uc548\uc815\uc131<\/td>\n\ud0dc\uc591\uad11(PV) \uc778\ubc84\ud130, \ud48d\ub825 \ud130\ube48 \ucee8\ubc84\ud130, \uc194\ub9ac\ub4dc \uc2a4\ud14c\uc774\ud2b8 \ubcc0\uc555\uae30, HVDC \uc804\uc1a1<\/td>\n<\/tr>\n
    RF \uc804\ub825 & \ud1b5\uc2e0<\/td>\n\uace0\uc8fc\ud30c \uc791\ub3d9, \uace0\ucd9c\ub825, \ub6f0\uc5b4\ub09c \uc5f4 \ubc29\ucd9c<\/td>\n5G\/6G \uae30\uc9c0\uad6d \uc804\ub825 \uc99d\ud3ed\uae30, \ub808\uc774\ub354 \uc2dc\uc2a4\ud15c, \uc704\uc131 \ud1b5\uc2e0 \ud2b8\ub79c\uc2a4\ud3f0\ub354<\/td>\n<\/tr>\n
    \ud56d\uacf5\uc6b0\uc8fc \ubc0f \ubc29\uc704<\/td>\n\uace0\uc628 \uc791\ub3d9, \ub0b4\ubc29\uc0ac\uc120 \uacbd\ub3c4, \uc2e0\ub8b0\uc131<\/td>\n\uc791\ub3d9 \uc2dc\uc2a4\ud15c, \ubc30\uc804 \uc7a5\uce58, \ud56d\uacf5 \uc804\uc790 \uacf5\ud559, \ub808\uc774\ub354 \ubc0f \uc13c\uc11c \uc2dc\uc2a4\ud15c<\/td>\n<\/tr>\n
    \uc0b0\uc5c5\uc6a9 \ub09c\ubc29 \ubc0f \uac00\uacf5<\/td>\n\uace0\uc628 \uacf5\uc815\uc744 \uc704\ud55c \ud6a8\uc728\uc801\uc778 \uc804\ub825 \uacf5\uae09<\/td>\n\uc720\ub3c4 \uac00\uc5f4 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58, \ud50c\ub77c\uc988\ub9c8 \uc0dd\uc131 \uc2dc\uc2a4\ud15c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

    \uc81c\uc870\uc5c5\uccb4\uac00 \uc9c0\uc18d\uc801\uc73c\ub85c \uac1c\uc120\ud568\uc5d0 \ub530\ub77c SiC \uc7a5\uce58 \uc81c\uc870<\/strong> \uacf5\uc815\uacfc \ube44\uc6a9\uc774 \uac10\uc18c\ud568\uc5d0 \ub530\ub77c \uc804\uc790 \uc81c\ud488\uc5d0\uc11c\uc758 SiC \uc801\uc6a9 \ubc94\uc704\uac00 \ub354\uc6b1 \ud655\ub300\ub418\uc5b4 \uc5d0\ub108\uc9c0 \ud6a8\uc728\uc131\uc774 \ub354\uc6b1 \ub192\uc740 \ubbf8\ub798\ub97c \uc704\ud55c \ud575\uc2ec \uc18c\uc7ac\ub85c\uc11c\uc758 \uc785\uc9c0\ub97c \ub354\uc6b1 \uacf5\uace0\ud788 \ud560 \uac83\uc73c\ub85c \uc608\uc0c1\ub429\ub2c8\ub2e4.<\/p>\n

    \ub9de\ucda4\ud615\uc758 \uc774\uc810: \ub9de\ucda4\ud615 SiC \uc194\ub8e8\uc158\uc774 \uc804\uc790 \ud601\uc2e0\uc5d0 \uc911\uc694\ud55c \uc774\uc720<\/h2>\n

    \ud45c\uc900 \uae30\uc131\ud488 SiC \ubd80\ud488\uc740 \uc0c1\ub2f9\ud55c \uc774\uc810\uc744 \uc81c\uacf5\ud558\uc9c0\ub9cc, \uae4c\ub2e4\ub85c\uc6b4 \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \uc7a0\uc7ac\ub825\uc744 \ucd5c\ub300\ud55c \ud65c\uc6a9\ud558\ub824\uba74 \ub9de\ucda4\ud654\ub97c \ud1b5\ud574 \uc2e4\ud604\ud574\uc57c \ud558\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \ub9de\ucda4\ud615 SiC \uad6c\uc131 \uc694\uc18c<\/strong> \ub9de\ucda4\ud615 \uc194\ub8e8\uc158\uc744 \ud1b5\ud574 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \ub514\ubc14\uc774\uc2a4 \ubc0f \uc2dc\uc2a4\ud15c \uc131\ub2a5\uc744 \ucd5c\uc801\ud654\ud558\uace0 \ud2b9\uc815 \uc6b4\uc601 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uba70 \uacbd\uc7c1 \uc6b0\uc704\ub97c \ud655\ubcf4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc77c\ubd80 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uc77c\ubc18 \uad6c\uc131 \uc694\uc18c\ub85c\ub3c4 \ucda9\ubd84\ud560 \uc218 \uc788\uc9c0\ub9cc, \ucd5c\ucca8\ub2e8 \ud601\uc2e0\uc774\ub098 \uace0\uc720\ud55c \uc81c\uc57d \uc870\uac74\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 \uc2dc\uc2a4\ud15c\uc758 \uacbd\uc6b0 \ub9de\ucda4\ud615 \uc811\uadfc \ubc29\uc2dd\uc774 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n

    \uc804\uc790 \uc0b0\uc5c5\uc5d0\uc11c \ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc194\ub8e8\uc158\uc744 \uc120\ud0dd\ud558\uba74 \uc5bb\uc744 \uc218 \uc788\ub294 \uc8fc\uc694 \uc774\uc810\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n

      \n
    • \ud5a5\uc0c1\ub41c \uc804\uae30\uc801 \uc131\ub2a5:<\/strong> \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc744 \ud1b5\ud574 \ud56d\ubcf5 \uc804\uc555, \uc628 \uc0c1\ud0dc \uc800\ud56d($R_{DS(on)}$), \uc2a4\uc704\uce6d \ud2b9\uc131 \ubc0f \uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ube0c \uc694\uad6c \uc0ac\ud56d\uacfc \uac19\uc740 \uc804\uae30\uc801 \ud30c\ub77c\ubbf8\ud130\ub97c \ubbf8\uc138 \uc870\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 SiC \ub514\ubc14\uc774\uc2a4\uac00 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \ud2b9\uc815 \uc804\uc555, \uc804\ub958 \ubc0f \uc8fc\ud30c\uc218 \uc694\uad6c \uc0ac\ud56d\uc5d0 \uc644\ubcbd\ud558\uac8c \uc77c\uce58\ud558\ub3c4\ub85d \ud558\uc5ec \ud6a8\uc728\uc131\uc744 \uadf9\ub300\ud654\ud558\uace0 \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, \ud2b9\uc815 \uc804\ub825 \ucee8\ubc84\ud130 \ud1a0\ud3f4\ub85c\uc9c0\uc5d0 \ub9de\ub294 \ucd5c\uc801\uc758 \uc140 \uad6c\uc870\uc640 \ub3c4\ud551 \ud504\ub85c\ud30c\uc77c\ub85c \ub9de\ucda4\ud615 SiC MOSFET\uc744 \uc124\uacc4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n
    • \uc6b0\uc218\ud55c \uc5f4 \uad00\ub9ac:<\/strong> SiC\ub294 \ubcf8\uc9c8\uc801\uc73c\ub85c \uc5f4 \uc804\ub3c4\uc131\uc774 \ub6f0\uc5b4\ub098\uc9c0\ub9cc \ub9de\ucda4\ud615 \uc124\uacc4\ub97c \ud1b5\ud574 \uc5f4 \ubc29\ucd9c \uacbd\ub85c\ub97c \ub354\uc6b1 \ucd5c\uc801\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \ud2b9\uc815 \ub2e4\uc774 \ud615\uc0c1, \ud2b9\uc218 \uae30\ud310 \uc7ac\ub8cc \ub610\ub294 \ucd5c\uc885 \uc2dc\uc2a4\ud15c\uc758 \uc5f4 \ud658\uacbd\uc5d0 \ub9de\ucd98 \uace0\uc720\ud55c \ud328\ud0a4\uc9d5 \uc194\ub8e8\uc158\uc774 \ud3ec\ud568\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud6a8\uacfc\uc801\uc778 \uc5f4 \uad00\ub9ac\ub294 \uace0\uc804\ub825 \uc804\uc790 \uae30\uae30\uc758 \uc2e0\ub8b0\uc131\uc744 \uac1c\uc120\ud558\uace0 \uc218\uba85\uc744 \uc5f0\uc7a5\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n
    • \uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcc4 \ud3fc \ud329\ud130 \ubc0f \ud1b5\ud569:<\/strong> \ub9de\ucda4\ud615 SiC \uad6c\uc131 \uc694\uc18c\ub294 \uc2dc\uc2a4\ud15c \ub0b4\uc758 \uc815\ubc00\ud55c \uae30\uacc4\uc801 \ubc0f \uacf5\uac04\uc801 \uc81c\uc57d \uc870\uac74\uc5d0 \ub9de\uac8c \uc124\uacc4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \ube44\ud45c\uc900 \uc6e8\uc774\ud37c \ud06c\uae30, \uace0\uc720\ud55c \uce69 \ub808\uc774\uc544\uc6c3 \ub610\ub294 \uc5ec\ub7ec SiC \ub514\ubc14\uc774\uc2a4\ub97c \uacb0\ud569\ud55c \ud1b5\ud569 \ubaa8\ub4c8\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc740 \uc2dc\uc2a4\ud15c \ud1b5\ud569\uc744 \uc6a9\uc774\ud558\uac8c \ud558\uace0 \uc804\uccb4 \uc2dc\uc2a4\ud15c \uc124\uce58 \uacf5\uac04\uc744 \uc904\uc774\uba70 \uc870\ub9bd \ud504\ub85c\uc138\uc2a4\ub97c \uac04\uc18c\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n
    • \ud2b9\uc815 \uc6b4\uc601 \uc870\uac74\uc5d0 \ucd5c\uc801\ud654\ub418\uc5c8\uc2b5\ub2c8\ub2e4:<\/strong> \uc77c\ubd80 \uc804\uc790 \uc2dc\uc2a4\ud15c\uc740 \ub9e4\uc6b0 \ub192\uc740 \uc628\ub3c4, \ub192\uc740 \ubc29\uc0ac\uc120 \uc218\uc900 \ub610\ub294 \ud2b9\uc815 \uae30\uacc4\uc801 \uc2a4\ud2b8\ub808\uc2a4\uc640 \uac19\uc740 \ubb38\uc81c\uc5d0 \uc9c1\uba74\ud558\ub294 \uadf9\ud55c \ud658\uacbd\uc5d0\uc11c \uc791\ub3d9\ud569\ub2c8\ub2e4. \ub9de\ucda4\ud615 SiC \uc194\ub8e8\uc158\uc740 \uc774\ub7ec\ud55c \ud2b9\uc815 \uc870\uac74\uc5d0 \ub300\ud55c \ubcf5\uc6d0\ub825\uc744 \uac15\ud654\ud558\ub294 \uc7ac\ub8cc\uc640 \uc124\uacc4\ub85c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\ud560 \uc218 \uc788\uc73c\ubbc0\ub85c \ud45c\uc900 \ubd80\ud488\uc774 \uace0\uc7a5\ub0a0 \uc218 \uc788\ub294 \uacf3\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc778 \uc791\ub3d9\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n
    • \uc2dc\uc2a4\ud15c \uc548\uc815\uc131 \ubc0f \uc218\uba85 \ud5a5\uc0c1:<\/strong> \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uc815\ud655\ud55c \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\uac8c SiC \ubd80\ud488\uc744 \ub9de\ucda4\ud654\ud558\uba74 \ub514\ubc14\uc774\uc2a4\uc5d0 \uac00\ud574\uc9c0\ub294 \uc2a4\ud2b8\ub808\uc2a4\ub97c \ucd5c\uc18c\ud654\ud558\uace0 \uc124\uacc4 \ub2e8\uacc4\uc5d0\uc11c \uc7a0\uc7ac\uc801\uc778 \uace0\uc7a5 \ubaa8\ub4dc\ub97c \uc0ac\uc804\uc5d0 \ud574\uacb0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \uc804\ubc18\uc801\uc778 \uc2dc\uc2a4\ud15c \uc548\uc815\uc131\uc774 \ud5a5\uc0c1\ub418\uace0 \uc791\ub3d9 \uc218\uba85\uc774 \uae38\uc5b4\uc838 \uc720\uc9c0\ubcf4\uc218 \ube44\uc6a9\uacfc \ub2e4\uc6b4\ud0c0\uc784\uc774 \uc904\uc5b4\ub4ed\ub2c8\ub2e4.<\/li>\n<\/ul>\n

      \uc804\ubb38 \uacf5\uae09\uc5c5\uccb4\uc640\uc758 \ud30c\ud2b8\ub108\uc2ed \ub9de\ucda4\ud615 SiC \uc194\ub8e8\uc158<\/strong> \ub294 \uc7ac\ub8cc \uacfc\ud559, \uc18c\uc790 \ubb3c\ub9ac\ud559 \ubc0f \uc81c\uc870 \uacf5\uc815\uc5d0 \ub300\ud55c \uc804\ubb38 \uc9c0\uc2dd\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud611\uc5c5 \uc811\uadfc \ubc29\uc2dd\uc740 \ucd5c\uc885 SiC \ubd80\ud488\uc774 \uace0\ud488\uc9c8\uc77c \ubfd0\ub9cc \uc544\ub2c8\ub77c \uc804\uc790 \uc2dc\uc2a4\ud15c \uc124\uacc4\uc790\uc758 \ud601\uc2e0\uc801\uc778 \ubaa9\ud45c\uc640 \uc644\ubcbd\ud558\uac8c \uc77c\uce58\ud558\ub3c4\ub85d \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \uc804\ub825 \uc804\uc790 \uc7a5\uce58, \uc804\uae30\ucc28 \ub610\ub294 \uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc131\ub2a5\uc758 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\uace0\uc790 \ud558\ub294 \uae30\uc5c5\ub4e4\uc740 \ub9de\ucda4\ud615 SiC\uac00 \ub69c\ub837\ud55c \uc774\uc810\uc744 \uc81c\uacf5\ud55c\ub2e4\ub294 \uc0ac\uc2e4\uc744 \uc54c\uac8c \ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>\n

      SiC \ub4f1\uae09 \ud0d0\uc0c9\ud558\uae30: \uc804\uc790 \ubd80\ud488\uc5d0 \uc801\ud569\ud55c \uc18c\uc7ac \uc120\ud0dd<\/h2>\n

      \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \ub2e8\uc77c\ud55c \ubb3c\uc9c8\uc774 \uc544\ub2c8\ub77c \ud3f4\ub9ac\ud0c0\uc785\uc774\ub77c\ub294 \ub2e4\uc591\ud55c \uacb0\uc815\ud559\uc801 \ud615\ud0dc\ub85c \uc874\uc7ac\ud558\uba70, \ub2e4\uc591\ud55c \uc804\uae30\uc801 \ud2b9\uc131\uc744 \ub2ec\uc131\ud558\uae30 \uc704\ud574 \ub3c4\ud551\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc801\uc808\ud55c SiC \ub4f1\uae09, \ud3f4\ub9ac\ud0c0\uc785, \ub3c4\ud551 \uc218\uc900\uc744 \uc120\ud0dd\ud558\ub294 \uac83\uc740 \uc804\uc790 \uae30\uae30\uc758 \uc131\ub2a5\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ucc28\uc774\uc810\uc744 \uc774\ud574\ud558\ub294 \uac83\uc740 \uc124\uacc4 \ubc0f \uc0ac\uc591\uc744 \uc9c0\uc815\ud558\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\uc5d0\uac8c \ud544\uc218\uc801\uc785\ub2c8\ub2e4 \uc804\uc790 \uc81c\ud488\uc6a9 SiC \uc6e8\uc774\ud37c<\/strong> \ub610\ub294 \uac1c\ubcc4 \ucef4\ud3ec\ub10c\ud2b8\uc785\ub2c8\ub2e4.<\/p>\n

      \uc804\uc790\uc81c\ud488\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uac00\uc7a5 \uc77c\ubc18\uc801\uc778 \ud3f4\ub9ac\ud0c0\uc785\uc740 4H-SiC\uc640 6H-SiC\uc774\uba70, \uc804\uc790 \uc774\ub3d9\ub3c4\uac00 \ub192\uace0 \ub4f1\ubc29\uc131\uc774 \ub192\uc544 \ub300\ubd80\ubd84\uc758 \uc804\ub825 \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc8fc\ub85c \uc0ac\uc6a9\ub418\ub294 4H-SiC\uc785\ub2c8\ub2e4. \ud3f4\ub9ac\ud0c0\uc785 \uc678\uc5d0\ub3c4 SiC \uc6e8\uc774\ud37c\ub294 \uc804\ub3c4\uc131(N\ud615 \ub610\ub294 P\ud615 \ub3c4\ud551) \ub610\ub294 \ubc18\uc808\uc5f0\uc131\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n\n\n\n\n\n\n
      SiC \ud3f4\ub9ac\ud0c0\uc785\/\ub4f1\uae09<\/th>\n\uc8fc\uc694 \ud2b9\uc9d5<\/th>\n\uc8fc\uc694 \uc804\uc790 \uc751\uc6a9 \ubd84\uc57c<\/th>\n\uc870\ub2ec \uace0\ub824 \uc0ac\ud56d<\/th>\n<\/tr>\n<\/thead>\n
      4H-SiC<\/strong><\/td>\n\ub192\uc740 \uc804\uc790 \uc774\ub3d9\ub3c4(\ud2b9\ud788 c\ucd95\uc5d0 \uc218\uc9c1), \ub192\uc740 \uc784\uacc4 \uc804\uae30\uc7a5, \uc6b0\uc218\ud55c \uc5f4 \uc804\ub3c4\uc131. \ub113\uc740 \ubc34\ub4dc\uac2d(~3.26eV).<\/td>\n\uace0\uc804\uc555 \uc804\ub825 \uc7a5\uce58(MOSFET, \uc1fc\ud2b8\ud0a4 \ubc30\ub9ac\uc5b4 \ub2e4\uc774\uc624\ub4dc, SBD, IGBT), \uace0\uc8fc\ud30c \uc804\ub825 \uc804\uc790 \uc7a5\uce58, \uace0\uc628 \uc13c\uc11c\uc5d0 \uc120\ud638\ub429\ub2c8\ub2e4.<\/td>\n\uac00\uc7a5 \uc77c\ubc18\uc801\uc774\uace0 \ubc1c\uc804\ub41c \uc804\ub825 \uc804\uc790\uc81c\ud488\uc6a9 \ud3f4\ub9ac\ud0c0\uc785. \ud488\uc9c8(\uc608: \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504 \ub4f1 \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4)\uc774 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. N\ud615, P\ud615 \ubc0f \ubc18\uc808\uc5f0 \ud615\ud0dc\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4.<\/td>\n<\/tr>\n
      6H-SiC<\/strong><\/td>\n\uc5ed\uc0ac\uc801\uc73c\ub85c \ub354 \uc131\uc219\ud55c \uc131\uc7a5 \uae30\uc220, \uc6b0\uc218\ud55c \uc5f4 \uc804\ub3c4\uc131. \ub113\uc740 \ubc34\ub4dc\uac2d(~3.03eV). 4H-SiC\ubcf4\ub2e4 \uc804\uc790 \uc774\ub3d9\ub3c4\uac00 \ub0ae\uace0 \uc774\ubc29\uc131\uc774 \ub354 \ub192\uc2b5\ub2c8\ub2e4.<\/td>\n\uc774\uc804\uc5d0\ub294 \uccad\uc0c9 LED, \uc77c\ubd80 \uace0\uc804\ub825 \uc7a5\uce58\uc5d0 \uc0ac\uc6a9\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc0c8\ub85c\uc6b4 \uc804\ub825 \ub514\ubc14\uc774\uc2a4 \uc124\uacc4\ub97c \uc704\ud574 \ub300\ubd80\ubd84 4H-SiC\ub85c \ub300\uccb4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc77c\ubd80 \ud2c8\uc0c8 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc5ec\uc804\ud788 \uc0ac\uc6a9\ub428.<\/td>\n\uc774\ub3d9\uc131\uc774 \ub0ae\uace0 \uc774\ubc29\uc131\uc774 \ub192\uae30 \ub54c\ubb38\uc5d0 4H-SiC\uc5d0 \ube44\ud574 \uace0\uc131\ub2a5 \uc804\ub825 \ub514\ubc14\uc774\uc2a4\uc5d0 \ub35c \uc120\ud638\ub429\ub2c8\ub2e4.<\/td>\n<\/tr>\n
      \uace0\uc21c\ub3c4 \ubc18\uc808\uc5f0(HPSI) SiC<\/strong><\/td>\n\ub9e4\uc6b0 \ub192\uc740 \uc804\uae30 \uc800\ud56d($> 10^9 \uc624\uba54\uac00 cdot cm$), \ub0ae\uc740 RF \uc190\uc2e4, \uc6b0\uc218\ud55c \uc5f4 \uc804\ub3c4\uc131. \uc77c\ubc18\uc801\uc73c\ub85c 4H-SiC \ub610\ub294 6H-SiC.<\/td>\nRF \uc804\ub825 \uc99d\ud3ed\uae30(\uc608: 5G \uae30\uc9c0\uad6d, \ub808\uc774\ub354), \ub9c8\uc774\ud06c\ub85c\ud30c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc9c8\ud654 \uac08\ub968(GaN) \uace0\uc804\uc790 \uc774\ub3d9\uc131 \ud2b8\ub79c\uc9c0\uc2a4\ud130(HEMT)\uc6a9 \uae30\ud310.<\/td>\n\uc21c\ub3c4(\ubc14\ub098\ub4d0 \ubcf4\uc0c1 \ub610\ub294 \ub0b4\uc7ac\uc801)\uc640 \ud45c\uba74 \ud488\uc9c8\uc740 GaN \uc5d0\ud53c\ud0dd\uc2dc \ubc0f \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ub0ae\uc740 \uc794\ub958 \ub3c4\ub108\/\uc5b5\uc149\ud130 \ub18d\ub3c4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/td>\n<\/tr>\n
      N\ud615 \ub3c4\ud551 SiC<\/strong><\/td>\n\uacfc\uc789 \uc804\uc790\ub85c \uc778\ud574 \uc804\ub3c4\uc131. \uc77c\ubc18\uc801\uc73c\ub85c \uc9c8\uc18c(N)\ub85c \ub3c4\ud551\ub429\ub2c8\ub2e4. \uc800\ud56d\uc744 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/td>\n\uc804\ub825 \ub514\ubc14\uc774\uc2a4\uc758 \ub4dc\ub9ac\ud504\ud2b8 \ub808\uc774\uc5b4, MOSFET\uc758 \ucc44\ub110 \uc601\uc5ed, \uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc \uc74c\uadf9, \ud638\ubaa8 \uc5d0\ud53c\ud0dd\uc2dc\uc6a9 SiC \uae30\ud310 \ub4f1\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/td>\n\ub3c4\ud551 \ub18d\ub3c4 \uade0\uc77c\uc131 \ubc0f \uc81c\uc5b4\ub294 \ud56d\ubcf5 \uc804\uc555 \ubc0f \uc628 \uc800\ud56d\uacfc \uac19\uc740 \ub514\ubc14\uc774\uc2a4 \ud30c\ub77c\ubbf8\ud130\uc758 \ud575\uc2ec\uc785\ub2c8\ub2e4.<\/td>\n<\/tr>\n
      P\ud615 \ub3c4\ud551 SiC<\/strong><\/td>\n\uacfc\ub3c4\ud55c \uad6c\uba4d\uc73c\ub85c \uc778\ud574 \uc804\ub3c4\uc131\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c \uc54c\ub8e8\ubbf8\ub284(Al) \ub610\ub294 \ubd95\uc18c(B)\ub85c \ub3c4\ud551\ub429\ub2c8\ub2e4. N\ud615\ubcf4\ub2e4 \ub3c4\ud380\ud2b8\uc758 \ud65c\uc131\ud654 \uc5d0\ub108\uc9c0\uac00 \ub354 \ub192\uc2b5\ub2c8\ub2e4.<\/td>\nMOSFET\uc758 \ubc14\ub514 \uc601\uc5ed, JFET\uc758 \ucc44\ub110 \uc601\uc5ed, PiN \ub2e4\uc774\uc624\ub4dc \ubc0f SBD\uc758 \uc591\uadf9\uce35, \uc77c\ubd80 \uc811\ucd09\uce35\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/td>\n\ub0ae\uc740 \uc800\ud56d\ub960\uc758 P\ud615 SiC\ub97c \uad6c\ud604\ud558\ub294 \uac83\uc740 \uc5b4\ub824\uc6b8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub3c4\ud380\ud2b8\ub97c \ud65c\uc131\ud654\ud558\ub824\uba74 \uace0\uc628 \uc5b4\ub2d0\ub9c1\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

      SiC \ub4f1\uae09 \uc120\ud0dd\uc740 \ucc28\ub2e8 \uc804\uc555, \uc628\uc800\ud56d, \uc2a4\uc704\uce6d \uc18d\ub3c4 \ubc0f \uc5f4 \uc131\ub2a5\uacfc \uac19\uc740 \ub514\ubc14\uc774\uc2a4 \ud2b9\uc131\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \uc870\ub2ec \uad00\ub9ac\uc790\uc640 \uae30\uc220 \uad6c\ub9e4\uc790\uc5d0\uac8c\ub294 \ud0c4\ud654\uaddc\uc18c\ubfd0\ub9cc \uc544\ub2c8\ub77c \uc815\ud655\ud55c \ud3f4\ub9ac\ud0c0\uc785, \uc804\ub3c4\uc131 \uc720\ud615(N\ud615, P\ud615 \ub610\ub294 \ubc18\uc808\uc5f0), \ub3c4\ud551 \ub18d\ub3c4(\ub610\ub294 \uc800\ud56d \ubc94\uc704), \uacb0\uc815 \ubc30\ud5a5, \ud488\uc9c8 \uc9c0\ud45c(\uc608: \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504 \ubc00\ub3c4, \uc801\uce35 \uacb0\ud568 \ubc00\ub3c4, \ud45c\uba74 \uac70\uce60\uae30)\ub97c \uc9c0\uc815\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc9c0\uc2dd\uc774 \ud48d\ubd80\ud55c \uc804\ubb38\uac00\uc640 \ud568\uaed8 \uc791\uc5c5 \ud0c4\ud654\uaddc\uc18c \uacf5\uae09\uc5c5\uccb4\ub294<\/strong> \uc7ac\ub8cc \uc120\ud0dd\uc5d0 \ub300\ud55c \uc9c0\uce68\uc744 \uc81c\uacf5\ud558\uace0 \uace0\ud488\uc9c8\uc758 \uc77c\uad00\ub41c \uc6e8\uc774\ud37c \ub610\ub294 \ub9de\ucda4\ud615 \uc5d0\ud53c\ud0dd\uc15c \uad6c\uc870\ub97c \uc81c\uacf5\ud560 \uc218 \uc788\ub294 \uc5c5\uccb4\ub294 \uc131\uacf5\uc801\uc778 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791\uacfc \uc131\ub2a5\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uacf5\uae09\uc5c5\uccb4\ub294 \uc885\uc885 \ub2e4\uc74c\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4 \uace0\uae09 SiC \uc18c\uc7ac<\/strong> \ud2b9\uc815 \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub9de\uac8c \ub9de\ucda4\ud654\ub418\uc5b4 \ucd5c\uc801\uc758 \uacb0\uacfc\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n

      \uc815\ubc00 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1: SiC \uc804\uc790 \uc7a5\uce58\ub97c \uc704\ud55c \uc8fc\uc694 \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d<\/h2>\n

      \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub85c \uc804\uc790 \uc7a5\uce58\ub97c \uc124\uacc4\ud558\ub824\uba74 \uadf8 \uc7a0\uc7ac\ub825\uc744 \ucd5c\ub300\ud55c \ud65c\uc6a9\ud558\uae30 \uc704\ud574 \uace0\uc720\ud55c \uc7ac\ub8cc \ud2b9\uc131\uc5d0 \ub300\ud55c \ubbf8\ubb18\ud55c \uc774\ud574\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. SiC\ub294 \ub6f0\uc5b4\ub09c \uc131\ub2a5 \uc9c0\ud45c\ub97c \uc81c\uacf5\ud558\uc9c0\ub9cc, \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uae30\uc874 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \uc124\uacc4\uc640 \ud06c\uac8c \ub2e4\ub978 \ud2b9\uc815 \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d\uc744 \ud574\uacb0\ud574\uc57c \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uace0\ub824 \uc0ac\ud56d\uc740 \uc804\uae30, \uc5f4, \uae30\uacc4\uc801 \uce21\uba74\uc5d0 \uac78\uccd0 \uc788\uc73c\uba70, \ubaa8\ub450 \uc548\uc815\uc801\uc774\uace0 \ud6a8\uc728\uc801\uc778 \uc81c\ud488\uc744 \uac1c\ubc1c\ud558\ub294 \ub370 \uc911\uc694\ud569\ub2c8\ub2e4 SiC \uc804\ub825 \ubaa8\ub4c8<\/strong> \ubc0f \uac1c\ubcc4 \ucef4\ud3ec\ub10c\ud2b8.<\/p>\n

      \uc804\uae30 \uc124\uacc4 \uce21\uba74:<\/h3>\n
        \n
      • \ud56d\ubcf5 \uc804\uc555($V_{BR}$):<\/strong> SiC\uc758 \ub192\uc740 \uc784\uacc4 \uc804\uae30\uc7a5\uc740 \uc2e4\ub9ac\ucf58\uc5d0 \ube44\ud574 \uc8fc\uc5b4\uc9c4 \ucc28\ub2e8 \uc804\uc555\uc5d0 \ub300\ud574 \ud6e8\uc52c \ub354 \uc587\uc740 \ub4dc\ub9ac\ud504\ud2b8 \uc601\uc5ed\uc744 \ud5c8\uc6a9\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc628 \uc0c1\ud0dc \uc800\ud56d\uc740 \uac10\uc18c\ud558\uc9c0\ub9cc \uc870\uae30 \uace0\uc7a5\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \ud2b9\ud788 \uc885\ub2e8 \uc5d0\uc9c0\uc5d0\uc11c \uc804\uae30\uc7a5\uc744 \uc8fc\uc758 \uae4a\uac8c \uad00\ub9ac\ud574\uc57c \ud569\ub2c8\ub2e4. JTE(\uc811\ud569 \uc885\ub2e8 \ud655\uc7a5) \ub610\ub294 \ud544\ub4dc \ub9c1\uacfc \uac19\uc740 \uc5d0\uc9c0 \uc885\ub2e8 \uae30\uc220\uc740 \uc138\uc2ec\ud558\uac8c \uc124\uacc4\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n
      • \uc628 \uc0c1\ud0dc \uc800\ud56d($R_{DS(on)}$(MOSFET\uc758 \uacbd\uc6b0, $V_F$(\ub2e4\uc774\uc624\ub4dc\uc758 \uacbd\uc6b0)):<\/strong> \uc804\ub3c4 \uc190\uc2e4\uc744 \uc904\uc774\ub824\uba74 \uc628 \uc0c1\ud0dc \uc800\ud56d\uc744 \ucd5c\uc18c\ud654\ud558\ub294 \uac83\uc774 \ud575\uc2ec\uc785\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \ucc44\ub110 \uc774\ub3d9\uc131(MOSFET\uc758 \uacbd\uc6b0), \ub4dc\ub9ac\ud504\ud2b8 \uc601\uc5ed \ub3c4\ud551 \ubc0f \ub450\uaed8, \uc811\ucd09 \uc800\ud56d\uc744 \ucd5c\uc801\ud654\ud558\ub294 \uac83\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. SiC MOSFET \ucc44\ub110 \uc774\ub3d9\uc131\uc740 SiO2\/SiC \uc778\ud130\ud398\uc774\uc2a4\uc758 \uc778\ud130\ud398\uc774\uc2a4 \ud2b8\ub7a9\uc5d0 \uc758\ud574 \uc601\ud5a5\uc744 \ubc1b\uc744 \uc218 \uc788\uc73c\ubbc0\ub85c \uace0\uae09 \uac8c\uc774\ud2b8 \uc720\uc804\uccb4 \ucc98\ub9ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n
      • \uc804\ud658 \uc18d\ub3c4\uc640 \uc5ed\ub3d9\uc131:<\/strong> SiC \ub514\ubc14\uc774\uc2a4\ub294 Si \ub514\ubc14\uc774\uc2a4\ubcf4\ub2e4 \ud6e8\uc52c \ube60\ub974\uac8c \uc2a4\uc704\uce6d\ud560 \uc218 \uc788\uc5b4 \uc2a4\uc704\uce6d \uc190\uc2e4\uc774 \uc801\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ube60\ub978 dV\/dt \ubc0f dI\/dt \uc18d\ub3c4\ub294 \ud68c\ub85c\uc758 \uae30\uc0dd \uc778\ub355\ud134\uc2a4 \ubc0f \ucee4\ud328\uc2dc\ud134\uc2a4\ub85c \uc778\ud574 \uc804\uc790\uae30 \uac04\uc12d(EMI) \ubc0f \uc804\uc555 \uc624\ubc84\uc288\ud2b8\/\ub9c1\uc789\uc744 \uc720\ubc1c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ubc84 \uc124\uacc4\ub294 \uc2a4\uc704\uce6d \uc18d\ub3c4\ub97c \uad00\ub9ac\ud558\uace0 \uac8c\uc774\ud2b8 \uc0b0\ud654\ubb3c\uc744 \ubcf4\ud638\ud558\uae30 \uc704\ud574 \uac8c\uc774\ud2b8 \uc804\ub958\uc640 \uc804\uc555\uc744 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud574\uc57c \ud558\ubbc0\ub85c \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ucf08\ube48 \uc18c\uc2a4 \uc5f0\uacb0\uc740 \uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ube0c\uc5d0 \ub300\ud55c \uc18c\uc2a4 \uc778\ub355\ud134\uc2a4 \ud6a8\uacfc\ub97c \ucd5c\uc18c\ud654\ud558\uae30 \uc704\ud574 SiC \ub514\ubc14\uc774\uc2a4 \ud328\ud0a4\uc9c0\uc5d0\uc11c \uc790\uc8fc \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n
      • \uac8c\uc774\ud2b8 \ub4dc\ub77c\uc774\ube0c \uc694\uad6c \uc0ac\ud56d(MOSFET\uc6a9):<\/strong> SiC MOSFET\uc740 \uc77c\ubc18\uc801\uc73c\ub85c Si MOSFET\uc5d0 \ube44\ud574 \uac8c\uc774\ud2b8 \uc804\uc555 \uc694\uad6c \uc0ac\ud56d(\uc608: $V_{GS(th)}$, \uad8c\uc7a5 $V_{GS(on)}$, $V_{GS(off)}$)\uc774 \ub2e4\ub985\ub2c8\ub2e4. \uac8c\uc774\ud2b8 \uc0b0\ud654\ubb3c\uc740 \ub610\ud55c \ubbfc\uac10\ud55c \ubd80\ud488\uc774\ubbc0\ub85c \uc791\ub3d9 \uc911\uc5d0 \uacfc\ub3c4\ud55c \uc2a4\ud2b8\ub808\uc2a4\ub97c \ubc1b\uc9c0 \uc54a\ub3c4\ub85d \ud558\ub294 \uac83\uc774 \uc7a5\uae30\uc801\uc778 \uc2e0\ub8b0\uc131\uc744 \uc704\ud574 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \uc624\ud504 \uc0c1\ud0dc\uc758 \ub124\uac70\ud2f0\ube0c \uac8c\uc774\ud2b8 \ubc14\uc774\uc5b4\uc2a4\ub294 dV\/dt\ub85c \uc778\ud55c \uc758\ub3c4\uce58 \uc54a\uc740 \ud134\uc628\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uc885\uc885 \uad8c\uc7a5\ub429\ub2c8\ub2e4.<\/li>\n
      • \ub2e8\ub77d \ub0b4\uc131 \uc2dc\uac04(SCWT):<\/strong> \uc804\ub825 \ubc00\ub3c4\uac00 \ub192\uae30 \ub54c\ubb38\uc5d0 SiC MOSFET\uc758 SCWT\ub294 Si IGBT\ubcf4\ub2e4 \uc9e7\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ubcf4\ud638 \ud68c\ub85c \uc124\uacc4 \uc2dc \uc774\ub97c \uc2e0\uc911\ud558\uac8c \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n
      • \ubc14\ub514 \ub2e4\uc774\uc624\ub4dc \uc131\ub2a5(MOSFET\uc6a9):<\/strong> SiC MOSFET\uc758 \ubcf8\uc9c8 \ubc14\ub514 \ub2e4\uc774\uc624\ub4dc\ub294 \uc21c\ubc29\ud5a5 \uc804\uc555 \uac15\ud558\uac00 \ub354 \ub192\uace0 \uacbd\uc6b0\uc5d0 \ub530\ub77c \uc591\uadf9\uc131 \uc800\ud558\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc131\ub2a5\uc774 \uac1c\uc120\ub418\uc5c8\uc9c0\ub9cc, \uc678\ubd80 SiC SBD\ub294 \uae4c\ub2e4\ub85c\uc6b4 \ud504\ub9ac\ud720\ub9c1 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud574 \ubcd1\ub82c\ub85c \uc0ac\uc6a9\ub418\uae30\ub3c4 \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n

        \uc5f4 \uad00\ub9ac \uc804\ub7b5:<\/h3>\n

        SiC\uc758 \ub192\uc740 \uc5f4\uc804\ub3c4\uc728\uc740 \uc5f4 \ucd94\ucd9c\uc5d0 \ub3c4\uc6c0\uc774 \ub418\uc9c0\ub9cc, \ub2ec\uc131 \uac00\ub2a5\ud55c \uc804\ub825 \ubc00\ub3c4\uac00 \ub192\uc744\uc218\ub85d \uc5f4\uc6d0\uc774 \ub354 \uc9d1\uc911\ub41c\ub2e4\ub294 \uc758\ubbf8\uc774\uae30\ub3c4 \ud569\ub2c8\ub2e4. \ud6a8\uacfc\uc801\uc778 \uc5f4 \uc124\uacc4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4:<\/p>\n

          \n
        • SiC \ub2e4\uc774\uc5d0\uc11c \ud788\ud2b8\uc2f1\ud06c\uae4c\uc9c0\uc758 \uc5f4 \uc800\ud56d \ucd5c\uc18c\ud654. \uc5ec\uae30\uc5d0\ub294 \ub2e4\uc774 \ubd80\ucc29 \uc7ac\ub8cc, \uae30\ud310 \uc7ac\ub8cc(\uc608: DBC \uae30\ud310\uc758 \uacbd\uc6b0 AlN, Si3N4) \ubc0f \ud328\ud0a4\uc9c0 \uc124\uacc4\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/li>\n
        • \uae30\uacc4\uc801 \uc2a4\ud2b8\ub808\uc2a4\uc640 \ud53c\ub85c\ub97c \ubc29\uc9c0\ud558\uae30 \uc704\ud574 SiC\uc640 \ud3ec\uc7a5\uc7ac \uac04\uc758 \uc5f4\ud33d\ucc3d \uacc4\uc218(CTE)\uac00 \uc77c\uce58\ud558\uc9c0 \uc54a\ub294 \uac83\uc744 \uace0\ub824\ud569\ub2c8\ub2e4.<\/li>\n
        • \ucd08\uace0\ucd9c\ub825 \ubaa8\ub4c8\uc744 \uc704\ud55c \uace0\uae09 \ub0c9\uac01 \uae30\uc220(\uc608: \uc561\uccb4 \ub0c9\uac01, \uc591\uba74 \ub0c9\uac01)\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n

          \uae30\uacc4 \ubc0f \ud328\ud0a4\uc9d5 \ud1b5\ud569:<\/h3>\n

          SiC\uc758 \uae30\uacc4\uc801 \ud2b9\uc131(\ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4)\uacfc \ub192\uc740 \uc791\ub3d9 \uc628\ub3c4 \ubc0f \uc8fc\ud30c\uc218\ub294 \ud328\ud0a4\uc9d5 \uc120\ud0dd\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n

            \n
          • SiC \ub514\ubc14\uc774\uc2a4\uc758 \ube60\ub978 \uc2a4\uc704\uce6d \uc18d\ub3c4\ub97c \ud65c\uc6a9\ud558\ub824\uba74 \uc800 \uc778\ub355\ud134\uc2a4 \ud328\ud0a4\uc9d5\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n
          • \ud3ec\uc7a5\uc7ac\ub294 \ub192\uc740 \uc791\ub3d9 \uc628\ub3c4\ub97c \uacac\ub514\uace0 \uc548\uc815\uc801\uc778 \uc0c1\ud638 \uc5f0\uacb0\uc744 \uc81c\uacf5\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n
          • \uc640\uc774\uc5b4 \ubcf8\ub529 \ubc0f \ub2e4\uc774 \uc811\ucc29 \uacf5\uc815\uc740 SiC\uc5d0 \ucd5c\uc801\ud654\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n

            \ud615\uc0c1 \uc81c\ud55c, \ud328\ud0a4\uc9d5\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uacbd\uc6b0 \uc138\ub77c\ubbf9 \ubd80\ud488\uc758 \ubcbd \ub450\uaed8, \uc751\ub825 \uc9d1\uc911 \uc9c0\uc810 \ub4f1\uc744 \uace0\ub824\ud558\uc5ec \uc81c\uc870 \uac00\ub2a5\uc131\uc744 \uace0\ub824\ud55c \uc124\uacc4\ub3c4 \uc911\uc694\ud569\ub2c8\ub2e4. \ub514\ubc14\uc774\uc2a4 \uc124\uacc4\uc790\uc640 \ub9de\ucda4\ud615 SiC \uc81c\ud488<\/strong> \uc81c\uc870\uc5c5\uccb4\ub294 \uc774\ub7ec\ud55c \ub2e4\uac01\uc801\uc778 \uace0\ub824 \uc0ac\ud56d\uc744 \ud6a8\uacfc\uc801\uc73c\ub85c \ud574\uacb0\ud558\ub294 \ub370 \ud575\uc2ec\uc801\uc778 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n

            \uc644\ubcbd\ud568 \ub2ec\uc131\ud558\uae30: SiC \uc804\uc790 \uc81c\ud488\uc758 \uacf5\ucc28, \ud45c\uba74 \ud488\uc9c8 \ubc0f \ub9c8\uac10 \ucc98\ub9ac<\/h2>\n

            \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc804\uc790 \uae30\uae30\uc758 \uc131\ub2a5\uacfc \uc2e0\ub8b0\uc131\uc740 \uae30\uae30\uc758 \uae30\ubc18\uc774 \ub418\ub294 SiC \uc6e8\uc774\ud37c\uc640 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc758 \uce58\uc218 \uc815\ud655\ub3c4, \ud45c\uba74 \ud488\uc9c8, \ub9c8\uac10 \ucc98\ub9ac\uc5d0 \uc758\ud574 \ud06c\uac8c \uc601\ud5a5\uc744 \ubc1b\uc2b5\ub2c8\ub2e4. \uc870\ub2ec \uc804\ubb38\uac00 \ubc0f \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \ub2e4\uc74c\uc744 \uc9c0\uc815\ud558\ub294 \uacbd\uc6b0 SiC \uae30\ud310<\/strong> \ubc0f \uc5d0\ud53c\uc6e8\uc774\ud37c\uc758 \uacbd\uc6b0 \ub2ec\uc131 \uac00\ub2a5\ud55c \ud5c8\uc6a9 \uc624\ucc28\uc640 \uadf8 \uc601\ud5a5\uc744 \uc774\ud574\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \uacb0\uc815 \uc131\uc7a5\uacfc \uc6e8\uc774\ud37c\ub9c1\ubd80\ud130 \uc5d0\ud53c\ud0dd\uc2dc \ubc0f \ucd5c\uc885 \ud45c\uba74 \uc900\ube44\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uc81c\uc870 \uacf5\uc815 \uc804\ubc18\uc5d0 \uac78\uccd0 \uc774\ub7ec\ud55c \ud30c\ub77c\ubbf8\ud130\ub97c \uc5c4\uaca9\ud558\uac8c \uc81c\uc5b4\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

            SiC \uc804\uc790 \uc81c\ud488\uc758 \uacf5\ucc28, \ud45c\uba74 \ub9c8\uac10 \ubc0f \uce58\uc218 \uc815\ud655\ub3c4\uc640 \uad00\ub828\ub41c \uc8fc\uc694 \uce21\uba74\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n

              \n
            • \uc6e8\uc774\ud37c \ud3c9\ud0c4\ub3c4 \ubc0f \ub450\uaed8 \ubcc0\ud654(TTV):<\/strong> \uace0\ud488\uc9c8 SiC \uc6e8\uc774\ud37c\ub294 \uc804\uccb4 \uc6e8\uc774\ud37c\uc5d0\uc11c \ud0c1\uc6d4\ud55c \ud3c9\ud0c4\ub3c4(\uc608: \ubcf4\uc6b0, \uc6cc\ud504, \uc18c\ub9ac)\uc640 \ucd5c\uc18c\ud55c\uc758 \ucd1d \ub450\uaed8 \ud3b8\ucc28(TTV)\ub97c \ubcf4\uc5ec\uc57c \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud30c\ub77c\ubbf8\ud130\ub294 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud558\uba70, \ub514\ubc14\uc774\uc2a4 \uc81c\uc791 \uc2dc \uade0\uc77c\ud55c \ud53c\ucc98 \uc815\uc758\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \ud3b8\ucc28\ub294 \ucd08\uc810 \uc2ec\ub3c4 \ubb38\uc81c\ub85c \uc774\uc5b4\uc838 \uc77c\uad00\ub418\uc9c0 \uc54a\uc740 \uc18c\uc790 \ud2b9\uc131\uacfc \uc218\uc728 \uc800\ud558\ub97c \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uacf5\uae09\uc5c5\uccb4 \ud14c\ud06c\ub2c8\uceec \uc138\ub77c\ubbf9 SiC<\/strong> \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uc5c4\uaca9\ud55c \ud3c9\ud0c4\ub3c4 \uc0ac\uc591\uc744 \uc900\uc218\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n
            • \ud45c\uba74 \uc870\ub3c4(Ra, Rq, Rms):<\/strong> \ud2b9\ud788 \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP) \ud6c4 SiC \uc6e8\uc774\ud37c\uc758 \ud45c\uba74\uc740 \ub9e4\uc6b0 \ub9e4\ub044\ub7ec\uc6cc\uc57c \ud558\uba70, \uc77c\ubc18\uc801\uc73c\ub85c \uc6d0\uc790 \uc218\uc900\uc758 \ud3c9\ud0c4\ub3c4(Ra < 0.5nm \ubbf8\ub9cc, \uc885\uc885 <0.2nm). \uace0\ud488\uc9c8 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc758 \ud6c4\uc18d \uc131\uc7a5\uc744 \uc704\ud574\uc11c\ub294 \ub9e4\ub044\ub7fd\uace0 \uacb0\ud568 \uc5c6\ub294 \ud45c\uba74\uc774 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4. \ud45c\uba74 \uc544\ub798\uc5d0 \uc794\ub958\ud558\ub294 \uc190\uc0c1\uc774\ub098 \ud45c\uba74 \uac70\uce60\uae30\ub294 \uacb0\ud568\uc744 \uc5d0\ud53c\uce35\uc73c\ub85c \uc804\ud30c\ud558\uc5ec \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5(\uc608: \uac8c\uc774\ud2b8 \uc0b0\ud654\ubb3c \ubb34\uacb0\uc131, \ub204\uc124 \uc804\ub958)\uc5d0 \uc545\uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n
            • \uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4 \uade0\uc77c\uc131:<\/strong> SiC \ub514\ubc14\uc774\uc2a4\uc758 \uacbd\uc6b0, \ud65c\uc131\uce35\uc740 \uc77c\ubc18\uc801\uc73c\ub85c SiC \uae30\ud310 \uc704\uc5d0 \uc5d0\ud53c\ud0dd\uc15c \ubc29\uc2dd\uc73c\ub85c \uc131\uc7a5\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc5d0\ud53c\ud0dd\uc15c \uce35\uc758 \ub450\uaed8\uc640 \ub3c4\ud551 \ub18d\ub3c4\ub294 \uc6e8\uc774\ud37c \uc804\uccb4\uc640 \uc6e8\uc774\ud37c \uac04\uc5d0 \ub9e4\uc6b0 \uade0\uc77c\ud574\uc57c \ud569\ub2c8\ub2e4. \ud3b8\ucc28\ub294 \uc784\uacc4 \uc804\uc555, \ud56d\ubcf5 \uc804\uc555, \uc628\uc800\ud56d\uacfc \uac19\uc740 \uc18c\uc790 \ud30c\ub77c\ubbf8\ud130\uc758 \uc77c\uad00\uc131\uc774 \ub5a8\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ub2ec\uc131\ud558\ub824\uba74 \uace0\uae09 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \uae30\uc220(\uc608: CVD)\uacfc \uc815\ubc00\ud55c \uacf5\uc815 \uc81c\uc5b4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n
            • \uacb0\ud568 \ubc00\ub3c4(\ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504, \uc2a4\ud0dc\ud0b9 \uacb0\ud568, \uc804\uc704):<\/strong> SiC \uacb0\uc815 \uc131\uc7a5\uc740 \uae4c\ub2e4\ub86d\uace0 \ub2e4\uc591\ud55c \uc720\ud615\uc758 \uacb0\uc815\ud559\uc801 \uacb0\ud568\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud2b9\ud788 \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504(\uc911\uacf5 \ucf54\uc5b4 \ub098\uc0ac \uc804\uc704)\ub294 \uc870\uae30 \ub514\ubc14\uc774\uc2a4 \uace0\uc7a5\uc744 \uc77c\uc73c\ud0ac \uc218 \uc788\uc5b4 \uce58\uba85\uc801\uc785\ub2c8\ub2e4. \uae30\ud310\uc758 \uae30\uc800\uba74 \uc804\uc704(BPD)\ub3c4 \uc791\ub3d9 \uc911 \ud65c\uc131 \uc18c\uc790 \uce35\uc5d0 \uc2a4\ud0dd \uacb0\ud568\uc744 \uc77c\uc73c\ucf1c \ubc14\uc774\ud3f4\ub77c \uc18c\uc790\uc758 \uc628\uc800\ud56d\uc744 \uc99d\uac00\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud2b9\ud788 \uace0\uc804\uc555 \ubc0f \uace0\uc2e0\ub8b0\uc131 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uacb0\ud568 \ubc00\ub3c4\uac00 \ub0ae\uc740 \uc6e8\uc774\ud37c\ub97c \uc9c0\uc815\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n
            • \uc5d0\uc9c0 \uc81c\uc678 \ubc0f \uce69 \uc218\uc728:<\/strong> \uc6e8\uc774\ud37c\uc758 \uc0ac\uc6a9 \uac00\ub2a5\ud55c \uc601\uc5ed\uc740 \uc5d0\uc9c0 \uc81c\uc678 \uc601\uc5ed\uc5d0 \uc758\ud574 \uc815\uc758\ub418\uba70, \uc77c\ubc18\uc801\uc73c\ub85c \uc5d0\uc9c0 \uacb0\ud568\uc774\ub098 \uacf5\uc815 \ubd88\uc77c\uce58\ub85c \uc778\ud574 \ub514\ubc14\uc774\uc2a4 \uc218\uc728\uc774 \ub0ae\uc544\uc9d1\ub2c8\ub2e4. \ub354 \ub098\uc740 \uc6e8\uc774\ud37c \uc131\ud615 \ubc0f \uc5d0\uc9c0 \uc5f0\ub9c8\ub97c \ud1b5\ud574 \uc774 \uc81c\uc678 \uc601\uc5ed\uc744 \ucd5c\uc18c\ud654\ud558\uba74 \uc6e8\uc774\ud37c\ub2f9 \uc591\ud638\ud55c \ub2e4\uc774\uc758 \uc218\ub97c \ub298\ub824 \ube44\uc6a9\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \uc904 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n
            • \ucee4\uc2a4\ud140 \ucef4\ud3ec\ub10c\ud2b8\uc758 \uce58\uc218 \uc815\ud655\ub3c4:<\/strong> \ud788\ud2b8 \uc2a4\ud504\ub808\ub354, \ud558\uc774\ube0c\ub9ac\ub4dc \ubaa8\ub4c8\uc6a9 \uae30\ud310 \ub610\ub294 \uc808\uc5f0\uccb4\ub85c \uc0ac\uc6a9\ub418\ub294 \ub9de\ucda4\ud615 SiC \ubd80\ud488\uc758 \uacbd\uc6b0 \uc801\uc808\ud55c \uc870\ub9bd\uacfc \uc5f4 \uc131\ub2a5\uc744 \uc704\ud574 \uc815\ubc00\ud55c \uce58\uc218 \uc81c\uc5b4(\uae38\uc774, \ub108\ube44, \ub450\uaed8, \ud3c9\ud589\ub3c4, \uc9c1\uac01\ub3c4)\uac00 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n

              SiC \uc6e8\uc774\ud37c\uc758 \ub2ec\uc131 \uac00\ub2a5\ud55c \uacf5\ucc28\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc9c1\uacbd \ubc0f \ub450\uaed8\uc640 \uac19\uc740 \uce58\uc218\uc758 \uacbd\uc6b0 \ub9c8\uc774\ud06c\ub85c\ubbf8\ud130 \ubc94\uc704\uc774\uba70, \ud3c9\ud0c4\ub3c4 \ubc0f TTV\ub294 \ub354 \uc5c4\uaca9\ud55c \ud55c\uacc4\ub85c \uc81c\uc5b4\ub429\ub2c8\ub2e4. CMP \ud6c4 \ud45c\uba74 \ub9c8\uac10 \uc635\uc158\uc740 \uac70\uc6b8\uacfc \uac19\uc740 \ud45c\uba74\uc744 \ub9cc\ub4e4\uc5b4\ub0c5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc5c4\uaca9\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub824\uba74 \uc5f0\uc0ad, \ub798\ud551 \ubc0f \uc5f0\ub9c8\uc758 \uc815\ubc00 \uae30\ub2a5\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc18c\uc2f1 \uc2dc SiC \uc6e8\uc774\ud37c \uc804\uc790 \uc81c\ud488<\/strong> \ub4f1\uae09\uc758 \uacbd\uc6b0, \uacf5\uae09\uc5c5\uccb4\uc640 \uc774\ub7ec\ud55c \uc0ac\uc591\uc744 \uba85\ud655\ud558\uac8c \uc815\uc758\ud558\uc5ec \ud574\ub2f9 \uc18c\uc7ac\uac00 \uc758\ub3c4\ud55c \uace0\uc131\ub2a5 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud55c\uc9c0 \ud655\uc778\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n

              \uc81c\uc791 \uadf8 \uc774\uc0c1: SiC \uc804\uc790 \ubd80\ud488\uc744 \uc704\ud55c \ud544\uc218 \ud6c4\uacf5\uc815<\/h2>\n

              \uae30\ubcf8\uc801\uc778 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc18c\uc790 \uad6c\uc870\uac00 \uc6e8\uc774\ud37c\uc5d0 \uc81c\uc791\ub418\uba74 \uc774\ub7ec\ud55c \uad6c\uc870\ub97c \uae30\ub2a5\uc801\uc774\uace0 \uc2e0\ub8b0\ud560 \uc218 \uc788\uc73c\uba70 \ud328\ud0a4\uc9d5 \uac00\ub2a5\ud55c \uc804\uc790 \ubd80\ud488\uc73c\ub85c \ubcc0\ud658\ud558\uae30 \uc704\ud574 \uc77c\ub828\uc758 \uc911\uc694\ud55c \ud6c4\ucc98\ub9ac \ub2e8\uacc4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub2e8\uacc4\ub294 \ucd08\uae30 \uc6e8\uc774\ud37c \ucc98\ub9ac \ubc0f \uc5d0\ud53c\ud0dd\uc2dc\ub9cc\ud07c\uc774\ub098 \uc911\uc694\ud558\uba70 \uc18c\uc790 \uc131\ub2a5, \uc218\uc728 \ubc0f \ube44\uc6a9\uc5d0 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \ub2e4\uc74c\uc5d0 \uc758\uc874\ud558\ub294 \uc0b0\uc5c5\uc758 \uacbd\uc6b0 SiC \uc7a5\uce58 \uc81c\uc870<\/strong>\ud6a8\uc728\uc801\uc778 \uc81c\uc791\uacfc \uace0\ud488\uc9c8 \uacb0\uacfc\ubb3c\uc744 \uc704\ud574\uc11c\ub294 \uc774\ub7ec\ud55c \ud6c4\ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d\uc744 \uc774\ud574\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n

              SiC \uc804\uc790 \ubd80\ud488\uc758 \uc77c\ubc18\uc801\uc774\uace0 \ud544\uc218\uc801\uc778 \ud6c4\ucc98\ub9ac \ub2e8\uacc4\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n

                \n
              1. \uc6e8\uc774\ud37c \ubc31\uadf8\ub77c\uc778\ub529 \ubc0f \uc587\uac8c \ud558\uae30:<\/strong> \uc55e\uba74 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791 \ud6c4\uc5d0\ub294 \ub4b7\uba74\ubd80\ud130 SiC \uc6e8\uc774\ud37c\ub97c \uc587\uac8c \ub9cc\ub4dc\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uc774\ub807\uac8c \ud558\uba74 \ub2e4\uc774\uc758 \uc5f4 \uc800\ud56d\uc774 \uac10\uc18c\ud558\uc5ec \uc5f4 \ubc29\ucd9c\uc774 \uac1c\uc120\ub418\uace0 \uc218\uc9c1 \uc804\ub825 \ub514\ubc14\uc774\uc2a4\uc758 \uc628 \uc0c1\ud0dc \uc800\ud56d\ub3c4 \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. SiC\uc758 \uacbd\ub3c4 \ub54c\ubb38\uc5d0 \ud2b9\uc218 \uc5f0\uc0ad \uae30\uc220\uc774 \uc0ac\uc6a9\ub418\uba70, \uc5f0\uc0ad\uc73c\ub85c \uc778\ud55c \uc190\uc0c1\uc744 \uc81c\uac70\ud558\uae30 \uc704\ud574 CMP \ub610\ub294 \uac74\uc2dd \uc5f0\ub9c8\uc640 \uac19\uc740 \uc751\ub825 \uc644\ud654 \uacf5\uc815\uc774 \uc774\uc5b4\uc9d1\ub2c8\ub2e4.<\/li>\n
              2. \ub4b7\uba74 \uae08\uc18d\ud654:<\/strong> \uc218\uc9c1\ud615 \uc804\ub825 \ub514\ubc14\uc774\uc2a4\uc758 \uacbd\uc6b0, \uc6e8\uc774\ud37c \ub4b7\uba74\uc5d0 \uae08\uc18d\uce35\uc744 \uc99d\ucc29\ud558\uc5ec \ub4dc\ub808\uc778(MOSFET\uc758 \uacbd\uc6b0) \ub610\ub294 \uc74c\uadf9(\ub2e4\uc774\uc624\ub4dc\uc758 \uacbd\uc6b0) \uc811\uc810\uc744 \ud615\uc131\ud569\ub2c8\ub2e4. \uc774 \uce35\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc6b0\uc218\ud55c \uc634 \uc811\ucd09, \ub0a9\ub55c\uc131 \ubc0f \uc5f4 \uc804\ub3c4\uc131\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 \uc5ec\ub7ec \uae08\uc18d(\uc608: Ti\/Ni\/Ag \ub610\ub294 Ti\/Ni\/Au)\uc73c\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4. \ub0ae\uc740 \uc811\ucd09 \uc800\ud56d\uacfc \uc7a5\uae30\uc801\uc778 \uc2e0\ub8b0\uc131\uc744 \uc704\ud574\uc11c\ub294 \uae08\uc18d\uacfc \uc99d\ucc29 \uae30\uc220(\uc608: \uc2a4\ud37c\ud130\ub9c1, \uc99d\ucc29)\uc758 \uc120\ud0dd\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n
              3. \uc218\ubc31 \ub610\ub294 \uc218\ucc9c \uac1c\uc758 \uac1c\ubcc4 \uc7a5\uce58\ub97c \ud3ec\ud568\ud558\ub294 \ucc98\ub9ac\ub41c \uc6e8\uc774\ud37c\ub294 \uac1c\ubcc4 \ub2e4\uc774\ub85c \uc808\ub2e8\ub429\ub2c8\ub2e4. \ub808\uc774\uc800 \ub2e4\uc774\uc2f1 \ub610\ub294 \ub2e4\uc774\uc544\ubaac\ub4dc \ud1b1 \ub2e4\uc774\uc2f1\uc774 \uc77c\ubc18\uc801\uc778 \ubc29\ubc95\uc785\ub2c8\ub2e4. \uc815\ubc00\ub3c4\ub294 \ub2e4\uc774\uc758 \uce69\ud551 \ub610\ub294 \uc190\uc0c1\uc744 \ubc29\uc9c0\ud558\ub294 \ub370 \uc911\uc694\ud569\ub2c8\ub2e4. SiC\uc758 \uacbd\uc6b0 \uacbd\ub3c4\uac00 \uc2e4\ub9ac\ucf58\ubcf4\ub2e4 \ub2e4\uc774\uc2f1\uc744 \ub354 \uc5b4\ub835\uac8c \ub9cc\ub4ed\ub2c8\ub2e4.<\/strong> \ubaa8\ub4e0 \uc55e\uba74\uacfc \ub4b7\uba74 \uac00\uacf5\uc774 \uc644\ub8cc\ub418\uba74 \uc6e8\uc774\ud37c\ub97c \uac1c\ubcc4 \uce69(\ub2e4\uc774)\uc73c\ub85c \ub2e4\uc774\uc2f1\ud569\ub2c8\ub2e4. SiC\uc758 \uacbd\ub3c4\uc640 \ucde8\uc131\uc73c\ub85c \uc778\ud574 \ub808\uc774\uc800 \ub2e4\uc774\uc2f1 \ub610\ub294 \ud2b9\uc218 \ub2e4\uc774\uc544\ubaac\ub4dc \ube14\ub808\uc774\ub4dc \ud1b1\uc9c8 \uae30\uc220\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ub2e4\uc774\uc2f1 \uacf5\uc815\uc740 \ub2e4\uc774 \uc218\uc728\uc744 \uadf9\ub300\ud654\ud558\uace0 \ub2e4\uc774 \uac15\ub3c4\ub97c \uc720\uc9c0\ud558\uae30 \uc704\ud574 \uce58\ud551, \uade0\uc5f4 \ubc0f \ucee4\ud504 \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud574\uc57c \ud569\ub2c8\ub2e4. \uc2a4\ud154\uc2a4 \ub2e4\uc774\uc2f1\uc740 \uc810\uc810 \ub354 \ub9ce\uc774 \uc0ac\uc6a9\ub418\ub294 \ubc29\ubc95\uc785\ub2c8\ub2e4.<\/li>\n
              4. \ub2e4\uc774 \ubd80\ucc29:<\/strong> \uadf8\ub7f0 \ub2e4\uc74c \uc2f1\uade4\ub808\uc774\uc158\ub41c SiC \ub2e4\uc774\ub97c \ub9ac\ub4dc\ud504\ub808\uc784, \uc9c1\uc811 \ubcf8\ub529 \uad6c\ub9ac(DBC) \uae30\ud310 \ub610\ub294 \uae30\ud0c0 \ud328\ud0a4\uc9c0 \ubca0\uc774\uc2a4\uc5d0 \ubd80\ucc29\ud569\ub2c8\ub2e4. \ub2e4\uc774 \uc811\ucc29 \uc7ac\ub8cc(\uc608: \uc194\ub354, \uc740 \uc18c\uacb0 \ud398\uc774\uc2a4\ud2b8, \uc5d0\ud3ed\uc2dc)\ub294 \uc5f4 \ubc0f \uc804\uae30 \uc804\ub3c4\uc131, \uae30\uacc4\uc801 \uac15\ub3c4\uac00 \uc6b0\uc218\ud558\uace0 \ub192\uc740 \uc791\ub3d9 \uc628\ub3c4\ub97c \uacac\ub51c \uc218 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uc740 \uc18c\uacb0\uc740 \ub192\uc740 \uc5f4\uc804\ub3c4\uc728\uacfc \uc2e0\ub8b0\uc131\uc73c\ub85c \uc778\ud574 \uace0\uc804\ub825 SiC \ub514\ubc14\uc774\uc2a4\uc5d0 \uc120\ud638\ub429\ub2c8\ub2e4.<\/li>\n
              5. \uc640\uc774\uc5b4 \ubcf8\ub529 \/ \uc0c1\ud638 \uc5f0\uacb0:<\/strong> \uc804\uae30 \uc5f0\uacb0\uc740 SiC \ub2e4\uc774\uc758 \ubcf8\ub4dc \ud328\ub4dc\uc5d0\uc11c \ud328\ud0a4\uc9c0 \ub9ac\ub4dc \ub610\ub294 \uae30\ud310\uc73c\ub85c \uc774\ub8e8\uc5b4\uc9d1\ub2c8\ub2e4. \uc54c\ub8e8\ubbf8\ub284(Al) \ub610\ub294 \uad6c\ub9ac(Cu) \uc640\uc774\uc5b4\uac00 \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\uba70 \ucd08\uc74c\ud30c \ub610\ub294 \uc5f4\uc74c\ud30c \ubcf8\ub529\uc744 \ud1b5\ud574 \ubd80\ucc29\ub429\ub2c8\ub2e4. \uace0\uc804\ub825 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uad6c\ub9ac\uc120 \ub610\ub294 \ub9ac\ubcf8 \ubcf8\ub529\uc774 \uc804\ub958 \ucc98\ub9ac \ubc0f \uc5f4 \uc131\ub2a5\uc774 \ub354 \uc6b0\uc218\ud558\uae30 \ub54c\ubb38\uc5d0 \uc120\ud638\ub429\ub2c8\ub2e4. \uace0\uae09 \ud328\ud0a4\uc9d5\uc744 \uc704\ud574 \ud50c\ub9bd\uce69 \ubcf8\ub529 \ub610\ub294 \uad6c\ub9ac \ud544\ub7ec \ubc94\ud504\ub3c4 \ub4f1\uc7a5\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n
              6. \ud328\uc2dc\ubca0\uc774\uc158 \ubc0f \ucea1\uc290\ud654:<\/strong> \ud658\uacbd \uc624\uc5fc \ubb3c\uc9c8\uacfc \uae30\uacc4\uc801 \uc2a4\ud2b8\ub808\uc2a4, \ud2b9\ud788 \uc885\ub2e8 \uc601\uc5ed \uc8fc\ubcc0\uc73c\ub85c\ubd80\ud130 \ub2e4\uc774 \ud45c\uba74\uacfc \ubbfc\uac10\ud55c \uc811\ud569\ubd80\ub97c \ubcf4\ud638\ud558\uae30 \uc704\ud574 \ucd94\uac00\uc801\uc778 \ud328\uc2dc\ubca0\uc774\uc158 \ub808\uc774\uc5b4\ub97c \uc801\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub7f0 \ub2e4\uc74c \uc804\uccb4 \uc5b4\uc148\ube14\ub9ac\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ubab0\ub529 \ucef4\ud30c\uc6b4\ub4dc(\uac1c\ubcc4 \ud328\ud0a4\uc9c0\uc758 \uacbd\uc6b0)\ub85c \ucea1\uc290\ud654\ud558\uac70\ub098 \uc2e4\ub9ac\ucf58 \uc824 \ub610\ub294 \uae30\ud0c0 \ubcf4\ud638 \uc7ac\ub8cc\ub85c \ucc44\uc6cc\uc9c4 \ubaa8\ub4c8 \ucf00\uc774\uc2a4\uc5d0 \ub123\uc5b4 \uc804\uae30 \uc808\uc5f0 \ubc0f \uae30\uacc4\uc801 \uc548\uc815\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n
              7. \ub514\ubc14\uc774\uc2a4 \ud14c\uc2a4\ud2b8 \ubc0f \ubd84\ub958:<\/strong> \uac01\uac01\uc758 \ub2e4\uc774\uc2f1 \ubc0f\/\ub610\ub294 \ud328\ud0a4\uc9c0 \ub514\ubc14\uc774\uc2a4\ub294 \uc5c4\uaca9\ud55c \uc804\uae30 \ud14c\uc2a4\ud2b8\ub97c \uac70\uccd0 \ud56d\ubcf5 \uc804\uc555, \ub204\uc124 \uc804\ub958, \uc628 \uc0c1\ud0dc \uc800\ud56d \ubc0f \uc2a4\uc704\uce6d \ud2b9\uc131\uacfc \uac19\uc740 \ub9e4\uac1c\ubcc0\uc218 \uc0ac\uc591\uc744 \ucda9\uc871\ud558\ub294\uc9c0 \ud655\uc778\ud569\ub2c8\ub2e4. \ub514\ubc14\uc774\uc2a4\ub294 \uc131\ub2a5\uc5d0 \ub530\ub77c \ubd84\ub958(\ube44\ub2dd)\ub429\ub2c8\ub2e4. \uc870\uae30 \uace0\uc7a5\uc744 \uc120\ubcc4\ud558\uae30 \uc704\ud574 \uace0\uc628 \uc5ed\ubc29\ud5a5 \ubc14\uc774\uc5b4\uc2a4(HTRB) \ubc0f \uae30\ud0c0 \uc2a4\ud2b8\ub808\uc2a4 \ud14c\uc2a4\ud2b8\uac00 \uc885\uc885 \uc218\ud589\ub429\ub2c8\ub2e4.<\/li>\n<\/ol>\n

                \uc774\ub7ec\ud55c \uac01 \ud6c4\ucc98\ub9ac \ub2e8\uacc4\uc5d0\ub294 \uc804\ubb38 \uc7a5\ube44\uc640 \uc804\ubb38 \uc9c0\uc2dd\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \ub2e4\uc74c\uc744 \uc6d0\ud558\ub294 \uae30\uc5c5 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488 \uad6c\ub9e4<\/strong> \ub610\ub294 \uc790\uccb4 \uac1c\ubc1c\ud558\ub294 \uacbd\uc6b0, \uc774\ub7ec\ud55c \ubc31\uc5d4\ub4dc \ud504\ub85c\uc138\uc2a4\uc758 \ubcf5\uc7a1\uc131\uc744 \uc774\ud574\ud558\ub294 \uac83\uc740 \ucd5c\uc801\uc758 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5, \uc2e0\ub8b0\uc131 \ubc0f \ube44\uc6a9 \ud6a8\uc728\uc131\uc744 \ub2ec\uc131\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \uac15\ub825\ud55c \ud6c4\ucc98\ub9ac \uc5ed\ub7c9\uc744 \uac16\ucd98 \uacf5\uae09\uc5c5\uccb4\uc640 \ud611\ub825\ud558\uba74 \uacf5\uae09\ub9dd\uc744 \uac04\uc18c\ud654\ud558\uace0 \ub354 \ub192\uc740 \ud488\uc9c8\uc758 \ucd5c\uc885 \uc81c\ud488\uc744 \ubcf4\uc7a5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

                \uc7a5\uc560\ubb3c \uadf9\ubcf5\ud558\uae30: SiC \uc804\uc790 \uc81c\ud488 \uc81c\uc870\uc758 \uc77c\ubc18\uc801\uc778 \uacfc\uc81c \ud574\uacb0<\/h2>\n

                \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \uc804\uc790 \uc0b0\uc5c5\uc5d0 \ud601\uc2e0\uc801\uc778 \uc774\uc810\uc744 \uc81c\uacf5\ud558\uc9c0\ub9cc, \uad11\ubc94\uc704\ud55c \ucc44\ud0dd\uacfc \uc81c\uc870\uc5d0 \uc5b4\ub824\uc6c0\uc774 \uc5c6\ub294 \uac83\uc740 \uc544\ub2d9\ub2c8\ub2e4. \uace0\uc804\ub825 \ubc0f \uace0\uc8fc\ud30c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub9e4\uc6b0 \ub9e4\ub825\uc801\uc778 SiC\uc758 \ub3c5\ud2b9\ud55c \uc7ac\ub8cc \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uacb0\uc815 \uc131\uc7a5, \uc6e8\uc774\ud37c \uc81c\uc870, \ub514\ubc14\uc774\uc2a4 \uc124\uacc4 \ubc0f \uc804\uccb4 \ube44\uc6a9\uc5d0 \uc788\uc5b4\uc11c\ub3c4 \uc0c1\ub2f9\ud55c \uc7a5\uc560\ubb3c\uc774 \uc874\uc7ac\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uacfc\uc81c\ub97c \ud574\uacb0\ud558\ub294 \uac83\uc774 \ub2e4\uc74c\uacfc \uac19\uc740 \uc7a0\uc7ac\ub825\uc744 \ucd5c\ub300\ud55c \ud65c\uc6a9\ud558\uae30 \uc704\ud55c \ud575\uc2ec\uc785\ub2c8\ub2e4 \uace0\uae09 SiC \uc18c\uc7ac<\/strong> \ub354 \uc27d\uac8c \uc811\uadfc\ud560 \uc218 \uc788\ub3c4\ub85d \ud569\ub2c8\ub2e4.<\/p>\n

                SiC \uc804\uc790 \uc81c\ud488 \uc81c\uc870\uc758 \uc77c\ubc18\uc801\uc778 \uacfc\uc81c\uc640 \uadf8 \ud574\uacb0 \ubc29\ubc95\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n

                  \n
                • \ud06c\ub9ac\uc2a4\ud0c8 \uacb0\ud568 \uac10\uc18c:<\/strong> SiC \ub2e8\uacb0\uc815 \uc131\uc7a5(\uc77c\ubc18\uc801\uc73c\ub85c \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1 – PVT\ub97c \ud1b5\ud55c \uc131\uc7a5)\uc740 \ubcf5\uc7a1\ud55c \uace0\uc628 \uacf5\uc815\uc785\ub2c8\ub2e4. \uc131\uc7a5 \ub610\ub294 \ud6c4\uc18d \uc5d0\ud53c\ud0dd\uc2dc \uacfc\uc815\uc5d0\uc11c \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504(MP), \ub098\uc0ac \uc804\uc704, \uae30\uc800\uba74 \uc804\uc704(BPD), \uc2a4\ud0dc\ud0b9 \uacb0\ud568(SF) \ub4f1\uc758 \uacb0\ud568\uc774 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uacb0\ud568\uc740 \ub514\ubc14\uc774\uc2a4 \uc218\uc728, \uc131\ub2a5(\uc608: \ub204\uc124 \uc804\ub958, \uc2e0\ub8b0\uc131)\uc5d0 \uc2ec\uac01\ud55c \uc601\ud5a5\uc744 \ubbf8\uce58\uba70 \uc870\uae30 \uace0\uc7a5\uc744 \uc77c\uc73c\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.
                  \n \uc644\ud654:<\/em> \uc0c1\ub2f9\ud55c R&D \ub178\ub825\uc73c\ub85c \ucca8\ub2e8 \uc2dc\ub529 \ubc29\ubc95, \ucd5c\uc801\ud654\ub41c \uc628\ub3c4 \uad6c\ubc30, \uacb0\ud568 \uac10\uc18c \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \uacf5\uc815(\uc608: LPE \uce58\uc720, BPD\uc5d0\uc11c TED\ub85c\uc758 \ubcc0\ud658) \ub4f1 \uacb0\uc815 \uc131\uc7a5 \uae30\uc220\uc774 \uac1c\uc120\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc5c4\uaca9\ud55c \uc7ac\ub8cc \uac80\uc0ac \ubc0f \ud488\uc9c8 \uad00\ub9ac\ub3c4 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n
                • SiC MOSFET\uc758 \uac8c\uc774\ud2b8 \uc0b0\ud654\ub9c9 \uc2e0\ub8b0\uc131:<\/strong> MOSFET\uc5d0\uc11c SiC\uc640 \uac8c\uc774\ud2b8 \uc720\uc804\uccb4(\uc77c\ubc18\uc801\uc73c\ub85c SiO2) \uc0ac\uc774\uc758 \uc778\ud130\ud398\uc774\uc2a4\ub294 \ub9e4\uc6b0 \uc911\uc694\ud55c \uc601\uc5ed\uc785\ub2c8\ub2e4. \uc774 SiO2\/SiC \uc778\ud130\ud398\uc774\uc2a4\ub294 Si\/SiO2 \uc778\ud130\ud398\uc774\uc2a4\uc5d0 \ube44\ud574 \uc778\ud130\ud398\uc774\uc2a4 \ud2b8\ub7a9($D_{it}$)\uacfc \uadfc\uacc4\uba74 \uc0b0\ud654\ubb3c \ud2b8\ub7a9(NIOT)\uc758 \ubc00\ub3c4\uac00 \ub354 \ub192\uc740 \uacbd\ud5a5\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b8\ub7a9\uc740 \ucc44\ub110 \uc774\ub3d9\uc131\uc744 \uac10\uc18c\uc2dc\ud0a4\uace0 \uc784\uacc4 \uc804\uc555 \ubd88\uc548\uc815\uc131\uc744 \uc720\ubc1c\ud558\uba70 \ub192\uc740 \uc804\uae30\uc7a5 \ubc0f \uc628\ub3c4\uc5d0\uc11c \uc7a5\uae30\uc801\uc778 \uc2e0\ub8b0\uc131\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4.
                  \n \uc644\ud654:<\/em> \uc0b0\ud654 \uc9c8\uc18c(NO) \ub610\ub294 \uae30\ud0c0 \uc9c8\uc18c \ud568\uc720 \ud658\uacbd\uc5d0\uc11c \uc0b0\ud654 \ud6c4 \uc5b4\ub2d0\ub9c1\uc740 \uc778\ud130\ud398\uc774\uc2a4 \ud2b8\ub7a9\uc744 \ubd80\ub3d9\ud0dc\ud654\ud558\uace0 \uac8c\uc774\ud2b8 \uc0b0\ud654\ubb3c \ud488\uc9c8\uc744 \uac1c\uc120\ud558\ub294 \ub370 \ub9e4\uc6b0 \ud6a8\uacfc\uc801\uc774\uc5c8\uc2b5\ub2c8\ub2e4. \ub300\uccb4 \uac8c\uc774\ud2b8 \uc720\uc804\uccb4\uc640 \uace0\uae09 \uc778\ud130\ud398\uc774\uc2a4 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uae30\uc220\ub3c4 \uc5f0\uad6c \uc911\uc785\ub2c8\ub2e4.<\/li>\n
                • \ube44\uc6a9 \ud6a8\uc728\uc801\uc778 \uc5d0\ud53c\ud0dd\uc2dc \ubc0f \ub3c4\ud551:<\/strong> \ub450\uaed8\uc640 \ub3c4\ud551 \ud504\ub85c\ud30c\uc77c\uc774 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ub41c \uace0\ud488\uc9c8 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc740 SiC \ub514\ubc14\uc774\uc2a4\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \ub192\uc740 \ucc98\ub9ac\ub7c9\uacfc \ub0ae\uc740 \ube44\uc6a9\uc73c\ub85c \uc774\ub97c \ub2ec\uc131\ud558\ub294 \uac83\uc740 \uc5ec\uc804\ud788 \uc5b4\ub824\uc6b4 \uacfc\uc81c\uc785\ub2c8\ub2e4. SiC\uc758 P\ud615 \ub3c4\ud551(\uc77c\ubc18\uc801\uc73c\ub85c \uc54c\ub8e8\ubbf8\ub284 \uc0ac\uc6a9)\uc740 \uc218\uc6a9\uccb4\uc758 \ub192\uc740 \ud65c\uc131\ud654 \uc5d0\ub108\uc9c0\ub85c \uc778\ud574 \ud45c\uba74\uc744 \uc190\uc0c1\uc2dc\ud0ac \uc218 \uc788\ub294 \uace0\uc628\uc758 \uc8fc\uc785 \ud6c4 \uc5b4\ub2d0\ub9c1\uc774 \ud544\uc694\ud558\uae30 \ub54c\ubb38\uc5d0 \ud2b9\ud788 \uc5b4\ub835\uc2b5\ub2c8\ub2e4.
                  \n \uc644\ud654:<\/em> \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \ubc18\uc751\uae30 \uc124\uacc4, \uac1c\uc120\ub41c \uc804\uad6c\uccb4 \uc7ac\ub8cc, \ucd5c\uc801\ud654\ub41c \uc5b4\ub2d0\ub9c1 \uacf5\uc815\uc758 \ubc1c\uc804\uc73c\ub85c \uc5d0\ud53c\uce35 \ud488\uc9c8\uc744 \uac1c\uc120\ud558\uace0 \ube44\uc6a9\uc744 \uc808\uac10\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\uc628 \uc8fc\uc785 \uae30\uc220\ub3c4 \ub354 \ub098\uc740 \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654\uc640 \uc190\uc0c1 \uac10\uc18c\ub97c \uc704\ud574 \uac1c\uc120\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n
                • \uace0\uc628 \ucc98\ub9ac \ubc0f \uc624\ubbf9 \uc811\uc810:<\/strong> \uacb0\uc815 \uc131\uc7a5, \uc5d0\ud53c\ud0dd\uc2dc, \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654 \uc5b4\ub2d0\ub9c1, \uc634 \uc811\ucd09 \ud615\uc131\uc744 \ud3ec\ud568\ud55c \ub9ce\uc740 SiC \uc81c\uc870 \ub2e8\uacc4\uc5d0\ub294 \ub9e4\uc6b0 \ub192\uc740 \uc628\ub3c4(\ub300\uac1c 1500\u00b0C \uc774\uc0c1)\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uace0\uc628\uc740 \uc7a5\ube44, \uacf5\uc815 \uc81c\uc5b4 \ubc0f \uc7ac\ub8cc \ud638\ud658\uc131 \uce21\uba74\uc5d0\uc11c \ubb38\uc81c\ub97c \uc57c\uae30\ud569\ub2c8\ub2e4. N\ud615 \ubc0f P\ud615 SiC \ubaa8\ub450\uc5d0 \uc548\uc815\uc801\uc774\uace0 \uc800\ud56d\uc774 \ub0ae\uc740 \uc634 \uc811\uc810\uc744 \ud615\uc131\ud558\ub294 \uac83\uc740 \ub9e4\uc6b0 \uc911\uc694\ud558\uc9c0\ub9cc \uc5b4\ub835\uc2b5\ub2c8\ub2e4.
                  \n \uc644\ud654:<\/em> \ud2b9\uc218 \uace0\uc628 \ucc98\ub9ac \uc7a5\ube44\uc640 \uc0c8\ub85c\uc6b4 \uc811\ucd09 \uae08\uc18d\ud654 \ubc29\uc2dd(\uc608: P\ud615\uc758 \uacbd\uc6b0 Ti\/Al, N\ud615\uc758 \uacbd\uc6b0 Ni-\uaddc\uc18c)\uacfc \uae09\uc18d \uc5f4 \uc5b4\ub2d0\ub9c1(RTA)\uc758 \uac1c\ubc1c\ub85c \uc774\ub7ec\ud55c \ubb38\uc81c\ub97c \ud574\uacb0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n
                • \ub514\ubc14\uc774\uc2a4 \ud30c\ub77c\ubbf8\ud130 \uade0\uc77c\uc131 \ubc0f \uc218\uc728:<\/strong> \uc6e8\uc774\ud37c \uc804\uccb4\uc640 \uc6e8\uc774\ud37c \uac04 \ub514\ubc14\uc774\uc2a4 \ud30c\ub77c\ubbf8\ud130(\uc608: $V_{th}$, $R_{DS(on)}$)\ub97c \uc5c4\uaca9\ud558\uac8c \uc81c\uc5b4\ud558\ub294 \uac83\uc740 \ub300\uaddc\ubaa8 \uc81c\uc870\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc7ac\ub8cc \ud488\uc9c8\uc758 \ubcc0\ud654
                  ","protected":false},"excerpt":{"rendered":"

                  SiC: \uc804\uc790 \uc0b0\uc5c5 \ud601\uc2e0\uc758 \uc6d0\ub3d9\ub825 \uc18c\uac1c: \ud604\ub300 \uc804\uc790\uc81c\ud488\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \uc911\ucd94\uc801 \uc5ed\ud560 \ube60\ub974\uac8c \uc9c4\ud654\ud558\ub294 \uc804\uc790 \uc0b0\uc5c5\uc758 \ud658\uacbd\uc5d0\uc11c \ub354 \ub192\uc740 \uc804\ub825 \ubc00\ub3c4, \ub354 \ub192\uc740 \ud6a8\uc728\uc131, \uadf9\ud55c\uc758 \uc870\uac74\uc5d0\uc11c \ub6f0\uc5b4\ub09c \uc131\ub2a5\uc744 \uc81c\uacf5\ud560 \uc218 \uc788\ub294 \uc18c\uc7ac\uc5d0 \ub300\ud55c \ud0d0\uad6c\ub294 \ub04a\uc784\uc5c6\uc774 \uacc4\uc18d\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58(Si)\uc73c\ub85c \uad6c\uc131\ub41c \ud654\ud569\ubb3c \ubc18\ub3c4\uccb4 \uc18c\uc7ac\uc778 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)\uac00 \ubc14\ub85c \uadf8 \uc8fc\uc778\uacf5\uc785\ub2c8\ub2e4;<\/p>","protected":false},"author":3,"featured_media":2333,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_gspb_post_css":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-2538","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized"],"acf":{"en_gb-title":"","en_gb-meta":"","ja-title":"","ja-meta":"","ja-content":"","ko-title":"","ko-meta":"","ko-content":"","nl-title":"","nl-meta":"","nl-content":"","es-title":"","es-meta":"","es-content":"","ru-title":"","ru-meta":"","ru-content":"","tr-title":"","tr-meta":"","tr-content":"","pl-title":"","pl-meta":"","pl-content":"","pt-title":"","pt-meta":"","pt-content":"","de-title":"","de-meta":"","de-content":"","fr-title":"","fr-meta":"","fr-content":""},"taxonomy_info":{"category":[{"value":1,"label":"Uncategorized"}]},"featured_image_src_large":["https:\/\/sicarbtech.com\/wp-content\/uploads\/2025\/05\/Custom-Silicon-Carbide-Products-22_1-1.jpg",1024,1024,false],"author_info":{"display_name":"yiyunyinglucky","author_link":"https:\/\/sicarbtech.com\/ko\/author\/yiyunyinglucky\/"},"comment_info":16,"category_info":[{"term_id":1,"name":"Uncategorized","slug":"uncategorized","term_group":0,"term_taxonomy_id":1,"taxonomy":"category","description":"","parent":0,"count":793,"filter":"raw","cat_ID":1,"category_count":793,"category_description":"","cat_name":"Uncategorized","category_nicename":"uncategorized","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2538","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/comments?post=2538"}],"version-history":[{"count":2,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2538\/revisions"}],"predecessor-version":[{"id":4937,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2538\/revisions\/4937"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media\/2333"}],"wp:attachment":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media?parent=2538"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/categories?post=2538"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/tags?post=2538"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}