{"id":2531,"date":"2025-09-02T09:11:00","date_gmt":"2025-09-02T09:11:00","guid":{"rendered":"https:\/\/casnewmaterials.com\/?p=2531"},"modified":"2025-08-13T01:01:33","modified_gmt":"2025-08-13T01:01:33","slug":"sic-enhancing-rf-device-performance-reliability","status":"publish","type":"post","link":"https:\/\/sicarbtech.com\/ko\/sic-enhancing-rf-device-performance-reliability\/","title":{"rendered":"SiC Enhancing RF Device Performance &#038; Reliability"},"content":{"rendered":"<h1>RF \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5 \ubc0f \uc2e0\ub8b0\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 SiC<\/h1>\n<h2>\uc18c\uac1c \ubcf4\uc774\uc9c0 \uc54a\ub294 \uac15\uc790 - RF \uae30\uc220\uc758 \ub9de\ucda4\ud615 SiC<\/h2>\n<p>\ube60\ub974\uac8c \uc9c4\ud654\ud558\ub294 \ubb34\uc120 \uc8fc\ud30c\uc218(RF) \uae30\uc220 \ud658\uacbd\uc5d0\uc11c \ub354 \ub192\uc740 \uc131\ub2a5, \ub354 \ub192\uc740 \uc2e0\ub8b0\uc131, \ub354 \ucef4\ud329\ud2b8\ud55c \uc194\ub8e8\uc158\uc5d0 \ub300\ud55c \uc694\uad6c\ub294 \ub04a\uc784\uc5c6\uc774 \uc774\uc5b4\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ucca8\ub2e8 \ud1b5\uc2e0 \uc2dc\uc2a4\ud15c\uacfc \ub808\uc774\ub354 \uae30\uc220\ubd80\ud130 \ucd5c\ucca8\ub2e8 \uc758\ub8cc \uae30\uae30 \ubc0f \uc0b0\uc5c5\uc6a9 \ub09c\ubc29\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 RF \ub514\ubc14\uc774\uc2a4\ub294 \uc911\ucd94\uc801\uc778 \uc5ed\ud560\uc744 \ub2f4\ub2f9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubc1c\uc804\uc758 \uc911\uc2ec\uc5d0\ub294 \ub180\ub77c\uc6b4 \uc18c\uc7ac\uac00 \uc788\uc2b5\ub2c8\ub2e4: \ubc14\ub85c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)\uc785\ub2c8\ub2e4. \ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc81c\ud488\uc740 \uac00\ub2a5\uc131\uc758 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\ub294 \uace0\uc720\ud55c \ud2b9\uc131 \uc870\ud569\uc744 \uc81c\uacf5\ud558\uba74\uc11c \uace0\uc131\ub2a5 RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc810\uc810 \ub354 \ud544\uc218\uc801\uc778 \uc694\uc18c\uac00 \ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ube14\ub85c\uadf8 \uac8c\uc2dc\ubb3c\uc5d0\uc11c\ub294 SiC\uac00 \uc5b4\ub5bb\uac8c RF \ub514\ubc14\uc774\uc2a4\uc758 \uc131\ub2a5\uacfc \uc2e0\ub8b0\uc131\uc744 \ud601\uc2e0\ud558\uace0 \uc788\ub294\uc9c0 \uc0b4\ud3b4\ubcf4\uace0, \uc560\ud50c\ub9ac\ucf00\uc774\uc158, \uc7a5\uc810, \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d, \uadf8\ub9ac\uace0 \uc911\uc694\ud55c \uc694\uad6c \uc0ac\ud56d\uc5d0 \uc801\ud569\ud55c \uc81c\uc870 \ud30c\ud2b8\ub108\ub97c \uc120\ud0dd\ud558\ub294 \ubc29\ubc95\uc744 \uc0b4\ud3b4\ubd05\ub2c8\ub2e4. \ubc18\ub3c4\uccb4, \ud56d\uacf5\uc6b0\uc8fc, \uc804\ub825 \uc804\uc790 \ub4f1\uc758 \uc0b0\uc5c5 \ubd84\uc57c\uc758 \uc5d4\uc9c0\ub2c8\uc5b4, \uc870\ub2ec \uad00\ub9ac\uc790, \uae30\uc220 \uad6c\ub9e4\uc790\uc5d0\uac8c \ub9de\ucda4\ud615 SiC\uc758 \ubbf8\ubb18\ud55c \ucc28\uc774\ub97c \uc774\ud574\ud558\ub294 \uac83\uc740 \ucc28\uc138\ub300 RF \uae30\ub2a5\uc744 \ud65c\uc6a9\ud558\ub294 \ub370 \uc788\uc5b4 \ud575\uc2ec\uc801\uc778 \uc694\uc18c\uc785\ub2c8\ub2e4.<\/p>\n<p>\ubc38\ube0c\uc6a9 <strong>\ub9de\ucda4\ud615 SiC \uad6c\uc131 \uc694\uc18c<\/strong> \ub97c RF \uc2dc\uc2a4\ud15c\uc5d0 \ub3c4\uc785\ud558\ub294 \uac83\uc740 \ub2e8\uc21c\ud55c \uc5c5\uadf8\ub808\uc774\ub4dc\uac00 \uc544\ub2c8\ub77c \ud601\uc2e0\uc801\uc778 \ub2e8\uacc4\uc785\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58(Si) \ubc0f \uac08\ub968\ube44\uc18c(GaAs)\uc640 \uac19\uc740 \uae30\uc874 \uc18c\uc7ac\ub294 RF \uc0b0\uc5c5\uc5d0\uc11c \uc798 \uc0ac\uc6a9\ub418\uc5b4 \uc654\uc9c0\ub9cc \ud2b9\ud788 \ub192\uc740 \uc804\ub825 \ubc00\ub3c4, \ub192\uc740 \uc8fc\ud30c\uc218 \ubc0f \uadf9\ud55c\uc758 \uc628\ub3c4\uc5d0\uc11c \uc810\uc810 \ub354 \uc791\ub3d9 \ud55c\uacc4\uc5d0 \ubd80\ub52a\ud788\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4\uc778 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 RF \ub514\ubc14\uc774\uc2a4\uac00 \uae4c\ub2e4\ub85c\uc6b4 \uc870\uac74\uc5d0\uc11c \ubcf4\ub2e4 \ud6a8\uc728\uc801\uc774\uace0 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc788\ub3c4\ub85d \ud558\ub294 \uc6b0\uc218\ud55c \ub300\uc548\uc73c\ub85c \ubd80\uc0c1\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4 <strong>siC\uc640 \uac19\uc740 \uae30\uc220 \uc138\ub77c\ubbf9<\/strong> 5G \uae30\uc9c0\uad6d\ubd80\ud130 \uc815\uad50\ud55c \uad70\uc6a9 \ub808\uc774\ub354 \uc2dc\uc2a4\ud15c\uacfc \uc704\uc131 \ud1b5\uc2e0\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \ucc28\uc138\ub300 RF \uc778\ud504\ub77c\uc5d0 \uc5c6\uc5b4\uc11c\ub294 \uc548 \ub420 \ud544\uc218 \uc694\uc18c\uc785\ub2c8\ub2e4.<\/p>\n<h2>\ucd5c\uc2e0 RF \ub514\ubc14\uc774\uc2a4 \uae30\ub2a5\uc5d0 \ub300\ud55c SiC\uc758 \uc911\uc694\ud55c \uc601\ud5a5<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \uc804\ub825, \uc8fc\ud30c\uc218 \ubc0f \uc5f4 \uad00\ub9ac\uc758 \ud575\uc2ec \uacfc\uc81c\ub97c \uc9c1\uc811\uc801\uc73c\ub85c \ud574\uacb0\ud558\uba74\uc11c \ucd5c\uc2e0 RF \uc7a5\uce58\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5\uc774 \ub9e4\uc6b0 \ud07d\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \ub6f0\uc5b4\ub09c \uc7ac\ub8cc \ud2b9\uc131\uc740 \ub2e4\uc591\ud55c RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uac00\uc2dc\uc801\uc778 \uc131\ub2a5 \ud5a5\uc0c1\uc73c\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4 <strong>SiC RF \uc804\ub825 \ud2b8\ub79c\uc9c0\uc2a4\ud130<\/strong> \uc99d\ud3ed\uae30\ub294 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \uc99d\ud3ed\uae30\ubcf4\ub2e4 \ud6e8\uc52c \ub354 \ub192\uc740 \uc804\ub825 \uc218\uc900\uc744 \ucc98\ub9ac\ud558\uace0 \ub354 \ub192\uc740 \uc628\ub3c4\uc5d0\uc11c \uc791\ub3d9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ub354 \uc791\uace0 \ud6a8\uc728\uc801\uc778 \uc804\ub825 \ubaa8\ub4c8\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc5b4 \ud56d\uacf5\uc6b0\uc8fc, \ubc29\uc704, \ud734\ub300\uc6a9 \ud1b5\uc2e0 \uc7a5\uce58\uc5d0\uc11c \uc911\uc694\ud55c \uc694\uc18c\uc778 \uc2dc\uc2a4\ud15c \ud06c\uae30\uc640 \ub0c9\uac01 \uc694\uad6c \uc0ac\ud56d\uc744 \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ub610\ud55c SiC\uc758 \ub192\uc740 \ud56d\ubcf5 \uc804\uae30\uc7a5(\uc2e4\ub9ac\ucf58\uc758 \uc57d 10\ubc30)\uc740 \ud6e8\uc52c \ub354 \ub192\uc740 \uc804\uc555\uc744 \uacac\ub51c \uc218 \uc788\ub294 \uc7a5\uce58\ub97c \uc81c\uc791\ud560 \uc218 \uc788\uac8c \ud574\uc90d\ub2c8\ub2e4. \uc774\ub294 \ubc29\uc1a1 \uc1a1\uc2e0\uae30 \ubc0f \uc0b0\uc5c5\uc6a9 \ud50c\ub77c\uc988\ub9c8 \uc0dd\uc131\uacfc \uac19\uc740 \uace0\ucd9c\ub825 RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud2b9\ud788 \uc720\uc6a9\ud569\ub2c8\ub2e4. \ub610\ud55c \uc774 \uc18c\uc7ac\uc758 \ub192\uc740 \ud3ec\ud654 \uc804\uc790 \uc18d\ub3c4\ub294 \uace0\uc8fc\ud30c \uc791\ub3d9\uc5d0 \uc801\ud569\ud558\uc5ec \ud1b5\uc2e0 \ubc0f \ub808\uc774\ub354 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ub354 \uc120\uba85\ud55c \uc2e0\ud638\uc640 \ub354 \ub113\uc740 \ub300\uc5ed\ud3ed\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4. \uc0ac\uc6a9 <strong>\uace0\uc8fc\ud30c SiC \uae30\ud310<\/strong> \ub294 \ud544\ud130 \ubc0f \ucee4\ud50c\ub7ec\uc640 \uac19\uc740 \uc791\uace0 \ud6a8\uc728\uc801\uc778 \uc218\ub3d9 RF \ubd80\ud488 \uac1c\ubc1c\uc5d0\ub3c4 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud558\uba70, RF \uc601\uc5ed\uc5d0\uc11c SiC\uc758 \ub2e4\ubaa9\uc801\uc131\uacfc \uc911\uc694\uc131\uc744 \ub354\uc6b1 \uac15\uc870\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc790\ub3d9\ucc28 \ub808\uc774\ub354 \uc2dc\uc2a4\ud15c\ubd80\ud130 \uac15\ub825\ud55c RF \ud1b5\uc2e0\uc774 \ud544\uc694\ud55c \uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc778\ubc84\ud130\uc5d0 \uc774\ub974\ub294 \uc0b0\uc5c5\uc5d0\uc11c \uc810\uc810 \ub354 \ub9ce\uc740 \uc0b0\uc5c5\uc774 <strong>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc RF \ud328\ud0a4\uc9d5<\/strong> \ub0b4\uad6c\uc131 \ud5a5\uc0c1\uc744 \uc704\ud55c \uc194\ub8e8\uc158\uc785\ub2c8\ub2e4.<\/p>\n<h2>\ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uac00 RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \ud310\ub3c4\ub97c \ubc14\uafb8\ub294 \uc774\uc720<\/h2>\n<p>RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub97c \uc120\ud0dd\ud558\ub294 \uc774\uc720\ub294 \uc804\uae30\uc801, \uc5f4\uc801, \uae30\uacc4\uc801 \ud2b9\uc131\uc758 \ub3c5\ubcf4\uc801\uc778 \uc870\ud569\uc774 \ucd5c\uc2e0 RF \uc2dc\uc2a4\ud15c\uc758 \uc5c4\uaca9\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucd1d\uccb4\uc801\uc73c\ub85c \ucda9\uc871\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \ud2b9\uc815 \uc131\ub2a5 \uc9c0\ud45c, \ud3fc \ud329\ud130 \ub610\ub294 \uc6b4\uc601 \ud658\uacbd\uc774 \uc911\uc694\ud55c \uacbd\uc6b0 \uc77c\ubc18 \uae30\uc131 \ubd80\ud488\uc740 \uc885\uc885 \ubd80\uc871\ud569\ub2c8\ub2e4. \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc744 \ud1b5\ud574 \uc5d4\uc9c0\ub2c8\uc5b4\ub294 \uac00\uc7a5 \ud544\uc694\ud55c \uacf3\uc5d0\uc11c SiC\uc758 \uace0\uc720\ud55c \uc7a5\uc810\uc744 \uc815\ud655\ud558\uac8c \ud65c\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>\uc6b0\uc218\ud55c \uc5f4 \uad00\ub9ac:<\/strong> SiC\ub294 \uc2e4\ub9ac\ucf58\ubcf4\ub2e4 \uc5f4\uc804\ub3c4\uc728\uc774 \uc57d 3\ubc30 \ub192\uace0 \ub2e4\ub978 \ub9ce\uc740 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc\ubcf4\ub2e4 \ud6e8\uc52c \uc6b0\uc218\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c RF \ub514\ubc14\uc774\uc2a4\uac00 \uc5f4\uc744 \ub354 \ud6a8\uacfc\uc801\uc73c\ub85c \ubc29\ucd9c\ud558\uc5ec \uc791\ub3d9 \uc628\ub3c4\ub97c \ub0ae\ucd94\uace0 \uc131\ub2a5 \uc548\uc815\uc131\uc744 \uac1c\uc120\ud558\uba70 \uc2e0\ub8b0\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uace0\ucd9c\ub825 RF \uc99d\ud3ed\uae30 \ubc0f \uc1a1\uc2e0\uae30\uc758 \uacbd\uc6b0 \ubd80\ud53c\uac00 \ud06c\uace0 \ubcf5\uc7a1\ud55c \ub0c9\uac01 \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud55c \uc758\uc874\ub3c4\uac00 \uc904\uc5b4\ub4ed\ub2c8\ub2e4.<\/li>\n<li><strong>\ud5a5\uc0c1\ub41c \uc804\ub825 \ucc98\ub9ac:<\/strong> \ub192\uc740 \uc784\uacc4 \uc804\uae30\uc7a5 \uac15\ub3c4(\uc57d 2.5~3 MV\/cm)\ub97c \uac00\uc9c4 SiC \ub514\ubc14\uc774\uc2a4\ub294 Si \ub610\ub294 GaAs\uc5d0 \ube44\ud574 \ud6e8\uc52c \ub354 \ub192\uc740 \uc804\uc555\uacfc \uc804\ub825 \ubc00\ub3c4\ub97c \ucc98\ub9ac\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \ub808\uc774\ub354, \uc804\uc790\uc804, 5G\/6G \uae30\uc9c0\uad6d\uacfc \uac19\uc740 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud544\uc218\uc801\uc778 \ub354 \uc791\uc740 \ub514\ubc14\uc774\uc2a4 \ud48b\ud504\ub9b0\ud2b8\uc5d0\uc11c \ub354 \uac15\ub825\ud55c RF \uc2e0\ud638\ub85c \ubcc0\ud658\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\ub354 \ub192\uc740 \uc8fc\ud30c\uc218 \uc791\ub3d9:<\/strong> SiC\uc758 \ub192\uc740 \uc804\uc790 \ud3ec\ud654 \uc18d\ub3c4\ub294 \ub354 \ube60\ub978 \uc2a4\uc704\uce6d \uc18d\ub3c4\ub97c \uac00\ub2a5\ud558\uac8c \ud558\uc5ec \ub354 \ub192\uc740 \uc8fc\ud30c\uc218\uc5d0\uc11c \uc791\ub3d9\ud560 \uc218 \uc788\uac8c \ud569\ub2c8\ub2e4. \uc774\ub294 \uace0\uae09 \ud1b5\uc2e0 \uc2dc\uc2a4\ud15c, \uc704\uc131 \ub9c1\ud06c \ubc0f \uace0\ud574\uc0c1\ub3c4 \ub808\uc774\ub354\uc5d0 \ud544\uc218\uc801\uc774\uba70 \ub370\uc774\ud130 \uc804\uc1a1 \ubc0f \uac10\uc9c0\uc758 \uacbd\uacc4\ub97c \ub113\ud600\uc90d\ub2c8\ub2e4.<\/li>\n<li><strong>\uc548\uc815\uc131 \ubc0f \uc218\uba85 \ud5a5\uc0c1:<\/strong> \uace0\uc628 \ubc0f \ubc29\uc0ac\uc120\uc5d0 \ub300\ud55c \ub0b4\uc131\uc744 \ud3ec\ud568\ud55c SiC \uace0\uc720\uc758 \uacac\uace0\uc131\uc740 \ud56d\uacf5\uc6b0\uc8fc, \ubc29\uc704 \ubc0f \uc0b0\uc5c5 \ud658\uacbd\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uc5f4\uc545\ud55c \ud658\uacbd\uc5d0\uc11c\ub3c4 RF \ub514\ubc14\uc774\uc2a4\uc758 \uc791\ub3d9 \uc218\uba85\uc744 \uc5f0\uc7a5\ud558\uace0 \uc2e0\ub8b0\uc131\uc744 \ub192\uc774\ub294 \ub370 \uae30\uc5ec\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc720\uc9c0\ubcf4\uc218 \ube44\uc6a9\uc774 \uc808\uac10\ub418\uace0 \uc2dc\uc2a4\ud15c \uac00\ub3d9 \uc2dc\uac04\uc774 \ud5a5\uc0c1\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\ud06c\uae30, \ubb34\uac8c, \uc804\ub825(SWaP) \uac10\uc18c:<\/strong> \ub354 \uc791\uc740 \ud328\ud0a4\uc9c0\ub85c \ub354 \ub9ce\uc740 \uc804\ub825\uc744 \ucc98\ub9ac\ud558\uace0 \ub354 \ub192\uc740 \uc628\ub3c4\uc5d0\uc11c \ud6a8\uc728\uc801\uc73c\ub85c \uc791\ub3d9\ud558\ub294 SiC\uc758 \ub2a5\ub825 \ub355\ubd84\uc5d0 RF \uc2dc\uc2a4\ud15c\uc758 \uc804\uccb4 \ud06c\uae30, \ubb34\uac8c \ubc0f \uc804\ub825 \uc18c\ube44\ub97c \ud06c\uac8c \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \ubaa8\ubc14\uc77c, \ud56d\uacf5 \ubc0f \uc6b0\uc8fc \uae30\ubc18 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud55c \uc774\uc810\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\ub9de\ucda4\ud615 \uc131\ub2a5:<\/strong> \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc744 \ud1b5\ud574 SiC \uc7ac\ub8cc \ud2b9\uc131(\uc608: \ub3c4\ud551 \uc218\uc900, \uacb0\uc815 \ubc29\ud5a5)\uacfc \ubd80\ud488 \uc124\uacc4(\uc608: \ud615\uc0c1, \uae08\uc18d\ud654)\ub97c \ucd5c\uc801\ud654\ud558\uc5ec \uc774\ub4dd \uadf9\ub300\ud654, \uc7a1\uc74c \uc218\uce58 \ucd5c\uc18c\ud654 \ub610\ub294 \ud2b9\uc815 \uc784\ud53c\ub358\uc2a4 \ub9e4\uce6d \ub2ec\uc131 \ub4f1 \ud2b9\uc815 RF \uc131\ub2a5 \ubaa9\ud45c\ub97c \ucda9\uc871\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\ub41c SiC \uc194\ub8e8\uc158\uc744 <strong>\ub9de\ucda4\ud615 SiC RF \uc194\ub8e8\uc158<\/strong>\ub97c \ud1b5\ud574 \uae30\uc5c5\uc740 \uadf8 \uc5b4\ub290 \ub54c\ubcf4\ub2e4 \uac15\ub825\ud558\uace0 \ud6a8\uc728\uc801\uc774\uba70 \ucef4\ud329\ud2b8\ud558\uace0 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 RF \uc2dc\uc2a4\ud15c\uc744 \uac1c\ubc1c\ud558\uc5ec \uacbd\uc7c1 \uc6b0\uc704\ub97c \ud655\ubcf4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub9de\ucda4\ud615 \uc811\uadfc \ubc29\uc2dd\uc740 \ucd5c\uc885 \uad6c\uc131 \uc694\uc18c\uac00 \ub354 \ud070 RF \uc2dc\uc2a4\ud15c \ub0b4\uc5d0\uc11c \uc6d0\ud65c\ud558\uac8c \ud1b5\ud569\ub418\uace0 \ucd5c\uc801\uc758 \uc131\ub2a5\uc744 \ubc1c\ud718\ud558\ub3c4\ub85d \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<h2>\ucd5c\uc801\uc758 RF \uc131\ub2a5\uc744 \uc704\ud55c \uc8fc\uc694 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ub4f1\uae09 \ubc0f \uc870\uc131<\/h2>\n<p>SiC \uae30\ubc18 RF \ub514\ubc14\uc774\uc2a4\uc758 \uc131\ub2a5\uc740 \uc0ac\uc6a9\ub418\ub294 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc18c\uc7ac\uc758 \ud2b9\uc815 \ub4f1\uae09\uacfc \ud3f4\ub9ac\ud0c0\uc785\uc5d0 \ub530\ub77c \ud06c\uac8c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. RF \uc2a4\ud399\ud2b8\ub7fc \ub0b4\uc758 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\ub9c8\ub2e4 \uc804\uae30 \uc804\ub3c4\ub3c4, \uc800\ud56d\ub960 \ubc0f \uacb0\uc815 \ud488\uc9c8\uc5d0 \ub300\ud55c \uc694\uad6c \uc0ac\ud56d\uc774 \ub2e4\ub985\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub258\uc559\uc2a4\ub97c \uc774\ud574\ud558\ub294 \uac83\uc740 \ub9de\ucda4\ud615 \ubd80\ud488\uc5d0 \uc801\ud569\ud55c SiC\ub97c \uc120\ud0dd\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<table>\n<thead>\n<tr>\n<th>SiC \ub4f1\uae09\/\uc720\ud615<\/th>\n<th>RF\uc758 \uc8fc\uc694 \ud2b9\uc131<\/th>\n<th>\uc77c\ubc18\uc801\uc778 RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>\uace0\uc21c\ub3c4 \ubc18\uc808\uc5f0(HPSI) 4H-SiC<\/strong><\/td>\n<td>\ub9e4\uc6b0 \ub192\uc740 \uc800\ud56d\ub960(&gt;10<sup>9<\/sup> \u03a9-cm), \ub0ae\uc740 RF \uc190\uc2e4, \uc6b0\uc218\ud55c \uc5f4 \uc804\ub3c4\uc131, \ub192\uc740 \ud56d\ubcf5\uc7a5. \uae30\ud310\uc73c\ub85c \uc778\ud55c \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \uace0\uc8fc\ud30c\uc218\uc5d0\uc11c \uc2e0\ud638 \ubb34\uacb0\uc131\uc744 \ubcf4\uc7a5\ud558\ub294 \ub370 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/td>\n<td>RF \uc804\ub825 \uc99d\ud3ed\uae30, \ubaa8\ub180\ub9ac\uc2dd \ub9c8\uc774\ud06c\ub85c\ud30c \uc9d1\uc801 \ud68c\ub85c(MMIC), RF \uc2a4\uc704\uce58 \ubc0f \uc218\ub3d9 \ubd80\ud488\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc9c8\ud654 \uac08\ub968(GaN) \uace0\uc804\uc790 \uc774\ub3d9\ub3c4 \ud2b8\ub79c\uc9c0\uc2a4\ud130(HEMT)\uc6a9 \uae30\ud310\uc785\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>\uc804\ub3c4\uc131 n\ud615 4H-SiC<\/strong><\/td>\n<td>\ud2b9\uc815 \uc804\ub3c4\ub3c4, \ub192\uc740 \uc804\uc790 \uc774\ub3d9\ub3c4, \uc6b0\uc218\ud55c \uc5f4 \uc804\ub3c4\ub3c4\ub97c \uc704\ud574 \ub3c4\ud551 \uc218\uc900(\uc77c\ubc18\uc801\uc73c\ub85c \uc9c8\uc18c)\uc744 \uc81c\uc5b4\ud569\ub2c8\ub2e4. \ud65c\uc131 \ub514\ubc14\uc774\uc2a4 \ub808\uc774\uc5b4\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/td>\n<td>RF \uc804\ub825 MOSFET, \uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc(1\ucc28 RF \uc99d\ud3ed\uc5d0\ub294 \ub35c \uc77c\ubc18\uc801\uc774\uc9c0\ub9cc RF \uc2dc\uc2a4\ud15c \ub0b4 \uc804\ub825 \ucee8\ub514\uc154\ub2dd\uc5d0 \ub354 \ub9ce\uc774 \uc0ac\uc6a9\ub428), GaN-on-SiC \uad6c\uc870\uc758 \uc804\ub3c4\uc131 \ubc84\ud37c \ub808\uc774\uc5b4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>\ubc14\ub098\ub4d0 \ub3c4\ud551 \ubc18\uc808\uc5f0 SiC<\/strong><\/td>\n<td>\uc5ed\uc0ac\uc801\uc73c\ub85c \ubc18\uc808\uc5f0 \ud2b9\uc131\uc744 \ub2ec\uc131\ud558\ub294 \ub370 \uc0ac\uc6a9\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ubc14\ub098\ub4d0\uc740 \uae4a\uc740 \uc218\uc900\uc758 \ub3c4\ud380\ud2b8 \uc5ed\ud560\uc744 \ud558\uc5ec \uc794\ub958\ud558\ub294 \uc595\uc740 \ub3c4\ub108 \ub610\ub294 \uc218\uc6a9\uccb4\ub97c \ubcf4\uc644\ud569\ub2c8\ub2e4.<\/td>\n<td>\uc774\uc804 \uc138\ub300\uc758 RF \ub514\ubc14\uc774\uc2a4\uc6a9 SiC \uae30\ud310. \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uacfc \uc2e0\ub8b0\uc131\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \ubc14\ub098\ub4d0 \ud655\uc0b0 \ubc0f \ud2b8\ub798\ud551 \ud6a8\uacfc\uc5d0 \ub300\ud55c \uc6b0\ub824\ub85c \uc778\ud574 \ub300\ubd80\ubd84 HPSI SiC\ub85c \ub300\uccb4\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>\ub2e4\uacb0\uc815 SiC<\/strong><\/td>\n<td>\uc800\ub834\ud55c \ube44\uc6a9, \uc6b0\uc218\ud55c \uc5f4 \uc804\ub3c4\uc131 \ubc0f \uae30\uacc4\uc801 \uac15\ub3c4. \uc804\uc790 \ud2b9\uc131\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc785\uc790 \uacbd\uacc4\ub85c \uc778\ud574 \uc77c\ubc18\uc801\uc73c\ub85c \uc561\ud2f0\ube0c RF \ub514\ubc14\uc774\uc2a4 \ub808\uc774\uc5b4\uc5d0\ub294 \uc0ac\uc6a9\ub418\uc9c0 \uc54a\uc9c0\ub9cc \uc5f4 \uad00\ub9ac \ubd80\ud488\uc774\ub098 \ud328\ud0a4\uc9d5\uc5d0\ub294 \uace0\ub824\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/td>\n<td>\ud788\ud2b8 \uc2a4\ud504\ub808\ub354, RF \ubaa8\ub4c8\uc758 \uad6c\uc870\uc801 \uc9c0\uc9c0\ub300, \ub192\uc740 \uc804\uae30 \uc800\ud56d\uc774 \uc8fc\uc694 \ubb38\uc81c\uac00 \ub418\uc9c0 \uc54a\ub294 \uc77c\ubd80 \uc720\ud615\uc758 RF \ud761\uc218\uae30 \ub610\ub294 \ucc28\ud3d0.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\uadf8\ub9ac\uace0 <strong>4H \ud3f4\ub9ac\ud0c0\uc785\uc758 SiC(4H-SiC)<\/strong> \ub294 6H-SiC\uc640 \uac19\uc740 \ub2e4\ub978 \ud3f4\ub9ac\ud0c0\uc785\uc5d0 \ube44\ud574 \ub354 \ub192\uc740 \uc804\uc790 \uc774\ub3d9\ub3c4\uc640 \ub354 \ub113\uc740 \ubc34\ub4dc\uac2d \ub4f1 \uc6b0\uc218\ud55c \uc804\uc790 \ud2b9\uc131\uc73c\ub85c \uc778\ud574 RF \ubc0f \uc804\ub825 \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc8fc\ub85c \uc120\ud638\ub429\ub2c8\ub2e4. RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158, \ud2b9\ud788 GaN-on-SiC \uae30\uc220\uc758 \uacbd\uc6b0 \ubc18\uc808\uc5f0 SiC \uae30\ud310\uc758 \ud488\uc9c8\uc774 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4. \ub192\uc740 \uc800\ud56d, \ub0ae\uc740 \uc720\uc804 \uc190\uc2e4, GaN \uce35\uc758 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc744 \uc704\ud55c \uc548\uc815\uc801\uc778 \ud50c\ub7ab\ud3fc\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 \ubd88\uc21c\ubb3c\uacfc \uacb0\ud568\uc774 \uadf9\ub3c4\ub85c \ub0ae\uc544\uc57c \ud569\ub2c8\ub2e4. SiC \uc18c\uc7ac\uc758 \uc120\ud0dd\uc740 \ucd5c\uc885 \ub514\ubc14\uc774\uc2a4\uc758 \uc774\ub4dd, \ud6a8\uc728\uc131, \uc120\ud615\uc131 \ubc0f \uc804\ubc18\uc801\uc778 \uc2e0\ub8b0\uc131\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\ubbc0\ub85c, \uc9c0\uc2dd\uc774 \ud48d\ubd80\ud55c \uc804\ubb38\uac00\uc640\uc758 \ud611\ub825\uc774 \uc911\uc694\ud569\ub2c8\ub2e4 <strong>\ud0c4\ud654\uaddc\uc18c \uc81c\uc870\uc5c5\uccb4\uc640\uc758 \uc0c1\ub2f4<\/strong> rF \ubd80\ud488 \uc131\ub2a5\uc744 \ucd5c\uc801\ud654\ud558\ub294 \ub370 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n<h2>\ub9de\ucda4\ud615 SiC RF \ubd80\ud488\uc744 \uc704\ud55c \uc804\ub7b5\uc801 \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d<\/h2>\n<p>\ub9de\ucda4\ud615 SiC RF \ubd80\ud488\uc744 \uc124\uacc4\ud558\ub824\uba74 \uc804\uae30\uc801 \uc131\ub2a5\uacfc \uc5f4 \uad00\ub9ac, \uc81c\uc870 \uac00\ub2a5\uc131 \ubc0f \uc2e0\ub8b0\uc131 \uac04\uc758 \uade0\ud615\uc744 \ub9de\ucd94\ub294 \uc138\uc2ec\ud55c \uc811\uadfc \ubc29\uc2dd\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\uc758 \uace0\uc720\ud55c \ud2b9\uc131\uc740 \uc5c4\uccad\ub09c \uc7a0\uc7ac\ub825\uc744 \uc81c\uacf5\ud558\uc9c0\ub9cc, \uc774\ub7ec\ud55c \uc7a0\uc7ac\ub825\uc744 \ud6a8\uacfc\uc801\uc73c\ub85c \ud65c\uc6a9\ud558\ub824\uba74 \uae30\uc874 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc\uc640 \ud06c\uac8c \ub2e4\ub97c \uc218 \uc788\ub294 \ud2b9\uc815 \uc124\uacc4 \uaddc\uce59\uacfc \uace0\ub824 \uc0ac\ud56d\uc5d0 \uc138\uc2ec\ud55c \uc8fc\uc758\ub97c \uae30\uc6b8\uc5ec\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h3>SiC RF \ub514\ubc14\uc774\uc2a4\ub97c \uc704\ud55c \uc8fc\uc694 \uc124\uacc4 \ud30c\ub77c\ubbf8\ud130:<\/h3>\n<ul>\n<li><strong>\uc791\ub3d9 \uc8fc\ud30c\uc218 \ubc0f \ub300\uc5ed\ud3ed:<\/strong> \ubaa9\ud45c \uc8fc\ud30c\uc218 \ubc94\uc704\ub294 \uc7ac\ub8cc \uc120\ud0dd(\ud2b9\ud788 \ubc18\uc808\uc5f0 SiC\uc758 \ud488\uc9c8), \ub514\ubc14\uc774\uc2a4 \ud615\uc0c1 \ubc0f \ud328\ud0a4\uc9d5\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \uc8fc\ud30c\uc218\uac00 \ub192\uc744\uc218\ub85d \ub354 \uc5c4\uaca9\ud55c \ud5c8\uc6a9 \uc624\ucc28\uc640 \ucd5c\uc18c\ud654\ub41c \uae30\uc0dd \ucee4\ud328\uc2dc\ud134\uc2a4 \ubc0f \uc778\ub355\ud134\uc2a4\uac00 \uc694\uad6c\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc804\uc6d0 \ub808\ubca8(\uc785\ub825\/\ucd9c\ub825):<\/strong> \uc608\uc0c1 \uc804\ub825 \ucc98\ub9ac \ub2a5\ub825\uc5d0 \ub530\ub77c \ud65c\uc131 \ub514\ubc14\uc774\uc2a4 \uba74\uc801, \uc5f4 \uc124\uacc4 \ubc0f \uae08\uc18d\ud654 \ubc29\uc2dd\uc774 \uacb0\uc815\ub429\ub2c8\ub2e4. SiC\uc758 \ub192\uc740 \uc804\ub825 \ubc00\ub3c4 \uae30\ub2a5\uc73c\ub85c \ub514\ubc14\uc774\uc2a4 \ud06c\uae30\ub97c \ub354 \uc791\uac8c \ub9cc\ub4e4 \uc218 \uc788\uc9c0\ub9cc \ud6a8\uc728\uc801\uc778 \uc5f4 \ucd94\ucd9c\uc740 \uc5ec\uc804\ud788 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc5f4 \uad00\ub9ac \uc804\ub7b5:<\/strong> SiC\uc758 \ub6f0\uc5b4\ub09c \uc5f4 \uc804\ub3c4\uc131\uc5d0\ub3c4 \ubd88\uad6c\ud558\uace0 \uace0\ucd9c\ub825 RF \ub514\ubc14\uc774\uc2a4\ub294 \uc0c1\ub2f9\ud55c \uc5f4\uc744 \ubc1c\uc0dd\uc2dc\ud0b5\ub2c8\ub2e4. \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d\uc5d0\ub294 \ud6a8\uc728\uc801\uc778 \uc5f4 \ubc29\ucd9c\uc744 \uc704\ud55c \uacbd\ub85c\uac00 \ud3ec\ud568\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \ub2e4\uc774 \uc5b4\ud0dc\uce58\uba3c\ud2b8 \ucd5c\uc801\ud654, \ubc29\uc5f4\ud310 \uc7ac\ub8cc \uc120\ud0dd, \uc7a0\uc7ac\uc801\uc73c\ub85c \uace0\uae09 \ub0c9\uac01 \uae30\uc220 \ud1b5\ud569\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. SiC\uc640 \ud328\ud0a4\uc9d5 \uc7ac\ub8cc \uac04\uc758 \uc5f4\ud33d\ucc3d \uacc4\uc218 \ubd88\uc77c\uce58\ub3c4 \uc8fc\uc758 \uae4a\uac8c \uad00\ub9ac\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc784\ud53c\ub358\uc2a4 \ub9e4\uce6d:<\/strong> \ud6a8\uc728\uc801\uc778 \uc804\ub825 \uc804\uc1a1\uacfc \uc2e0\ud638 \ubc18\uc0ac\ub97c \ucd5c\uc18c\ud654\ud558\ub824\uba74 \uc801\uc808\ud55c \uc784\ud53c\ub358\uc2a4 \ub9e4\uce6d(\uc77c\ubc18\uc801\uc73c\ub85c 50\uc634)\uc744 \ub2ec\uc131\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \uc804\uc1a1 \ub77c\uc778\uc758 \uc2e0\uc911\ud55c \ub808\uc774\uc544\uc6c3, \ub124\ud2b8\uc6cc\ud06c \ub9e4\uce6d, SiC\uc758 \uc720\uc804\uccb4 \ud2b9\uc131 \uace0\ub824\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\ub514\ubc14\uc774\uc2a4 \uc9c0\uc624\uba54\ud2b8\ub9ac \ubc0f \ub808\uc774\uc544\uc6c3:<\/strong> \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \ub204\ud654\ub97c \uc904\uc774\uba70 \uc804\uae30\uc7a5 \ubd84\ud3ec\ub97c \uad00\ub9ac\ud558\uc5ec \uc870\uae30 \uace0\uc7a5\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 SiC \uae30\ud310\uc758 \ud2b8\ub79c\uc9c0\uc2a4\ud130, \uc778\ub355\ud130, \ucee4\ud328\uc2dc\ud130 \ubc0f \uc778\ud130\ucee4\ub125\ud2b8\uc758 \ubb3c\ub9ac\uc801 \ub808\uc774\uc544\uc6c3\uc744 \ucd5c\uc801\ud654\ud574\uc57c \ud569\ub2c8\ub2e4. \uac8c\uc774\ud2b8 \uae38\uc774, \uc18c\uc2a4-\ub4dc\ub808\uc778 \uac04\uaca9, \ube44\uc544 \ubc30\uce58\uc640 \uac19\uc740 \uce21\uba74\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uae30\uc0dd \ud6a8\uacfc:<\/strong> \ub192\uc740 RF \uc8fc\ud30c\uc218\uc5d0\uc11c \ubcf8\ub4dc \uc640\uc774\uc5b4, \ud328\ud0a4\uc9c0 \ub9ac\ub4dc \ubc0f \uc628\uce69 \uad6c\uc870\uc640 \uad00\ub828\ub41c \uae30\uc0dd \ucee4\ud328\uc2dc\ud134\uc2a4 \ubc0f \uc778\ub355\ud134\uc2a4\ub294 \uc131\ub2a5\uc744 \uc2ec\uac01\ud558\uac8c \uc800\ud558\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc124\uacc4 \uc2dc\ubbac\ub808\uc774\uc158\uc740 \uc774\ub7ec\ud55c \uae30\uc0dd\uc744 \uc815\ud655\ud558\uac8c \ubaa8\ub378\ub9c1\ud558\uc5ec \uadf8 \uc601\ud5a5\uc744 \uc644\ud654\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc7ac\ub8cc \uc21c\ub3c4 \ubc0f \uacb0\ud568 \ubc00\ub3c4:<\/strong> \ud2b9\ud788 \uc800\uc7a1\uc74c \uc99d\ud3ed\uae30 \ub610\ub294 \uace0\uc120\ud615\uc131 \ub514\ubc14\uc774\uc2a4\uc758 \uacbd\uc6b0 \ucd5c\uc801\uc758 RF \uc131\ub2a5\uc744 \uc704\ud574\uc11c\ub294 SiC \uae30\ud310\uc758 \uc21c\ub3c4\uac00 \ub192\uace0 \uacb0\uc815\ud559\uc801 \uacb0\ud568 \ubc00\ub3c4\uac00 \ub0ae\uc544\uc57c \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc694\uc18c\ub294 \uc8fc\ub85c \uc7ac\ub8cc \uacf5\uae09\uc5c5\uccb4\uc5d0 \ub530\ub77c \ub2e4\ub974\uc9c0\ub9cc \uc124\uacc4 \uaddc\uce59\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/li>\n<li><strong>\ud328\ud0a4\uc9d5 \ubc0f \uc0c1\ud638 \uc5f0\uacb0:<\/strong> \ud328\ud0a4\uc9d5 \uae30\uc220(\uc608: \ud45c\uba74 \uc2e4\uc7a5, \ud50c\ub79c\uc9c0 \uc2e4\uc7a5, \uce69 \uc628 \ubcf4\ub4dc) \ubc0f \uc0c1\ud638 \uc5f0\uacb0(\uc608: \uc640\uc774\uc5b4 \ubcf8\ub4dc, \ud50c\ub9bd\uce69) \uc120\ud0dd\uc740 SiC\uc758 \ub192\uc740 \uc791\ub3d9 \uc628\ub3c4 \ubc0f RF \uc131\ub2a5 \uc694\uad6c \uc0ac\ud56d\uacfc \ud638\ud658\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uc5f4\uc545\ud55c \ud658\uacbd\uc5d0\uc11c\uc758 \uc2e0\ub8b0\uc131\uc744 \uc704\ud574 \ubc00\ud3d0 \ubc00\ubd09\uc774 \ud544\uc694\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc81c\uc870 \uac00\ub2a5\uc131 \ubc0f \ube44\uc6a9:<\/strong> \uc131\ub2a5\uc758 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\ub294 \ub3d9\uc2dc\uc5d0 \ub2ec\uc131 \uac00\ub2a5\ud55c \ud5c8\uc6a9 \uc624\ucc28, \ucc98\ub9ac \uc218\uc728, \uc804\uccb4 \ube44\uc6a9 \ub4f1 \uc81c\uc870\uc758 \uc2e4\uc6a9\uc801\uc778 \uce21\uba74\ub3c4 \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4. \ubcf5\uc7a1\ud55c \ub514\uc790\uc778\uc740 \uc81c\uc870 \ube44\uc6a9\uacfc \ub9ac\ub4dc \ud0c0\uc784\uc744 \uc99d\uac00\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\ud6a8\uacfc\uc801\uc778 \uc124\uacc4 <strong>\ub9de\ucda4\ud615 SiC RF \ubd80\ud488<\/strong> \uc5d0\ub294 \uc885\uc885 \uc815\uad50\ud55c \uc2dc\ubbac\ub808\uc774\uc158 \ud234(\uc608: \uc804\uc790\uae30 \ubc0f \uc5f4 \ubaa8\ub378\ub9c1 \uc18c\ud504\ud2b8\uc6e8\uc5b4)\uc744 \uc0ac\uc6a9\ud558\uc5ec \ub514\ubc14\uc774\uc2a4 \ub3d9\uc791\uc744 \uc608\uce21\ud558\uace0 \uc81c\uc791 \uc804\uc5d0 \uc124\uacc4\ub97c \ucd5c\uc801\ud654\ud558\ub294 \uc791\uc5c5\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uace0\ub824 \uc0ac\ud56d\uc744 \uc131\uacf5\uc801\uc73c\ub85c \ud574\uacb0\ud558\uc5ec \uacac\uace0\ud558\uace0 \uace0\uc131\ub2a5\uc758 RF \ub514\ubc14\uc774\uc2a4\ub97c \uac1c\ubc1c\ud558\ub824\uba74 RF \uc124\uacc4 \uc5d4\uc9c0\ub2c8\uc5b4\uc640 SiC \uc7ac\ub8cc\/\ud30c\uc6b4\ub4dc\ub9ac \uc804\ubb38\uac00 \uac04\uc758 \ud611\uc5c5\uc774 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h2>\uc815\ubc00\ub3c4 \ub2ec\uc131: SiC RF \ubd80\ud488\uc758 \uacf5\ucc28, \ud45c\uba74 \ub9c8\uac10 \ubc0f \uce58\uc218 \uc815\ud655\ub3c4 \ud655\ubcf4<\/h2>\n<p>\uace0\uc8fc\ud30c\uc218\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc RF \ubd80\ud488\uc758 \uc131\ub2a5\uc740 \uc81c\uc870 \uacfc\uc815\uc5d0\uc11c \ub2ec\uc131\ud558\ub294 \uc815\ubc00\ub3c4\uc5d0 \ub530\ub77c \ud06c\uac8c \uc88c\uc6b0\ub429\ub2c8\ub2e4. \uc5c4\uaca9\ud55c \uacf5\ucc28, \uc6b0\uc218\ud55c \ud45c\uba74 \ub9c8\uac10, \ub192\uc740 \uce58\uc218 \uc815\ud655\ub3c4\ub294 \uc77c\uad00\ub41c \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc744 \ubcf4\uc7a5\ud558\uace0 \uc2e0\ud638 \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud558\uba70 \uc2e0\ud638 \ubb34\uacb0\uc131\uc744 \uc720\uc9c0\ud558\ub294 \ub370 \ud544\uc218\uc801\uc77c \ubfd0\ub9cc \uc544\ub2c8\ub77c \ubc14\ub78c\uc9c1\ud560 \ubfd0\ub9cc \uc544\ub2c8\ub77c \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc694\uc18c\ub294 \uae30\uc0dd \ucee4\ud328\uc2dc\ud134\uc2a4, \uc784\ud53c\ub358\uc2a4 \ub9e4\uce6d \ubc0f RF \ubaa8\ub4c8\uc758 \uc804\ubc18\uc801\uc778 \uc2e0\ub8b0\uc131\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p>\ub2ec\uc131 \uac00\ub2a5\ud55c \ud5c8\uc6a9 \uc624\ucc28 <strong>\ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488<\/strong> \uc81c\uc870 \uacf5\uc815(\uc608: \uc6e8\uc774\ud37c \ub2e4\uc774\uc2f1, \uc5f0\uc0ad, \ub798\ud551, \uc5f0\ub9c8) \ubc0f \ubd80\ud488\uc758 \ubcf5\uc7a1\uc131\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc778 \uce58\uc218 \uacf5\ucc28\ub294 \uc218\uc2ed \ubbf8\ud06c\ub860\uc5d0\uc11c \uc911\uc694\ud55c \ud53c\ucc98\uc758 \uacbd\uc6b0 \uc218 \ubbf8\ud06c\ub860\uae4c\uc9c0 \ub2e4\uc591\ud569\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4<\/p>\n<ul>\n<li><strong>\ub450\uaed8 \uade0\uc77c\uc131:<\/strong> \uae30\ud310\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 SiC \uc6e8\uc774\ud37c\uc758 \uacbd\uc6b0, \uc804\uccb4 \uc6e8\uc774\ud37c\uc758 \ub450\uaed8 \uade0\uc77c\uc131\uc740 \uc77c\uad00\ub41c \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5(\uc608: SiC\uc758 GaN) \ubc0f \ud6c4\uc18d \uc18c\uc790 \uacf5\uc815\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ud3b8\ucc28\ub294 \uc18c\uc790 \ud2b9\uc131\uc758 \ubd88\uc77c\uce58\ub85c \uc774\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud3c9\ud0c4\ub3c4 \ubc0f \ud65c:<\/strong> \uae30\ud310 \ud3c9\ud0c4\ub3c4(\ucd1d \ub450\uaed8 \ubcc0\ud654, TTV)\uc640 \ubcf4\uc6b0\ub294 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\uba70 \uc0c1\ubd80 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc5d0 \uc751\ub825\uc744 \uc720\ubc1c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc5c4\uaca9\ud55c \uc81c\uc5b4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uce21\uba74 \uce58\uc218:<\/strong> \ub2e4\uc774\uc2f1 \ub610\ub294 \uc5d0\uce6d \uacf5\uc815\uc758 \uc815\ubc00\ub3c4\uc5d0 \ub530\ub77c \uac1c\ubcc4 \uce69 \ub610\ub294 \uac1c\ubcc4 \ubd80\ud488\uc758 \ucd5c\uc885 \uce58\uc218\uac00 \uacb0\uc815\ub429\ub2c8\ub2e4. \uc774\ub294 \ud328\ud0a4\uc9c0 \ub0b4 \ud53c\ud305\uacfc \uc804\uc1a1 \ub77c\uc778 \ub610\ub294 \ucee4\ud328\uc2dc\ud130 \uc601\uc5ed\uacfc \uac19\uc740 \uae30\ub2a5\uc744 \uc815\uc758\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\ud45c\uba74 \ub9c8\uac10\uc740 RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uac00\uc7a5 \uc911\uc694\ud55c \ub610 \ub2e4\ub978 \uace0\ub824 \uc0ac\ud56d\uc785\ub2c8\ub2e4. \ud45c\uba74 \uc190\uc0c1\uc744 \ucd5c\uc18c\ud654\ud558\ub294 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74\uc740 \uc5ec\ub7ec \uac00\uc9c0 \uc774\uc720\ub85c \uc911\uc694\ud569\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>RF \uc190\uc2e4 \uac10\uc18c:<\/strong> \ud45c\uba74\uc774 \uac70\uce60\uba74 \uc804\ub958\uac00 \ud45c\uba74 \uadfc\ucc98\uc5d0 \uc9d1\uc911\ub418\ub294 \uc2a4\ud0a8 \ud6a8\uacfc\ub85c \uc778\ud574 \uace0\uc8fc\ud30c\uc5d0\uc11c \ub3c4\uccb4 \uc190\uc2e4\uc774 \uc99d\uac00\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud45c\uba74\uc774 \ub9e4\ub044\ub7ec\uc6b8\uc218\ub85d \uc2e0\ud638 \uac10\uc1e0\uac00 \uc904\uc5b4\ub4ed\ub2c8\ub2e4.<\/li>\n<li><strong>\uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc774 \uac1c\uc120\ub418\uc5c8\uc2b5\ub2c8\ub2e4:<\/strong> GaN-on-SiC \uc18c\uc790\uc758 \uacbd\uc6b0 SiC \uae30\ud310\uc758 \ud45c\uba74 \ud488\uc9c8\uc740 GaN \uc5d0\ud53c\ud0dd\uc15c \uce35\uc758 \ud488\uc9c8\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. GaN \ucc44\ub110\uc5d0\uc11c \ub192\uc740 \uc804\uc790 \uc774\ub3d9\ub3c4\uc640 \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4\ub97c \ub2ec\uc131\ud558\ub824\uba74 \uae68\ub057\ud558\uace0 \uacb0\ud568\uc774 \uc5c6\ub294 \ud45c\uba74\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \ud654\ud559\uc801 \uae30\uacc4\uc801 \uc5f0\ub9c8(CMP)\ub294 \uc639\uc2a4\ud2b8\ub86c \uc218\uc900\uc758 \ud45c\uba74 \uac70\uce60\uae30(Ra &lt;0.5nm)\ub97c \ub2ec\uc131\ud558\uae30 \uc704\ud574 \uc885\uc885 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\ud5a5\uc0c1\ub41c \uae08\uc18d\ud654 \uc811\ucc29\ub825:<\/strong> \uae68\ub057\ud558\uace0 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74\uc740 \uae08\uc18d \uc811\uc810\uacfc \uc0c1\ud638 \uc5f0\uacb0\uc758 \uc811\ucc29\ub825\uc744 \ub192\uc5ec \uc2e0\ub8b0\uc131\uc744 \ud5a5\uc0c1\ud558\uace0 \uc811\ucd09 \uc800\ud56d\uc744 \uc904\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>SiC \ubd80\ud488\uc758 \ubaa8\ub4e0 \ud2b9\uc9d5\uc5d0 \uac78\uce5c \uce58\uc218 \uc815\ud655\ub3c4\ub294 \uc81c\uc791\ub41c \ub514\ubc14\uc774\uc2a4\uac00 \uc124\uacc4 \uc2dc\ubbac\ub808\uc774\uc158\uc5d0\uc11c \uc608\uce21\ud55c \ub300\ub85c \uc791\ub3d9\ud558\ub3c4\ub85d \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \ud3b8\ucc28\ub294 \uacf5\uc9c4 \uc8fc\ud30c\uc218\uc758 \ubcc0\ud654, \uc784\ud53c\ub358\uc2a4 \ubd88\uc77c\uce58, \uc804\ubc18\uc801\uc778 \uc131\ub2a5 \uc800\ud558\ub85c \uc774\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud45c\uba74 \uac70\uce60\uae30\ub97c \uc704\ud55c \uc6d0\uc790\ub825 \ud604\ubbf8\uacbd(AFM), \uacb0\uc815 \ud488\uc9c8\uc744 \uc704\ud55c X\uc120 \ud68c\uc808(XRD), \uce58\uc218 \uc81c\uc5b4\ub97c \uc704\ud55c \uace0\uae09 \uad11\ud559 \uac80\uc0ac \uc2dc\uc2a4\ud15c\uc744 \ud3ec\ud568\ud55c \uc815\uad50\ud55c \uacc4\uce21 \uae30\uc220\uc740 \uace0\ud488\uc9c8\uc758 \uc81c\ud488\uc744 \uc81c\uc870\ud558\ub294 \ub370 \ud544\uc218\uc801\uc785\ub2c8\ub2e4 <strong>SiC RF \ubd80\ud488<\/strong>. \uc5c4\uaca9\ud55c \uacf5\uc815 \uc81c\uc5b4 \ubc0f \uacc4\uce21 \uc5ed\ub7c9\uc744 \uac16\ucd98 \uacf5\uae09\uc5c5\uccb4\uc640 \ud611\ub825\ud558\ub294 \uac83\uc740 RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uc5c4\uaca9\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294 SiC \ubd80\ud488\uc744 \ud655\ubcf4\ud558\ub294 \ub370 \uc788\uc5b4 \ud575\uc2ec\uc785\ub2c8\ub2e4.<\/p>\n<h2>SiC RF \ub514\ubc14\uc774\uc2a4 \ucd5c\uc801\ud654\ub97c \uc704\ud55c \ud544\uc218 \ud6c4\ucc98\ub9ac \uae30\uc220<\/h2>\n<p>\uae30\ubcf8 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc RF \ub514\ubc14\uc774\uc2a4 \uad6c\uc870\uac00 \uc81c\uc791\ub418\uba74 \uc131\ub2a5\uc744 \ucd5c\uc801\ud654\ud558\uace0 \ub0b4\uad6c\uc131\uc744 \uac15\ud654\ud558\uba70 \ub354 \ud070 \uc2dc\uc2a4\ud15c\uc5d0 \ud1b5\ud569\ud560 \uc218 \uc788\ub3c4\ub85d \uc900\ube44\ud558\uae30 \uc704\ud574 \uba87 \uac00\uc9c0 \ud6c4\ucc98\ub9ac \ub2e8\uacc4\uac00 \ud544\uc694\ud55c \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uae30\uc220\uc740 \ud2b9\uc815 RF \uc694\uad6c \uc0ac\ud56d\uacfc SiC\uc758 \uace0\uc720\ud55c \ud2b9\uc131\uc744 \ud574\uacb0\ud558\ub3c4\ub85d \ub9de\ucda4\ud654\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub2e8\uacc4\ub97c \uc2e0\uc911\ud558\uac8c \uc2e4\ud589\ud558\ub294 \uac83\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \uc7a0\uc7ac\ub825\uc744 \ucd5c\ub300\ud55c \uc2e4\ud604\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4 <strong>\ub9de\ucda4\ud615 SiC RF \ubd80\ud488<\/strong>.<\/p>\n<h3>\uc77c\ubc18\uc801\uc778 \ud6c4\ucc98\ub9ac \ub2e8\uacc4:<\/h3>\n<ul>\n<li><strong>\ub4b7\uba74 \uc5f0\ub9c8\/\uc587\uac8c \ub9cc\ub4e4\uae30:<\/strong> SiC \uc6e8\uc774\ud37c\ub294 \uc5f4 \uc800\ud56d\uc744 \uc904\uc774\uace0 \uc5f4 \ubc29\ucd9c\uc744 \uac1c\uc120\ud558\uba70 \ud2b9\uc815 \ud328\ud0a4\uc9c0 \ub192\uc774 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uae30 \uc704\ud574 \uc804\uba74 \ucc98\ub9ac \ud6c4 \uc587\uac8c \ub9cc\ub4dc\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uc774\ub294 \ud6a8\uc728\uc801\uc778 \uc5f4 \uad00\ub9ac\uac00 \uac00\uc7a5 \uc911\uc694\ud55c \uace0\ucd9c\ub825 RF \ub514\ubc14\uc774\uc2a4\uc5d0 \ud2b9\ud788 \uc911\uc694\ud569\ub2c8\ub2e4. \uc815\ubc00 \uc5f0\uc0ad \ud6c4\uc5d0\ub294 \uc6e8\uc774\ud37c \ud30c\uc190\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud55c \uc751\ub825 \uc644\ud654 \uacf5\uc815\uc774 \uc774\uc5b4\uc9d1\ub2c8\ub2e4.<\/li>\n<li><strong>\uae08\uc18d\ud654:<\/strong> \uc800\uc800\ud56d \uc634 \uc811\uc810\uacfc \uacac\uace0\ud55c \uc1fc\ud2b8\ud0a4 \uc811\uc810\uc744 \ub9cc\ub4dc\ub294 \uac83\uc740 RF \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \ud2b9\uc815 \uae08\uc18d \uc2a4\ud0dd(\uc608: Ti\/Pt\/Au, Ni\/Au)\uc744 \uc99d\ucc29\ud55c \ud6c4 \uace0\uc628\uc5d0\uc11c \uc5b4\ub2d0\ub9c1\ud558\ub294 \uacfc\uc815\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uae08\uc18d \ubc0f \uc5b4\ub2d0\ub9c1 \uc870\uac74\uc758 \uc120\ud0dd\uc740 SiC\uc758 \uc720\ud615(n\ud615 \ub610\ub294 p\ud615)\uacfc \ud2b9\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158(\uc608: \uac8c\uc774\ud2b8, \ub4dc\ub808\uc778, \uc18c\uc2a4, \ud328\ub4dc)\uc5d0 \ub530\ub77c \ucd5c\uc801\ud654\ub429\ub2c8\ub2e4. \uae08\uc18d\ud654\uc5d0\ub294 \uc778\ud130\ucee4\ub125\ud2b8 \ubc0f \uc804\uc1a1 \ub77c\uc778\uc758 \ud615\uc131\ub3c4 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\ud328\uc2dc\ubca0\uc774\uc158:<\/strong> \uc720\uc804\uccb4 \uce35(\uc608: SiO<sub>2<\/sub>, Si<sub>3<\/sub>N<sub>4<\/sub>)\ub294 \uc77c\ubc18\uc801\uc73c\ub85c SiC \ud45c\uba74\uc744 \ubcf4\ud638\ud558\uace0 \ud45c\uba74 \ub204\uc124 \uc804\ub958\ub97c \uc904\uc774\uba70 \uad6c\uc131 \uc694\uc18c \uac04\uc758 \uc804\uae30\uc801 \uc808\uc5f0\uc744 \uc81c\uacf5\ud558\uae30 \uc704\ud574 \uc99d\ucc29\ub429\ub2c8\ub2e4. \ud328\uc2dc\ubca0\uc774\uc158 \ub808\uc774\uc5b4\uc758 \ud488\uc9c8\uacfc SiC\uc640\uc758 \uc778\ud130\ud398\uc774\uc2a4\ub294 \ud2b9\ud788 \uace0\uc804\uc555 \ubc0f \uace0\uc628\uc5d0\uc11c \ub514\ubc14\uc774\uc2a4\uc758 \uc548\uc815\uc131\uacfc \uc2e0\ub8b0\uc131\uc5d0 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ub2e4\uc774\uc2f1 \ubc0f \ub2e4\uc774 \ubd84\ub9ac:<\/strong> \uc5ec\ub7ec \uac1c\uc758 RF \ub514\ubc14\uc774\uc2a4\uac00 \ud3ec\ud568\ub41c \uc6e8\uc774\ud37c\ub97c \uac1c\ubcc4 \uce69\uc73c\ub85c \ub2e4\uc774\uc2f1\ud569\ub2c8\ub2e4. \ub808\uc774\uc800 \ub2e4\uc774\uc2f1 \ub610\ub294 \ub2e4\uc774\uc544\ubaac\ub4dc \ud1b1 \uc808\ub2e8\uc774 \uc77c\ubc18\uc801\uc778 \ubc29\ubc95\uc785\ub2c8\ub2e4. \ub2e4\uc774\uc2f1 \uacf5\uc815\uc740 \ub514\ubc14\uc774\uc2a4 \ubb34\uacb0\uc131\uc744 \uc190\uc0c1\uc2dc\ud0ac \uc218 \uc788\ub294 \uce58\ud551\uacfc \uae30\uacc4\uc801 \uc2a4\ud2b8\ub808\uc2a4\ub97c \ucd5c\uc18c\ud654\ud558\uae30 \uc704\ud574 \uc2e0\uc911\ud558\uac8c \uc81c\uc5b4\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ud45c\uba74 \ucc98\ub9ac\/\ucf54\ud305:<\/strong> \uacbd\uc6b0\uc5d0 \ub530\ub77c \ud2b9\uc815 \ud2b9\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\uae30 \uc704\ud574 \ud2b9\uc218 \ud45c\uba74 \ucc98\ub9ac \ub610\ub294 \ucf54\ud305\uc774 \uc801\uc6a9\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4 \uad11\uc804\uc790 \uce21\uba74\uc744 \uc704\ud55c \ubc18\uc0ac \ubc29\uc9c0 \ucf54\ud305\uc774\ub098 \uc5f4\uc545\ud55c \ud658\uacbd\uc744 \uc704\ud55c \ubcf4\ud638 \ucf54\ud305 \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4. RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uacb0\ud569 \ub610\ub294 \ucea1\uc290\ud654\ub97c \uac1c\uc120\ud558\uae30 \uc704\ud574 \ud2b9\uc815 \ud45c\uba74 \uae30\ub2a5\ud654\ub97c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ube44\uc544 \ud640 \ud615\uc131:<\/strong> \uad00\ud1b5 \uc6e8\uc774\ud37c \ube44\uc544(TWV)\ub294 \ud2b9\ud788 GaN-on-SiC MMIC\uc758 \uacbd\uc6b0 SiC \uae30\ud310\uc5d0 \uc0dd\uc131\ub418\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ube44\uc544\ub294 \uc778\ub355\ud134\uc2a4\uac00 \ub0ae\uc740 \uc811\uc9c0 \uc5f0\uacb0\uc744 \uc81c\uacf5\ud558\uace0 RF \uc131\ub2a5\uc744 \uac1c\uc120\ud558\uba70 \uc5f4 \uad00\ub9ac\uc5d0 \ub3c4\uc6c0\uc744 \uc90d\ub2c8\ub2e4. \ubc18\uc751\uc131 \uc774\uc628 \uc5d0\uce6d(RIE)\uc740 \uc774\ub7ec\ud55c \ube44\uc544\ub97c \uc0dd\uc131\ud558\ub294 \uc77c\ubc18\uc801\uc778 \uae30\uc220\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\ud14c\uc2a4\ud2b8 \ubc0f \ubc88\uc778:<\/strong> \ucd5c\uc885 \uc870\ub9bd \uc804\uc5d0 \uac1c\ubcc4 SiC RF \ub514\ubc14\uc774\uc2a4\ub294 \uc0ac\uc591\uc744 \ucda9\uc871\ud558\ub294\uc9c0 \ud655\uc778\ud558\uae30 \uc704\ud574 \uc5c4\uaca9\ud55c \uc804\uae30 \ud14c\uc2a4\ud2b8(DC \ubc0f RF)\ub97c \uac70\uce69\ub2c8\ub2e4. \ub192\uc740 \uc628\ub3c4\uc640 \uc804\uc555\uc5d0\uc11c \ubc88\uc778 \ud14c\uc2a4\ud2b8\ub97c \uc218\ud589\ud558\uc5ec \uc870\uae30 \uace0\uc7a5\uc744 \uc120\ubcc4\ud558\uace0 \uc804\ubc18\uc801\uc778 \uc81c\ud488 \uc2e0\ub8b0\uc131\uc744 \uac1c\uc120\ud560 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uc774\ub7ec\ud55c \uac01 \ud6c4\ucc98\ub9ac \ub2e8\uacc4\uc5d0\ub294 \uc804\ubb38 \uc7a5\ube44\uc640 \uc804\ubb38 \uc9c0\uc2dd\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub2e8\uacc4\uc758 \ubcf5\uc7a1\uc131\uacfc \uc21c\uc11c\ub294 \uc81c\uc870\ub418\ub294 \ud2b9\uc815 RF \ub514\ubc14\uc774\uc2a4(\uc608: \ud2b8\ub79c\uc9c0\uc2a4\ud130, MMIC, \uc218\ub3d9 \uc18c\uc790)\uc640 \uadf8 \uc6a9\ub3c4\uc5d0 \ub530\ub77c \ud06c\uac8c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. \ud6a8\uacfc\uc801\uc778 \ud6c4\ucc98\ub9ac\ub294 \uace0\ud488\uc9c8\uc758 \ud2b9\uc9d5\uc785\ub2c8\ub2e4 <strong>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc RF \ud328\ud0a4\uc9d5<\/strong> \ubc0f \ubd80\ud488 \uc81c\uc870\ub97c \ud1b5\ud574 \uae4c\ub2e4\ub85c\uc6b4 RF \uc2dc\uc2a4\ud15c\uc5d0\uc11c \ucd5c\uc801\uc758 \uc131\ub2a5\uacfc \uc7a5\uae30\uc801\uc778 \uc548\uc815\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<h2>SiC RF \ubd80\ud488 \uc81c\uc870\uc758 \uc77c\ubc18\uc801\uc778 \uc7a5\uc560\ubb3c \uadf9\ubcf5<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc0c1\ub2f9\ud55c \uc774\uc810\uc744 \uc81c\uacf5\ud558\uc9c0\ub9cc, \uc81c\uc870 \uc2dc\uc5d0\ub294 \ub2a5\uc219\ud558\uac8c \uad00\ub9ac\ud574\uc57c \ud558\ub294 \uace0\uc720\ud55c \uacfc\uc81c\uac00 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uc18c\uc7ac\uc758 \uadf9\ub3c4\uc758 \uacbd\ub3c4, \ud654\ud559\uc801 \ubd88\ud65c\uc131, \ud2b9\uc815 \uacb0\uc815\ud559\uc801 \uacb0\ud568 \uacbd\ud5a5\uc740 \uc804\ubb38 \uc9c0\uc2dd, \ucca8\ub2e8 \uc7a5\ube44, \uc5c4\uaca9\ud55c \uacf5\uc815 \uc81c\uc5b4\ub97c \ud544\uc694\ub85c \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc7a5\uc560\ubb3c\uc744 \uadf9\ubcf5\ud558\ub294 \uac83\uc774 \uace0\ud488\uc9c8\uc758 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uc81c\ud488\uc744 \uc0dd\uc0b0\ud558\uae30 \uc704\ud55c \ud575\uc2ec\uc785\ub2c8\ub2e4 <strong>SiC RF \ub514\ubc14\uc774\uc2a4<\/strong> \uacbd\uc7c1\ub825 \uc788\ub294 \ube44\uc6a9\uc73c\ub85c<\/p>\n<h3>\uc8fc\uc694 \uc81c\uc870 \ubd84\uc57c\uc758 \uacfc\uc81c \ubc0f \uc644\ud654 \uc804\ub7b5:<\/h3>\n<ul>\n<li><strong>\uc7ac\ub8cc \ud488\uc9c8 \ubc0f \uacb0\ud568 \uad00\ub9ac:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> SiC \uacb0\uc815 \uc131\uc7a5(\ubd88 \uc0dd\uc0b0)\uc740 \ubbf8\uc138 \ud30c\uc774\ud504, \uc804\uc704, \uc801\uce35 \uacb0\ud568\uacfc \uac19\uc740 \uacb0\ud568\uc744 \ucd08\ub798\ud558\uc5ec \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uacfc \uc2e0\ub8b0\uc131\uc744 \uc800\ud558\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub300\uad6c\uacbd, \uace0\uc21c\ub3c4, \uc800\uacb0\ud568 \ubc18\uc808\uc5f0 \uae30\ud310\uc744 \uad6c\ud604\ud558\ub294 \uac83\uc740 \ud2b9\ud788 \uc5b4\ub835\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \uc628\ub3c4, \uc555\ub825 \ubc0f \uc18c\uc2a4 \uc7ac\ub8cc\ub97c \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud558\ub294 \uace0\uae09 \uacb0\uc815 \uc131\uc7a5 \uae30\uc220(\uc608: \uace0\uc628 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 - HTCVD, \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1 - PVT)\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ud5c8\uc6a9 \uac00\ub2a5\ud55c \uacb0\ud568 \ubc00\ub3c4\ub97c \uac00\uc9c4 \uc6e8\uc774\ud37c\ub97c \uc120\ud0dd\ud558\uae30 \uc704\ud55c \uc5c4\uaca9\ud55c \uc7ac\ub8cc \ud2b9\uc131\ud654 \ubc0f \uc2a4\ud06c\ub9ac\ub2dd. \ubd88 \uc131\uc7a5 \ubc0f \uc6e8\uc774\ud37c \uacf5\uc815\uc5d0 \ub300\ud55c \uc9c0\uc18d\uc801\uc778 R&amp;D.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc6e8\uc774\ud37c \ucc98\ub9ac \ubc0f \uac00\uacf5:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> SiC\uc758 \uacbd\ub3c4(\ubaa8\uc2a4 \uacbd\ub3c4 9.0~9.5)\ub294 \ud1b1\uc9c8, \uc5f0\uc0ad, \ub798\ud551, \uc5f0\ub9c8 \uc791\uc5c5\uc774 \uc5b4\ub835\uace0 \uc2dc\uac04\uc774 \ub9ce\uc774 \uc18c\uc694\ub418\ubbc0\ub85c \uacf5\uad6c \ub9c8\ubaa8\uc640 \uac00\uacf5 \ube44\uc6a9\uc774 \ub192\uc544\uc9d1\ub2c8\ub2e4. \ub610\ud55c \uc62c\ubc14\ub974\uac8c \ucc98\ub9ac\ud558\uc9c0 \uc54a\uc73c\uba74 \ud45c\uba74 \uc190\uc0c1\uc744 \uc720\ubc1c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \ub2e4\uc774\uc544\ubaac\ub4dc \uae30\ubc18 \uc5f0\ub9c8\uc7ac \ubc0f \ud2b9\uc218 \uae30\uacc4 \uc0ac\uc6a9. \uac00\uacf5 \ub9e4\uac1c\ubcc0\uc218 \ucd5c\uc801\ud654(\uc608: \uc18d\ub3c4, \uc774\uc1a1 \uc18d\ub3c4, \ub0c9\uac01\uc218). \ub9e4\uc6b0 \ub9e4\ub044\ub7fd\uace0 \uc190\uc0c1 \uc5c6\ub294 \ud45c\uba74\uc744 \uad6c\ud604\ud558\uae30 \uc704\ud55c \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP)\uc640 \uac19\uc740 \uace0\uae09 \uc5f0\ub9c8 \uae30\uc220. \ub808\uc774\uc800 \uac00\uacf5\uc740 \ud2b9\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub300\ud55c \ub300\uc548\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub3c4\ud551 \ubc0f \uc774\uc628 \uc8fc\uc785:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> \uc774\uc628 \uc8fc\uc785\uc744 \ud1b5\ud574 SiC\uc5d0\uc11c \uc815\ubc00\ud558\uace0 \uade0\uc77c\ud55c \ub3c4\ud551 \ud504\ub85c\ud30c\uc77c\uc744 \ub2ec\uc131\ud558\ub294 \uac83\uc740 \ubc00\ub3c4 \ub54c\ubb38\uc5d0 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654\uc5d0 \ud544\uc694\ud55c \uc8fc\uc785 \ud6c4 \uc5b4\ub2d0\ub9c1\uc740 \ub9e4\uc6b0 \ub192\uc740 \uc628\ub3c4(\ubcf4\ud1b5 1700\u00b0C \uc774\uc0c1)\uac00 \ud544\uc694\ud558\ubbc0\ub85c \uc8fc\uc758 \uae4a\uac8c \uc81c\uc5b4\ud558\uc9c0 \uc54a\uc73c\uba74 SiC \ud45c\uba74\uc774 \uc190\uc0c1\ub418\uac70\ub098 \ub3c4\ud380\ud2b8 \uc7ac\ubd84\ubc30\uac00 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \ucd5c\uc801\ud654\ub41c \uc784\ud50c\ub780\ud2b8 \uc5d0\ub108\uc9c0\uc640 \uc120\ub7c9. \ud45c\uba74 \ubb34\uacb0\uc131\uc744 \ubcf4\uc874\ud558\uae30 \uc704\ud55c \uace0\uae09 \uc5b4\ub2d0\ub9c1 \uae30\uc220(\uc608: \ub9c8\uc774\ud06c\ub85c\ud30c \uc5b4\ub2d0\ub9c1, \ub808\uc774\uc800 \uc5b4\ub2d0\ub9c1) \ubc0f \uc5b4\ub2d0\ub9c1 \uc911 \ubcf4\ud638 \ucea1\ud551 \ub808\uc774\uc5b4 \uac1c\ubc1c. \ub3c4\ud551 \ud504\ub85c\ud30c\uc77c\uc758 \uc2e0\uc911\ud55c \ud2b9\uc131\ud654.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc5d0\uce6d:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> SiC\uc758 \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc73c\ub85c \uc778\ud574 \uc2b5\uc2dd \uc5d0\uce6d\uc740 \ub9e4\uc6b0 \ub290\ub9ac\uace0 \ubbf8\uc138\ud55c \ud53c\ucc98 \uc815\uc758\uc5d0 \ube44\uc2e4\uc6a9\uc801\uc785\ub2c8\ub2e4. \uac74\uc2dd \uc5d0\uce6d \uacf5\uc815(\uc608: RIE, \uc720\ub3c4 \uacb0\ud569 \ud50c\ub77c\uc988\ub9c8 \ubc0f ICP \uc5d0\uce6d)\uc774 \uc0ac\uc6a9\ub418\uc9c0\ub9cc \uc120\ud0dd\uc131, \uc5d0\uce6d \uc18d\ub3c4 \ubc0f \uc774\ubc29\uc131\uc744 \ucd5c\uc801\ud654\ud558\ub294 \ub370 \ubcf5\uc7a1\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \ud2b9\uc815 \ud50c\ub77c\uc988\ub9c8 \ud654\ud559 \uac1c\ubc1c(\ubd88\uc18c \uae30\ubc18 \uac00\uc2a4(\uc608: SF<sub>6<\/sub>, CHF<sub>3<\/sub>) \ubc0f \uc5d0\uce6d \uacf5\uc815 \ud30c\ub77c\ubbf8\ud130. \uacac\uace0\ud55c \uc5d0\uce6d \ub9c8\uc2a4\ud06c \uc0ac\uc6a9. \uc5d0\uce6d \uae4a\uc774\ub97c \uc81c\uc5b4\ud558\uae30 \uc704\ud55c \uc138\uc2ec\ud55c \uc5d4\ub4dc\ud3ec\uc778\ud2b8 \uac10\uc9c0.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc624\ubbf9 \uc811\ucd09 \ud615\uc131:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> N\ud615 \ubc0f p\ud615 SiC \ubaa8\ub450\uc5d0 \uc800\ud56d\uc774 \ub0ae\uace0 \uc5f4\uc801\uc73c\ub85c \uc548\uc815\uc801\uc778 \uc634 \uc811\uc810\uc744 \ud615\uc131\ud558\ub294 \uac83\uc740 \uc5b4\ub824\uc6b4 \uc77c\uc774\uba70, \ud2b9\ud788 p\ud615 SiC\uc758 \uacbd\uc6b0 \ubc34\ub4dc\uac2d\uc774 \ub113\uace0 \uc801\ud569\ud55c \uc791\uc5c5 \uae30\ub2a5\uc744 \uac00\uc9c4 \uae08\uc18d\uc744 \ucc3e\uae30\uac00 \uc5b4\ub835\uae30 \ub54c\ubb38\uc5d0 \ub354\uc6b1 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c \ub192\uc740 \uc5b4\ub2d0\ub9c1 \uc628\ub3c4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \ucd5c\uc801\uc758 \uae08\uc18d \ubc29\uc2dd(\uc608: n\ud615\uc758 \uacbd\uc6b0 Ti\/Al, p\ud615\uc758 \uacbd\uc6b0 Ni\/Ti\/Al) \ubc0f \ud45c\uba74 \uc900\ube44 \uae30\uc220\uc5d0 \ub300\ud55c \uc5f0\uad6c. \uc5b4\ub2d0\ub9c1 \uc870\uac74(\uc628\ub3c4, \uc2dc\uac04, \ub300\uae30)\uc744 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud558\uc5ec \ub0ae\uc740 \uc811\ucd09 \uc800\ud56d\uacfc \uc6b0\uc218\ud55c \ud615\ud0dc\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc7a5\uce58\uc758 \uc5f4 \uad00\ub9ac:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> SiC\ub294 \uc5f4 \uc804\ub3c4\uc131\uc774 \ub192\uc9c0\ub9cc \uc77c\ubd80 RF \ub514\ubc14\uc774\uc2a4\uc758 \uacbd\uc6b0 \uc804\ub825 \ubc00\ub3c4\uac00 \ub9e4\uc6b0 \ub192\uae30 \ub54c\ubb38\uc5d0 \uacfc\uc5f4\uc744 \ubc29\uc9c0\ud558\uace0 \uc548\uc815\uc131\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 \uc815\uad50\ud55c \uc5f4 \uad00\ub9ac \uc194\ub8e8\uc158\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \uc5f4\uc744 \ubd84\uc0b0\uc2dc\ud0a4\ub294 \uace0\uae09 \uc7a5\uce58 \uc124\uacc4, \uc587\uc740 \uae30\ud310 \uc0ac\uc6a9, \uace0\uc804\ub3c4\uc131 \ub2e4\uc774 \ubd80\ucc29 \uc7ac\ub8cc, \ud6a8\uc728\uc801\uc778 \ubc29\uc5f4\ud310. \uadf9\ud55c\uc758 \uacbd\uc6b0 \ubbf8\uc138 \uc720\uccb4 \ub0c9\uac01 \ub610\ub294 \ub2e4\uc774\uc544\ubaac\ub4dc \ud788\ud2b8 \uc2a4\ud504\ub808\ub354\ub97c \ud1b5\ud569\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc81c\uc870 \ube44\uc6a9:<\/strong>\n<ul>\n<li><strong>\ub3c4\uc804:<\/strong> \uc704\uc5d0\uc11c \uc5b8\uae09\ud55c \ubcf5\uc7a1\uc131\uacfc \uc2e4\ub9ac\ucf58\uc5d0 \ube44\ud574 \uc0c1\ub300\uc801\uc73c\ub85c \ub0ae\uc740 \uc0dd\uc0b0\ub7c9\uc73c\ub85c \uc778\ud574 SiC \ub514\ubc14\uc774\uc2a4\uc758 \uc81c\uc870 \ube44\uc6a9\uc774 \ub192\uc544\uc9d1\ub2c8\ub2e4.<\/li>\n<li><strong>\uc644\ud654:<\/strong> \uc9c0\uc18d\uc801\uc778 \uacf5\uc815 \uac1c\uc120, \ub354 \ud070 \uc9c1\uacbd\uc758 \uc6e8\uc774\ud37c(\uc608: 150mm \ubc0f 200mm) \uac1c\ubc1c, \ub354 \ub192\uc740 \uc218\uc728\uc758 \uacf5\uc815, \ucc44\ud0dd\uc774 \uc99d\uac00\ud568\uc5d0 \ub530\ub978 \uaddc\ubaa8\uc758 \uacbd\uc81c. \uacbd\uc7c1\ub825 \uc788\ub294 \uc194\ub8e8\uc158\uc744 \uc81c\uacf5\ud558\ub294 \uc219\ub828\ub41c \uacf5\uae09\uc5c5\uccb4\uc640\uc758 \uc804\ub7b5\uc801 \ud30c\ud2b8\ub108\uc2ed.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\uc774\ub7ec\ud55c \uacfc\uc81c\ub97c \ud574\uacb0\ud558\ub824\uba74 \uc7ac\ub8cc \uacfc\ud559, \ubc18\ub3c4\uccb4 \ubb3c\ub9ac\ud559, \uc81c\uc870 \uacf5\ud559\uc5d0 \ub300\ud55c \uae4a\uc740 \uc774\ud574\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc804\ubb38 \ubd84\uc57c\ubcc4 \uae30\uc5c5 <strong>\ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc81c\uc870<\/strong> \uc774\ub7ec\ud55c \ubb38\uc81c\ub97c \uc644\ud654\ud558\uace0 \uace0\uc131\ub2a5 RF \ubd80\ud488\uc744 \uc548\uc815\uc801\uc73c\ub85c \uc81c\uacf5\ud558\uae30 \uc704\ud574 R&amp;D \ubc0f \uacf5\uc815 \uae30\uc220\uc5d0 \ub9ce\uc740 \ud22c\uc790\ub97c \ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>\uc774\uc0c1\uc801\uc778 \ud30c\ud2b8\ub108 \uc120\ud0dd\ud558\uae30: \ub9de\ucda4\ud615 SiC RF \ubd80\ud488 \uacf5\uae09\uc5c5\uccb4 \uc120\ud0dd\ud558\uae30<\/h2>\n<p>RF \ud504\ub85c\uc81d\ud2b8\uc758 \uc131\uacf5 \uc5ec\ubd80\ub294 \ub9de\ucda4\ud615 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ubd80\ud488 \uacf5\uae09\uc5c5\uccb4\uc758 \uc5ed\ub7c9\uacfc \uc2e0\ub8b0\uc131\uc5d0 \ub530\ub77c \ud06c\uac8c \uc88c\uc6b0\ub429\ub2c8\ub2e4. \uc62c\ubc14\ub978 \ud30c\ud2b8\ub108\ub97c \uc120\ud0dd\ud558\ub294 \uac83\uc740 \ub2e8\uc21c\ud55c \ube44\uc6a9 \uc774\uc0c1\uc758 \uc804\ub7b5\uc801 \uacb0\uc815\uc785\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \uae30\uc220 \uc804\ubb38\uc131, \uc81c\uc870 \ub2a5\ub825, \ud488\uc9c8 \ubcf4\uc99d \uc2dc\uc2a4\ud15c, \uad6c\uccb4\uc801\uc774\uace0 \uae4c\ub2e4\ub85c\uc6b4 RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uae30 \uc704\ud55c \ud6a8\uacfc\uc801\uc778 \ud611\uc5c5 \ub2a5\ub825 \ub4f1\uc744 \ud3c9\uac00\ud558\ub294 \uac83\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uc870\ub2ec \uad00\ub9ac\uc790\uc640 \uae30\uc220 \uad6c\ub9e4\uc790\uc5d0\uac8c \uc7a5\uae30\uc801\uc778 \ud30c\ud2b8\ub108 \uc5ed\ud560\uc744 \ud560 \uc218 \uc788\ub294 \uacf5\uae09\uc5c5\uccb4\ub97c \ud30c\uc545\ud558\ub294 \uac83\uc740 \uc9c0\uc18d\uc801\uc778 \ud601\uc2e0\uacfc \uacf5\uae09\ub9dd \uc548\uc815\uc131\uc744 \uc704\ud574 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h3>SiC \uacf5\uae09\uc5c5\uccb4 \ud3c9\uac00\ub97c \uc704\ud55c \uc8fc\uc694 \uae30\uc900:<\/h3>\n<ul>\n<li><strong>\uae30\uc220 \uc804\ubb38 \uc9c0\uc2dd\uacfc \uacbd\ud5d8:<\/strong> \uacf5\uae09\uc5c5\uccb4\uac00 SiC \uc7ac\ub8cc \uacfc\ud559, RF \ub514\ubc14\uc774\uc2a4 \ubb3c\ub9ac\ud559, RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c SiC \ud504\ub85c\uc138\uc2f1\uc758 \ud2b9\uc815 \uacfc\uc81c\uc5d0 \ub300\ud574 \uae4a\uc774 \uc774\ud574\ud558\uace0 \uc788\uc2b5\ub2c8\uae4c? \uc785\uc99d\ub41c \uc2e4\uc801, \uc219\ub828\ub41c \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ud300, \uad00\ub828\uc131\uc744 \uac16\ucd98 <a href=\"https:\/\/sicarbtech.com\/ko\/cases\/\">\uc0ac\ub840 \uc5f0\uad6c \ub610\ub294 \uacfc\uac70 \uc791\uc5c5\uc758 \uc608<\/a>.<\/li>\n<li><strong>\uc7ac\ub8cc \ud488\uc9c8 \ubc0f \uc18c\uc2f1:<\/strong> SiC \uae30\ud310\uc758 \ucd9c\ucc98\uc640 \ud488\uc9c8\uc5d0 \ub300\ud574 \ubb38\uc758\ud558\uc138\uc694. RF\uc5d0 \uc801\ud569\ud55c \uace0\uc21c\ub3c4, \uc800\uacb0\ud568 \ubc18\uc808\uc5f0 SiC\ub97c \uc870\ub2ec\ud560 \uc218 \uc788\ub294 \ud1b5\uc81c\uad8c\uc774 \uc788\uac70\ub098 \uac15\ub825\ud55c \ud30c\ud2b8\ub108\uc2ed\uc744 \ub9fa\uace0 \uc788\ub098\uc694? \uc7ac\ub8cc \uc77c\uad00\uc131\uc774 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uae30\ub2a5:<\/strong> \uacf5\uae09\uc5c5\uccb4\uac00 \uc9c4\uc815\uc73c\ub85c \ub9de\ucda4\ud615 \uc194\ub8e8\uc158\uc744 \uc81c\uacf5\ud560 \uc218 \uc788\ub098\uc694? \uc5ec\uae30\uc5d0\ub294 \ub9de\ucda4\ud615 \ub514\uc790\uc778, \uc7ac\ub8cc \ud2b9\uc131 \uc870\uc815(\ud55c\ub3c4 \ub0b4), \ud2b9\uc815 \uce58\uc218 \uacf5\ucc28, \uace0\uc720\ud55c \ud45c\uba74 \ub9c8\uac10 \ubc0f \ub9de\ucda4\ud615 \ud6c4\ucc98\ub9ac\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uc720\uc5f0\uc131\uacfc \uacf5\ub3d9 \uac1c\ubc1c\uc5d0 \ucc38\uc5ec\ud560 \uc758\uc9c0\uac00 \uc788\ub294\uc9c0 \ud3c9\uac00\ud558\uc138\uc694. \uc6b0\ub9ac\uc758 <a href=\"https:\/\/sicarbtech.com\/ko\/customizing-support\/\">\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uc9c0\uc6d0<\/a> \ub97c \ud1b5\ud574 \ub2e4\uc591\ud558\uace0 \uad6c\uccb4\uc801\uc778 \uace0\uac1d\uc758 \uc694\uad6c\ub97c \ud6a8\uacfc\uc801\uc73c\ub85c \ucda9\uc871\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc81c\uc870 \uc2dc\uc124 \ubc0f \ud504\ub85c\uc138\uc2a4:<\/strong> \uc81c\uc870 \uc778\ud504\ub77c\ub97c \ud3c9\uac00\ud569\ub2c8\ub2e4. SiC \uc131\uc7a5(\ud574\ub2f9\ub418\ub294 \uacbd\uc6b0), \uc6e8\uc774\ud37c\ub9c1, \uc5d0\ud53c\ud0dd\uc2dc(GaN-on-SiC\ub97c \uc81c\uacf5\ud558\ub294 \uacbd\uc6b0), \ub9ac\uc18c\uadf8\ub798\ud53c, \uc5d0\uce6d, \uae08\uc18d\ud654 \ubc0f \ud14c\uc2a4\ud2b8\ub97c \uc704\ud55c \uace0\uae09 \uc7a5\ube44\ub97c \ubcf4\uc720\ud558\uace0 \uc788\ub098\uc694? \ud504\ub85c\uc138\uc2a4\uac00 \uc798 \ubb38\uc11c\ud654\ub418\uace0 \uad00\ub9ac\ub418\uace0 \uc788\ub098\uc694?<\/li>\n<li><strong>\ud544\uc694\ud55c \uac83\uacfc \uc720\uc0ac\ud55c \ud06c\uae30\uc640 \ubcf5\uc7a1\uc131\uc758 \ubd80\ud488\uc5d0 \ub300\ud55c \uacbd\ud5d8\uc774 \uc788\uc2b5\ub2c8\uae4c?<\/strong> ISO 9001\uacfc \uac19\uc740 \uc778\uc99d\uc744 \ucc3e\uc544\ubcf4\uc138\uc694. \uc0dd\uc0b0\uc758 \uac01 \ub2e8\uacc4\uc5d0\uc11c \uc5b4\ub5a4 \ud488\uc9c8 \uad00\ub9ac \uc870\uce58\uac00 \ub9c8\ub828\ub418\uc5b4 \uc788\ub098\uc694? \uc790\uc7ac \ucd94\uc801\uc131, \ud504\ub85c\uc138\uc2a4 \ubaa8\ub2c8\ud130\ub9c1, \ucd5c\uc885 \uc81c\ud488 \ud14c\uc2a4\ud2b8\ub294 \uc5b4\ub5bb\uac8c \ucc98\ub9ac\ud558\ub098\uc694?<\/li>\n<li><strong>\uacc4\uce21 \ubc0f \ud2b9\uc131\ud654 \uae30\ub2a5:<\/strong> \uc911\uc694\ud55c \ud30c\ub77c\ubbf8\ud130(\uc608: \uc800\ud56d\ub960, \uacb0\ud568 \ubc00\ub3c4, \ud45c\uba74 \uac70\uce60\uae30, \uce58\uc218 \uc815\ud655\ub3c4, RF \uc131\ub2a5)\ub97c \uce21\uc815\ud558\uace0 \uac80\uc99d\ud558\ub294 \uacf5\uae09\uc5c5\uccb4\uc758 \ub2a5\ub825\uc740 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uace0\uae09 \uacc4\uce21 \ub3c4\uad6c\ub294 \ud488\uc9c8\uc5d0 \ub300\ud55c \ub178\ub825\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4.<\/li>\n<li><strong>\ub9ac\ub4dc \ud0c0\uc784 \ubc0f \ud655\uc7a5\uc131:<\/strong> \uacf5\uae09\uc5c5\uccb4\uac00 \ud504\ub85c\ud1a0\ud0c0\uc785 \ubc0f \ub300\ub7c9 \uc0dd\uc0b0 \uc77c\uc815\uc744 \ub9de\ucd9c \uc218 \uc788\ub098\uc694? \uc218\uc694\uac00 \uc99d\uac00\ud560 \uacbd\uc6b0 \uc0dd\uc0b0\uc744 \ud655\uc7a5\ud560 \uc218 \uc788\ub294 \uc5ed\ub7c9\uc744 \uac16\ucd94\uace0 \uc788\ub098\uc694? \ub9ac\ub4dc \ud0c0\uc784\uc5d0 \uad00\ud55c \ud22c\uba85\ud55c \ucee4\ubba4\ub2c8\ucf00\uc774\uc158\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ube44\uc6a9 \ud6a8\uc728\uc131:<\/strong> \uc720\uc77c\ud55c \uc694\uc18c\ub294 \uc544\ub2c8\uc9c0\ub9cc \uac00\uaca9\ub3c4 \uacbd\uc7c1\ub825 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4. \ube44\uc6a9 \uad6c\uc870\ub97c \uc774\ud574\ud558\uace0 \uc81c\uacf5\ub418\ub294 \ud488\uc9c8 \ubc0f \uc0ac\uc6a9\uc790 \uc9c0\uc815 \uc218\uc900\uc5d0 \ube44\ud574 \uc801\uc808\ud55c \uac00\uce58\ub97c \ubc1b\uace0 \uc788\ub294\uc9c0 \ud655\uc778\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uae30\uc220 \uc9c0\uc6d0 \ubc0f \ucee4\ubba4\ub2c8\ucf00\uc774\uc158:<\/strong> \ud2b9\ud788 \ub9de\ucda4\ud615 \ud504\ub85c\uc81d\ud2b8\uc758 \uacbd\uc6b0 \ud6a8\uacfc\uc801\uc774\uace0 \uc2e0\uc18d\ud55c \ucee4\ubba4\ub2c8\ucf00\uc774\uc158\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \uacf5\uae09\uc5c5\uccb4\uac00 \uc124\uacc4, \uc81c\uc870 \ubc0f \ub0a9\ud488 \ud6c4 \ub2e8\uacc4\uc5d0 \uac78\uccd0 \uac15\ub825\ud55c \uae30\uc220 \uc9c0\uc6d0\uc744 \uc81c\uacf5\ud558\ub098\uc694?<\/li>\n<li><strong>\uc704\uce58 \ubc0f \uacf5\uae09\ub9dd \ubcf5\uc6d0\ub825:<\/strong> \uacf5\uae09\uc5c5\uccb4\uc758 \uc704\uce58\uc640 \ubb3c\ub958 \ubc0f \uacf5\uae09\ub9dd \uc704\ud5d8\uc5d0 \ubbf8\uce58\ub294 \uc601\ud5a5\uc744 \uace0\ub824\ud558\uc138\uc694. \uc77c\ubd80 \uc9c0\uc5ed\uc740 SiC \uc81c\uc870\uc758 \uc911\uc694\ud55c \ud5c8\ube0c\uac00 \ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, \uc911\uad6d \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \ub9de\ucda4\ud615 \ubd80\ud488 \uc81c\uc870\uc758 \ud5c8\ube0c\ub294 \uc6e8\uc774\ud321\uc2dc\uc5d0 \uc704\uce58\ud574 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uc9c0\uc5ed\uc5d0\ub294 40\uac1c \uc774\uc0c1\uc758 SiC \uc0dd\uc0b0 \uae30\uc5c5\uc774 \uc788\uc73c\uba70, \uc911\uad6d \uc804\uccb4 SiC \uc0dd\uc0b0\ub7c9\uc758 80% \uc774\uc0c1\uc744 \ucc28\uc9c0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uc2dc\uce74\ube0c \ud14c\ud06c\uc640 \uac19\uc740 \uae30\uc5c5\uc740 \uc774\ub7ec\ud55c \ud5c8\ube0c\uc758 \ubc1c\uc804\uc5d0 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud574\uc654\uc2b5\ub2c8\ub2e4. 2015\ub144\ubd80\ud130 SicSino\ub294 \ucca8\ub2e8 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc0dd\uc0b0 \uae30\uc220\uc744 \ub3c4\uc785\ud558\uace0 \uad6c\ud604\ud558\uc5ec \uc6e8\uc774\ud321\uc758 \ud604\uc9c0 \uae30\uc5c5\uc774 \ub300\uaddc\ubaa8 \uc0dd\uc0b0\uacfc \uae30\uc220 \ud601\uc2e0\uc744 \ub2ec\uc131\ud560 \uc218 \uc788\ub3c4\ub85d \uc9c0\uc6d0\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc911\uad6d\uacfc\ud559\uc6d0 \uad6d\uac00\uae30\uc220\uc774\uc804\uc13c\ud130\uc640 \uae34\ubc00\ud788 \ud611\ub825\ud558\ub294 \uae30\uc5c5\uac00 \uacf5\uc6d0\uc778 \uc911\uad6d\uacfc\ud559\uc6d0(\uc6e8\uc774\ud321) \ud601\uc2e0 \ub2e8\uc9c0\uc758 \uc77c\ubd80\uc778 SicSino\ub294 \uc911\uad6d\uacfc\ud559\uc6d0\uc758 \uac15\ub825\ud55c \uacfc\ud559, \uae30\uc220 \uc5ed\ub7c9\uacfc \uc778\uc7ac \ud480\uc744 \ud65c\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc9c0\uc6d0\uc740 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294<\/p>","protected":false},"excerpt":{"rendered":"<p>RF \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5 \ubc0f \uc2e0\ub8b0\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 SiC \uc18c\uac1c: \ubcf4\uc774\uc9c0 \uc54a\ub294 \uac15\uc790 - RF \uae30\uc220\uc758 \ub9de\ucda4\ud615 SiC \ube60\ub974\uac8c \uc9c4\ud654\ud558\ub294 \ubb34\uc120 \uc8fc\ud30c\uc218(RF) \uae30\uc220 \ud658\uacbd\uc5d0\uc11c \ub354 \ub192\uc740 \uc131\ub2a5, \ub354 \ub192\uc740 \uc2e0\ub8b0\uc131, \ub354 \ucef4\ud329\ud2b8\ud55c \uc194\ub8e8\uc158\uc5d0 \ub300\ud55c \uc218\uc694\ub294 \ub04a\uc784\uc5c6\uc774 \uc99d\uac00\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ucca8\ub2e8 \ud1b5\uc2e0 \uc2dc\uc2a4\ud15c\uacfc \ub808\uc774\ub354 \uae30\uc220\ubd80\ud130 \ucd5c\ucca8\ub2e8 \uc758\ub8cc \uae30\uae30 \ubc0f \uc0b0\uc5c5\uc6a9 \ub09c\ubc29\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 RF\ub294...<\/p>","protected":false},"author":3,"featured_media":2344,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_gspb_post_css":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-2531","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized"],"acf":{"en_gb-title":"","en_gb-meta":"","ja-title":"","ja-meta":"","ja-content":"","ko-title":"","ko-meta":"","ko-content":"","nl-title":"","nl-meta":"","nl-content":"","es-title":"","es-meta":"","es-content":"","ru-title":"","ru-meta":"","ru-content":"","tr-title":"","tr-meta":"","tr-content":"","pl-title":"","pl-meta":"","pl-content":"","pt-title":"","pt-meta":"","pt-content":"","de-title":"","de-meta":"","de-content":"","fr-title":"","fr-meta":"","fr-content":""},"taxonomy_info":{"category":[{"value":1,"label":"Uncategorized"}]},"featured_image_src_large":["https:\/\/sicarbtech.com\/wp-content\/uploads\/2025\/05\/Custom-Silicon-Carbide-Products-6_1-1.jpg",1024,1024,false],"author_info":{"display_name":"yiyunyinglucky","author_link":"https:\/\/sicarbtech.com\/ko\/author\/yiyunyinglucky\/"},"comment_info":17,"category_info":[{"term_id":1,"name":"Uncategorized","slug":"uncategorized","term_group":0,"term_taxonomy_id":1,"taxonomy":"category","description":"","parent":0,"count":795,"filter":"raw","cat_ID":1,"category_count":795,"category_description":"","cat_name":"Uncategorized","category_nicename":"uncategorized","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2531","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/comments?post=2531"}],"version-history":[{"count":3,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2531\/revisions"}],"predecessor-version":[{"id":4944,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2531\/revisions\/4944"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media\/2344"}],"wp:attachment":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media?parent=2531"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/categories?post=2531"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/tags?post=2531"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}