{"id":2530,"date":"2025-09-03T09:10:55","date_gmt":"2025-09-03T09:10:55","guid":{"rendered":"https:\/\/casnewmaterials.com\/?p=2530"},"modified":"2025-08-13T01:01:50","modified_gmt":"2025-08-13T01:01:50","slug":"sic-substrates-the-foundation-for-advanced-tech","status":"publish","type":"post","link":"https:\/\/sicarbtech.com\/ko\/sic-substrates-the-foundation-for-advanced-tech\/","title":{"rendered":"SiC Substrates: The Foundation for Advanced Tech"},"content":{"rendered":"<h1>SiC Substrates: The Foundation for Advanced Tech<\/h1>\n<p>\ube60\ub974\uac8c \uc9c4\ud654\ud558\ub294 \ucca8\ub2e8 \uae30\uc220 \ud658\uacbd\uc5d0\uc11c\ub294 \uadf9\ud55c\uc758 \uc870\uac74\uc744 \uacac\ub514\uace0 \ub6f0\uc5b4\ub09c \uc131\ub2a5\uc744 \uc81c\uacf5\ud558\ub294 \uc18c\uc7ac\uc5d0 \ub300\ud55c \uc694\uad6c\uac00 \ubb34\uc5c7\ubcf4\ub2e4 \uc911\uc694\ud569\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uae30\ud310\uc740 \ud2b9\ud788 \ud601\uc2e0\uc758 \ud55c\uacc4\ub97c \ub6f0\uc5b4\ub118\ub294 \uc0b0\uc5c5\uc5d0\uc11c \uc911\uc694\ud55c \uae30\ubc18 \uc7ac\ub8cc\ub85c \ubd80\uc0c1\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uace0\uc804\ub825 \uc804\uc790\uae30\uae30\ubd80\ud130 \ucd5c\ucca8\ub2e8 \ud56d\uacf5\uc6b0\uc8fc \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 SiC \uae30\ud310\uc740 \ucc28\uc138\ub300 \ub514\ubc14\uc774\uc2a4\uc5d0 \ud544\uc694\ud55c \uacac\uace0\ud55c \uae30\ubc18\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc774 \ube14\ub85c\uadf8 \uac8c\uc2dc\ubb3c\uc5d0\uc11c\ub294 SiC \uae30\ud310\uc758 \uc751\uc6a9 \ubd84\uc57c, \uc7a5\uc810, \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d \ubc0f \ud2b9\uc815 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\ub294 \uace0\ud488\uc9c8 \ub9de\ucda4\ud615 \uc194\ub8e8\uc158\uc744 \uc870\ub2ec\ud558\ub294 \ubc29\ubc95\uc744 \uc0b4\ud3b4\ubcf4\uba70 SiC \uae30\ud310\uc758 \uc138\uacc4\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubd05\ub2c8\ub2e4.<\/p>\n<h2>1. \uc18c\uac1c \uc18c\uac1c: \ucc28\uc138\ub300 \uae30\uc220\uc758 \uae30\ubc18\uc774 \ub418\ub294 SiC \uae30\ud310<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)\ub294 \ub6f0\uc5b4\ub09c \ubb3c\ub9ac\uc801 \ubc0f \uc804\uc790\uc801 \ud2b9\uc131\uc73c\ub85c \uc798 \uc54c\ub824\uc9c4 \ud654\ud569\ubb3c \ubc18\ub3c4\uccb4 \uc18c\uc7ac\uc785\ub2c8\ub2e4. SiC \uae30\ud310\uc740 \uae30\ubcf8\uc801\uc73c\ub85c \ub2e8\uacb0\uc815 SiC\ub85c \ub9cc\ub4e0 \uc6e8\uc774\ud37c \ub610\ub294 \ub514\uc2a4\ud06c\ub85c, \uadf8 \uc704\uc5d0 \ud65c\uc131 \ubc18\ub3c4\uccb4 \uce35(\uc5d0\ud53c\ud0dd\uc15c \uce35)\uc744 \uc131\uc7a5\uc2dc\ucf1c \uc804\uc790 \ub610\ub294 \uad11\uc804\uc790 \uc7a5\uce58\ub97c \uc81c\uc791\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uae30\ud310\uc740 \ub2e8\uc21c\ud55c \uc218\ub3d9 \uce90\ub9ac\uc5b4\uac00 \uc544\ub2c8\ub77c \ucd5c\uc885 \ub514\ubc14\uc774\uc2a4\uc758 \uc131\ub2a5, \uc2e0\ub8b0\uc131, \ud6a8\uc728\uc131\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \ud488\uc9c8\uc785\ub2c8\ub2e4. \ub113\uc740 \ubc34\ub4dc\uac2d, \ub192\uc740 \uc5f4 \uc804\ub3c4\uc131, \ub192\uc740 \ud56d\ubcf5 \uc804\uae30\uc7a5 \uac15\ub3c4, \uc6b0\uc218\ud55c \uae30\uacc4\uc801 \uc548\uc815\uc131\uc758 \ub3c5\ud2b9\ud55c \uc870\ud569\uc740 \uace0\uc804\ub825, \uace0\uc8fc\ud30c \ubc0f \uace0\uc628 \uc791\ub3d9\uc744 \uc694\uad6c\ud558\ub294 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 SiC \uae30\ud310\uc744 \ud544\uc218 \ubd88\uac00\uacb0\ud55c \uc694\uc18c\ub85c \ub9cc\ub4ed\ub2c8\ub2e4. 5G, \uc804\uae30 \uc790\ub3d9\ucc28, \uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc2dc\uc2a4\ud15c\uacfc \uac19\uc740 \uae30\uc220\uc774 \ubc1c\uc804\ud568\uc5d0 \ub530\ub77c \uace0\ud488\uc9c8 SiC \uae30\ud310\uc758 \uc5ed\ud560\uc740 \uc810\uc810 \ub354 \uc911\uc694\ud574\uc9c0\uace0 \uc788\uc73c\uba70, \ubbf8\ub798 \ud601\uc2e0\uc758 \uae30\ubc18\uc774 \ub418\ub294 \uc5ed\ud560\uc744 \ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud2b9\uc815 \ub514\ubc14\uc774\uc2a4 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\ub294 \ub9de\ucda4\ud615 SiC \uae30\ud310\uc744 \uc870\ub2ec\ud560 \uc218 \uc788\ub294 \ub2a5\ub825\uc740 \uadf8 \uac00\uce58\ub97c \ub354\uc6b1 \uc99d\ud3ed\uc2dc\ucf1c \uc5d4\uc9c0\ub2c8\uc5b4\uac00 \uac00\uc7a5 \uae4c\ub2e4\ub85c\uc6b4 \uc0b0\uc5c5 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c\ub3c4 \uc131\ub2a5\uc744 \ucd5c\uc801\ud654\ud560 \uc218 \uc788\uac8c \ud574\uc90d\ub2c8\ub2e4.<\/p>\n<h2>2. SiC \uae30\ud310\uc758 \uc218\uc694\ub97c \uc8fc\ub3c4\ud558\ub294 \uc8fc\uc694 \uc0b0\uc5c5 \ubd84\uc57c<\/h2>\n<p>SiC \uae30\ud310\uc758 \ub6f0\uc5b4\ub09c \ud2b9\uc131 \ub355\ubd84\uc5d0 \ub2e4\uc591\ud55c \ucca8\ub2e8 \uae30\uc220 \uc0b0\uc5c5\uc5d0\uc11c \ucc44\ud0dd\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uac01 \ubd84\uc57c\uc5d0\uc11c\ub294 SiC\uc758 \uace0\uc720\ud55c \uc7a5\uc810\uc744 \ud65c\uc6a9\ud558\uc5ec \uc774\uc804\uc758 \uc18c\uc7ac \ud55c\uacc4\ub97c \uadf9\ubcf5\ud558\uace0 \uc0c8\ub85c\uc6b4 \ucc28\uc6d0\uc758 \uc131\ub2a5\uacfc \ud6a8\uc728\uc131\uc744 \uc2e4\ud604\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>\ubc18\ub3c4\uccb4 \ubc0f \uc804\ub825 \uc804\uc790:<\/strong> SiC \uae30\ud310\uc758 \uac00\uc7a5 \ud070 \uc2dc\uc7a5\uc785\ub2c8\ub2e4. \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58, \uc778\ubc84\ud130, \uac00\ubcc0 \uc8fc\ud30c\uc218 \ub4dc\ub77c\uc774\ube0c\uc5d0 \uc0ac\uc6a9\ub418\ub294 MOSFET, \uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc, \uc804\ub825 \ubaa8\ub4c8\uacfc \uac19\uc740 \uc804\ub825 \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc5d0 \ud544\uc218\uc801\uc778 \uc18c\uc7ac\uc785\ub2c8\ub2e4. SiC \uae30\ubc18 \ub514\ubc14\uc774\uc2a4\ub294 \uae30\uc874 \uc2e4\ub9ac\ucf58 \ub514\ubc14\uc774\uc2a4\uc5d0 \ube44\ud574 \uc5d0\ub108\uc9c0 \uc190\uc2e4\uc774 \uc801\uace0 \uc2a4\uc704\uce6d \uc8fc\ud30c\uc218\uac00 \ub192\uc73c\uba70 \uc791\ub3d9 \uc628\ub3c4\uac00 \ub192\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ub354 \uc791\uace0 \ud6a8\uc728\uc801\uc774\uba70 \uc548\uc815\uc801\uc778 \uc804\ub825 \ubcc0\ud658 \uc2dc\uc2a4\ud15c\uc744 \uad6c\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc790\ub3d9\ucc28:<\/strong> \uc790\ub3d9\ucc28 \uc0b0\uc5c5, \ud2b9\ud788 \uc804\uae30 \uc790\ub3d9\ucc28(EV) \ubd80\ubb38\uc740 SiC \uae30\ud310 \uc218\uc694\uc758 \uc8fc\uc694 \ub3d9\uc778\uc785\ub2c8\ub2e4. EV \uc778\ubc84\ud130, \uc628\ubcf4\ub4dc \ucda9\uc804\uae30, DC-DC \ucee8\ubc84\ud130\uc758 SiC \uc804\ub825 \ubaa8\ub4c8\uc740 \uc8fc\ud589 \uac70\ub9ac \uc99d\uac00, \ucda9\uc804 \uc2dc\uac04 \ub2e8\ucd95, \ucc28\ub7c9 \ubb34\uac8c \ubc0f \ubd80\ud53c \uac10\uc18c\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4. \ub610\ud55c \ub354 \ub192\uc740 \uc628\ub3c4\uc5d0\uc11c \uc791\ub3d9\ud560 \uc218 \uc788\uae30 \ub54c\ubb38\uc5d0 \ub0c9\uac01 \uc2dc\uc2a4\ud15c \uc694\uad6c \uc0ac\ud56d\ub3c4 \uac04\uc18c\ud654\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\ud56d\uacf5\uc6b0\uc8fc &#038; \ubc29\uc704:<\/strong> \ud56d\uacf5\uc6b0\uc8fc \ubc0f \ubc29\uc704 \uc2dc\uc2a4\ud15c\uc5d0\ub294 \uac00\ubccd\uace0 \uacac\uace0\ud558\uba70 \uc5f4\uc545\ud55c \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc788\ub294 \ubd80\ud488\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. SiC \uae30\ud310\uc740 \ubc29\uc0ac\uc120 \uacbd\ub3c4, \uace0\uc628 \ub0b4\uc131 \ubc0f \ub192\uc740 \uc804\ub825 \ubc00\ub3c4\ub85c \uc778\ud574 \ub808\uc774\ub354 \uc2dc\uc2a4\ud15c, \uc704\uc131 \uc804\uc6d0 \uc2dc\uc2a4\ud15c \ubc0f \ud56d\uacf5 \uc804\uc790\uae30\uae30 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc7ac\uc0dd \uc5d0\ub108\uc9c0:<\/strong> \ud0dc\uc591\uad11 \uc778\ubc84\ud130\uc640 \ud48d\ub825 \ud130\ube48 \ucee8\ubc84\ud130\ub294 SiC \uae30\uc220\uc758 \uc774\uc810\uc744 \ud06c\uac8c \ub204\ub9b4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. SiC \uae30\ubc18 \uc804\ub825 \ubcc0\ud658\uc758 \ud6a8\uc728\uc774 \ub192\uc744\uc218\ub85d \uc5d0\ub108\uc9c0 \uc218\ud655\ub7c9\uc774 \uc99d\uac00\ud558\uace0 \uc2dc\uc2a4\ud15c \ube44\uc6a9\uc774 \uc808\uac10\ub429\ub2c8\ub2e4. \ub610\ud55c \ub0b4\uad6c\uc131\uc774 \ub6f0\uc5b4\ub098 \uba40\ub9ac \ub5a8\uc5b4\uc838 \uc788\uac70\ub098 \uae4c\ub2e4\ub85c\uc6b4 \uc124\uce58 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc720\uc6a9\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>LED \uc81c\uc870:<\/strong> \uc9c8\ud654 \uac08\ub968(GaN)\uc740 \uc885\uc885 \uc0ac\ud30c\uc774\uc5b4\ub098 \uc2e4\ub9ac\ucf58\uc5d0\uc11c \uc131\uc7a5\ud558\uc9c0\ub9cc, SiC \uae30\ud310\uc740 \uace0\ucd9c\ub825 GaN \uae30\ubc18 LED \ubc0f \ub808\uc774\uc800 \ub2e4\uc774\uc624\ub4dc\uc5d0 \ub354 \uac00\uae4c\uc6b4 \uaca9\uc790 \uc77c\uce58\uc640 \ub354 \ub098\uc740 \uc5f4 \uc804\ub3c4\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uadf8 \uacb0\uacfc \ud2b9\ud788 \uc0b0\uc5c5\uc6a9 \uc870\uba85, \uc790\ub3d9\ucc28 \ud5e4\ub4dc\ub7a8\ud504, \ub300\ud615 \ub514\uc2a4\ud50c\ub808\uc774\uc640 \uac19\uc740 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ub354 \ubc1d\uace0 \ud6a8\uc728\uc801\uc774\uba70 \uc624\ub798 \uc9c0\uc18d\ub418\ub294 \uc870\uba85 \uc194\ub8e8\uc158\uc744 \uad6c\ud604\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc0b0\uc5c5 \uae30\uacc4 &amp;038; \uc81c\uc870:<\/strong> \uace0\ucd9c\ub825 \ubaa8\ud130 \ub4dc\ub77c\uc774\ube0c, \uc0b0\uc5c5\uc6a9 \ub09c\ubc29 \uc2dc\uc2a4\ud15c \ubc0f \uc6a9\uc811 \uc7a5\ube44\ub294 \ud6a8\uc728, \uc815\ubc00\ub3c4 \ubc0f \uc81c\uc5b4 \ud5a5\uc0c1\uc744 \uc704\ud574 SiC \uc804\ub825 \uc7a5\uce58\ub97c \ud65c\uc6a9\ud569\ub2c8\ub2e4. SiC\uc758 \uacac\uace0\ud568\uc740 \uae4c\ub2e4\ub85c\uc6b4 \uc0b0\uc5c5 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uae34 \uc218\uba85\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>10447: \ud1b5\uc2e0:<\/strong> SiC \uae30\ud310\uc740 5G \uae30\uc9c0\uad6d \ubc0f \uae30\ud0c0 \ud1b5\uc2e0 \uc778\ud504\ub77c\uc758 \uace0\uc8fc\ud30c \uc804\ub825 \uc99d\ud3ed\uae30 \ubd84\uc57c\uc5d0\uc11c \uc751\uc6a9 \ubd84\uc57c\ub97c \ucc3e\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uace0\uc8fc\ud30c\uc5d0\uc11c \ub192\uc740 \uc804\ub825\uc744 \ucc98\ub9ac\ud558\ub294 \ub2a5\ub825\uc740 \ud6a8\uc728\uc801\uc778 \uc2e0\ud638 \uc804\uc1a1\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc11d\uc720 \ubc0f \uac00\uc2a4:<\/strong> \uc11d\uc720 \ubc0f \uac00\uc2a4 \uc0b0\uc5c5\uc758 \ub2e4\uc6b4\ud640 \uc2dc\ucd94 \ubc0f \uac10\uc9c0 \uc7a5\ube44\ub294 \uadf9\ud55c\uc758 \uc628\ub3c4\uc640 \uc555\ub825\uc5d0\uc11c \uc791\ub3d9\ud569\ub2c8\ub2e4. SiC \uae30\ubc18 \uc13c\uc11c\uc640 \uc804\uc790 \uc7a5\uce58\ub294 \uc774\ub7ec\ud55c \uae4c\ub2e4\ub85c\uc6b4 \uc870\uac74\uc5d0\uc11c \ub6f0\uc5b4\ub09c \uc2e0\ub8b0\uc131\uacfc \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ucca0\ub3c4 \uc6b4\uc1a1:<\/strong> \ucd5c\uc2e0 \uc5f4\ucc28\uc640 \ud2b8\ub7a8\uc740 \uc5d0\ub108\uc9c0 \ud6a8\uc728\uc744 \uac1c\uc120\ud558\uace0 \uc804\ub825 \uc2dc\uc2a4\ud15c\uc758 \ud06c\uae30\uc640 \ubb34\uac8c\ub97c \uc904\uc774\uba70 \uc6b4\uc601 \ube44\uc6a9\uc744 \uc808\uac10\ud558\uae30 \uc704\ud574 SiC \uae30\ubc18 \ubcf4\uc870 \uc804\uc6d0 \uc7a5\uce58\uc640 \ud2b8\ub799\uc158 \uc778\ubc84\ud130\ub97c \uc810\uc810 \ub354 \ub9ce\uc774 \uc0ac\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc6d0\uc790\ub825:<\/strong> SiC\ub294 \ub0b4\ubc29\uc0ac\uc120\uc131\uacfc \uace0\uc628 \uc548\uc815\uc131\uc774 \ub6f0\uc5b4\ub098 \uc6d0\uc790\ub825 \ubc1c\uc804\uc18c \ub0b4 \uc13c\uc11c \ubc0f \uc804\uc790 \ubd80\ud488\uc5d0 \uc801\ud569\ud55c \uc18c\uc7ac\ub85c, \ubcf4\ub2e4 \uc548\uc804\ud558\uace0 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uc6b4\uc601\uc5d0 \uae30\uc5ec\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<h2>3. \ub9de\ucda4\ud615 SiC \uae30\ud310\uc758 \ub3c5\ubcf4\uc801\uc778 \uc7a5\uc810<\/h2>\n<p>\ud45c\uc900 SiC \uae30\ud310\ub3c4 \uc0c1\ub2f9\ud55c \uc774\uc810\uc744 \uc81c\uacf5\ud558\uc9c0\ub9cc, \uc774\ub7ec\ud55c \uae30\ubcf8 \uad6c\uc131 \uc694\uc18c\ub97c \ub9de\ucda4\ud654\ud560 \uc218 \uc788\uc73c\uba74 \ub514\ubc14\uc774\uc2a4 \ucd5c\uc801\ud654 \ubc0f \uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcc4 \uc131\ub2a5\uc5d0 \ub300\ud55c \uc0c8\ub85c\uc6b4 \uac00\ub2a5\uc131\uc758 \uc601\uc5ed\uc774 \uc5f4\ub9bd\ub2c8\ub2e4. \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc744 \ud1b5\ud574 \uc5d4\uc9c0\ub2c8\uc5b4\uc640 \uc124\uacc4\uc790\ub294 \ucca8\ub2e8 \uae30\uc220\uc758 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\uac8c \uae30\ud310 \ud2b9\uc131\uc744 \uc815\ubc00\ud558\uac8c \uc870\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ub9de\ucda4\ud615 SiC \uae30\ud310 \uc120\ud0dd\uc758 \uc8fc\uc694 \uc774\uc810\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\ucd5c\uc801\ud654\ub41c \uc5f4 \uad00\ub9ac:<\/strong> SiC\ub294 \uc2e4\ub9ac\ucf58\ubcf4\ub2e4 \uc57d 3\ubc30 \ub192\uc740 \uc5f4 \uc804\ub3c4\uc131\uc744 \uc790\ub791\ud569\ub2c8\ub2e4. \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc744 \ud1b5\ud574 \ud2b9\uc815 \ud3f4\ub9ac\ud0c0\uc785\uc744 \uc9c0\uc815\ud558\uac70\ub098 \ud45c\uba74\uc744 \uc218\uc815\ud558\uc5ec \ubc29\uc5f4 \uacbd\ub85c\ub97c \ucd5c\uc801\ud654\ud568\uc73c\ub85c\uc368 \uc774\ub97c \ub354\uc6b1 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc73c\uba70, \uc774\ub294 \uace0\uc804\ub825 \ubc00\ub3c4 \ub514\ubc14\uc774\uc2a4\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \uc791\ub3d9 \uc628\ub3c4\ub97c \ub0ae\ucd94\uace0 \uc548\uc815\uc131\uc744 \uac1c\uc120\ud558\uba70 \ubd80\ud53c\uac00 \ud070 \ub0c9\uac01 \uc2dc\uc2a4\ud15c\uc758 \ud544\uc694\uc131\uc744 \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud5a5\uc0c1\ub41c \uc804\uae30\uc801 \uc131\ub2a5:<\/strong>\n<ul>\n<li><strong>\ub192\uc740 \ud56d\ubcf5 \uc804\uc555:<\/strong> SiC\uc758 \ud56d\ubcf5 \uc804\uae30\uc7a5\uc740 \uc2e4\ub9ac\ucf58\uc758 \uc57d 10\ubc30\uc5d0 \ub2ec\ud569\ub2c8\ub2e4. \uc774 \ud2b9\uc131\uc744 \uadf9\ub300\ud654\ud558\uae30 \uc704\ud574 \ud2b9\uc815 \ub3c4\ud551 \uc218\uc900(\uc608: N\ud615 \ub610\ub294 \ubc18\uc808\uc5f0) \ubc0f \uacb0\ud568 \ubc00\ub3c4\ub85c \ub9de\ucda4\ud615 \uae30\ud310\uc744 \uc124\uacc4\ud558\uc5ec \ub514\ubc14\uc774\uc2a4\uac00 \uace0\uc7a5 \uc5c6\uc774 \ud6e8\uc52c \ub354 \ub192\uc740 \uc804\uc555\uc744 \ucc98\ub9ac\ud560 \uc218 \uc788\ub3c4\ub85d \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ub0ae\uc740 \uc628-\uc800\ud56d:<\/strong> \uc804\ub825 \uc2a4\uc704\uce6d \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uc804\ub3c4 \uc190\uc2e4\uc744 \uc904\uc774\ub824\uba74 \uc628\uc800\ud56d\uc744 \ucd5c\uc18c\ud654\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \ub9de\ucda4\ud615 \uae30\ud310 \ub450\uaed8\uc640 \ub3c4\ud551 \ud504\ub85c\ud30c\uc77c\uc744 \uc870\uc815\ud558\uc5ec \uc8fc\uc5b4\uc9c4 \ub514\ubc14\uc774\uc2a4 \uc124\uacc4\uc5d0 \ub300\ud574 \uac00\ub2a5\ud55c \uac00\uc7a5 \ub0ae\uc740 \uc628\uc800\ud56d\uc744 \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uace0\uc8fc\ud30c \uc791\ub3d9:<\/strong> SiC\uc758 \ub192\uc740 \uc804\uc790 \ud3ec\ud654 \uc18d\ub3c4\ub294 \ub354 \ub192\uc740 \uc2a4\uc704\uce6d \uc8fc\ud30c\uc218\ub97c \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ube60\ub978 \uc2a4\uc704\uce6d \uc18d\ub3c4\ub97c \uc9c0\uc6d0\ud558\ub3c4\ub85d \uae30\ud310 \ud2b9\uc131\uc744 \ucd5c\uc801\ud654\ud558\uc5ec \ub354 \uc791\uc740 \uc218\ub3d9 \ubd80\ud488\uacfc \ub354 \ucef4\ud329\ud2b8\ud55c \uc2dc\uc2a4\ud15c\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub6f0\uc5b4\ub09c \uae30\uacc4\uc801 \uacac\uace0\uc131:<\/strong> SiC\ub294 \ub9e4\uc6b0 \ub2e8\ub2e8\ud558\uace0 \uae30\uacc4\uc801\uc73c\ub85c \uc548\uc815\uc801\uc778 \uc18c\uc7ac\uc785\ub2c8\ub2e4. \ub9de\ucda4\ud615 \uc81c\uc791\uc5d0\ub294 \ud2b9\uc815 \uce58\uc218 \uacf5\ucc28, \uc5d0\uc9c0 \ud504\ub85c\ud30c\uc77c\ub9c1 \ubc0f \ud6c4\uba74 \uac00\uacf5\uc774 \ud3ec\ud568\ub420 \uc218 \uc788\uc73c\uba70, \uc774\ub97c \ud1b5\ud574 \uae30\ud310\uc774 \uc5d0\ud53c\ud0dd\uc2dc \ubc0f \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc640 \uac19\uc740 \ub2e4\uc6b4\uc2a4\ud2b8\ub9bc \uacf5\uc815\uc758 \uc5c4\uaca9\ud55c \uc870\uac74\uc744 \uacac\ub514\uace0 \uae30\uacc4\uc801\uc73c\ub85c \uae4c\ub2e4\ub85c\uc6b4 \ud658\uacbd\uc5d0\uc11c \uc7a5\uae30\uc801\uc778 \uc2e0\ub8b0\uc131\uc744 \ubcf4\uc7a5\ud558\ub294 \ub2a5\ub825\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ub9de\ucda4\ud615 \ud654\ud559\uc801 \ubd88\ud65c\uc131 \ubc0f \uc21c\ub3c4:<\/strong> SiC\ub294 \uace0\uc628\uc5d0\uc11c\ub3c4 \ud654\ud559\uc801 \uacf5\uaca9\uc5d0 \ub9e4\uc6b0 \uac15\ud569\ub2c8\ub2e4. \ub9de\ucda4\ud615 \uae30\ud310 \uc81c\uc870 \uacf5\uc815\uc740 \uc624\uc5fc\uc73c\ub85c \uc778\ud574 \uc131\ub2a5\uc774\ub098 \uc218\uc728\uc774 \uc800\ud558\ub420 \uc218 \uc788\ub294 \ubbfc\uac10\ud55c \ubc18\ub3c4\uccb4 \uc7a5\uce58 \uc81c\uc870\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud55c \ucd08\uace0\uc21c\ub3c4 \uc218\uc900\uacfc \ud2b9\uc815 \ud45c\uba74 \ud654\ud559\uc744 \ubcf4\uc7a5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158\ubcc4 \uc9c0\uc624\uba54\ud2b8\ub9ac \ubc0f \ubc29\ud5a5:<\/strong>\n<ul>\n<li><strong>\uc9c1\uacbd \ubc0f \ub450\uaed8:<\/strong> \uae30\ud310\uc740 \uc7a5\ube44 \uc131\ub2a5 \ubc0f \uc7a5\uce58 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\uac8c \ub2e4\uc591\ud55c \uc9c1\uacbd(\uc608: 100mm, 150mm, 200mm)\uacfc \uc815\ubc00\ud55c \ub450\uaed8\ub85c \uc81c\uc791\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud06c\ub9ac\uc2a4\ud0c8 \ubc29\ud5a5(\uc624\ud504\ucef7):<\/strong> \ud2b9\uc815 \uacb0\uc815\uba74\uc5d0\uc11c \uc624\ud504\ucef7\uc758 \uac01\ub3c4\uc640 \ubc29\ud5a5(\uc608: 4H-SiC\uc758 \uacbd\uc6b0 (0001) \ud3c9\uba74\uc5d0\uc11c 4\u00b0 \uc624\ud504\ucd95)\uc740 \uace0\ud488\uc9c8 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc744 \ud1b5\ud574 \uc774\ub7ec\ud55c \ud30c\ub77c\ubbf8\ud130\ub97c \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ud50c\ub7ab \ubc0f \ub178\uce58:<\/strong> \uace0\uac1d \uc0ac\uc591\uc5d0 \ub530\ub77c \uc6e8\uc774\ud37c \ubc29\ud5a5 \ubc0f \ucde8\uae09\uc744 \uc704\ud55c \ud2b9\uc815 \ud3c9\uba74 \ub610\ub294 \ub178\uce58\ub97c \ud1b5\ud569\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub514\ubc14\uc774\uc2a4 \uc218\uc728 \ubc0f \uc548\uc815\uc131 \ud5a5\uc0c1:<\/strong> \uc81c\uc870\uc5c5\uccb4\ub294 \uc758\ub3c4\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uacfc \ud6c4\uc18d \uacf5\uc815 \ub2e8\uacc4\uc5d0 \uc644\ubcbd\ud558\uac8c \uc77c\uce58\ud558\ub294 \uae30\ud310\uc73c\ub85c \uc2dc\uc791\ud558\uc5ec \ub514\ubc14\uc774\uc2a4 \uc218\uc728\uc744 \uac1c\uc120\ud558\uace0 \ucd5c\uc885 \uc81c\ud488\uc758 \uc804\ubc18\uc801\uc778 \uc2e0\ub8b0\uc131\uacfc \uc218\uba85\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\ub294 \uacb0\ud568 \ubc00\ub3c4(\uc608: \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504 \ubc00\ub3c4, \uae30\uc800\uba74 \uc804\uc704)\uc5d0 \ub300\ud55c \ub9de\ucda4\ud615 \uc0ac\uc591\uc774 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uace0\ud488\uc9c8\uc744 \uc81c\uacf5\ud560 \uc218 \uc788\ub294 \uacf5\uae09\uc5c5\uccb4\uc640 \ud30c\ud2b8\ub108\uc2ed\uc744 \ub9fa\uc2b5\ub2c8\ub2e4, <a href=\"https:\/\/sicarbtech.com\/ko\/customizing-support\/\">\ub9de\ucda4\ud615 SiC \uae30\ud310<\/a> \ub294 \uae30\uc220\uc758 \ucd5c\uc804\uc120\uc5d0\uc11c \ud65c\ub3d9\ud558\ub294 \uae30\uc5c5\uc5d0\uac8c \uc804\ub7b5\uc801 \uc774\uc810\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>4. \uae30\ud310 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c SiC \ud3f4\ub9ac\ud0c0\uc785 \ubc0f \ub4f1\uae09 \ud0d0\uc0c9\ud558\uae30<\/h2>\n<p>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub294 \ud3f4\ub9ac\ud0c0\uc785\uc73c\ub85c \uc54c\ub824\uc9c4 \ub2e4\uc591\ud55c \uacb0\uc815 \uad6c\uc870\ub85c \uc874\uc7ac\ud560 \uc218 \uc788\ub2e4\ub294 \uc810\uc5d0\uc11c \ub3c5\ud2b9\ud569\ub2c8\ub2e4. 250\uac1c \uc774\uc0c1\uc758 SiC \ud3f4\ub9ac\ud0c0\uc785\uc774 \ud655\uc778\ub418\uc5c8\uc9c0\ub9cc, \ud2b9\uc815 \uc804\uc790 \ubc0f \ubb3c\ub9ac\uc801 \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \uae30\ud310 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc0c1\uc5c5\uc801\uc73c\ub85c \uc911\uc694\ud55c \uac83\uc740 \uc18c\uc218\uc5d0 \ubd88\uacfc\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud3f4\ub9ac\ud0c0\uc785\uacfc \uc0ac\uc6a9 \uac00\ub2a5\ud55c \ub4f1\uae09\uc744 \uc774\ud574\ud558\ub294 \uac83\uc740 \uc8fc\uc5b4\uc9c4 \uae30\uae30\uc5d0 \uc801\ud569\ud55c \uae30\ud310\uc744 \uc120\ud0dd\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p>\uae30\ud310\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uac00\uc7a5 \uc77c\ubc18\uc801\uc778 SiC \ud3f4\ub9ac\ud0c0\uc785\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>4H-SiC(\uc721\uac01\ud615 SiC):<\/strong> \ud604\uc7ac \uc804\ub825 \uc804\uc790 \uc7a5\uce58\uc5d0 \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \ud3f4\ub9ac\ud0c0\uc785\uc785\ub2c8\ub2e4.\n<ul>\n<li><strong>\uc18d\uc131:<\/strong> 6H-SiC\uc5d0 \ube44\ud574 \ub354 \ub113\uc740 \ubc34\ub4dc\uac2d(~3.26eV), \ub354 \ub192\uc740 \uc804\uc790 \uc774\ub3d9\ub3c4(\ud2b9\ud788 c\ucd95\uc744 \ub530\ub77c), \ub354 \ub192\uc740 \ub4f1\ubc29\uc131 \ud2b9\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc774\ub294 \ub514\ubc14\uc774\uc2a4\uc758 \uc628\uc800\ud56d\uc744 \ub0ae\ucd94\uace0 \uc2a4\uc704\uce6d \uc8fc\ud30c\uc218\ub97c \ub192\uc778\ub2e4\ub294 \uc758\ubbf8\ub85c \ud574\uc11d\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> \uace0\uc804\uc555 \uc804\ub825 MOSFET, \uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc \ubc0f \uace0\uc8fc\ud30c \uc7a5\uce58\uc5d0 \uc8fc\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>6H-SiC(\uc721\uac01\ud615 SiC):<\/strong> \uacfc\uac70\uc5d0\ub294 \uacb0\uc815 \uc131\uc7a5\uc774 \ub354 \uc26c\uc6b4 6H-SiC\uac00 \ub354 \uc77c\ubc18\uc801\uc774\uc5c8\uc9c0\ub9cc, \ub300\ubd80\ubd84\uc758 \uc804\ub825 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c 4H-SiC\uac00 \uc774\ub97c \ub300\uccb4\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.\n<ul>\n<li><strong>\uc18d\uc131:<\/strong> 4H-SiC\uc5d0 \ube44\ud574 \ubc34\ub4dc\uac2d\uc774 \uc57d\uac04 \ub354 \uc791\uace0(~3.03 eV) \uc804\uc790 \uc774\ub3d9\ub3c4\uac00 \ub0ae\uc2b5\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \ub9e4\uc6b0 \ub192\uc740 \uacb0\uc815 \ud488\uc9c8\uc744 \ub098\ud0c0\ub0bc \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> \uc77c\ubd80 \uace0\uc8fc\ud30c RF \uc7a5\uce58, \ud2b9\uc815 \uc720\ud615\uc758 LED\uc5d0 \uc5ec\uc804\ud788 \uc0ac\uc6a9\ub418\uba70, GaN\uacfc\uc758 \uaca9\uc790 \ub9e4\uce6d\uc774 \uc6b0\uc218\ud558\uc5ec \uacbd\uc6b0\uc5d0 \ub530\ub77c GaN \uc5d0\ud53c\ud0dd\uc2dc \uae30\ud310\uc73c\ub85c\ub3c4 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc77c\ubd80 \uace0\uc628 \uc13c\uc11c\uc5d0\ub3c4 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>3C-SiC(\uc785\ubc29 SiC):<\/strong> \u0392-SiC\ub77c\uace0\ub3c4 \ud558\ub294 \uc774 \ud3f4\ub9ac\ud0c0\uc785\uc740 \ubc34\ub4dc\uac2d\uc774 \uc791\uc9c0\ub9cc(~2.36 eV) 4H \ub610\ub294 6H\ubcf4\ub2e4 \uc804\uc790 \uc774\ub3d9\ub3c4\uac00 \ub192\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.\n<ul>\n<li><strong>\uc18d\uc131:<\/strong> \ub4f1\ubc29\uc131 \ud2b9\uc131. \uc8fc\uc694 \uacfc\uc81c\ub294 \uace0\ud488\uc9c8\uc758 \ub300\uad6c\uacbd 3C-SiC \uacb0\uc815\uc744 \uc9c1\uc811 \uc131\uc7a5\uc2dc\ud0a4\ub294 \uac83\uc774\uc5c8\uc2b5\ub2c8\ub2e4. \uc885\uc885 \uc2e4\ub9ac\ucf58 \uae30\ud310\uc5d0\uc11c \uc774\uc9c8\uc801\uc73c\ub85c \uc131\uc7a5\ud558\uae30 \ub54c\ubb38\uc5d0 \uc751\ub825\uacfc \uacb0\ud568\uc774 \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uc560\ud50c\ub9ac\ucf00\uc774\uc158:<\/strong> \uc218\uc815 \ud488\uc9c8 \ubb38\uc81c\ub97c \uadf9\ubcf5\ud560 \uc218 \uc788\ub2e4\uba74 MEMS, \uc13c\uc11c, \uc7a0\uc7ac\uc801\uc73c\ub85c \uc77c\ubd80 MOSFET\uacfc \uac19\uc740 \ud2b9\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub300\ud55c \uc5f0\uad6c \uad00\uc2ec. \uc8fc\ub958 \uc804\ub825 \uc7a5\uce58\uc5d0\ub294 \ub110\ub9ac \ubcf4\uae09\ub418\uc9c0 \uc54a\uc558\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\ud3f4\ub9ac\ud0c0\uc785 \uc678\uc5d0\ub3c4 SiC \uae30\ud310\uc740 \uc804\uae30 \uc804\ub3c4\ub3c4\uc640 \ud488\uc9c8\uc5d0 \ub530\ub77c \ub2e4\uc591\ud55c \ub4f1\uae09\uc73c\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4:<\/p>\n<p><strong>\ud45c 1: \uc77c\ubc18\uc801\uc778 SiC \uae30\ud310 \ub4f1\uae09 \ubc0f \ud2b9\uc131<\/strong><\/p>\n<table>\n<thead>\n<tr>\n<th>\ub4f1\uae09<\/th>\n<th>\uc77c\ubc18\uc801\uc778 \ub3c4\ud310\ud2b8<\/th>\n<th>\uc800\ud56d\ub960 \ubc94\uc704(\u03a9-cm)<\/th>\n<th>\uc8fc\uc694 \ud2b9\uc9d5<\/th>\n<th>10470: \uc8fc\uc694 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>N\ud615(\uc804\ub3c4\uc131)<\/strong><\/td>\n<td>\uc9c8\uc18c(N)<\/td>\n<td>0.015 &#8211; 0.028(4H-SiC\uc6a9)<\/td>\n<td>\ub0ae\uc740 \uc800\ud56d\ub960\ub85c \ub514\ubc14\uc774\uc2a4\uc5d0\uc11c \uc218\uc9c1 \uc804\ub958 \ud750\ub984\uc744 \uc704\ud55c \uc804\ub3c4\uc131 \uacbd\ub85c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uc634 \uc811\ucd09 \ud615\uc131\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/td>\n<td>\uc804\ub825 MOSFET, \uc1fc\ud2b8\ud0a4 \ubc30\ub9ac\uc5b4 \ub2e4\uc774\uc624\ub4dc(SBD), IGBT(SiC\uc5d0\uc11c\ub294 \ub35c \uc77c\ubc18\uc801), LED.<\/td>\n<\/tr>\n<tr>\n<td><strong>\ubc18\uc808\uc5f0(SI)<\/strong><\/td>\n<td>\ubc14\ub098\ub4d0(V) \ub3c4\ud551 \ub610\ub294 \ub0b4\uc7ac\uc801(\uace0\uc21c\ub3c4 \ubc18\uc808\uc5f0 &amp;8211; HPSI)<\/td>\n<td>10<sup>5<\/sup> (\uc885\uc885 10<sup>9<\/sup> hPSI\uc758 \uacbd\uc6b0)<\/td>\n<td>\ub192\uc740 \uc800\ud56d\ub960\ub85c RF \uc190\uc2e4\uacfc \uae30\ud310 \uae30\uc0dd \ucee4\ud328\uc2dc\ud134\uc2a4\ub97c \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4. \uc804\uae30\uc801 \uc808\uc5f0\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/td>\n<td>RF \uc804\ub825 \uc99d\ud3ed\uae30(\uc608: 5G \uae30\uc9c0\uad6d\uc6a9), MESFET, \uace0\uc8fc\ud30c \ub514\ubc14\uc774\uc2a4, \uc77c\ubd80 \uc13c\uc11c \uc560\ud50c\ub9ac\ucf00\uc774\uc158. \ubc14\ub098\ub4d0 \uad00\ub828 \ud2b8\ub798\ud551 \ud6a8\uacfc\ub97c \uc904\uc774\uae30 \uc704\ud574 HPSI \ub4f1\uae09\uc774 \uc120\ud638\ub429\ub2c8\ub2e4.<\/td>\n<\/tr>\n<tr>\n<td><strong>P\ud615(\uc804\ub3c4\uc131)<\/strong><\/td>\n<td>\uc54c\ub8e8\ubbf8\ub284(Al) \ub610\ub294 \ubd95\uc18c(B)<\/td>\n<td>\ub2e4\uc591\ud558\uba70, \uc77c\ubc18\uc801\uc73c\ub85c \ud640 \uc774\ub3d9\uc131\uc774 \ub0ae\uae30 \ub54c\ubb38\uc5d0 \ube44\uc2b7\ud55c \ub3c4\ud551 \uc218\uc900\uc5d0\uc11c N\ud615\ubcf4\ub2e4 \ub192\uc2b5\ub2c8\ub2e4.<\/td>\n<td>\ub300\ub2e4\uc218 \uce90\ub9ac\uc5b4 \ub514\ubc14\uc774\uc2a4\uc758 \uae30\ud310\uc5d0\ub294 \ub35c \uc77c\ubc18\uc801\uc774\uc9c0\ub9cc \ud2b9\uc815 \ub514\ubc14\uc774\uc2a4 \uad6c\uc870 \ub610\ub294 \ud2b9\uc815 \uc5d0\ud53c\ud0dd\uc15c \uacf5\uc815\uc758 \uc2dc\uc791 \uc7ac\ub8cc\ub85c \uc0ac\uc6a9\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/td>\n<td>\uc77c\ubd80 \ubc14\uc774\ud3f4\ub77c \ub514\ubc14\uc774\uc2a4(BJT), \ud2b9\uc815 \uc13c\uc11c \uc124\uacc4, \uc5f0\uad6c \ubaa9\uc801.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\ud3f4\ub9ac\ud0c0\uc785\uacfc \ub4f1\uae09\uc758 \uc120\ud0dd\uc740 \ub514\ubc14\uc774\uc2a4 \uc124\uacc4\uc5d0\uc11c \uadfc\ubcf8\uc801\uc778 \uacb0\uc815\uc785\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4 \uace0\uc804\ub825 \uc2a4\uc704\uce6d \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \uac70\uc758 \ub3c5\uc810\uc801\uc73c\ub85c N\ud615 4H-SiC \uae30\ud310\uc744 \uc0ac\uc6a9\ud558\ub294 \ubc18\uba74, \uace0\uc8fc\ud30c RF \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc740 \ubc18\uc808\uc5f0(\uc8fc\ub85c HPSI 4H-SiC \ub610\ub294 \uace0\ud488\uc9c8 6H-SiC) \uae30\ud310\uc744 \uc120\ud638\ud569\ub2c8\ub2e4. \uacb0\ud568 \ubc00\ub3c4(\ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504, \uc804\uc704, \uc801\uce35 \uacb0\ud568)\ub294 \ub610 \ub2e4\ub978 \uc911\uc694\ud55c \ub4f1\uae09 \ub9e4\uac1c\ubcc0\uc218\uc774\uba70, \ud504\ub77c\uc784 \ub4f1\uae09\uc740 \uace0\uc218\uc728, \uace0\uc131\ub2a5 \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc5d0 \ud544\uc218\uc801\uc778 \uacb0\ud568 \uc218\uac00 \uac00\uc7a5 \ub0ae\uc740 \ub4f1\uae09\uc785\ub2c8\ub2e4.<\/p>\n<h2>5. \ucd5c\uc801\uc758 SiC \uae30\ud310 \uc131\ub2a5\uc744 \uc704\ud55c \uc8fc\uc694 \uc124\uacc4 \uace0\ub824 \uc0ac\ud56d<\/h2>\n<p>\uc62c\ubc14\ub978 SiC \uae30\ud310\uc744 \uc124\uacc4\ud558\uac70\ub098 \uc120\ud0dd\ud558\ub824\uba74 \ud6c4\uc18d \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uacfc \ucd5c\uc885 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc5ec\ub7ec \ud30c\ub77c\ubbf8\ud130\ub97c \uc2e0\uc911\ud558\uac8c \uace0\ub824\ud574\uc57c \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uace0\ub824 \uc0ac\ud56d\uc740 \ub2e8\uc21c\ud788 \ud3f4\ub9ac\ud0c0\uc785\uacfc \ub4f1\uae09\uc744 \uc120\ud0dd\ud558\ub294 \uac83 \uc774\uc0c1\uc73c\ub85c \uc6e8\uc774\ud37c\uc758 \ubb3c\ub9ac\uc801 \ubc0f \uacb0\uc815\ud559\uc801 \uc138\ubd80 \uc0ac\ud56d\uc744 \uc790\uc138\ud788 \uc0b4\ud3b4\ubd10\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<ul>\n<li><strong>\uacb0\uc815 \ubc29\ud5a5 \ubc0f \uc624\ud504\ucef7 \uac01\ub3c4:<\/strong>\n<ul>\n<li>SiC \uae30\ud310\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 1\ucc28 \uacb0\uc815\uba74(\uc608: (0001) \uae30\uc800\uba74)\uc5d0\uc11c \ucd95\uc744 \uba87\ub3c4 \ubc97\uc5b4\ub09c \uc0c1\ud0dc\ub85c \ud45c\uba74\uc774 \uc808\ub2e8\ub41c \uc0c1\ud0dc\ub85c \uacf5\uae09\ub429\ub2c8\ub2e4. 4H-SiC\uc758 \uacbd\uc6b0, \uc77c\ubc18\uc801\uc778 \uc624\ud504\ucef7 \uac01\ub3c4\ub294 '11-20' \ubc29\ud5a5\uc5d0 \ub300\ud574 4\u00b0 \ub610\ub294 8\u00b0\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\uc911\uc694\uc131:<\/strong> \uc774\ub7ec\ud55c \uc758\ub3c4\uc801\uc778 \ubc29\ud5a5 \uc804\ud658\uc740 \uace0\ud488\uc9c8 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5, \ud2b9\ud788 \ub2e8\uacc4 \ud750\ub984 \uc131\uc7a5 \ubaa8\ub4dc\uc758 \uacbd\uc6b0 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc5d0\uc11c \ud2b9\uc815 \uc720\ud615\uc758 \uacb0\uc815 \uacb0\ud568(\uc608: 3C \ub0b4\ud3ec\ubb3c)\uc758 \ud615\uc131\uc744 \uc904\uc774\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub418\ub294 \ub9e4\uc6b0 \uc911\uc694\ud55c \uc694\uc18c\uc785\ub2c8\ub2e4. \uc624\ud504\ucef7 \uac01\ub3c4\uc640 \ubc29\ud5a5\uc758 \uc120\ud0dd\uc740 \ub3c4\ud551 \ud1b5\ud569, \ud45c\uba74 \ud615\ud0dc \ubc0f \uacb0\ud568 \uc804\ud30c\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc9c1\uacbd \ubc0f \ub450\uaed8:<\/strong>\n<ul>\n<li><strong>\uc9c1\uacbd:<\/strong> \uc77c\ubc18\uc801\uc778 \uc9c1\uacbd\uc73c\ub85c\ub294 100mm(4\uc778\uce58), 150mm(6\uc778\uce58)\uac00 \uc788\uc73c\uba70, \ub2e4\uc774\ub2f9 \ube44\uc6a9\uc744 \uc904\uc774\uae30 \uc704\ud574 200mm(8\uc778\uce58)\ub85c\uc758 \uc804\ud658\uc774 \uc9c4\ud589 \uc911\uc785\ub2c8\ub2e4. \uc120\ud0dd\uc740 \uc885\uc885 \ud30c\uc6b4\ub4dc\ub9ac\uc758 \ucc98\ub9ac \ub2a5\ub825\uacfc \uc0dd\uc0b0\ub7c9\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4.<\/li>\n<li><strong>\ub450\uaed8:<\/strong> \uae30\ud310 \ub450\uaed8\ub294 \ucc98\ub9ac \ubc0f \ucde8\uae09 \uc2dc \uae30\uacc4\uc801 \uc9c0\uc9c0\ub825\uc744 \uc81c\uacf5\ud558\uae30\uc5d0 \ucda9\ubd84\ud574\uc57c \ud558\uc9c0\ub9cc, \uc7ac\ub8cc \ube44\uc6a9\uc774\ub098 \uc804\ub3c4\uc131 \uae30\ud310\uc758 \uacbd\uc6b0 \uc9c1\ub82c \uc800\ud56d\uc744 \ubd88\ud544\uc694\ud558\uac8c \uc99d\uac00\uc2dc\ud0ac \uc815\ub3c4\ub85c \ub450\uaecd\uc9c0 \uc54a\uc544\uc57c \ud569\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc778 \ub450\uaed8\ub294 100mm \ubc0f 150mm \uc6e8\uc774\ud37c\uc758 \uacbd\uc6b0 350\u00b5m\uc5d0\uc11c 500\u00b5m\uc785\ub2c8\ub2e4. \ub9de\ucda4\ud615 \ub450\uaed8\uac00 \ud544\uc694\ud55c \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ud45c\uba74 \ud488\uc9c8 \ubc0f \uc900\ube44:<\/strong>\n<ul>\n<li><strong>\uc5d0\ud53c \uc900\ube44:<\/strong> \uc131\uacf5\uc801\uc778 \uc5d0\ud53c\ud0dd\uc2dc\ub97c \uc704\ud574\uc11c\ub294 \uae30\ud310 \ud45c\uba74\uc774 \ub9e4\uc6b0 \ub9e4\ub044\ub7fd\uace0 \ud45c\uba74 \uc544\ub798 \uc190\uc0c1, \uc624\uc5fc \ubb3c\uc9c8, \uc785\uc790\uac00 \uc5c6\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uc774\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP)\ub97c \ud1b5\ud574 \ub2ec\uc131\ub429\ub2c8\ub2e4. '\uc5d0\ud53c \uc900\ube44\ub41c' \ud45c\uba74\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ud45c\uba74 \uac70\uce60\uae30(Ra):<\/strong> \uc77c\ubc18\uc801\uc73c\ub85c \uc639\uc2a4\ud2b8\ub86c \ubc94\uc704(\uc608: Ra &lt; 0.5nm \ub610\ub294 &lt; 0.2nm)\ub85c \uc9c0\uc815\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc2a4\ud06c\ub798\uce58, \uc5bc\ub8e9 \ubc0f \uc785\uc790:<\/strong> \ub208\uc5d0 \ubcf4\uc774\ub294 \ud45c\uba74 \uacb0\ud568\uc774 \uc788\ub294 \uacbd\uc6b0 \uc5c4\uaca9\ud55c \uc81c\ud55c\uc774 \uc801\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uacb0\ud568 \ubc00\ub3c4:<\/strong> \uc774\ub294 \uac00\uc7a5 \uc911\uc694\ud55c \ub9e4\uac1c\ubcc0\uc218 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4.\n<ul>\n<li><strong>\uacb0\uc815 \ud488\uc9c8 \ud3c9\uac00:<\/strong> \ub9c8\uc774\ud06c\ub85c \ud30c\uc774\ud504\ub294 \uae30\ud310\uc5d0\uc11c \uc5d0\ud53c\ud0dd\uc15c \uce35\uc73c\ub85c \uc804\ud30c\ub418\ub294 \uc911\uacf5 \ucf54\uc5b4 \ub098\uc0ac \uc804\uc704\ub85c, \ub300\ubd80\ubd84\uc758 \ub514\ubc14\uc774\uc2a4\uc5d0\uc11c \uce58\uba85\uc801\uc778 \uacb0\ud568\uc73c\ub85c \uc791\uc6a9\ud569\ub2c8\ub2e4. MPD\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 1cm\ub85c \uc9c0\uc815\ub429\ub2c8\ub2e4<sup>-2<\/sup> \ud504\ub77c\uc784 \ub4f1\uae09\uc758 \uacbd\uc6b0 \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504 \uc6e8\uc774\ud37c \uc81c\ub85c\ud654\ub97c \ud5a5\ud574 \ub098\uc544\uac00\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\uae30\uc800\uba74 \ud0c8\uad6c(BPD) \ubc00\ub3c4:<\/strong> \uae30\ud310\uc758 BPD\ub294 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc5d0 \uc2a4\ud0dc\ud0b9 \uacb0\ud568\uc744 \uc77c\uc73c\ucf1c \ud2b9\ud788 \uc591\uadf9\uc131 \uc18c\uc790\uc758 \uacbd\uc6b0 \uc18c\uc790 \uc131\ub2a5\uc744 \uc800\ud558\uc2dc\ud0a4\uace0 V<sub>f<\/sub> piN \ub2e4\uc774\uc624\ub4dc\uc758 \ub4dc\ub9ac\ud504\ud2b8.<\/li>\n<li><strong>\uc2a4\ub808\ub529 \ub098\uc0ac \ud0c8\uad6c(TSD) \ubc0f \uc2a4\ub808\ub529 \ubaa8\uc11c\ub9ac \ud0c8\uad6c(TED):<\/strong> \uc774\ub294 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uacfc \uc548\uc815\uc131\uc5d0\ub3c4 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/li>\n<li>\ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4\ub294 \ud2b9\ud788 \ub300\uba74\uc801 \ub514\ubc14\uc774\uc2a4\uc758 \uacbd\uc6b0 \ub192\uc740 \ub514\ubc14\uc774\uc2a4 \uc218\uc728\uc744 \ub2ec\uc131\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc800\ud56d\ub960 \uade0\uc77c\uc131:<\/strong> \uc804\ub3c4\uc131 \uae30\ud310\uc758 \uacbd\uc6b0 \uc77c\uad00\ub41c \ub514\ubc14\uc774\uc2a4 \ud2b9\uc131\uc744 \uc704\ud574\uc11c\ub294 \uc6e8\uc774\ud37c \uc804\uccb4\uc5d0 \uac78\uccd0 \uade0\uc77c\ud55c \uc800\ud56d\uc744 \uc720\uc9c0\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \ubc18\uc808\uc5f0 \uae30\ud310\uc758 \uacbd\uc6b0 \ub192\uc740 \uc800\ud56d\uc744 \uade0\uc77c\ud558\uac8c \uc720\uc9c0\ud558\ub294 \uac83\uc774 \ud575\uc2ec\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\ubcf4\uc6b0 \ubc0f \uc6cc\ud504:<\/strong> \uc774 \ub9e4\uac1c\ubcc0\uc218\ub294 \uc774\uc0c1\uc801\uc778 \ud3c9\uba74\uc5d0\uc11c \uc6e8\uc774\ud37c \ud45c\uba74\uc758 \ud3b8\ucc28\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uacfc\ub3c4\ud55c \ubcf4\uc6b0 \ub610\ub294 \uc6cc\ud504\ub294 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c, \uc5d0\ud53c\ud0dd\uc2dc \ubc0f \uae30\ud0c0 \uacf5\uc815 \ub2e8\uacc4\uc5d0\uc11c \ubb38\uc81c\ub97c \uc77c\uc73c\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc0ac\uc591\uc5d0\uc11c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc9c1\uacbd\uc5d0 \ub530\ub77c \ubcf4\uc6b0\ub97c 30~50\u00b5m\ub85c, \uc6cc\ud504\ub97c 50~70\u00b5m\ub85c \uc81c\ud55c\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ucd1d \ub450\uaed8 \ubcc0\ud654(TTV):<\/strong> \uc6e8\uc774\ud37c \uc804\uccb4\uc5d0 \uac78\uce5c \ucd5c\ub300 \ub450\uaed8\uc640 \ucd5c\uc18c \ub450\uaed8\uc758 \ucc28\uc774\uc785\ub2c8\ub2e4. \uade0\uc77c\ud55c \ucc98\ub9ac\ub97c \uc704\ud574\uc11c\ub294 \uc5c4\uaca9\ud55c TTV \uc81c\uc5b4\uac00 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n<li><strong>\uac00\uc7a5\uc790\ub9ac \uc81c\uc678:<\/strong> \ubaa8\ub4e0 \uc8fc\uc694 \ud488\uc9c8 \uc0ac\uc591\uc744 \ucda9\uc871\ud558\uc9c0 \ubabb\ud560 \uc218 \uc788\ub294 \uc6e8\uc774\ud37c \ub458\ub808\uc758 \ud2b9\uc815 \uc601\uc5ed(\uc608: 3~5mm)\uc785\ub2c8\ub2e4. \uc774 \uc601\uc5ed\uc744 \ucd5c\uc18c\ud654\ud558\uba74 \uc6e8\uc774\ud37c\ub2f9 \uc0ac\uc6a9 \uac00\ub2a5\ud55c \ub2e4\uc774\uac00 \ucd5c\ub300\ud654\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc2dd\ubcc4 \ud45c\uc2dc:<\/strong> \uc6e8\uc774\ud37c \ucd94\uc801\uc131\uc5d0\ub294 \ub808\uc774\uc800\ub85c \uc0c8\uaca8\uc9c4 \uc2dd\ubcc4 \ub9c8\ud06c(SEMI \ud45c\uc900)\uac00 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub9c8\ud06c\uc758 \ud488\uc9c8\uacfc \uc704\uce58\uac00 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p>\uc9c0\uc2dd\uc774 \ud48d\ubd80\ud55c SiC \uae30\ud310 \uacf5\uae09\uc5c5\uccb4\uc640 \uc0c1\uc758\ud558\uc5ec \uc774\ub7ec\ud55c \uc124\uacc4 \ud30c\ub77c\ubbf8\ud130\ub97c \uc2e0\uc911\ud558\uac8c \uc9c0\uc815\ud574\uc57c \uae30\ud310\uc774 \uc758\ub3c4\ud55c \ub514\ubc14\uc774\uc2a4 \uad6c\uc870\uc640 \uc81c\uc870 \uacf5\uc815\uc5d0 \ucd5c\uc801\ud654\ub418\uc5b4 \uad81\uadf9\uc801\uc73c\ub85c \ub354 \ub192\uc740 \uc131\ub2a5\uacfc \uc548\uc815\uc131\uc744 \uac16\ucd98 \ucd5c\uc885 \uc81c\ud488\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>6. \uc815\ubc00\ub3c4 \ub2ec\uc131: \uacf5\ucc28, \ud45c\uba74 \ub9c8\uac10 \ubc0f SiC \uae30\ud310\uc758 \uce58\uc218 \uc815\ud655\ub3c4<\/h2>\n<p>\uc6d0\uc2dc SiC \ubd88\uc5d0\uc11c \uace0\uc131\ub2a5 \uae30\ud310\uc73c\ub85c\uc758 \uc5ec\uc815\uc5d0\ub294 \uc77c\ub828\uc758 \ubcf5\uc7a1\ud55c \uc131\ud615, \uae30\uacc4 \uac00\uacf5 \ubc0f \ub9c8\uac10 \uacf5\uc815\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4. \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \ub514\ubc14\uc774\uc2a4\uc758 \uc131\uacf5\uc801\uc778 \uc81c\uc791\uc744 \uc704\ud574\uc11c\ub294 \uc5c4\uaca9\ud55c \uacf5\ucc28, \uc644\ubcbd\ud55c \ud45c\uba74 \ub9c8\uac10, \uc815\ubc00\ud55c \uce58\uc218 \uc815\ud655\ub3c4\ub97c \ub2ec\uc131\ud558\ub294 \uac83\uc774 \ubb34\uc5c7\ubcf4\ub2e4 \uc911\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc694\uc18c\ub294 \uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4 \ud488\uc9c8, \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \ud574\uc0c1\ub3c4 \ubc0f \uc804\uccb4 \ub514\ubc14\uc774\uc2a4 \uc218\uc728\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p><strong>\uc8fc\uc694 \ub9e4\uac1c\ubcc0\uc218 \ubc0f \ub2ec\uc131 \uac00\ub2a5\ud55c \uc0ac\uc591:<\/strong><\/p>\n<ul>\n<li><strong>\uc9c1\uacbd \ud5c8\uc6a9 \uc624\ucc28:<\/strong>\n<ul>\n<li>\uc6e8\uc774\ud37c\uac00 \uacf5\uc815 \uc7a5\ube44\uc5d0 \uc62c\ubc14\ub974\uac8c \uc7a5\ucc29\ub418\ub3c4\ub85d \ud569\ub2c8\ub2e4.<\/li>\n<li>\uc77c\ubc18\uc801\uc778 \ud5c8\uc6a9 \uc624\ucc28: \uacf5\uce6d \uc9c1\uacbd\uc758 \u00b10.1mm ~ \u00b10.2mm(\uc608: 100mm, 150mm).<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub450\uaed8 \ud5c8\uc6a9 \uc624\ucc28:<\/strong>\n<ul>\n<li>\uc77c\uad00\ub41c \uc5f4 \ubc0f \uc804\uae30\uc801 \ud2b9\uc131\uacfc \uae30\uacc4\uc801 \ucde8\uae09\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n<li>\uc77c\ubc18\uc801\uc778 \ud5c8\uc6a9 \uc624\ucc28: \uacf5\uce6d \ub450\uaed8(\uc608: 350\u00b5m, 500\u00b5m)\uc5d0\uc11c \u00b110\u00b5m ~ \u00b125\u00b5m\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ucd1d \ub450\uaed8 \ubcc0\ud654(TTV):<\/strong>\n<ul>\n<li>\uc6e8\uc774\ud37c \uc804\uccb4 \ub450\uaed8\uc758 \uade0\uc77c\uc131\uc744 \uce21\uc815\ud569\ub2c8\ub2e4. \uade0\uc77c\ud55c \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \ubc0f \ud3c9\ud0c4\ud654 \uacf5\uc815\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n<li>\ub2ec\uc131 \uac00\ub2a5\ud55c \uac12: 10\u00b5m, \ud504\ub9ac\ubbf8\uc5c4 \ub4f1\uae09\uc740 5\u00b5m\ub97c \ubaa9\ud45c\ub85c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>Bow:<\/strong>\n<ul>\n<li>\ud074\ub7a8\ud551\ub418\uc9c0 \uc54a\uc740 \uc790\uc720 \uc6e8\uc774\ud37c\uc758 \uc911\uc559 \ud45c\uba74\uc758 \uc624\ubaa9\ud568 \ub610\ub294 \ubcfc\ub85d\ud568\uc785\ub2c8\ub2e4. \ub9ac\uc18c\uadf8\ub798\ud53c \ucd08\uc810\uc5d0 \uc601\ud5a5\uc744 \uc90d\ub2c8\ub2e4.<\/li>\n<li>\ub2ec\uc131 \uac00\ub2a5\ud55c \uac12: \uc77c\ubc18\uc801\uc73c\ub85c 30\u00b5m, \ub354 \ud070 \uc9c1\uacbd\uc774\ub098 \uae4c\ub2e4\ub85c\uc6b4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \ub354 \uc5c4\uaca9\ud55c \uc0ac\uc591\uc73c\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>Warp:<\/strong>\n<ul>\n<li>\uae30\uc900 \ud3c9\uba74\uc5d0\uc11c \uc911\uc559 \ud45c\uba74\uc758 \ucd5c\ub300 \uac70\ub9ac\uc640 \ucd5c\uc18c \uac70\ub9ac\uc758 \ucc28\uc774\uc785\ub2c8\ub2e4. \uc804\uccb4 \uc6e8\uc774\ud37c \ud3c9\ud0c4\ub3c4\ub97c \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \ucc99\ud0b9 \ubc0f \ucde8\uae09\uc5d0 \uc601\ud5a5\uc744 \uc90d\ub2c8\ub2e4.<\/li>\n<li>\ub2ec\uc131 \uac00\ub2a5\ud55c \uac12: \uc77c\ubc18\uc801\uc73c\ub85c 40\u00b5m.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ud45c\uba74 \uac70\uce60\uae30(\uc608: Ra, Rms, Rq):<\/strong>\n<ul>\n<li><strong>\uc2dc\ud398\uc774\uc2a4(\ud3f4\ub780\ub4dc\uc5b4 \ucabd):<\/strong> \uc774\uac83\uc740 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc744 \uc704\ud55c \uc911\uc694\ud55c \ud45c\uba74\uc785\ub2c8\ub2e4. \uc6d0\uc790 \ub2e8\uc704\ub85c \ub9e4\ub044\ub7ec\uc6cc\uc57c \ud569\ub2c8\ub2e4.\n<ul>\n<li>\ub2ec\uc131 \uac00\ub2a5\ud55c Ra: 0.5nm, \ud654\ud559\uc801 \uae30\uacc4\uc801 \uc5f0\ub9c8(CMP) \ud6c4 0.2nm\uc778 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4. \uc77c\ubd80 \uc0ac\uc591\uc5d0\uc11c\ub294 0.1nm\ub97c \uc694\uad6c\ud558\uae30\ub3c4 \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>C\uba74(\ub4b7\uba74):<\/strong> \uc77c\ubc18\uc801\uc73c\ub85c \uc5f0\ub9c8 \ub610\ub294 \ub7a9 \ucc98\ub9ac\ub418\uba70, \uc6a9\ub3c4\uc5d0 \ub530\ub77c \uc5f0\ub9c8\ud560 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4(\uc608: \uc591\uba74 \uc5f0\ub9c8 \uc6e8\uc774\ud37c \ub610\ub294 \ud2b9\uc815 \uc5f4 \uc811\ucd09 \uc694\uad6c \uc0ac\ud56d). \uc77c\ubc18\uc801\uc73c\ub85c \uac70\uce60\uae30\ub294 \uc2e4\ub9ac\ucf58 \ud45c\uba74\ubcf4\ub2e4 \ub192\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc5e3\uc9c0 \ud504\ub85c\ud30c\uc77c \ubc0f \uce58\ud551:<\/strong>\n<ul>\n<li>\uc6e8\uc774\ud37c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ucde8\uae09 \ubc0f \ucc98\ub9ac \uacfc\uc815\uc5d0\uc11c \uce69\ud551\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uac00\uc7a5\uc790\ub9ac\uac00 \ub465\uae00\uac70\ub098 \ubaa8\ub530\uae30 \ucc98\ub9ac\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \ud504\ub85c\ud30c\uc77c\uc740 \uc77c\uad00\uc131\uc774 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li>\uc5e3\uc9c0 \uce69\uc758 \ud06c\uae30\uc640 \uac1c\uc218\ub97c \uc5c4\uaca9\ud558\uac8c \uc81c\ud55c\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ubc29\ud5a5 \ud50c\ub7ab \ub610\ub294 \ub178\uce58 \uc815\ubc00\ub3c4:<\/strong>\n<ul>\n<li>\ud50c\ub7ab(\uc791\uc740 \uc9c1\uacbd\uc758 \uacbd\uc6b0) \ub610\ub294 \ub178\uce58(\ud070 \uc9c1\uacbd\uc758 \uacbd\uc6b0, \uc608: SEMI \ud45c\uc900)\ub294 \ucc98\ub9ac \uc7a5\ube44\uc5d0\uc11c \uc6e8\uc774\ud37c\uc758 \ubc29\ud5a5\uc744 \uc9c0\uc815\ud558\uace0 \uacb0\uc815\ud559\uc801 \ubc29\ud5a5\uc744 \ud45c\uc2dc\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li>\uc774\ub7ec\ud55c \ud53c\ucc98\uc758 \uae38\uc774 \ubc0f \uac01\ub3c4 \ud5c8\uc6a9 \uc624\ucc28\ub294 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4 \ud3c9\uba74 \uae38\uc774 \ud5c8\uc6a9 \uc624\ucc28\ub294 \u00b11mm, \uac01\ub3c4 \ubc29\ud5a5 \ud5c8\uc6a9 \uc624\ucc28\ub294 \u00b10.5\u00b0\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc0ac\uc774\ud2b8 \ud3c9\ud0c4\ub3c4(\uc608: STIR &amp;8211; \uc0ac\uc774\ud2b8 \ucd1d \ud45c\uc2dc \ud310\ub3c5\uac12):<\/strong>\n<ul>\n<li>\uac1c\ubcc4 \uae08\ud615\uc744 \uc81c\uc791\ud560 \uad6d\ubd80\uc801\uc778 \uc601\uc5ed(\uc0ac\uc774\ud2b8)\uc5d0 \ub300\ud55c \ud3c9\ud0c4\ub3c4\ub97c \uce21\uc815\ud569\ub2c8\ub2e4. \ubbf8\uc138 \ub77c\uc778 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<li>\ub2ec\uc131 \uac00\ub2a5\ud55c \uac12\uc740 \uc0ac\uc774\ud2b8 \ud06c\uae30\uc5d0 \ub530\ub77c \ub2e4\ub974\uc9c0\ub9cc \ubbf8\ud06c\ub860 \ubbf8\ub9cc\uc77c \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uc5f0\uc0ad \ubc0f \ub798\ud551 \uacf5\uc815\uc740 \uc6e8\uc774\ud37c \ud45c\uba74 \uc544\ub798\uc5d0 \uc190\uc0c1\ub41c \uce35\uc744 \ub3c4\uc785\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uc190\uc0c1\ub41c \uce35\uc740 \uc7a5\uce58 \uc131\ub2a5\uc744 \uc800\ud558\uc2dc\ud0ac \uc218 \uc788\uc73c\ubbc0\ub85c \ud6c4\uc18d \uc5f0\ub9c8 \ub2e8\uacc4(\ud2b9\ud788 CMP)\ub85c \uc644\uc804\ud788 \uc81c\uac70\ud574\uc57c \ud569\ub2c8\ub2e4.<\/strong>\n<ul>\n<li>\uc0ac\uc591\uc740 \uc5f0\ub9c8\ub41c \ud45c\uba74\uc758 \uc2a4\ud06c\ub798\uce58, \uad6c\ub369\uc774, \uc5bc\ub8e9, \uc785\uc790 \ubc0f \uae30\ud0c0 \uc2dc\uac01\uc801 \uacb0\ud568\uc758 \uc218\uc640 \ud06c\uae30\ub97c \uc81c\ud55c\ud569\ub2c8\ub2e4. \uc815\ub7c9\ud654\uc5d0\ub294 \uc790\ub3d9\ud654\ub41c \uac80\uc0ac \uc2dc\uc2a4\ud15c\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li>\uadf8\ub77c\uc778\ub529 \ubc0f \ub798\ud551\uc73c\ub85c \uc778\ud55c \ud45c\uba74 \uc190\uc0c1\uc740 CMP \ud504\ub85c\uc138\uc2a4\ub97c \ud1b5\ud574 \uc644\uc804\ud788 \uc81c\uac70\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p><strong>\ud45c 2: \ud504\ub77c\uc784 SiC \uae30\ud310\uc758 \uc77c\ubc18\uc801\uc778 \uce58\uc218 \ubc0f \ud45c\uba74 \ub9c8\uac10 \uc0ac\uc591<\/strong><\/p>\n<table>\n<thead>\n<tr>\n<th>\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>\uc77c\ubc18\uc801\uc778 \uc0ac\uc591(150mm N\ud615 4H-SiC \uc608\uc2dc)<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc9c1\uacbd<\/td>\n<td>150mm \u00b1 0.2mm<\/td>\n<\/tr>\n<tr>\n<td>\ucd08\uc815\ubc00 \ub4f1\uae09(\uc608: \uad11\ud559, \uace0\uae09 \ubc18\ub3c4\uccb4)<\/td>\n<td>350\u00b5m \u00b1 15\u00b5m \ub610\ub294 500\u00b5m \u00b1 20\u00b5m<\/td>\n<\/tr>\n<tr>\n<td>\uae30\ubcf8 \ud3c9\uba74\/\ub178\uce58 \ubc29\ud5a5<\/td>\n<td>11-20'\uc5d0 \uc218\uc9c1 \u00b1 0.5\u00b0(\ub610\ub294 \uae30\ud0c0 \uc9c0\uc815\ub41c \ubc29\ud5a5)<\/td>\n<\/tr>\n<tr>\n<td>\uc624\ud504\ucef7 \uac01\ub3c4<\/td>\n<td>4.0\u00b0 \u00b1 0.25\u00b0(\uc9c0\uc815\ub41c \ubc29\ud5a5)<\/td>\n<\/tr>\n<tr>\n<td>TTV (\ucd1d \ub450\uaed8 \ubcc0\ud654)<\/td>\n<td>10\u00b5m(\ud504\ub9ac\ubbf8\uc5c4\uc758 \uacbd\uc6b0 5\u00b5m\uc778 \uacbd\uc6b0\uac00 \ub9ce\uc74c)<\/td>\n<\/tr>\n<tr>\n<td>\ud728(Bow)<\/td>\n<td>30\u00b5m<\/td>\n<\/tr>\n<tr>\n<td>\ub4a4\ud2c0\ub9bc(Warp)<\/td>\n<td>40\u00b5m<\/td>\n<\/tr>\n<tr>\n<td>\ub2e8\uba74 \ud45c\uba74 \uac70\uce60\uae30(Ra)<\/td>\n<td>&lt; 0.2nm<\/td>\n<\/tr>\n<tr>\n<td>\ubbf8\uc138 \ud30c\uc774\ud504 \ubc00\ub3c4 (MPD)<\/td>\n<td>0.5cm<sup>-2<\/sup> (\ub610\ub294 \ud559\ub144\ubcc4\ub85c \uc9c0\uc815)<\/td>\n<\/tr>\n<tr>\n<td>\uc5e3\uc9c0 \uc81c\uc678<\/td>\n<td>3mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\uc774\ub7ec\ud55c \uc5c4\uaca9\ud55c \uc0ac\uc591\uc744 \ub2ec\uc131\ud558\ub824\uba74 \uae30\ud310 \uc81c\uc870 \uccb4\uc778 \uc804\ubc18\uc5d0 \uac78\uccd0 \uc815\uad50\ud55c \uacc4\uce21 \uc7a5\ube44\uc640 \uac15\ub825\ud55c \uacf5\uc815 \uc81c\uc5b4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc870\ub2ec \uad00\ub9ac\uc790\uc640 \uae30\uc220 \uad6c\ub9e4\uc790\ub294 \uae30\ud310\uc774 \ud2b9\uc815 \uc81c\uc870 \ub77c\uc778 \ubc0f \uc7a5\uce58 \uc124\uacc4\uc758 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294\uc9c0 \ud655\uc778\ud558\uae30 \uc704\ud574 \uacf5\uae09\uc5c5\uccb4\uc640 \uc774\ub7ec\ud55c \uc694\uad6c \uc0ac\ud56d\uc744 \uba85\ud655\ud558\uac8c \uc815\uc758\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<h2>7. \uace0\ud488\uc9c8 SiC \uae30\ud310\uc744 \uc704\ud55c \ud544\uc218 \ud6c4\ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d<\/h2>\n<p>SiC \ubd88\uc758 \ucd08\uae30 \uc2ac\ub77c\uc774\uc2f1\uacfc \uc6e8\uc774\ud37c\uc758 1\ucc28 \uc131\ud615(\uc5f0\uc0ad \ubc0f \ub798\ud551) \ud6c4\uc5d0\ub294 \uace0\ud488\uc9c8\uc758 '\uc5d0\ud53c \uc900\ube44' \uae30\ud310\uc73c\ub85c \ubcc0\ud658\ud558\uae30 \uc704\ud574 \uba87 \uac00\uc9c0 \uc911\uc694\ud55c \ud6c4\ucc98\ub9ac \ub2e8\uacc4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub2e8\uacc4\ub294 \uc131\uacf5\uc801\uc778 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uacfc \uc18c\uc790 \uc81c\uc791\uc5d0 \ud544\uc694\ud55c \uc5c4\uaca9\ud55c \ud45c\uba74 \ub9c8\uac10, \uccad\uacb0\ub3c4 \ubc0f \uce58\uc218 \uacf5\ucc28\ub97c \ub2ec\uc131\ud558\ub3c4\ub85d \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uc8fc\uc694 \ud6c4\ucc98\ub9ac \ub2e8\uacc4\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li><strong>\ubbf8\uc138\ud55c \ub2e4\uc774\uc544\ubaac\ub4dc \uc2ac\ub7ec\ub9ac\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/strong>\n<ul>\n<li>\uc774\ub294 SiC \uae30\ud310\uc758 Si-\uba74(\ub54c\ub85c\ub294 C-\uba74)\uc5d0 \uc6d0\uc790\uc801\uc73c\ub85c \ub9e4\ub044\ub7fd\uace0 \uc190\uc0c1 \uc5c6\ub294 \ud45c\uba74\uc744 \uad6c\ud604\ud558\uae30 \uc704\ud55c \uac00\uc7a5 \uc911\uc694\ud55c \ud6c4\ucc98\ub9ac \ub2e8\uacc4\uc785\ub2c8\ub2e4.<\/li>\n<li>CMP\ub294 \ud654\ud559 \uc2ac\ub7ec\ub9ac(\uc5f0\ub9c8 \uc785\uc790 \ubc0f \ubc18\uc751\uc131 \ud654\ud559 \ubb3c\uc9c8 \ud3ec\ud568)\uc640 \uc5f0\ub9c8 \ud328\ub4dc\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6e8\uc774\ud37c\ub97c \uc5f0\ub9c8\ud558\ub294 \uacfc\uc815\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc740 \uae30\uacc4\uc801 \ub9c8\ubaa8\uc640 \ud654\ud559\uc801 \uc5d0\uce6d\uc744 \uacb0\ud569\ud558\uc5ec \uc7ac\ub8cc\ub97c \uc81c\uac70\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ubaa9\ud45c:<\/strong> \uc0ac\uc804 \uc5f0\ub9c8 \ubc0f \ub798\ud551\uc73c\ub85c \uc778\ud55c \ud45c\uba74 \uc190\uc0c1\uc744 \uc81c\uac70\ud558\ub824\uba74 \ud45c\uba74 \uac70\uce60\uae30\ub97c \uc639\uc2a4\ud2b8\ub86c \uc218\uc900(\uc608: Ra &lt; 0.2nm)\uc73c\ub85c \ub0ae\ucd94\uace0 \uc6b0\uc218\ud55c \ud45c\uba74 \ud3c9\ud0c4\ub3c4\ub97c \ub2ec\uc131\ud558\uc138\uc694.<\/li>\n<li>\uc6d0\ud558\ub294 \ucd5c\uc885 \ub9c8\uac10\uc744 \uc5bb\uae30 \uc704\ud574 \uc11c\ub85c \ub2e4\ub978 \uc2ac\ub7ec\ub9ac \ubc0f \ud328\ub4dc\ub97c \uc0ac\uc6a9\ud558\ub294 \uc5ec\ub7ec CMP \ub2e8\uacc4\ub97c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\uace0\uae09 \uccad\uc18c \ud504\ub85c\uc138\uc2a4:<\/strong>\n<ul>\n<li>CMP \ubc0f \uae30\ud0c0 \ucc98\ub9ac \ub2e8\uacc4\ub97c \uac70\uce5c \ud6c4 \uae30\ud310\uc740 \uc794\ub958 \uc2ac\ub7ec\ub9ac \uc785\uc790, \uae08\uc18d \uc624\uc5fc \ubb3c\uc9c8, \uc720\uae30 \uc794\ub958\ubb3c \ubc0f \uae30\ud0c0 \ubd88\uc21c\ubb3c\uc744 \uc81c\uac70\ud558\uae30 \uc704\ud574 \uc5c4\uaca9\ud55c \uc138\ucc99\uc744 \uac70\uccd0\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li>\uccad\uc18c \uc21c\uc11c\uc5d0\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc5ec\ub7ec \ub2e8\uacc4\uac00 \ud3ec\ud568\ub418\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4:\n<ul>\n<li>\uc194\ubca4\ud2b8 \uc138\ucc99(\uc608: \uc544\uc138\ud1a4, IPA \uc0ac\uc6a9).<\/li>\n<li>\uc0b0\uc131 \uc6a9\uc561(\uc608: \ud53c\ub77c\ub0d0 \uc5d0\uce6d(H<sub>2<\/sub>SO<sub>4<\/sub> + H<sub>2<\/sub>O<sub>2<\/sub>), SC-2 (HCl + H<sub>2<\/sub>O<sub>2<\/sub> + H<sub>2<\/sub>O))\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc720\uae30 \ubc0f \uae08\uc18d \uc624\uc5fc \ubb3c\uc9c8\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4.<\/li>\n<li>\uc54c\uce7c\ub9ac\uc131 \uc6a9\uc561(\uc608: SC-1 (NH<sub>4<\/sub>OH + H<sub>2<\/sub>O<sub>2<\/sub> + H<sub>2<\/sub>O))\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc785\uc790\ub97c \uc81c\uac70\ud569\ub2c8\ub2e4.<\/li>\n<li>DI \ubb3c \ud5f9\uad7c \ubc0f \uac74\uc870(\uc608: \uc2a4\ud540 \ub9b0\uc2a4 \uac74\uc870, \ub9c8\ub791\uace0\ub2c8 \uac74\uc870).<\/li>\n<\/ul>\n<\/li>\n<li>\ubaa9\ud45c\ub294 \uc785\uc790\uac00 \uc5c6\uace0 \uc6d0\uc790 \ub2e8\uc704\ub85c \uae68\ub057\ud55c \ud45c\uba74\uc744 \uad6c\ud604\ud558\ub294 \uac83\uc774\uba70, \uc774\ub294 \uc885\uc885 \uad11\uc0b0\ub780 \ud45c\uba74 \uac80\uc0ac\uc640 \uac19\uc740 \uae30\uc220\uc744 \ud1b5\ud574 \uac80\uc99d\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ud45c\uba74 \uac80\uc0ac \ubc0f \uacc4\uce21:<\/strong>\n<ul>\n<li>\ud6c4\ucc98\ub9ac \uacfc\uc815\uacfc \ud6c4\ucc98\ub9ac \ud6c4\uc5d0\ub294 \uad11\ubc94\uc704\ud55c \uac80\uc0ac \ubc0f \uacc4\uce21\uc774 \uc218\ud589\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc790\ub3d9\ud654\ub41c \ud45c\uba74 \uc2a4\uce90\ub108:<\/strong> \uc785\uc790, \uc2a4\ud06c\ub798\uce58, \uad6c\ub369\uc774 \ubc0f \uae30\ud0c0 \ud45c\uba74 \uacb0\ud568\uc744 \uace0\uac10\ub3c4\ub85c \uac10\uc9c0\ud558\uace0 \ub9e4\ud551\ud558\ub294 \ub370\ub294 KLA-Tencor Candela \ub610\ub294 Surfscan\uacfc \uac19\uc740 \ub3c4\uad6c\uac00 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>\uc6d0\uc790\ub825 \ud604\ubbf8\uacbd(AFM):<\/strong> \ub098\ub178 \uc2a4\ucf00\uc77c\uc5d0\uc11c \ud45c\uba74 \uac70\uce60\uae30\ub97c \uc815\ub7c9\ud654\ud558\uace0 \ud45c\uba74 \ud615\ud0dc\ub97c \uc774\ubbf8\uc9c0\ud654\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/li>\n<li><strong>X\uc120 \ud68c\uc808(XRD)\/X\uc120 \uc9c0\ud615(XRT):<\/strong> \uacb0\uc815 \ubc29\ud5a5, \uc624\ud504\ucef7 \uac01\ub3c4\ub97c \ud655\uc778\ud558\uace0 \uacb0\uc815 \ud488\uc9c8(\uc608: \uacb0\ud568 \ubc00\ub3c4, \ubcc0\ud615\ub960)\uc744 \ud3c9\uac00\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\uad11\ud559 \ud604\ubbf8\uacbd:<\/strong> \uacb0\ud568, \uac00\uc7a5\uc790\ub9ac \ud488\uc9c8 \ubc0f \ub808\uc774\uc800 \ub9c8\ud06c\ub97c \uc721\uc548\uc73c\ub85c \uac80\uc0ac\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ub450\uaed8, TTV, \ubcf4\uc6b0, \uc6cc\ud504 \uce21\uc815 \uc2dc\uc2a4\ud15c:<\/strong> \uce58\uc218 \ub9e4\uac1c\ubcc0\uc218\uac00 \uc0ac\uc591 \ub0b4\uc5d0 \uc788\ub294\uc9c0 \ud655\uc778\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ubc31\uc0ac\uc774\ub4dc \ucc98\ub9ac(\uc120\ud0dd \uc0ac\ud56d\uc774\uc9c0\ub9cc \uc77c\ubc18\uc801):<\/strong>\n<ul>\n<li>\uc804\uba74(Si-\uba74)\uc774 \uac00\uc7a5 \ub9ce\uc740 \uad00\uc2ec\uc744 \ubc1b\uc9c0\ub9cc, \ub4b7\uba74(C-\uba74)\ub3c4 \ud2b9\uc815 \ucc98\ub9ac\ub97c \uac70\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li><strong>\ub4b7\uba74 \uc5f0\ub9c8\/\ub7a9\ud551:<\/strong> \ubaa9\ud45c \ub450\uaed8\ub97c \ub2ec\uc131\ud558\uace0 \ub4b7\uba74 \ud3c9\ud589\ub3c4\ub97c \uac1c\uc120\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ub4b7\uba74 \uc5f0\ub9c8:<\/strong> \uc591\uba74 \uc5f0\ub9c8(DSP) \uc6e8\uc774\ud37c \ub610\ub294 \ud5a5\uc0c1\ub41c \uc5f4 \uc811\ucd09\uc774 \ud544\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/li>\n<li><strong>\ub4b7\uba74 \uae08\uc18d\ud654:<\/strong> \uacbd\uc6b0\uc5d0 \ub530\ub77c \uc804\ub3c4\uc131 \uae30\ud310\uc758 \ub4b7\uba74\uc5d0 \uae08\uc18d\uce35(\uc608: Ti\/Ni\/Ag)\uc744 \uc99d\ucc29\ud558\uc5ec \uc634 \uc811\ucd09 \ud615\uc131\uc744 \uc6a9\uc774\ud558\uac8c \ud558\uac70\ub098 \ub514\ubc14\uc774\uc2a4 \ud328\ud0a4\uc9d5 \uc911\uc5d0 \ub2e4\uc774 \uc811\ucc29\ub825\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc5c5\uccb4\uc5d0\uc11c \uc218\ud589\ud558\uc9c0\ub9cc \ub54c\ub54c\ub85c \uae30\ud310 \uc218\uc900 \uc11c\ube44\uc2a4\ub85c \uc81c\uacf5\ub420 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ub808\uc774\uc800 \ub9c8\ud0b9:<\/strong>\n<ul>\n<li>\uc81c\uc870 \uacf5\uc815 \uc804\ubc18\uc5d0 \uac78\uccd0 \uc2dd\ubcc4 \ubc0f \ucd94\uc801\uc131\uc744 \uc704\ud574 \uc6e8\uc774\ud37c(\uc77c\ubc18\uc801\uc73c\ub85c \ub4b7\uba74 \ub610\ub294 \uc55e\uba74 \uac00\uc7a5\uc790\ub9ac \uc81c\uc678 \uc601\uc5ed)\uc5d0 SEMI \ud45c\uc900 \ub610\ub294 \ub9de\ucda4\ud615 \ub808\uc774\uc800 \ub9c8\ud0b9\uc744 \uc801\uc6a9\ud569\ub2c8\ub2e4. \ub9c8\ud0b9 \uacf5\uc815\uc740 \uae68\ub057\ud574\uc57c \ud558\uba70 \uc2a4\ud2b8\ub808\uc2a4\ub098 \uc785\uc790\ub97c \uc720\ubc1c\ud558\uc9c0 \uc54a\uc544\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ubaa8\uc11c\ub9ac \ud504\ub85c\ud30c\uc77c\ub9c1\/\ubaa8\ub530\uae30:<\/strong>\n<ul>\n<li>\ub9e4\ub044\ub7fd\uace0 \ub465\uadfc \ubaa8\uc11c\ub9ac\ub97c \ubcf4\uc7a5\ud558\uc5ec \ucde8\uae09 \ubc0f \ucc98\ub9ac \uacfc\uc815\uc5d0\uc11c \uc785\uc790 \ubc1c\uc0dd\uc758 \uc6d0\uc778\uc774 \ub420 \uc218 \uc788\ub294 \uce69\ud551\uc744 \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\ucd5c\uc885 \uc815\ub9ac \ubc0f \ud3ec\uc7a5:<\/strong>\n<ul>\n<li>\uae30\ud310\uc744 SP\ub85c \ud3ec\uc7a5\ud558\uae30 \uc804\uc5d0 \ucd5c\uc885 \uc138\ucc99 \ub2e8\uacc4\uac00 \uc218\ud589\ub429\ub2c8\ub2e4<br \/>","protected":false},"excerpt":{"rendered":"<p>SiC \uae30\ud310: \ucca8\ub2e8 \uae30\uc220\uc758 \uae30\ubc18 \ucca8\ub2e8 \uae30\uc220\uc758 \uae09\ubcc0\ud558\ub294 \ud658\uacbd\uc5d0\uc11c \uadf9\ud55c \uc870\uac74\uc744 \uacac\ub51c \uc218 \uc788\uace0 \ub6f0\uc5b4\ub09c \uc131\ub2a5\uc744 \uc81c\uacf5\ud560 \uc218 \uc788\ub294 \uc7ac\ub8cc\uc5d0 \ub300\ud55c \uc694\uad6c\uac00 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4. \ud0c4\ud654\uaddc\uc18c(SiC) \uae30\ud310\uc740 \ud2b9\ud788 \ud601\uc2e0\uc758 \uacbd\uacc4\ub97c \ub113\ud788\ub294 \uc0b0\uc5c5\uc5d0\uc11c \uc911\uc694\ud55c \ud65c\uc131\ud654 \uc7ac\ub8cc\ub85c \ubd80\uc0c1\ud588\uc2b5\ub2c8\ub2e4. \uace0\uc804\ub825 \uc804\uc790 \uc81c\ud488\uc5d0\uc11c \ucd5c\ucca8\ub2e8 \ud56d\uacf5\uc6b0\uc8fc\uae4c\uc9c0...<\/p>","protected":false},"author":3,"featured_media":2345,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_gspb_post_css":"","_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","_kad_post_transparent":"","_kad_post_title":"","_kad_post_layout":"","_kad_post_sidebar_id":"","_kad_post_content_style":"","_kad_post_vertical_padding":"","_kad_post_feature":"","_kad_post_feature_position":"","_kad_post_header":false,"_kad_post_footer":false,"_kad_post_classname":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-2530","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized"],"acf":{"en_gb-title":"","en_gb-meta":"","ja-title":"","ja-meta":"","ja-content":"","ko-title":"","ko-meta":"","ko-content":"","nl-title":"","nl-meta":"","nl-content":"","es-title":"","es-meta":"","es-content":"","ru-title":"","ru-meta":"","ru-content":"","tr-title":"","tr-meta":"","tr-content":"","pl-title":"","pl-meta":"","pl-content":"","pt-title":"","pt-meta":"","pt-content":"","de-title":"","de-meta":"","de-content":"","fr-title":"","fr-meta":"","fr-content":""},"taxonomy_info":{"category":[{"value":1,"label":"Uncategorized"}]},"featured_image_src_large":["https:\/\/sicarbtech.com\/wp-content\/uploads\/2025\/05\/Custom-Silicon-Carbide-Products-7_1-1.jpg",1024,1024,false],"author_info":{"display_name":"yiyunyinglucky","author_link":"https:\/\/sicarbtech.com\/ko\/author\/yiyunyinglucky\/"},"comment_info":14,"category_info":[{"term_id":1,"name":"Uncategorized","slug":"uncategorized","term_group":0,"term_taxonomy_id":1,"taxonomy":"category","description":"","parent":0,"count":794,"filter":"raw","cat_ID":1,"category_count":794,"category_description":"","cat_name":"Uncategorized","category_nicename":"uncategorized","category_parent":0}],"tag_info":false,"_links":{"self":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2530","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/comments?post=2530"}],"version-history":[{"count":2,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2530\/revisions"}],"predecessor-version":[{"id":4945,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/posts\/2530\/revisions\/4945"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media\/2345"}],"wp:attachment":[{"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/media?parent=2530"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/categories?post=2530"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/sicarbtech.com\/ko\/wp-json\/wp\/v2\/tags?post=2530"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}