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<strong>\u30ab\u30b9\u30bf\u30e0SiC\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3<\/strong> \u3092\u73fe\u4ee3\u306e\u822a\u7a7a\u5b87\u5b99\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u306e\u57fa\u790e\u3068\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<h2>\u4e3b\u8981\u306a\u822a\u7a7a\u5b87\u5b99\u7528\u9014\uff1aSiC\u304c\u98db\u8e8d\u7684\u306b\u5411\u4e0a\u3059\u308b\u5834\u6240<\/h2>\n<p>\u70ad\u5316\u30b1\u30a4\u7d20\u30c7\u30a3\u30b9\u30af <strong>\u70ad\u5316\u30b1\u30a4\u7d20\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/strong> 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SiC\u307e\u305f\u306fSiC\u30d9\u30fc\u30b9\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u8907\u5408\u6750\u6599\uff08CMC\uff09\u3067\u4f5c\u3089\u308c\u305f\u71c3\u713c\u30e9\u30a4\u30ca\u30fc\u3001\u30ce\u30ba\u30eb\u30d9\u30fc\u30f3\u3001\u304a\u3088\u3073\u30bf\u30fc\u30d3\u30f3\u30d6\u30ec\u30fc\u30c9\u306a\u3069\u306e\u90e8\u54c1\u306f\u3001\u91d1\u5c5e\u8d85\u5408\u91d1\u3088\u308a\u3082\u9ad8\u3044\u6e29\u5ea6\u3067\u52d5\u4f5c\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001 <strong>\u9ad8\u6027\u80fd\u822a\u7a7a\u6a5f<\/strong>.<\/li>\n<li><strong>\u71b1\u4fdd\u8b77\u30b7\u30b9\u30c6\u30e0\uff08TPS\uff09\uff1a<\/strong> 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\u822a\u7a7a\u5b87\u5b99\u5206\u91ce\u3067\u306e\u9069\u7528\u6027\u3092\u62e1\u5927\u3057\u7d9a\u3051\u3066\u304a\u308a\u3001\u5c06\u6765\u3055\u3089\u306b\u9769\u65b0\u7684\u306a\u7528\u9014\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<h2>\u6bd4\u985e\u306e\u306a\u3044\u5229\u70b9\uff1a\u822a\u7a7a\u5b87\u5b99\u306e\u9700\u8981\u306b\u5bfe\u3059\u308b\u30ab\u30b9\u30bf\u30e0SiC\u306e\u7406\u7531<\/h2>\n<p>\u822a\u7a7a\u5b87\u5b99\u7523\u696d\u304c\u3001\u6975\u7aef\u306a\u52d5\u4f5c\u6761\u4ef6\u4e0b\u3067\u306e\u3088\u308a\u9ad8\u3044\u6027\u80fd\u3001\u3088\u308a\u9ad8\u3044\u52b9\u7387\u3001\u304a\u3088\u3073\u5f37\u5316\u3055\u308c\u305f\u4fe1\u983c\u6027\u3092\u7d76\u3048\u305a\u8ffd\u6c42\u3057\u3066\u3044\u308b\u305f\u3081\u3001 <strong>\u30ab\u30b9\u30bf\u30e0\u70ad\u5316\u30b1\u30a4\u7d20<\/strong> \u306f\u3001\u307e\u3059\u307e\u3059\u4e0d\u53ef\u6b20\u306a\u6750\u6599\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u5f93\u6765\u306e\u6750\u6599\u3084\u4ed6\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u6bd4\u8f03\u3057\u305f\u305d\u306e\u5229\u70b9\u306f\u3001\u7279\u306b\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u304c\u7279\u5b9a\u306e\u822a\u7a7a\u5b87\u5b99\u306e\u8981\u6c42\u306b\u5408\u308f\u305b\u3066\u8abf\u6574\u3055\u308c\u3066\u3044\u308b\u5834\u5408\u306b\u91cd\u8981\u3067\u3059\u3002<\/p>\n<ul>\n<li><strong>\u512a\u308c\u305f\u5f37\u5ea6\u5bfe\u91cd\u91cf\u6bd4\uff1a<\/strong> SiC\u306f\u3001\u307b\u3068\u3093\u3069\u306e\u91d1\u5c5e\u3088\u308a\u3082\u5927\u5e45\u306b\u8efd\u91cf\u3067\u3042\u308a\u306a\u304c\u3089\u3001\u5353\u8d8a\u3057\u305f\u5f37\u5ea6\u3068\u525b\u6027\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u91cd\u91cf\u524a\u6e1b\u304c\u71c3\u6599\u52b9\u7387\u306e\u5411\u4e0a\u3001\u30da\u30a4\u30ed\u30fc\u30c9\u5bb9\u91cf\u306e\u5897\u52a0\u3001\u304a\u3088\u3073\u64cd\u7e26\u6027\u306e\u5411\u4e0a\u306b\u76f4\u63a5\u3064\u306a\u304c\u308b\u822a\u7a7a\u5b87\u5b99\u7528\u9014\u306b\u3068\u3063\u3066\u91cd\u8981\u3067\u3059\u3002 <strong>\u8efd\u91cfSiC\u822a\u7a7a\u5b87\u5b99\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8<\/strong> \u306f\u3001\u3053\u308c\u3089\u306e\u76ee\u6a19\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306e\u9375\u3067\u3059\u3002<\/li>\n<li><strong>\u5353\u8d8a\u3057\u305f\u71b1\u5b89\u5b9a\u6027\uff1a<\/strong> SiC\u306f\u3001\u975e\u5e38\u306b\u9ad8\u3044\u6e29\u5ea6\uff08\u591a\u304f\u306e\u5834\u54081600\u00b0C\u3092\u8d85\u3048\u308b\uff09\u3067\u305d\u306e\u6a5f\u68b0\u7684\u7279\u6027\u3092\u7dad\u6301\u3057\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30a8\u30f3\u30b8\u30f3\u3067\u306e\u3088\u308a\u9ad8\u3044\u52d5\u4f5c\u6e29\u5ea6\u304c\u53ef\u80fd\u306b\u306a\u308a\u3001\u7a7a\u529b\u52a0\u71b1\u306b\u3055\u3089\u3055\u308c\u308b\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306b\u5bfe\u3059\u308b\u5805\u7262\u306a\u71b1\u4fdd\u8b77\u304c\u63d0\u4f9b\u3055\u308c\u307e\u3059\u3002\u305d\u306e\u4f4e\u3044\u71b1\u81a8\u5f35\u4fc2\u6570\uff08CTE\uff09\u306f\u3001\u5e45\u5e83\u3044\u6e29\u5ea6\u7bc4\u56f2\u3067\u306e\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027\uff1a<\/strong> \u591a\u304f\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u306f\u7570\u306a\u308a\u3001\u7279\u5b9a\u306e\u30b0\u30ec\u30fc\u30c9\u306eSiC\u306f\u9ad8\u3044\u71b1\u4f1d\u5c0e\u7387\u3092\u793a\u3057\u3001\u52b9\u7387\u7684\u306a\u71b1\u653e\u6563\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u654f\u611f\u306a\u96fb\u5b50\u6a5f\u5668\u306e\u51b7\u5374\u3001\u30a8\u30f3\u30b8\u30f3\u306e\u71b1\u7ba1\u7406\u3001 <strong>\u71b1\u7ba1\u7406\u822a\u7a7a\u5b87\u5b99\u30b7\u30b9\u30c6\u30e0<\/strong>.<\/li>\n<li><strong>\u6975\u7aef\u306a\u786c\u5ea6\u3068\u8010\u6469\u8017\u6027\uff1a<\/strong> SiC\u306f\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3068\u70ad\u5316\u30db\u30a6\u7d20\u306b\u6b21\u3044\u3067\u3001\u5e02\u8ca9\u3055\u308c\u3066\u3044\u308b\u6700\u3082\u786c\u3044\u6750\u6599\u306e1\u3064\u3067\u3059\u3002\u3053\u308c\u306f\u3001\u30b7\u30fc\u30eb\u3001\u30d9\u30a2\u30ea\u30f3\u30b0\u3001\u30ce\u30ba\u30eb\u3001\u304a\u3088\u3073\u4fdd\u8b77\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306a\u3069\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306b\u7406\u60f3\u7684\u306a\u3001\u512a\u308c\u305f\u8010\u6469\u8017\u6027\u3001\u8010\u6d78\u98df\u6027\u3001\u304a\u3088\u3073\u8010\u30b9\u30e9\u30a4\u30c9\u6469\u8017\u6027\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u512a\u308c\u305f\u5316\u5b66\u7684\u4e0d\u6d3b\u6027\u3068\u8010\u98df\u6027\uff1a<\/strong> SiC\u306f\u3001\u822a\u7a7a\u5b87\u5b99\u74b0\u5883\u3067\u906d\u9047\u3059\u308b\u8150\u98df\u6027\u71c3\u6599\u3001\u9178\u5316\u5264\u3001\u9ad8\u6e29\u30ac\u30b9\u3092\u542b\u3080\u307b\u3068\u3093\u3069\u306e\u5316\u5b66\u7269\u8cea\u306b\u3088\u308b\u653b\u6483\u306b\u5bfe\u3057\u3066\u975e\u5e38\u306b\u8010\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u9577\u5bff\u547d\u3068\u4fe1\u983c\u6027\u304c\u4fdd\u8a3c\u3055\u308c\u307e\u3059\u3002<\/li>\n<li><strong>\u653e\u5c04\u7dda\u8010\u6027\uff1a<\/strong> \u5b87\u5b99\u7528\u9014\u306e\u5834\u5408\u3001SiC\u306f\u3055\u307e\u3056\u307e\u306a\u5f62\u614b\u306e\u653e\u5c04\u7dda\u306b\u5bfe\u3059\u308b\u512a\u308c\u305f\u8010\u6027\u3092\u793a\u3057\u3001\u904e\u9177\u306a\u5b87\u5b99\u74b0\u5883\u3067\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u5b89\u5b9a\u6027\u3068\u6027\u80fd\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u306b\u3088\u308b\u8abf\u6574\u53ef\u80fd\u306a\u30d7\u30ed\u30d1\u30c6\u30a3\uff1a<\/strong> SiC\u306e\u7279\u6027\u306f\u3001\u539f\u6750\u6599\u3001\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\uff08\u53cd\u5fdc\u7d50\u5408\u3001\u713c\u7d50\u3001CVD\u306a\u3069\uff09\u3001\u304a\u3088\u3073\u5fae\u7d30\u69cb\u9020\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u3092\u6ce8\u610f\u6df1\u304f\u5236\u5fa1\u3059\u308b\u3053\u3068\u3067\u5fae\u8abf\u6574\u3067\u304d\u307e\u3059\u3002 <strong>\u30ab\u30b9\u30bf\u30e0SiC\u8a2d\u8a08<\/strong> \u306b\u3088\u308a\u3001\u5bc6\u5ea6\u3001\u591a\u5b54\u6027\u3001\u7c92\u5ea6\u3001\u304a\u3088\u3073\u4e8c\u6b21\u76f8\u3092\u6700\u9069\u5316\u3057\u3066\u3001\u7279\u5b9a\u306e\u822a\u7a7a\u5b87\u5b99\u6027\u80fd\u76ee\u6a19\u3092\u9054\u6210\u3067\u304d\u307e\u3059\u3002<\/li>\n<li><strong>\u5bf8\u6cd5\u5b89\u5b9a\u6027\uff1a<\/strong> SiC\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u3044\u3063\u305f\u3093\u88fd\u9020\u3055\u308c\u308b\u3068\u3001\u512a\u308c\u305f\u9577\u671f\u7684\u306a\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3092\u793a\u3057\u3001\u30df\u30e9\u30fc\u3084\u30ac\u30a4\u30c0\u30f3\u30b9\u30b7\u30b9\u30c6\u30e0\u306a\u3069\u306e\u7cbe\u5bc6\u6a5f\u5668\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/li>\n<\/ul>\n<p>\u3053\u308c\u3089\u306e\u5229\u70b9\u306b\u3088\u308a\u3001 <strong>\u5148\u7aefSiC\u6750\u6599<\/strong> \u306f\u3001\u5358\u306a\u308b\u5b9f\u884c\u53ef\u80fd\u306a\u4ee3\u66ff\u54c1\u3067\u306f\u306a\u304f\u3001\u307e\u3059\u307e\u3059\u591a\u304f\u306e\u8981\u6c42\u306e\u53b3\u3057\u3044\u822a\u7a7a\u5b87\u5b99\u7528\u9014\u306b\u3068\u3063\u3066\u512a\u308c\u305f\u9078\u629e\u80a2\u3067\u3042\u308a\u3001\u98db\u884c\u3068\u5b87\u5b99\u63a2\u67fb\u3067\u53ef\u80fd\u306a\u3053\u3068\u306e\u9650\u754c\u3092\u62bc\u3057\u5e83\u3052\u3066\u3044\u307e\u3059\u3002<\/p>\n<h2>\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u8abf\u6574\uff1a\u822a\u7a7a\u5b87\u5b99\u30df\u30c3\u30b7\u30e7\u30f3\u306b\u63a8\u5968\u3055\u308c\u308bSiC\u30b0\u30ec\u30fc\u30c9<\/h2>\n<p>\u9069\u5207\u306a\u70ad\u5316\u30b1\u30a4\u7d20\u30b0\u30ec\u30fc\u30c9\u306e\u9078\u629e\u306f\u3001\u7279\u5b9a\u306e\u822a\u7a7a\u5b87\u5b99\u7528\u9014\u3067\u306e\u6027\u80fd\u3092\u6700\u9069\u5316\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002\u3055\u307e\u3056\u307e\u306a\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u7279\u6027\u3001\u5bc6\u5ea6\u3001\u304a\u3088\u3073\u7d14\u5ea6\u304c\u7570\u306a\u308bSiC\u6750\u6599\u304c\u5f97\u3089\u308c\u307e\u3059\u3002\u822a\u7a7a\u5b87\u5b99\u7523\u696d\u306b\u95a2\u9023\u3059\u308b\u4e3b\u306a\u30b0\u30ec\u30fc\u30c9\u306f\u6b21\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>SiC\u30b0\u30ec\u30fc\u30c9<\/th>\n<th>\u88fd\u9020\u30d7\u30ed\u30bb\u30b9<\/th>\n<th>\u822a\u7a7a\u5b87\u5b99\u306e\u4e3b\u306a\u7279\u6027<\/th>\n<th>\u5178\u578b\u7684\u306a\u822a\u7a7a\u5b87\u5b99\u7528\u9014<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>\u713c\u7d50\u70ad\u5316\u30b1\u30a4\u7d20\uff08SSiC \/ Alpha-SiC\uff09<\/strong><\/td>\n<td>\u713c\u7d50\u52a9\u5264\u3092\u4f7f\u7528\u3057\u3066\u3001\u9ad8\u6e29\uff08\u901a\u5e382000\u00b0C\u4ee5\u4e0a\uff09\u3067\u5fae\u7d30\u306aSiC\u7c89\u672b\u3092\u56fa\u76f8\u713c\u7d50\u3057\u307e\u3059\u3002<\/td>\n<td>\u9ad8\u7d14\u5ea6\u3001\u975e\u5e38\u306b\u9ad8\u3044\u5f37\u5ea6\u3068\u786c\u5ea6\u3001\u512a\u308c\u305f\u8010\u98df\u6027\u3001\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027\u3001\u9ad8\u6e29\uff08\u301c1600\u00b0C\uff09\u3067\u306e\u5f37\u5ea6\u3092\u7dad\u6301\u3057\u307e\u3059\u3002\u5fae\u7d30\u306a\u7c92\u72b6\u69cb\u9020\u3002<\/td>\n<td>\u9ad8\u6e29\u30a8\u30f3\u30b8\u30f3\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\uff08\u30d6\u30ec\u30fc\u30c9\u3001\u30d9\u30fc\u30f3\uff09\u3001\u6469\u8017\u90e8\u54c1\uff08\u30b7\u30fc\u30eb\u3001\u30d9\u30a2\u30ea\u30f3\u30b0\uff09\u3001\u30ed\u30b1\u30c3\u30c8\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3001\u71b1\u4ea4\u63db\u5668\u30c1\u30e5\u30fc\u30d6\u3001\u88c5\u7532\u3002 <strong>SSiC\u822a\u7a7a\u5b87\u5b99\u90e8\u54c1<\/strong>.<\/td>\n<\/tr>\n<tr>\n<td><strong>\u53cd\u5fdc\u6027\u70ad\u5316\u30b1\u30a4\u7d20 (RBSiC \/ SiSiC)<\/strong><\/td>\n<td>\u6eb6\u878d\u30b1\u30a4\u7d20\u3092SiC\u3068\u70ad\u7d20\u306e\u591a\u5b54\u8cea\u30d7\u30ea\u30d5\u30a9\u30fc\u30e0\u306b\u6d78\u900f\u3055\u305b\u307e\u3059\u3002\u30b1\u30a4\u7d20\u306f\u70ad\u7d20\u3068\u53cd\u5fdc\u3057\u3066\u3055\u3089\u306bSiC\u3092\u5f62\u6210\u3057\u3001\u5143\u306eSiC\u7c92\u5b50\u3092\u7d50\u5408\u3055\u305b\u307e\u3059\u3002\u904a\u96e2\u30b1\u30a4\u7d20\u3092\u3044\u304f\u3064\u304b\u542b\u307f\u307e\u3059\uff08\u901a\u5e388\u301c15\uff05\uff09\u3002<\/td>\n<td>\u512a\u308c\u305f\u5f37\u5ea6\u3068\u786c\u5ea6\u3001\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027\u3001\u9ad8\u3044\u71b1\u4f1d\u5c0e\u7387\u3001\u30cb\u30a2\u30cd\u30c3\u30c8\u30b7\u30a7\u30a4\u30d7\u88fd\u9020\u80fd\u529b\u3001\u6bd4\u8f03\u7684\u4f4e\u30b3\u30b9\u30c8\u3002\u6700\u5927\u4f7f\u7528\u6e29\u5ea6\u306f\u30b1\u30a4\u7d20\u306e\u878d\u70b9\uff08\u301c1350\u00b0C\u301c1400\u00b0C\uff09\u306b\u3088\u3063\u3066\u5236\u9650\u3055\u308c\u307e\u3059\u3002<\/td>\n<td>\u69cb\u9020\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3001\u30d2\u30fc\u30c8\u30b9\u30d7\u30ec\u30c3\u30c0\u30fc\u3001\u30dd\u30f3\u30d7\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3001\u5927\u304d\u306a\u8907\u96d1\u306a\u5f62\u72b6\u3001 <strong>RBSiC\u822a\u7a7a\u5b87\u5b99\u90e8\u54c1<\/strong> \u6975\u7aef\u306a\u6e29\u5ea6\u304c\u552f\u4e00\u306e\u8981\u56e0\u3067\u306f\u306a\u304f\u3001\u71b1\u4f1d\u5c0e\u7387\u3068\u8907\u96d1\u306a\u5f62\u72b6\u304c\u91cd\u8981\u306a\u5834\u5408\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u5316\u5b66\u84b8\u7740SiC\uff08CVD-SiC\uff09<\/strong><\/td>\n<td>\u52a0\u71b1\u3055\u308c\u305f\u57fa\u677f\u3078\u306e\u30ac\u30b9\u72b6\u524d\u99c6\u4f53\u304b\u3089\u306e\u5806\u7a4d\u3002<\/td>\n<td>\u8d85\u9ad8\u7d14\u5ea6\uff0899.999\uff05\u4ee5\u4e0a\uff09\u3001\u7406\u8ad6\u7684\u306b\u9ad8\u5bc6\u5ea6\u3001\u512a\u308c\u305f\u8010\u85ac\u54c1\u6027\u3001\u512a\u308c\u305f\u8868\u9762\u4ed5\u4e0a\u3052\u304c\u53ef\u80fd\u3001\u826f\u597d\u306a\u71b1\u4f1d\u5c0e\u7387\u3002\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u307e\u305f\u306f\u30d0\u30eb\u30af\u6750\u6599\u3068\u3057\u3066\u5806\u7a4d\u3067\u304d\u307e\u3059\u3002<\/td>\n<td>\u534a\u5c0e\u4f53\u51e6\u7406\u88c5\u7f6e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\uff08\u822a\u7a7a\u5b87\u5b99\u96fb\u5b50\u6a5f\u5668\u306b\u3082\u95a2\u9023\uff09\u3001\u9ad8\u6027\u80fd\u5149\u5b66\u7cfb\u3001C \/ C\u8907\u5408\u6750\u6599\u306e\u4fdd\u8b77\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3001 <strong>\u9ad8\u7d14\u5ea6SiC\u822a\u7a7a\u5b87\u5b99<\/strong> \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3092\u4f7f\u7528\u3059\u308b\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u7a92\u5316\u30b1\u30a4\u7d20\u7d50\u5408\u70ad\u5316\u30b1\u30a4\u7d20\uff08NBSiC)<\/strong><\/td>\n<td>\u30b7\u30ea\u30b3\u30f3\u30ca\u30a4\u30c8\u30e9\u30a4\u30c9\uff08Si3N4\uff09\u76f8\u306b\u3088\u3063\u3066\u7d50\u5408\u3055\u308c\u305fSiC\u7c92\u5b50\u3002<\/td>\n<td>\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027\u3001\u4e2d\u6e29\u3067\u306e\u512a\u308c\u305f\u5f37\u5ea6\u3001\u6eb6\u878d\u91d1\u5c5e\u306b\u5bfe\u3059\u308b\u8010\u6027\u3002<\/td>\n<td>\u4e3b\u8981\u306a\u822a\u7a7a\u5b87\u5b99\u69cb\u9020\u3067\u306f\u3042\u307e\u308a\u4e00\u822c\u7684\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u304c\u3001\u822a\u7a7a\u5b87\u5b99\u6750\u6599\u306e\u88fd\u9020\u306b\u95a2\u9023\u3059\u308b\u7279\u5b9a\u306e\u7523\u696d\u30d7\u30ed\u30bb\u30b9\u8a2d\u5099\u3067\u4f7f\u7528\u3055\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u70ad\u7d20\u7e4a\u7dad\u5f37\u5316\u70ad\u5316\u30b1\u30a4\u7d20\uff08C\/SiC\u8907\u5408\u6750\uff09<\/strong><\/td>\n<td>SiC\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u306b\u57cb\u3081\u8fbc\u307e\u308c\u305f\u70ad\u7d20\u7e4a\u7dad\u3002<\/td>\n<td>\u30e2\u30ce\u30ea\u30b7\u30c3\u30afSiC\uff08&#8220;\u512a\u96c5\u306a\u6545\u969c&#8221;\uff09\u3088\u308a\u3082\u8457\u3057\u304f\u6539\u5584\u3055\u308c\u305f\u7834\u58ca\u976d\u6027\u3001\u975e\u5e38\u306b\u9ad8\u3044\u6e29\u5ea6\u8010\u6027\u3001\u8efd\u91cf\u6027\u3001\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027\u3002<\/td>\n<td>\u8d85\u97f3\u901f\u6a5f\u306e\u30ea\u30fc\u30c7\u30a3\u30f3\u30b0\u30a8\u30c3\u30b8\u3001\u30ed\u30b1\u30c3\u30c8\u30ce\u30ba\u30eb\u3001\u822a\u7a7a\u6a5f\u306e\u30d6\u30ec\u30fc\u30ad\u30c7\u30a3\u30b9\u30af\u3001\u5148\u9032\u30a8\u30f3\u30b8\u30f3\u306e\u9ad8\u6e29\u69cb\u9020\u3002 <strong>SiC CMC\u822a\u7a7a\u5b87\u5b99<\/strong>.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>SiC\u30b0\u30ec\u30fc\u30c9\u306e\u9078\u629e\u306f\u3001\u7279\u5b9a\u306e\u822a\u7a7a\u5b87\u5b99\u30df\u30c3\u30b7\u30e7\u30f3\u306b\u304a\u3051\u308b\u52d5\u4f5c\u74b0\u5883\u3001\u6a5f\u68b0\u7684\u8ca0\u8377\u3001\u71b1\u7684\u6761\u4ef6\u3001\u304a\u3088\u3073\u30b3\u30b9\u30c8\u306b\u95a2\u3059\u308b\u614e\u91cd\u306a\u5206\u6790\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002\u7d4c\u9a13\u8c4a\u5bcc\u306a <strong>\u70ad\u5316\u30b1\u30a4\u7d20\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc<\/strong> \u3068\u5354\u529b\u3059\u308b\u3053\u3068\u304c\u3001\u6700\u9069\u306a\u6750\u6599\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u9078\u629e\u3057\u3001\u958b\u767a\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n<h2>\u7a7a\u3078\u306e\u8a2d\u8a08\uff1a\u822a\u7a7a\u5b87\u5b99SiC\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u91cd\u8981\u306a\u8003\u616e\u4e8b\u9805<\/h2>\n<p>\u822a\u7a7a\u5b87\u5b99\u7528\u9014\u5411\u3051\u306b\u70ad\u5316\u30b1\u30a4\u7d20\u3067\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u8a2d\u8a08\u3059\u308b\u306b\u306f\u3001SiC\u306e\u30bb\u30e9\u30df\u30c3\u30af\u6027\u3001\u4e3b\u306b\u305d\u306e\u8106\u6027\u306e\u305f\u3081\u3001\u5f93\u6765\u306e\u91d1\u5c5e\u3068\u306f\u7570\u306a\u308b\u30a2\u30d7\u30ed\u30fc\u30c1\u304c\u5fc5\u8981\u3067\u3059\u3002\u305f\u3060\u3057\u3001\u614e\u91cd\u306a\u8a2d\u8a08\u4e0a\u306e\u8003\u616e\u4e8b\u9805\u304c\u3042\u308c\u3070\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u306fSiC\u306e\u512a\u308c\u305f\u7279\u6027\u3092\u6700\u5927\u9650\u306b\u6d3b\u7528\u3067\u304d\u307e\u3059\u3002\u4e3b\u306a\u8981\u7d20\u306f\u6b21\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/p>\n<ul>\n<li><strong>\u8106\u6027\u306e\u7ba1\u7406\uff1a<\/strong>\n<ul>\n<li>\u30b3\u30fc\u30ca\u30fc\u3084\u30a8\u30c3\u30b8\u3067\u306e\u5fdc\u529b\u96c6\u4e2d\u3092\u8efd\u6e1b\u3059\u308b\u305f\u3081\u306b\u3001\u5341\u5206\u306a\u534a\u5f84\u3068\u30d5\u30a3\u30ec\u30c3\u30c8\u3092\u7d44\u307f\u8fbc\u307f\u307e\u3059\u3002<\/li>\n<li>\u92ed\u3044\u30ce\u30c3\u30c1\u3084\u65ad\u9762\u306e\u6025\u6fc0\u306a\u5909\u5316\u3092\u907f\u3051\u3066\u304f\u3060\u3055\u3044\u3002<\/li>\n<li>\u53ef\u80fd\u3067\u3042\u308c\u3070\u3001\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306f\u5f15\u5f35\u3088\u308a\u3082\u5727\u7e2e\u306e\u65b9\u304c\u306f\u308b\u304b\u306b\u5f37\u3044\u305f\u3081\u3001\u5727\u7e2e\u8377\u91cd\u3092\u8003\u616e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/li>\n<li>\u5f15\u5f35\u8377\u91cd\u304c\u907f\u3051\u3089\u308c\u306a\u3044\u5834\u5408\u306f\u3001\u4e88\u5fdc\u529b\u6280\u8853\u3092\u691c\u8a0e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u90e8\u54c1\u306e\u5f62\u72b6\u3068\u88fd\u9020\u6027\uff1a<\/strong>\n<ul>\n<li>\u8907\u96d1\u306a\u5f62\u72b6\u306f\u5b9f\u73fe\u53ef\u80fd\u3067\u3059\u304c\u3001\u7279\u306bRBSiC\u3084SiC\u306e\u4ed8\u52a0\u88fd\u9020\u6280\u8853\u3092\u4f7f\u7528\u3059\u308b\u3068\u3001\u3088\u308a\u5358\u7d14\u306a\u5f62\u72b6\u306e\u65b9\u304c\u30b3\u30b9\u30c8\u3092\u6291\u3048\u3001\u4fe1\u983c\u6027\u3092\u9ad8\u3081\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/li>\n<li>\u9078\u629e\u3057\u305f\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\uff08\u4f8b\uff1a\u30b0\u30ea\u30fc\u30f3\u52a0\u5de5\u3001\u713c\u7d50\u53ce\u7e2e\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7814\u524a\u80fd\u529b\uff09\u306e\u5236\u9650\u3092\u7406\u89e3\u3057\u307e\u3059\u3002 <strong>\u7cbe\u5bc6SiC\u6a5f\u68b0\u52a0\u5de5\u822a\u7a7a\u5b87\u5b99<\/strong> 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<strong>\u8efd\u91cf\u822a\u7a7a\u5b87\u5b99\u69cb\u9020<\/strong>.<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u516c\u5dee\uff1a<\/strong>\n<ul>\n<li>\u9078\u629e\u3057\u305fSiC\u30b0\u30ec\u30fc\u30c9\u3068\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3067\u5b9f\u73fe\u53ef\u80fd\u306a\u516c\u5dee\u3092\u6307\u5b9a\u3057\u307e\u3059\u3002\u904e\u5ea6\u306b\u53b3\u3057\u3044\u516c\u5dee\u306f\u3001\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u306b\u5897\u52a0\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u74b0\u5883\u8981\u56e0\uff1a<\/strong>\n<ul>\n<li>\u6e29\u5ea6\u306e\u6975\u7aef\u306a\u5909\u5316\u3001\u8150\u98df\u6027\u96f0\u56f2\u6c17\u3001\u653e\u5c04\u7dda\u3001\u6f5c\u5728\u7684\u306a\u885d\u6483\u30a4\u30d9\u30f3\u30c8\u306a\u3069\u3001\u74b0\u5883\u3078\u306e\u5f71\u97ff\u306e\u5168\u7bc4\u56f2\u3092\u8003\u616e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\u65e9\u671f\u8a2d\u8a08\u6bb5\u968e\u304b\u3089 <strong>\u30ab\u30b9\u30bf\u30e0 SiC \u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u30e1\u30fc\u30ab\u30fc<\/strong> 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mm\uff08\u00b10.0004&#8243;\u304b\u3089\u00b10.002&#8243;\uff09\u306b\u9054\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u9ad8\u5ea6\u306a\u5c02\u9580\u7528\u9014\u3067\u306f\u3001\u6570\u30df\u30af\u30ed\u30f3\uff08\u00b5m\uff09\u307e\u3067\u306e\u3055\u3089\u306b\u53b3\u3057\u3044\u516c\u5dee\u3082\u53ef\u80fd\u3067\u3059\u3002 <strong>\u7cbe\u5bc6SiC\u6a5f\u68b0\u52a0\u5de5<\/strong> 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<strong>\u6280\u8853\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc<\/strong> 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SiC\/SiC\u8907\u5408\u6750\u306a\u3069\u306e\u975e\u5e38\u306b\u9ad8\u6e29\u3067\u306eSiC\u306e\u4e00\u822c\u7684\u306a\u9178\u5316\u9650\u754c\u3092\u8d85\u3048\u308b\u7528\u9014\u3067\u3001\u52a3\u5316\u3092\u9632\u304e\u307e\u3059\u3002<\/li>\n<li><strong>\u53cd\u5c04\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff08\u4f8b\uff1a\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3001\u91d1\u3001\u9280\u3001\u8a98\u96fb\u4f53\u30b9\u30bf\u30c3\u30af\uff09\uff1a<\/strong> SiC\u30df\u30e9\u30fc\u306b\u9069\u7528\u3057\u3066\u3001\u671b\u307e\u3057\u3044\u53cd\u5c04\u7387\u3092\u671b\u9060\u93e1\u3084\u5149\u5b66\u6a5f\u5668\u306e\u7279\u5b9a\u306e\u6ce2\u9577\u3067\u5b9f\u73fe\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u53cd\u5c04\u9632\u6b62\uff08AR\uff09\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff1a<\/strong> \u5149\u7dda\u900f\u904e\u7387\u3092\u6700\u5927\u5316\u3059\u308b\u305f\u3081\u306b\u3001SiC\u7a93\u307e\u305f\u306f\u30ec\u30f3\u30ba\u306b\u9069\u7528\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u8010\u6469\u8017\u6027\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff08\u4f8b\uff1a\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30e9\u30a4\u30af\u30ab\u30fc\u30dc\u30f3&#8211;DLC\uff09\uff1a<\/strong> SiC\u306f\u975e\u5e38\u306b\u786c\u3044\u3067\u3059\u304c\u3001\u5834\u5408\u306b\u3088\u3063\u3066\u306f\u3001\u3055\u3089\u306b\u4f4e\u3044\u6469\u64e6\u9762\u307e\u305f\u306f\u7279\u5b9a\u306e\u30c8\u30e9\u30a4\u30dc\u30ed\u30b8\u30fc\u30da\u30a2\u30ea\u30f3\u30b0\u304c\u5fc5\u8981\u306b\u306a\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u74b0\u5883\u30d0\u30ea\u30a2\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff08EBC\uff09\uff1a<\/strong> \u71c3\u713c\u74b0\u5883\u3067SiC\u304a\u3088\u3073SiC CMC\u3092\u6c34\u84b8\u6c17\u3084\u305d\u306e\u4ed6\u306e\u8150\u98df\u6027\u5143\u7d20\u304b\u3089\u4fdd\u8b77\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u30a8\u30c3\u30b8\u306e\u9762\u53d6\u308a\u3068\u4e38\u307f\u4ed8\u3051\uff1a<\/strong>\n<ul>\n<li><strong>\u76ee\u7684<\/strong> \u5fdc\u529b\u96c6\u4e2d\u70b9\u3084\u6f5c\u5728\u7684\u306a\u30c1\u30c3\u30d4\u30f3\u30b0\u3068\u306a\u308b\u53ef\u80fd\u6027\u306e\u3042\u308b\u92ed\u3044\u30a8\u30c3\u30b8\u3092\u9664\u53bb\u3057\u3001\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u976d\u6027\u3068\u53d6\u308a\u6271\u3044\u5b89\u5168\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u3002<\/li>\n<li><strong>\u822a\u7a7a\u5b87\u5b99\u95a2\u9023\uff1a<\/strong> \u307b\u3068\u3093\u3069\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u6a19\u6e96\u7684\u306a\u6163\u884c\u3067\u3042\u308a\u3001\u5805\u7262\u6027\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u3068\u8868\u9762\u51e6\u7406\uff1a<\/strong>\n<ul>\n<li><strong>\u76ee\u7684<\/strong> 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SiC\u306e\u6975\u5ea6\u306e\u786c\u5ea6\u306b\u3088\u308a\u3001\u6a5f\u68b0\u52a0\u5de5\u304c\u56f0\u96e3\u3067\u6642\u9593\u304c\u304b\u304b\u308a\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u5de5\u5177\u3068\u7279\u6b8a\u306a\u6a5f\u5668\u304c\u5fc5\u8981\u306b\u306a\u308a\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u91d1\u5c5e\u3068\u6bd4\u8f03\u3057\u3066\u6a5f\u68b0\u52a0\u5de5\u30b3\u30b9\u30c8\u304c\u9ad8\u304f\u306a\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u7de9\u548c\u6226\u7565\uff1a<\/strong>\n<ul>\n<li>\u6750\u6599\u9664\u53bb\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u305f\u3081\u306b\u3001\u30cb\u30a2\u30cd\u30c3\u30c8\u30b7\u30a7\u30a4\u30d7\u88fd\u9020\u3092\u5ff5\u982d\u306b\u7f6e\u3044\u3066\u8a2d\u8a08\u3057\u307e\u3059\u3002<\/li>\n<li>SiC\u3092\u5ff5\u982d\u306b\u7f6e\u3044\u3066\u3001\u88fd\u9020\u53ef\u80fd\u6027\u306e\u305f\u3081\u306b\u8a2d\u8a08\u3092\u6700\u9069\u5316\u3057\u307e\u3059\u3002<\/li>\n<li>\u7d4c\u9a13\u8c4a\u5bcc\u306a <strong>SiC\u6a5f\u68b0\u52a0\u5de5\u5c02\u9580\u5bb6\u306e\u7279\u5fb4\u3067\u3042\u308a\u3001<\/strong> \u3068\u5354\u529b\u3057\u3066\u3001\u30d7\u30ed\u30bb\u30b9\u3092\u6700\u9069\u5316\u3057\u307e\u3059\u3002<\/li>\n<li>\u6a5f\u68b0\u52a0\u5de5\u306e\u5fc5\u8981\u6027\u3092\u6e1b\u3089\u3059\u3053\u3068\u304c\u3067\u304d\u308b\u3001\u8907\u96d1\u306aSiC\u5f62\u72b6\u306e\u4ed8\u52a0\u88fd\u9020\u306a\u3069\u306e\u9ad8\u5ea6\u306a\u88fd\u9020\u6280\u8853\u3092\u691c\u8a0e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u71b1\u7ba1\u7406\u3068\u8010\u885d\u6483\u6027\uff1a<\/strong>\n<ul>\n<li><strong>\u30c1\u30e3\u30ec\u30f3\u30b8\u3060\uff1a<\/strong> SiC\u306f\u512a\u308c\u305f\u9ad8\u6e29\u5b89\u5b9a\u6027\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u304c\u3001\u6025\u6fc0\u306a\u6e29\u5ea6\u5909\u5316\uff08\u71b1\u885d\u6483\uff09\u306f\u3001\u7279\u306b\u8907\u96d1\u306a\u5f62\u72b6\u3084\u62d8\u675f\u3055\u308c\u305f\u90e8\u54c1\u3067\u3001\u7834\u58ca\u306b\u3064\u306a\u304c\u308b\u5fdc\u529b\u3092\u8a98\u767a\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002SiC\u30b0\u30ec\u30fc\u30c9\u306b\u3088\u3063\u3066\u3001\u8010\u71b1\u885d\u6483\u6027\u304c\u7570\u306a\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u7de9\u548c\u6226\u7565\uff1a<\/strong>\n<ul>\n<li>\u71b1\u4f1d\u5c0e\u7387\u304c\u9ad8\u304f\u3001\u71b1\u81a8\u5f35\u304c\u4f4e\u3044SiC\u30b0\u30ec\u30fc\u30c9\u3092\u9078\u629e\u3057\u307e\u3059\uff08\u4f8b\uff1aRBSiC\u306f\u3001\u71b1\u4f1d\u5c0e\u7387\u304c\u9ad8\u3044\u305f\u3081\u3001SSiC\u3088\u308a\u3082\u8010\u71b1\u885d\u6483\u6027\u304c\u512a\u308c\u3066\u3044\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\uff09\u3002<\/li>\n<li>\u71b1\u52fe\u914d\u3068\u62d8\u675f\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3088\u3046\u306b\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u8a2d\u8a08\u3057\u307e\u3059\u3002<\/li>\n<li>\u71b1\u5fdc\u529b\u3092\u4e88\u6e2c\u304a\u3088\u3073\u7ba1\u7406\u3059\u308b\u305f\u3081\u306b\u3001\u5fb9\u5e95\u7684\u306a\u71b1\u5206\u6790\uff08FEA\uff09\u3092\u5b9f\u884c\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<\/li>\n<li><strong>SiC\u3068\u4ed6\u306e\u6750\u6599\u3068\u306e\u63a5\u5408\uff1a<\/strong>\n<ul>\n<li><strong>\u30c1\u30e3\u30ec\u30f3\u30b8\u3060\uff1a<\/strong> SiC\u3092\u91d1\u5c5e\u307e\u305f\u306f\u4ed6\u306e\u30bb\u30e9\u30df\u30c3\u30af\u306b\u63a5\u5408\u3059\u308b\u3053\u3068\u306f\u3001\u71b1\u81a8\u5f35\u4fc2\u6570\uff08CTE\uff09\u306e\u4e0d\u4e00\u81f4\u306b\u3088\u308a\u56f0\u96e3\u306b\u306a\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001\u71b1\u30b5\u30a4\u30af\u30eb\u4e2d\u306b\u63a5\u5408\u90e8\u306b\u5fdc\u529b\u304c\u767a\u751f\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u7de9\u548c\u6226\u7565\uff1a<\/strong>\n<ul>\n<li>\u9069\u5408\u6027\u306e\u3042\u308b\u4e2d\u9593\u5c64\u307e\u305f\u306f\u52fe\u914d\u63a5\u5408\u3092\u4f7f\u7528\u3057\u307e\u3059\u3002<\/li>\n<li>CTE\u306e\u4e0d\u4e00\u81f4\u306b\u5bfe\u5fdc\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u305f\u3001\u6d3b\u6027\u91d1\u5c5e\u308d\u3046\u4ed8\u3051\u3001\u62e1\u6563\u63a5\u5408\u3001\u307e\u305f\u306f\u6a5f\u68b0\u7684\u7de0\u7d50\u306a\u3069\u306e\u7279\u6b8a\u306a\u63a5\u5408\u6280\u8853\u3092\u63a1\u7528\u3057\u307e\u3059\u3002<\/li>\n<li>\u63a5\u5408\u90e8\u306e\u5f62\u72b6\u3092\u614e\u91cd\u306b\u8a2d\u8a08\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u822a\u7a7a\u5b87\u5b99\u30dc\u30ea\u30e5\u30fc\u30e0\u306e\u8cbb\u7528\u5bfe\u52b9\u679c\u306e\u9ad8\u3044\u88fd\u9020\uff1a<\/strong>\n<ul>\n<li><strong>\u30c1\u30e3\u30ec\u30f3\u30b8\u3060\uff1a<\/strong> \u822a\u7a7a\u5b87\u5b99\u7528\u9014\u3067\u306f\u3001\u9ad8\u3044\u4fe1\u983c\u6027\u3068\u6027\u80fd\u304c\u6c42\u3081\u3089\u308c\u308b\u3053\u3068\u304c\u591a\u304f\u3042\u308a\u307e\u3059\u304c\u3001\u4ed6\u306e\u696d\u754c\u3088\u308a\u3082\u751f\u7523\u91cf\u304c\u5c11\u306a\u3044\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001 <strong>\u30ab\u30b9\u30bf\u30e0SiC\u90e8\u54c1\u306e\u751f\u7523<\/strong>.<\/li>\n<li><strong>\u7de9\u548c\u6226\u7565\uff1a<\/strong>\n<ul>\n<li>\u53ef\u80fd\u3067\u3042\u308c\u3070\u3001\u8a2d\u8a08\u3092\u6a19\u6e96\u5316\u3057\u307e\u3059\u3002<\/li>\n<li>\u53cd\u5fa9\u30bf\u30b9\u30af\u306e\u30d7\u30ed\u30bb\u30b9\u6700\u9069\u5316\u3068\u81ea\u52d5\u5316\u306b\u6295\u8cc7\u3057\u307e\u3059\u3002<\/li>\n<li>\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3068\u306e\u9577\u671f\u7684\u306a\u30d1\u30fc\u30c8\u30ca\u30fc\u30b7\u30c3\u30d7\u306f\u3001\u30b3\u30b9\u30c8\u306e\u5b89\u5b9a\u5316\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002<\/li>\n<li>SiC\u306e\u8010\u4e45\u6027\u306b\u3088\u308a\u521d\u671f\u6295\u8cc7\u3092\u76f8\u6bba\u3067\u304d\u308b\u305f\u3081\u3001\u7dcf\u30e9\u30a4\u30d5\u30b5\u30a4\u30af\u30eb\u30b3\u30b9\u30c8\u3092\u8003\u616e\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6750\u6599\u7279\u6027\u8a55\u4fa1\u3068\u8a8d\u5b9a\uff1a<\/strong>\n<ul>\n<li><strong>\u30c1\u30e3\u30ec\u30f3\u30b8\u3060\uff1a<\/strong> 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