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\u610f\u56f3\u3055\u308c\u305f\u7528\u9014\u3068\u305d\u308c\u306b\u7d9a\u304f\u51e6\u7406\u30b9\u30c6\u30c3\u30d7\u306b\u5b8c\u5168\u306b\u9069\u5408\u3059\u308b\u57fa\u677f\u304b\u3089\u59cb\u3081\u308b\u3053\u3068\u3067\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u30c7\u30d0\u30a4\u30b9\u306e\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a\u3055\u305b\u3001\u6700\u7d42\u88fd\u54c1\u306e\u5168\u4f53\u7684\u306a\u4fe1\u983c\u6027\u3068\u5bff\u547d\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002\u6b20\u9665\u5bc6\u5ea6\uff08\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u5bc6\u5ea6\u3001\u57fa\u5e95\u9762\u8ee2\u4f4d\u306a\u3069\uff09\u306e\u30ab\u30b9\u30bf\u30e0\u4ed5\u69d8\u304c\u3053\u3053\u3067\u91cd\u8981\u3067\u3059\u3002<\/li>\n<\/ul>\n<p>\u9ad8\u54c1\u8cea\u3092\u63d0\u4f9b\u3067\u304d\u308b\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3068\u306e\u63d0\u643a\u306f\u3001 <a href=\"https:\/\/sicarbtech.com\/ja\/customizing-support\/\">\u30ab\u30b9\u30bf\u30e0 SiC \u57fa\u677f<\/a> \u3057\u305f\u304c\u3063\u3066\u3001\u6280\u8853\u306e\u6700\u524d\u7dda\u3067\u4e8b\u696d\u3092\u5c55\u958b\u3059\u308b\u4f01\u696d\u306b\u3068\u3063\u3066\u6226\u7565\u7684\u306a\u5229\u70b9\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n<h2>4. \u57fa\u677f\u7528\u9014\u5411\u3051\u306eSiC\u30dd\u30ea\u30bf\u30a4\u30d7\u306e\u30ca\u30d3\u30b2\u30fc\u30c8\u3068\u30b0\u30ec\u30fc\u30c9<\/h2>\n<p>\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u3001\u30dd\u30ea\u30bf\u30a4\u30d7\u3068\u3057\u3066\u77e5\u3089\u308c\u308b\u591a\u304f\u306e\u7570\u306a\u308b\u7d50\u6676\u69cb\u9020\u3067\u5b58\u5728\u3067\u304d\u308b\u3068\u3044\u3046\u70b9\u3067\u30e6\u30cb\u30fc\u30af\u3067\u3059\u3002250\u3092\u8d85\u3048\u308bSiC\u30dd\u30ea\u30bf\u30a4\u30d7\u304c\u7279\u5b9a\u3055\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u7279\u5b9a\u306e\u96fb\u5b50\u7279\u6027\u3068\u7269\u7406\u7684\u7279\u6027\u306b\u3088\u308a\u3001\u57fa\u677f\u7528\u9014\u3068\u3057\u3066\u5546\u696d\u7684\u306b\u91cd\u8981\u306a\u3082\u306e\u306f\u308f\u305a\u304b\u3067\u3059\u3002\u3053\u308c\u3089\u306e\u30dd\u30ea\u30bf\u30a4\u30d7\u3068\u5229\u7528\u53ef\u80fd\u306a\u30b0\u30ec\u30fc\u30c9\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u306f\u3001\u7279\u5b9a\u306e\u30c7\u30d0\u30a4\u30b9\u306b\u9069\u3057\u305f\u57fa\u677f\u3092\u9078\u629e\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n<p>\u57fa\u677f\u306b\u4f7f\u7528\u3055\u308c\u308b\u6700\u3082\u4e00\u822c\u7684\u306aSiC\u30dd\u30ea\u30bf\u30a4\u30d7\u306f\u6b21\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/p>\n<ul>\n<li><strong>4H-SiC\uff08\u516d\u65b9\u6676SiC\uff09\uff1a<\/strong> \u3053\u308c\u306f\u73fe\u5728\u3001\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u30c7\u30d0\u30a4\u30b9\u306b\u6700\u3082\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u30dd\u30ea\u30bf\u30a4\u30d7\u3067\u3059\u3002\n<ul>\n<li><strong>\u30d7\u30ed\u30d1\u30c6\u30a3<\/strong> 6H-SiC\u3068\u6bd4\u8f03\u3057\u3066\u3001\u3088\u308a\u5e83\u3044\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\uff08\u301c3.26 eV\uff09\u3001\u3088\u308a\u9ad8\u3044\u96fb\u5b50\u79fb\u52d5\u5ea6\uff08\u7279\u306bc\u8ef8\u306b\u6cbf\u3063\u3066\uff09\u3001\u304a\u3088\u3073\u3088\u308a\u7b49\u65b9\u7684\u306a\u7279\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u30aa\u30f3\u62b5\u6297\u304c\u4f4e\u6e1b\u3055\u308c\u3001\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u5468\u6ce2\u6570\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/strong> \u4e3b\u306b\u9ad8\u96fb\u5727\u30d1\u30ef\u30fcMOSFET\u3001\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u30c0\u30a4\u30aa\u30fc\u30c9\u3001\u304a\u3088\u3073\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>6H-SiC\uff08\u516d\u65b9\u6676SiC\uff09\uff1a<\/strong> \u6b74\u53f2\u7684\u306b\u30016H-SiC\u306f\u7d50\u6676\u6210\u9577\u304c\u5bb9\u6613\u3067\u3042\u3063\u305f\u305f\u3081\u3088\u308a\u4e00\u822c\u7684\u3067\u3057\u305f\u304c\u30014H-SiC\u306f\u307b\u3068\u3093\u3069\u306e\u96fb\u529b\u7528\u9014\u3067\u305d\u308c\u306b\u53d6\u3063\u3066\u4ee3\u308f\u3063\u3066\u3044\u307e\u3059\u3002\n<ul>\n<li><strong>\u30d7\u30ed\u30d1\u30c6\u30a3<\/strong> 4H-SiC\u3068\u6bd4\u8f03\u3057\u3066\u3001\u308f\u305a\u304b\u306b\u5c0f\u3055\u3044\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\uff08\u301c3.03 eV\uff09\u3068\u4f4e\u3044\u96fb\u5b50\u79fb\u52d5\u5ea6\u304c\u3042\u308a\u307e\u3059\u3002\u305f\u3060\u3057\u3001\u975e\u5e38\u306b\u9ad8\u3044\u7d50\u6676\u6027\u3092\u793a\u3059\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/strong> \u4e00\u90e8\u306e\u9ad8\u5468\u6ce2RF\u30c7\u30d0\u30a4\u30b9\u3001\u7279\u5b9a\u306e\u30bf\u30a4\u30d7\u306eLED\u3001\u304a\u3088\u3073\u4e00\u90e8\u306e\u5834\u5408\u306b\u306fGaN\u3068\u306e\u683c\u5b50\u6574\u5408\u6027\u304c\u826f\u597d\u3067\u3042\u308b\u305f\u3081\u3001GaN\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u306e\u57fa\u677f\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u307e\u305f\u3001\u4e00\u90e8\u306e\u9ad8\u6e29\u30bb\u30f3\u30b5\u30fc\u3067\u3082\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u3053\u308c\u306f\u3001\u958b\u767a\u3055\u308c\u305f\u521d\u671f\u306e\u30dd\u30ea\u30bf\u30a4\u30d7\u306e1\u3064\u3067\u3057\u305f\u304c\u30014H-SiC\u306e\u3088\u308a\u512a\u308c\u305f\u96fb\u5b50\u79fb\u52d5\u5ea6\u3001\u7279\u306b\u5782\u76f4\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u306b\u3068\u3063\u3066\u91cd\u8981\u306a\u5e95\u9762\u306b\u5bfe\u3057\u3066\u5782\u76f4\u306a\u65b9\u5411\u306b\u304a\u3044\u3066\u3001\u307b\u3068\u3093\u3069\u306e\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30674H-SiC\u306b\u5927\u304d\u304f\u53d6\u3063\u3066\u4ee3\u308f\u3089\u308c\u307e\u3057\u305f\u3002<\/strong> 3C-SiC\uff08\u7acb\u65b9\u6676SiC\uff09\uff1a\n<ul>\n<li><strong>\u30d7\u30ed\u30d1\u30c6\u30a3<\/strong> \u307e\u305f\u3001\u03b2-SiC\u3068\u3057\u3066\u3082\u77e5\u3089\u308c\u3066\u304a\u308a\u3001\u3053\u306e\u30dd\u30ea\u30bf\u30a4\u30d7\u306f\u30014H\u307e\u305f\u306f6H\u3088\u308a\u3082\u5c0f\u3055\u3044\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\uff08\u301c2.36 eV\uff09\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u304c\u3001\u6f5c\u5728\u7684\u306b\u9ad8\u3044\u96fb\u5b50\u79fb\u52d5\u5ea6\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002<\/li>\n<li><strong>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/strong> \u7b49\u65b9\u6027\u7279\u6027\u3002\u4e3b\u306a\u8ab2\u984c\u306f\u3001\u9ad8\u54c1\u8cea\u306e\u5927\u53e3\u5f843C-SiC\u7d50\u6676\u3092\u76f4\u63a5\u6210\u9577\u3055\u305b\u308b\u3053\u3068\u3067\u3057\u305f\u3002\u591a\u304f\u306e\u5834\u5408\u3001\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306b\u30d8\u30c6\u30ed\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u306b\u6210\u9577\u3057\u3001\u5fdc\u529b\u3068\u6b20\u9665\u304c\u767a\u751f\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>MEMS\u3001\u30bb\u30f3\u30b5\u30fc\u3001\u304a\u3088\u3073\u7d50\u6676\u6027\u306e\u554f\u984c\u304c\u514b\u670d\u3067\u304d\u308c\u3070\u3001\u6f5c\u5728\u7684\u306b\u4e00\u90e8\u306eMOSFET\u306a\u3069\u306e\u7279\u5b9a\u306e\u7528\u9014\u306b\u5bfe\u3059\u308b\u7814\u7a76\u95a2\u5fc3\u3002\u4e3b\u6d41\u306e\u96fb\u529b\u30c7\u30d0\u30a4\u30b9\u3067\u306f\u305d\u308c\u307b\u3069\u4e00\u822c\u7684\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/p>\n<p><strong>\u30dd\u30ea\u30bf\u30a4\u30d7\u306b\u52a0\u3048\u3066\u3001SiC\u57fa\u677f\u306f\u3001\u96fb\u6c17\u4f1d\u5c0e\u7387\u3068\u54c1\u8cea\u306b\u57fa\u3065\u3044\u3066\u3055\u307e\u3056\u307e\u306a\u30b0\u30ec\u30fc\u30c9\u3067\u5229\u7528\u3067\u304d\u307e\u3059\u3002<\/strong><\/p>\n<table>\n<thead>\n<tr>\n<th>\u88681\uff1a\u4e00\u822c\u7684\u306aSiC\u57fa\u677f\u30b0\u30ec\u30fc\u30c9\u3068\u305d\u306e\u7279\u6027<\/th>\n<th>\u30b0\u30ec\u30fc\u30c9<\/th>\n<th>\u5178\u578b\u7684\u306a\u30c9\u30fc\u30d1\u30f3\u30c8<\/th>\n<th>\u4e3b\u306a\u7279\u5fb4<\/th>\n<th>\u4e3b\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>\u62b5\u6297\u7bc4\u56f2\uff08\u03a9\u00b7cm\uff09<\/strong><\/td>\n<td>N\u578b\uff08\u5c0e\u96fb\u6027\uff09<\/td>\n<td>\u7a92\u7d20\uff08N\uff09<\/td>\n<td>0.015\u301c0.028\uff084H-SiC\u306e\u5834\u5408\uff09<\/td>\n<td>\u4f4e\u62b5\u6297\u3067\u3001\u30c7\u30d0\u30a4\u30b9\u5185\u306e\u5782\u76f4\u96fb\u6d41\u306e\u6d41\u308c\u306b\u5bfe\u3059\u308b\u5c0e\u96fb\u30d1\u30b9\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002\u30aa\u30fc\u30e0\u63a5\u89e6\u306e\u5f62\u6210\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u30d1\u30ef\u30fcMOSFET\u3001\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u30d0\u30ea\u30a2\u30c0\u30a4\u30aa\u30fc\u30c9\uff08SBD\uff09\u3001IGBT\uff08SiC\u3067\u306f\u3042\u307e\u308a\u4e00\u822c\u7684\u3067\u306f\u3042\u308a\u307e\u305b\u3093\uff09\u3001LED\u3002<\/strong><\/td>\n<td>\u534a\u7d76\u7e01\u6027\uff08SI\uff09<\/td>\n<td>\u30d0\u30ca\u30b8\u30a6\u30e0\uff08V\uff09\u30c9\u30fc\u30d4\u30f3\u30b0\u307e\u305f\u306f\u672c\u8cea\u7684\uff08\u9ad8\u7d14\u5ea6\u534a\u7d76\u7e01\u6027\u2013 HPSI\uff09<sup>5<\/sup> &gt; 10<sup>9<\/sup> \uff08\u591a\u304f\u306e\u5834\u5408\u3001HPSI\u306e\u5834\u5408\u306f&gt; 10<\/td>\n<td>\u9ad8\u62b5\u6297\u3067\u3001RF\u640d\u5931\u3068\u57fa\u677f\u5bc4\u751f\u5bb9\u91cf\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u307e\u3059\u3002\u96fb\u6c17\u7684\u7d76\u7e01\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002<\/td>\n<td>RF\u30d1\u30ef\u30fc\u30a2\u30f3\u30d7\uff085G\u57fa\u5730\u5c40\u306a\u3069\uff09\u3001MESFET\u3001\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9\u3001\u4e00\u90e8\u306e\u30bb\u30f3\u30b5\u30fc\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3002\u30d0\u30ca\u30b8\u30a6\u30e0\u95a2\u9023\u306e\u30c8\u30e9\u30c3\u30d4\u30f3\u30b0\u52b9\u679c\u3092\u4f4e\u6e1b\u3059\u308b\u305f\u3081\u306b\u3001HPSI\u30b0\u30ec\u30fc\u30c9\u304c\u63a8\u5968\u3055\u308c\u307e\u3059\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>P\u578b\uff08\u5c0e\u96fb\u6027\uff09<\/strong><\/td>\n<td>\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\uff08Al\uff09\u307e\u305f\u306f\u30db\u30a6\u7d20\uff08B\uff09<\/td>\n<td>\u30c9\u30fc\u30d4\u30f3\u30b0\u30ec\u30d9\u30eb\u304c\u540c\u69d8\u306e\u5834\u5408\u3001\u6b63\u5b54\u79fb\u52d5\u5ea6\u304c\u4f4e\u3044\u305f\u3081\u3001\u901a\u5e38\u306fN\u578b\u3088\u308a\u3082\u7570\u306a\u308a\u307e\u3059\u3002<\/td>\n<td>\u5927\u591a\u6570\u30ad\u30e3\u30ea\u30a2\u30c7\u30d0\u30a4\u30b9\u306e\u57fa\u677f\u3068\u3057\u3066\u306f\u3042\u307e\u308a\u4e00\u822c\u7684\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u304c\u3001\u7279\u5b9a\u306e\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u307e\u305f\u306f\u7279\u5b9a\u306e\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u30d7\u30ed\u30bb\u30b9\u306e\u51fa\u767a\u6750\u6599\u3068\u3057\u3066\u4f7f\u7528\u3067\u304d\u307e\u3059\u3002<\/td>\n<td>\u4e00\u90e8\u306e\u30d0\u30a4\u30dd\u30fc\u30e9\u30c7\u30d0\u30a4\u30b9\uff08BJT\uff09\u3001\u7279\u5b9a\u306e\u30bb\u30f3\u30b5\u30fc\u8a2d\u8a08\u3001\u7814\u7a76\u76ee\u7684\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u30dd\u30ea\u30bf\u30a4\u30d7\u3068\u30b0\u30ec\u30fc\u30c9\u306e\u9078\u629e\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u8a2d\u8a08\u306b\u304a\u3051\u308b\u57fa\u672c\u7684\u306a\u6c7a\u5b9a\u3067\u3059\u3002\u305f\u3068\u3048\u3070\u3001\u9ad8\u96fb\u529b\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u7528\u9014\u3067\u306f\u3001\u307b\u307c\u4f8b\u5916\u306a\u304fN\u578b4H-SiC\u57fa\u677f\u304c\u4f7f\u7528\u3055\u308c\u3001\u9ad8\u5468\u6ce2RF\u7528\u9014\u3067\u306f\u3001\u534a\u7d76\u7e01\u6027\uff08\u591a\u304f\u306e\u5834\u5408HPSI 4H-SiC\u307e\u305f\u306f\u9ad8\u54c1\u8cea6H-SiC\uff09\u57fa\u677f\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u6b20\u9665\u5bc6\u5ea6\uff08\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u3001\u8ee2\u4f4d\u3001\u7a4d\u5c64\u6b20\u9665\uff09\u306f\u3001\u9ad8\u6b69\u7559\u307e\u308a\u3001\u9ad8\u6027\u80fd\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u4e0d\u53ef\u6b20\u306a\u3001\u3082\u30461\u3064\u306e\u91cd\u8981\u306a\u30b0\u30ec\u30fc\u30c7\u30a3\u30f3\u30b0\u30d1\u30e9\u30e1\u30fc\u30bf\u3067\u3059\u3002<\/p>\n<h2>5. \u6700\u9069\u306aSiC\u57fa\u677f\u6027\u80fd\u306e\u305f\u3081\u306e\u91cd\u8981\u306a\u8a2d\u8a08\u4e0a\u306e\u8003\u616e\u4e8b\u9805<\/h2>\n<p>\u9069\u5207\u306aSiC\u57fa\u677f\u306e\u8a2d\u8a08\u307e\u305f\u306f\u9078\u629e\u306b\u306f\u3001\u305d\u306e\u5f8c\u306e\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3068\u6700\u7d42\u7684\u306a\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u3044\u304f\u3064\u304b\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u614e\u91cd\u306b\u691c\u8a0e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u8003\u616e\u4e8b\u9805\u306f\u3001\u30dd\u30ea\u30bf\u30a4\u30d7\u3068\u30b0\u30ec\u30fc\u30c9\u3092\u9078\u629e\u3059\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u7269\u7406\u7684\u304a\u3088\u3073\u7d50\u6676\u5b66\u7684\u8a73\u7d30\u306b\u307e\u3067\u53ca\u3073\u307e\u3059\u3002<\/p>\n<ul>\n<li><strong>\u7d50\u6676\u65b9\u4f4d\u3068\u30aa\u30d5\u30ab\u30c3\u30c8\u89d2\uff1a<\/strong>\n<ul>\n<li>SiC\u57fa\u677f\u306f\u901a\u5e38\u3001\u4e3b\u7d50\u6676\u9762\uff08\uff080001\uff09\u57fa\u5e95\u9762\u306a\u3069\uff09\u304b\u3089\u6570\u5ea6\u30aa\u30d5\u8ef8\u3067\u8868\u9762\u304c\u30ab\u30c3\u30c8\u3055\u308c\u305f\u72b6\u614b\u3067\u4f9b\u7d66\u3055\u308c\u307e\u3059\u30024H-SiC\u306e\u5834\u5408\u3001\u4e00\u822c\u7684\u306a\u30aa\u30d5\u30ab\u30c3\u30c8\u89d2\u5ea6\u306f\u3001&lt;11-20&gt;\u65b9\u5411\u306b\u5411\u304b\u3063\u30664\u00b0\u307e\u305f\u306f8\u00b0\u3067\u3059\u3002<\/li>\n<li><strong>\u91cd\u8981\u3060\uff1a<\/strong> \u3053\u306e\u610f\u56f3\u7684\u306a\u30df\u30b9\u30aa\u30ea\u30a8\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3\u306f\u3001\u9ad8\u54c1\u8cea\u306e\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3001\u7279\u306b\u30b9\u30c6\u30c3\u30d7\u30d5\u30ed\u30fc\u6210\u9577\u30e2\u30fc\u30c9\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308a\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u306b\u304a\u3051\u308b\u7279\u5b9a\u306e\u30bf\u30a4\u30d7\u306e\u7d50\u6676\u6b20\u9665\uff083C\u30a4\u30f3\u30af\u30eb\u30fc\u30b8\u30e7\u30f3\u306a\u3069\uff09\u306e\u5f62\u6210\u3092\u6291\u5236\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002\u30aa\u30d5\u30ab\u30c3\u30c8\u89d2\u5ea6\u3068\u65b9\u5411\u306e\u9078\u629e\u306f\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u306e\u7d44\u307f\u8fbc\u307f\u3001\u8868\u9762\u5f62\u614b\u3001\u304a\u3088\u3073\u6b20\u9665\u306e\u4f1d\u64ad\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u76f4\u5f84\u3068\u539a\u3055\uff1a<\/strong>\n<ul>\n<li><strong>\u76f4\u5f84\uff1a<\/strong> \u4e00\u822c\u7684\u306a\u76f4\u5f84\u306b\u306f\u3001100mm\uff084\u30a4\u30f3\u30c1\uff09\u3001150mm\uff086\u30a4\u30f3\u30c1\uff09\u304c\u3042\u308a\u3001\u30c0\u30a4\u3042\u305f\u308a\u306e\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u305f\u3081\u306b200mm\uff088\u30a4\u30f3\u30c1\uff09\u3078\u306e\u79fb\u884c\u304c\u9032\u3093\u3067\u3044\u307e\u3059\u3002\u9078\u629e\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u30d5\u30a1\u30a6\u30f3\u30c9\u30ea\u306e\u51e6\u7406\u80fd\u529b\u3068\u751f\u7523\u91cf\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u539a\u3055\uff1a<\/strong> \u57fa\u677f\u306e\u539a\u3055\u306f\u3001\u51e6\u7406\u3068\u53d6\u308a\u6271\u3044\u4e2d\u306b\u6a5f\u68b0\u7684\u30b5\u30dd\u30fc\u30c8\u3092\u63d0\u4f9b\u3059\u308b\u306e\u306b\u5341\u5206\u3067\u3042\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u304c\u3001\u4e0d\u5fc5\u8981\u306b\u6750\u6599\u30b3\u30b9\u30c8\u3092\u5897\u52a0\u3055\u305b\u305f\u308a\u3001\u5c0e\u96fb\u6027\u57fa\u677f\u306e\u5834\u5408\u306f\u76f4\u5217\u62b5\u6297\u3092\u5897\u52a0\u3055\u305b\u305f\u308a\u3059\u308b\u307b\u3069\u539a\u304f\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u4e00\u822c\u7684\u306a\u539a\u3055\u306f\u3001100mm\u304a\u3088\u3073150mm\u30a6\u30a7\u30fc\u30cf\u3067350\u00b5m\u301c500\u00b5m\u3067\u3059\u3002\u30ab\u30b9\u30bf\u30e0\u306e\u539a\u3055\u304c\u5fc5\u8981\u306b\u306a\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u8868\u9762\u54c1\u8cea\u3068\u6e96\u5099\uff1a<\/strong>\n<ul>\n<li><strong>\u30a8\u30d4\u5bfe\u5fdc\uff1a<\/strong> \u57fa\u677f\u8868\u9762\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u3092\u6210\u529f\u3055\u305b\u308b\u305f\u3081\u306b\u3001\u975e\u5e38\u306b\u6ed1\u3089\u304b\u3067\u3001\u5730\u4e0b\u306e\u640d\u50b7\u3001\u6c5a\u67d3\u7269\u8cea\u3001\u304a\u3088\u3073\u7c92\u5b50\u304c\u306a\u3044\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u306f\u901a\u5e38\u3001\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff08CMP\uff09\u306b\u3088\u3063\u3066\u5b9f\u73fe\u3055\u308c\u307e\u3059\u3002\u300c\u30a8\u30d4\u5bfe\u5fdc\u300d\u8868\u9762\u304c\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/li>\n<li><strong>\u8868\u9762\u7c97\u3055\uff08Ra\uff09\uff1a<\/strong> \u901a\u5e38\u3001\u30aa\u30f3\u30b0\u30b9\u30c8\u30ed\u30fc\u30e0\u7bc4\u56f2\uff08Ra &lt; 0.5 nm\u307e\u305f\u306f&lt; 0.2 nm\u306a\u3069\uff09\u3067\u6307\u5b9a\u3055\u308c\u307e\u3059\u3002<\/li>\n<li><strong>\u50b7\u3001\u6c5a\u308c\u3001\u7c92\u5b50\uff1a<\/strong> \u76ee\u306b\u898b\u3048\u308b\u8868\u9762\u6b20\u9665\u306e\u5b58\u5728\u306b\u306f\u3001\u53b3\u683c\u306a\u5236\u9650\u304c\u8a2d\u3051\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6b20\u9665\u5bc6\u5ea6\uff1a<\/strong> \u3053\u308c\u306f\u6700\u3082\u91cd\u8981\u306a\u30d1\u30e9\u30e1\u30fc\u30bf\u306e1\u3064\u3067\u3059\u3002\n<ul>\n<li><strong>\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u5bc6\u5ea6\uff08MPD\uff09\uff1a<\/strong> \u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u306f\u3001\u57fa\u677f\u304b\u3089\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u306b\u4f1d\u64ad\u3059\u308b\u4e2d\u7a7a\u30b3\u30a2\u306e\u306d\u3058\u308c\u8ee2\u4f4d\u3067\u3042\u308a\u3001\u307b\u3068\u3093\u3069\u306e\u30c7\u30d0\u30a4\u30b9\u306b\u3068\u3063\u3066\u81f4\u547d\u7684\u306a\u6b20\u9665\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002MPD\u306f\u901a\u5e38\u3001\u30d7\u30e9\u30a4\u30e0\u30b0\u30ec\u30fc\u30c9\u306e\u5834\u5408&lt; 1 cm<sup>-2<\/sup> \u3067\u6307\u5b9a\u3055\u308c\u3001\u9032\u6b69\u306b\u3088\u308a\u30bc\u30ed\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u30a6\u30a7\u30fc\u30cf\u304c\u76ee\u6307\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n<li><strong>\u57fa\u5e95\u9762\u8ee2\u4f4d\uff08BPD\uff09\u5bc6\u5ea6\uff1a<\/strong> \u57fa\u677f\u5185\u306eBPD\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u306b\u7a4d\u5c64\u6b20\u9665\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001\u30d0\u30a4\u30dd\u30fc\u30e9\u30c7\u30d0\u30a4\u30b9\u306e\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u3092\u4f4e\u4e0b\u3055\u305b\u3001PiN\u30c0\u30a4\u30aa\u30fc\u30c9\u306bV<sub>f<\/sub> \u30c9\u30ea\u30d5\u30c8\u3092\u5f15\u304d\u8d77\u3053\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u30b9\u30ec\u30c3\u30c7\u30a3\u30f3\u30b0\u30b9\u30af\u30ea\u30e5\u30fc\u8ee2\u4f4d\uff08TSD\uff09\u304a\u3088\u3073\u30b9\u30ec\u30c3\u30c7\u30a3\u30f3\u30b0\u30a8\u30c3\u30b8\u8ee2\u4f4d\uff08TED\uff09\uff1a<\/strong> \u3053\u308c\u3089\u3082\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u3068\u4fe1\u983c\u6027\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002<\/li>\n<li>\u4f4e\u3044\u6b20\u9665\u5bc6\u5ea6\u306f\u3001\u7279\u306b\u5927\u9762\u7a4d\u30c7\u30d0\u30a4\u30b9\u306e\u5834\u5408\u3001\u9ad8\u3044\u30c7\u30d0\u30a4\u30b9\u6b69\u7559\u307e\u308a\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u62b5\u6297\u7387\u306e\u5747\u4e00\u6027\uff1a<\/strong> \u5c0e\u96fb\u6027\u57fa\u677f\u306e\u5834\u5408\u3001\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306b\u308f\u305f\u308b\u5747\u4e00\u306a\u62b5\u6297\u7387\u304c\u3001\u4e00\u8cab\u3057\u305f\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u306b\u3068\u3063\u3066\u91cd\u8981\u3067\u3059\u3002\u534a\u7d76\u7e01\u6027\u57fa\u677f\u306e\u5834\u5408\u3001\u9ad8\u3044\u62b5\u6297\u7387\u3092\u5747\u4e00\u306b\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3059\u3002<\/li>\n<li><strong>\u5f13\u3068\u53cd\u308a:<\/strong> \u3053\u308c\u3089\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u306f\u3001\u7406\u60f3\u7684\u306a\u5e73\u9762\u304b\u3089\u306e\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306e\u305a\u308c\u3092\u8868\u3057\u3066\u3044\u307e\u3059\u3002\u904e\u5ea6\u306e\u53cd\u308a\u3084\u30ef\u30fc\u30d7\u306f\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u3001\u304a\u3088\u3073\u305d\u306e\u4ed6\u306e\u51e6\u7406\u30b9\u30c6\u30c3\u30d7\u3067\u554f\u984c\u3092\u5f15\u304d\u8d77\u3053\u3059\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u4ed5\u69d8\u306f\u901a\u5e38\u3001\u76f4\u5f84\u306b\u5fdc\u3058\u3066\u3001\u53cd\u308a\u3092&lt; 30\u301c50 \u00b5m\u3001\u30ef\u30fc\u30d7\u3092&lt; 50\u301c70 \u00b5m\u306b\u5236\u9650\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u5168\u539a\u3055\u5909\u52d5\uff08TTV\uff09\uff1a<\/strong> \u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306b\u308f\u305f\u308b\u6700\u5927\u539a\u3055\u3068\u6700\u5c0f\u539a\u3055\u306e\u5dee\u3002\u53b3\u5bc6\u306aTTV\u5236\u5fa1\u306f\u3001\u5747\u4e00\u306a\u51e6\u7406\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/li>\n<li><strong>\u30a8\u30c3\u30b8\u9664\u5916\uff1a<\/strong> \u30a6\u30a7\u30fc\u30cf\u306e\u5468\u56f2\u306e\u6307\u5b9a\u3055\u308c\u305f\u9818\u57df\uff083\u301c5mm\u306a\u3069\uff09\u3067\u3001\u3059\u3079\u3066\u306e\u30d7\u30e9\u30a4\u30e0\u54c1\u8cea\u306e\u4ed5\u69d8\u3092\u6e80\u305f\u3057\u3066\u3044\u306a\u3044\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u9818\u57df\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3053\u3068\u3067\u3001\u30a6\u30a7\u30fc\u30cf\u3042\u305f\u308a\u306e\u4f7f\u7528\u53ef\u80fd\u306a\u30c0\u30a4\u3092\u6700\u5927\u5316\u3067\u304d\u307e\u3059\u3002<\/li>\n<li><strong>\u8b58\u5225\u30de\u30fc\u30af\uff1a<\/strong> \u30a6\u30a7\u30fc\u30cf\u306e\u30c8\u30ec\u30fc\u30b5\u30d3\u30ea\u30c6\u30a3\u306b\u306f\u3001\u30ec\u30fc\u30b6\u30fc\u523b\u5370\u3055\u308c\u305f\u8b58\u5225\u30de\u30fc\u30af\uff08SEMI\u898f\u683c\uff09\u304c\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u30de\u30fc\u30af\u306e\u54c1\u8cea\u3068\u914d\u7f6e\u304c\u91cd\u8981\u3067\u3059\u3002<\/li>\n<\/ul>\n<p>\u3053\u308c\u3089\u306e\u8a2d\u8a08\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u3001\u77e5\u8b58\u8c4a\u5bcc\u306aSiC\u57fa\u677f\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3068\u76f8\u8ac7\u3057\u3066\u614e\u91cd\u306b\u6307\u5b9a\u3059\u308b\u3053\u3068\u306f\u3001\u57fa\u677f\u304c\u610f\u56f3\u3055\u308c\u305f\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u3068\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u6700\u9069\u5316\u3055\u308c\u3001\u6700\u7d42\u7684\u306b\u9ad8\u6027\u80fd\u3067\u3088\u308a\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u6700\u7d42\u88fd\u54c1\u306b\u3064\u306a\u304c\u308b\u3053\u3068\u3092\u4fdd\u8a3c\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n<h2>6. \u7cbe\u5ea6\u306e\u5b9f\u73fe\uff1aSiC\u57fa\u677f\u306b\u304a\u3051\u308b\u516c\u5dee\u3001\u8868\u9762\u4ed5\u4e0a\u3052\u3001\u304a\u3088\u3073\u5bf8\u6cd5\u7cbe\u5ea6<\/h2>\n<p>\u751f\u306eSiC\u30a4\u30f3\u30b4\u30c3\u30c8\u304b\u3089\u9ad8\u6027\u80fd\u57fa\u677f\u3078\u306e\u9053\u306e\u308a\u306b\u306f\u3001\u4e00\u9023\u306e\u8907\u96d1\u306a\u6210\u5f62\u3001\u6a5f\u68b0\u52a0\u5de5\u3001\u304a\u3088\u3073\u4ed5\u4e0a\u3052\u30d7\u30ed\u30bb\u30b9\u304c\u542b\u307e\u308c\u307e\u3059\u3002\u53b3\u683c\u306a\u516c\u5dee\u3001\u5b8c\u74a7\u306a\u8868\u9762\u4ed5\u4e0a\u3052\u3001\u304a\u3088\u3073\u6b63\u78ba\u306a\u5bf8\u6cd5\u7cbe\u5ea6\u306e\u5b9f\u73fe\u306f\u3001\u9ad8\u5ea6\u306a\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u3092\u6210\u529f\u3055\u305b\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002\u3053\u308c\u3089\u306e\u8981\u56e0\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u306e\u54c1\u8cea\u3001\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306e\u89e3\u50cf\u5ea6\u3001\u304a\u3088\u3073\u30c7\u30d0\u30a4\u30b9\u5168\u4f53\u306e\u6b69\u7559\u307e\u308a\u306b\u76f4\u63a5\u5f71\u97ff\u3057\u307e\u3059\u3002<\/p>\n<p><strong>\u4e3b\u8981\u30d1\u30e9\u30e1\u30fc\u30bf\u3068\u9054\u6210\u53ef\u80fd\u306a\u4ed5\u69d8\uff1a<\/strong><\/p>\n<ul>\n<li><strong>\u76f4\u5f84\u516c\u5dee\uff1a<\/strong>\n<ul>\n<li>\u30a6\u30a7\u30fc\u30cf\u304c\u51e6\u7406\u88c5\u7f6e\u306b\u6b63\u3057\u304f\u9069\u5408\u3059\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059\u3002<\/li>\n<li>\u5178\u578b\u7684\u306a\u516c\u5dee\uff1a\u516c\u79f0\u76f4\u5f84\u306e\u00b10.1mm\u301c\u00b10.2mm\uff08100mm\u3001150mm\u306a\u3069\uff09\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u539a\u3055\u516c\u5dee\uff1a<\/strong>\n<ul>\n<li>\u4e00\u8cab\u3057\u305f\u71b1\u7684\u304a\u3088\u3073\u96fb\u6c17\u7684\u7279\u6027\u3001\u304a\u3088\u3073\u6a5f\u68b0\u7684\u53d6\u308a\u6271\u3044\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/li>\n<li>\u5178\u578b\u7684\u306a\u516c\u5dee\uff1a\u516c\u79f0\u539a\u3055\u306e\u00b110\u00b5m\u301c\u00b125\u00b5m\uff08350\u00b5m\u3001500\u00b5m\u306a\u3069\uff09\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u5168\u539a\u3055\u5909\u52d5\uff08TTV\uff09\uff1a<\/strong>\n<ul>\n<li>\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306e\u539a\u3055\u306e\u5747\u4e00\u6027\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002\u5747\u4e00\u306a\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3068\u5e73\u5766\u5316\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/li>\n<li>\u9054\u6210\u53ef\u80fd\u306a\u5024\uff1a&lt; 10\u00b5m\u3001\u30d7\u30ec\u30df\u30a2\u30e0\u30b0\u30ec\u30fc\u30c9\u306f&lt; 5\u00b5m\u3092\u76ee\u6307\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u305d\u308a\uff1a<\/strong>\n<ul>\n<li>\u30af\u30e9\u30f3\u30d7\u3055\u308c\u3066\u3044\u306a\u3044\u30a6\u30a7\u30fc\u30cf\u306e\u30e1\u30b8\u30a2\u30f3\u8868\u9762\u306e\u51f9\u9762\u307e\u305f\u306f\u51f8\u9762\u3002\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306e\u7126\u70b9\u306b\u5f71\u97ff\u3057\u307e\u3059\u3002<\/li>\n<li>\u9054\u6210\u53ef\u80fd\u306a\u5024\uff1a\u901a\u5e38&lt; 30\u00b5m\u3067\u3001\u3088\u308a\u5927\u304d\u306a\u76f4\u5f84\u307e\u305f\u306f\u8981\u6c42\u306e\u53b3\u3057\u3044\u7528\u9014\u3067\u306f\u3088\u308a\u53b3\u3057\u3044\u4ed5\u69d8\u304c\u9069\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u53cd\u308a\uff1a<\/strong>\n<ul>\n<li>\u30e1\u30b8\u30a2\u30f3\u8868\u9762\u3068\u57fa\u6e96\u9762\u3068\u306e\u9593\u306e\u6700\u5927\u8ddd\u96e2\u3068\u6700\u5c0f\u8ddd\u96e2\u306e\u5dee\u3002\u30a6\u30a7\u30fc\u30cf\u5168\u4f53\u306e\u5e73\u5766\u5ea6\u3092\u793a\u3057\u307e\u3059\u3002\u30c1\u30e3\u30c3\u30ad\u30f3\u30b0\u3068\u53d6\u308a\u6271\u3044\u306b\u5f71\u97ff\u3057\u307e\u3059\u3002<\/li>\n<li>\u9054\u6210\u53ef\u80fd\u306a\u5024\uff1a\u901a\u5e38&lt; 40\u00b5m\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u8868\u9762\u7c97\u3055\uff08Ra\u3001Rms\u3001Rq\u306a\u3069\uff09\uff1a<\/strong>\n<ul>\n<li><strong>Si\u9762<\/strong> \u3053\u308c\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306e\u305f\u3081\u306e\u91cd\u8981\u306a\u8868\u9762\u3067\u3059\u3002\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u6ed1\u3067\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\n<ul>\n<li>\u9054\u6210\u53ef\u80fd\u306aRa\uff1a&lt; 0.5 nm\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff08CMP\uff09\u5f8c&lt; 0.2 nm\u3002\u4e00\u90e8\u306e\u4ed5\u69d8\u3067\u306f\u3001&lt; 0.1 nm\u304c\u6c42\u3081\u3089\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>C\u9762\uff08\u88cf\u9762\uff09\uff1a<\/strong> \u901a\u5e38\u306f\u7814\u524a\u307e\u305f\u306f\u30e9\u30c3\u30d4\u30f3\u30b0\u3055\u308c\u3001\u7528\u9014\u306b\u5fdc\u3058\u3066\u7814\u78e8\u3055\u308c\u308b\u5834\u5408\u3082\u3042\u308a\u307e\u3059\uff08\u4f8b\uff1a\u4e21\u9762\u7814\u78e8\u30a6\u30a7\u30fc\u30cf\u307e\u305f\u306f\u7279\u5b9a\u306e\u71b1\u63a5\u89e6\u8981\u4ef6\u306e\u5834\u5408\uff09\u3002\u7c97\u3055\u306f\u4e00\u822c\u7684\u306bSi\u9762\u3088\u308a\u3082\u9ad8\u304f\u306a\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u30a8\u30c3\u30b8\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u3068\u30c1\u30c3\u30d4\u30f3\u30b0\uff1a<\/strong>\n<ul>\n<li>\u30a6\u30a7\u30fc\u30cf\u306f\u901a\u5e38\u3001\u53d6\u308a\u6271\u3044\u304a\u3088\u3073\u51e6\u7406\u4e2d\u306e\u30c1\u30c3\u30d4\u30f3\u30b0\u3092\u9632\u3050\u305f\u3081\u306b\u3001\u4e38\u307f\u3092\u5e2f\u3073\u305f\u30a8\u30c3\u30b8\u307e\u305f\u306f\u9762\u53d6\u308a\u3055\u308c\u305f\u30a8\u30c3\u30b8\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u3002\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u306f\u4e00\u8cab\u3057\u3066\u3044\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li>\u30a8\u30c3\u30b8\u30c1\u30c3\u30d7\u306e\u30b5\u30a4\u30ba\u3068\u6570\u306b\u5bfe\u3059\u308b\u53b3\u683c\u306a\u5236\u9650\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u914d\u5411\u30d5\u30e9\u30c3\u30c8\u307e\u305f\u306f\u30ce\u30c3\u30c1\u7cbe\u5ea6\uff1a<\/strong>\n<ul>\n<li>\u30d5\u30e9\u30c3\u30c8\uff08\u5c0f\u5f84\u7528\uff09\u307e\u305f\u306f\u30ce\u30c3\u30c1\uff08\u5927\u5f84\u7528\u3001\u4f8b\uff1aSEMI\u898f\u683c\uff09\u306f\u3001\u51e6\u7406\u88c5\u7f6e\u5185\u3067\u30a6\u30a7\u30fc\u30cf\u3092\u914d\u5411\u3055\u305b\u3001\u7d50\u6676\u5b66\u7684\u914d\u5411\u3092\u793a\u3059\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<li>\u3053\u308c\u3089\u306e\u7279\u5fb4\u306e\u9577\u3055\u3068\u89d2\u5ea6\u516c\u5dee\u306f\u91cd\u8981\u3067\u3059\u3002\u305f\u3068\u3048\u3070\u3001\u30d5\u30e9\u30c3\u30c8\u306e\u9577\u3055\u516c\u5dee\u306f\u00b11mm\u3001\u89d2\u5ea6\u914d\u5411\u516c\u5dee\u306f\u00b10.5\u00b0\u3067\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u30b5\u30a4\u30c8\u5e73\u5766\u5ea6\uff08\u4f8b\uff1aSTIR \u2013 \u30b5\u30a4\u30c8\u5168\u30a4\u30f3\u30b8\u30b1\u30fc\u30bf\u8aad\u53d6\u308a\uff09\uff1a<\/strong>\n<ul>\n<li>\u500b\u3005\u306e\u30c0\u30a4\u304c\u88fd\u9020\u3055\u308c\u308b\u5c40\u6240\u9818\u57df\uff08\u30b5\u30a4\u30c8\uff09\u5168\u4f53\u306e\u5e73\u5766\u5ea6\u3092\u6e2c\u5b9a\u3057\u307e\u3059\u3002\u5fae\u7d30\u7dda\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u3068\u3063\u3066\u975e\u5e38\u306b\u91cd\u8981\u3067\u3059\u3002<\/li>\n<li>\u9054\u6210\u53ef\u80fd\u306a\u5024\u306f\u30b5\u30a4\u30c8\u30b5\u30a4\u30ba\u306b\u4f9d\u5b58\u3057\u307e\u3059\u304c\u3001\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u8868\u9762\u6b20\u9665\uff1a<\/strong>\n<ul>\n<li>\u4ed5\u69d8\u3067\u306f\u3001\u7814\u78e8\u3055\u308c\u305f\u8868\u9762\u306e\u50b7\u3001\u30d4\u30c3\u30c8\u3001\u6c5a\u308c\u3001\u7c92\u5b50\u3001\u304a\u3088\u3073\u305d\u306e\u4ed6\u306e\u8996\u899a\u7684\u6b20\u9665\u306e\u6570\u3068\u30b5\u30a4\u30ba\u304c\u5236\u9650\u3055\u308c\u307e\u3059\u3002\u81ea\u52d5\u691c\u67fb\u30b7\u30b9\u30c6\u30e0\u304c\u5b9a\u91cf\u5316\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<li>\u7814\u524a\u304a\u3088\u3073\u30e9\u30c3\u30d4\u30f3\u30b0\u306b\u3088\u308b\u8868\u9762\u4e0b\u306e\u640d\u50b7\u306f\u3001CMP\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u3063\u3066\u5b8c\u5168\u306b\u9664\u53bb\u3055\u308c\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p><strong>\u88682\uff1a\u30d7\u30e9\u30a4\u30e0SiC\u57fa\u677f\u306e\u4ee3\u8868\u7684\u306a\u5bf8\u6cd5\u304a\u3088\u3073\u8868\u9762\u4ed5\u4e0a\u3052\u4ed5\u69d8<\/strong><\/p>\n<table>\n<thead>\n<tr>\n<th>\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th>\u4ee3\u8868\u7684\u306a\u4ed5\u69d8\uff08150mm N\u578b4H-SiC\u306e\u4f8b\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u76f4\u5f84<\/td>\n<td>150mm \u00b1 0.2mm<\/td>\n<\/tr>\n<tr>\n<td>\u539a\u3055<\/td>\n<td>350\u00b5m \u00b1 15\u00b5m\u307e\u305f\u306f500\u00b5m \u00b1 20\u00b5m<\/td>\n<\/tr>\n<tr>\n<td>\u4e3b\u30d5\u30e9\u30c3\u30c8\/\u30ce\u30c3\u30c1\u914d\u5411<\/td>\n<td>&lt;11-20&gt; \u00b1 0.5\u00b0\u306b\u5782\u76f4\uff08\u307e\u305f\u306f\u305d\u306e\u4ed6\u306e\u6307\u5b9a\u65b9\u5411\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u30aa\u30d5\u30ab\u30c3\u30c8\u89d2<\/td>\n<td>4.0\u00b0 \u00b1 0.25\u00b0\uff08\u6307\u5b9a\u65b9\u5411\u3078\uff09<\/td>\n<\/tr>\n<tr>\n<td>TTV<\/td>\n<td>&lt; 10\u00b5m\uff08\u591a\u304f\u306e\u5834\u5408\u3001\u30d7\u30ec\u30df\u30a2\u30e0\u306e\u5834\u5408\u306f&lt; 5\u00b5m\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u30dc\u30a6<\/td>\n<td>&lt; 30\u00b5m<\/td>\n<\/tr>\n<tr>\n<td>\u30ef\u30fc\u30d7<\/td>\n<td>&lt; 40\u00b5m<\/td>\n<\/tr>\n<tr>\n<td>Si\u9762\u8868\u9762\u7c97\u3055\uff08Ra\uff09<\/td>\n<td>&lt; 0.2 nm<\/td>\n<\/tr>\n<tr>\n<td>\u30de\u30a4\u30af\u30ed\u30d1\u30a4\u30d7\u5bc6\u5ea6\uff08MPD\uff09<\/td>\n<td>&lt; 0.5 cm<sup>-2<\/sup> \uff08\u307e\u305f\u306f\u30b0\u30ec\u30fc\u30c9\u3067\u6307\u5b9a\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u30a8\u30c3\u30b8\u9664\u5916<\/td>\n<td>3mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u3053\u308c\u3089\u306e\u53b3\u3057\u3044\u4ed5\u69d8\u3092\u9054\u6210\u3059\u308b\u306b\u306f\u3001\u9ad8\u5ea6\u306a\u8a08\u6e2c\u6a5f\u5668\u3068\u3001\u57fa\u677f\u88fd\u9020\u30c1\u30a7\u30fc\u30f3\u5168\u4f53\u3067\u306e\u5805\u7262\u306a\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u304c\u5fc5\u8981\u3067\u3059\u3002\u8abf\u9054\u30de\u30cd\u30fc\u30b8\u30e3\u30fc\u3068\u6280\u8853\u30d0\u30a4\u30e4\u30fc\u306b\u3068\u3063\u3066\u3001\u57fa\u677f\u304c\u7279\u5b9a\u306e\u88fd\u9020\u30e9\u30a4\u30f3\u3068\u30c7\u30d0\u30a4\u30b9\u8a2d\u8a08\u306e\u8981\u6c42\u3092\u6e80\u305f\u3059\u3088\u3046\u306b\u3001\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3068\u3053\u308c\u3089\u306e\u8981\u4ef6\u3092\u660e\u78ba\u306b\u5b9a\u7fa9\u3059\u308b\u3053\u3068\u304c\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n<h2>7. \u9ad8\u54c1\u8ceaSiC\u57fa\u677f\u306b\u5fc5\u8981\u306a\u5f8c\u51e6\u7406<\/h2>\n<p>SiC\u30a4\u30f3\u30b4\u30c3\u30c8\u306e\u6700\u521d\u306e\u30b9\u30e9\u30a4\u30b9\u3068\u30a6\u30a7\u30fc\u30cf\u306e\u4e00\u6b21\u6210\u5f62\uff08\u7814\u524a\u304a\u3088\u3073\u30e9\u30c3\u30d4\u30f3\u30b0\uff09\u306e\u5f8c\u3001\u9ad8\u54c1\u8cea\u306e\u300c\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u5bfe\u5fdc\u300d\u57fa\u677f\u306b\u5909\u63db\u3059\u308b\u305f\u3081\u306b\u3001\u3044\u304f\u3064\u304b\u306e\u91cd\u8981\u306a\u5f8c\u51e6\u7406\u30b9\u30c6\u30c3\u30d7\u304c\u5fc5\u8981\u3067\u3059\u3002\u3053\u308c\u3089\u306e\u30b9\u30c6\u30c3\u30d7\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3068\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u3092\u6210\u529f\u3055\u305b\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u3001\u53b3\u683c\u306a\u8868\u9762\u4ed5\u4e0a\u3052\u3001\u6e05\u6d44\u5ea6\u3001\u304a\u3088\u3073\u5bf8\u6cd5\u516c\u5dee\u3092\u9054\u6210\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\u4e3b\u306a\u5f8c\u51e6\u7406\u6bb5\u968e\u306b\u306f\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p>\n<ul>\n<li><strong>\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff08CMP\uff09\uff1a<\/strong>\n<ul>\n<li>\u3053\u308c\u306f\u3001SiC\u57fa\u677f\u306eSi\u9762\uff08\u304a\u3088\u3073\u5834\u5408\u306b\u3088\u3063\u3066\u306fC\u9762\uff09\u3067\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u5e73\u6ed1\u3067\u640d\u50b7\u306e\u306a\u3044\u8868\u9762\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306e\u3001\u304a\u305d\u3089\u304f\u6700\u3082\u91cd\u8981\u306a\u5f8c\u51e6\u7406\u30b9\u30c6\u30c3\u30d7\u3067\u3059\u3002<\/li>\n<li>CMP\u306b\u306f\u3001\u5316\u5b66\u30b9\u30e9\u30ea\u30fc\uff08\u7814\u78e8\u7c92\u5b50\u3068\u53cd\u5fdc\u6027\u5316\u5b66\u7269\u8cea\u3092\u542b\u3080\uff09\u3068\u7814\u78e8\u30d1\u30c3\u30c9\u3092\u4f7f\u7528\u3057\u305f\u30a6\u30a7\u30fc\u30cf\u306e\u7814\u78e8\u304c\u542b\u307e\u308c\u307e\u3059\u3002\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u6a5f\u68b0\u7684\u7814\u78e8\u3068\u5316\u5b66\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7d44\u307f\u5408\u308f\u305b\u3066\u6750\u6599\u3092\u9664\u53bb\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u76ee\u6a19\uff1a<\/strong> \u4e8b\u524d\u306e\u7814\u524a\u3068\u30e9\u30c3\u30d4\u30f3\u30b0\u306b\u3088\u3063\u3066\u8a98\u767a\u3055\u308c\u305f\u8868\u9762\u4e0b\u306e\u640d\u50b7\u3092\u9664\u53bb\u3057\u3001\u8868\u9762\u7c97\u3055\u3092\u30aa\u30f3\u30b0\u30b9\u30c8\u30ed\u30fc\u30e0\u30ec\u30d9\u30eb\uff08\u4f8b\uff1aRa &lt; 0.2 nm\uff09\u306b\u4f4e\u6e1b\u3057\u3001\u512a\u308c\u305f\u8868\u9762\u5e73\u5766\u5ea6\u3092\u9054\u6210\u3059\u308b\u3053\u3068\u3002<\/li>\n<li>\u6700\u7d42\u7684\u306a\u6240\u671b\u306e\u4ed5\u4e0a\u3052\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u3001\u7570\u306a\u308b\u30b9\u30e9\u30ea\u30fc\u3068\u30d1\u30c3\u30c9\u3092\u4f7f\u7528\u3057\u305f\u8907\u6570\u306eCMP\u30b9\u30c6\u30c3\u30d7\u3092\u4f7f\u7528\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u9ad8\u5ea6\u306a\u6d17\u6d44\u30d7\u30ed\u30bb\u30b9\uff1a<\/strong>\n<ul>\n<li>CMP\u304a\u3088\u3073\u305d\u306e\u4ed6\u306e\u53d6\u308a\u6271\u3044\u30b9\u30c6\u30c3\u30d7\u306e\u5f8c\u3001\u57fa\u677f\u306f\u3001\u6b8b\u7559\u30b9\u30e9\u30ea\u30fc\u7c92\u5b50\u3001\u91d1\u5c5e\u6c5a\u67d3\u7269\u8cea\u3001\u6709\u6a5f\u6b8b\u7559\u7269\u3001\u304a\u3088\u3073\u305d\u306e\u4ed6\u306e\u4e0d\u7d14\u7269\u3092\u9664\u53bb\u3059\u308b\u305f\u3081\u306b\u3001\u53b3\u683c\u306a\u6d17\u6d44\u3092\u53d7\u3051\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li>\u6d17\u6d44\u30b7\u30fc\u30b1\u30f3\u30b9\u306b\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u4ee5\u4e0b\u3092\u542b\u3080\u8907\u6570\u306e\u30b9\u30c6\u30c3\u30d7\u304c\u542b\u307e\u308c\u307e\u3059\u3002\n<ul>\n<li>\u6eb6\u5264\u6d17\u6d44\uff08\u4f8b\uff1a\u30a2\u30bb\u30c8\u30f3\u3001IPA\u3092\u4f7f\u7528\uff09\u3002<\/li>\n<li>\u9178\u6027\u6eb6\u6db2\uff08\u4f8b\uff1a\u30d4\u30e9\u30cb\u30a2\u30a8\u30c3\u30c1\uff08H<sub>2<\/sub>SO<sub>4<\/sub> + H<sub>2<\/sub>O<sub>2<\/sub>\uff09\u3001SC-2\uff08HCl + H<sub>2<\/sub>O<sub>2<\/sub> + H<sub>2<\/sub>O\uff09\uff09\u3092\u4f7f\u7528\u3057\u3066\u3001\u6709\u6a5f\u304a\u3088\u3073\u91d1\u5c5e\u6c5a\u67d3\u7269\u8cea\u3092\u9664\u53bb\u3057\u307e\u3059\u3002<\/li>\n<li>\u30a2\u30eb\u30ab\u30ea\u6027\u6eb6\u6db2\uff08\u4f8b\uff1aSC-1\uff08NH<sub>4<\/sub>OH + H<sub>2<\/sub>O<sub>2<\/sub> + H<sub>2<\/sub>O\uff09\uff09\u3092\u4f7f\u7528\u3057\u3066\u3001\u7c92\u5b50\u3092\u9664\u53bb\u3057\u307e\u3059\u3002<\/li>\n<li>DI\u6c34\u30ea\u30f3\u30b9\u3068\u4e7e\u71e5\uff08\u4f8b\uff1a\u30b9\u30d4\u30f3\u30ea\u30f3\u30b9\u4e7e\u71e5\u3001\u30de\u30e9\u30f3\u30b4\u30cb\u4e7e\u71e5\uff09\u3002<\/li>\n<\/ul>\n<\/li>\n<li>\u76ee\u6a19\u306f\u3001\u7c92\u5b50\u3092\u542b\u307e\u306a\u3044\u3001\u539f\u5b50\u30ec\u30d9\u30eb\u3067\u30af\u30ea\u30fc\u30f3\u306a\u8868\u9762\u3092\u9054\u6210\u3059\u308b\u3053\u3068\u3067\u3042\u308a\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u5149\u6563\u4e71\u8868\u9762\u691c\u67fb\u306a\u3069\u306e\u6280\u8853\u306b\u3088\u3063\u3066\u691c\u8a3c\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u8868\u9762\u691c\u67fb\u3068\u8a08\u6e2c\uff1a<\/strong>\n<ul>\n<li>\u5f8c\u51e6\u7406\u4e2d\u304a\u3088\u3073\u5f8c\u51e6\u7406\u5f8c\u3001\u5e83\u7bc4\u306a\u691c\u67fb\u3068\u8a08\u6e2c\u304c\u5b9f\u884c\u3055\u308c\u307e\u3059\u3002<\/li>\n<li><strong>\u81ea\u52d5\u8868\u9762\u30b9\u30ad\u30e3\u30ca\u30fc\uff1a<\/strong> KLA-Tencor Candela\u3084Surfscan\u306a\u3069\u306e\u30c4\u30fc\u30eb\u3092\u4f7f\u7528\u3057\u3066\u3001\u7c92\u5b50\u3001\u50b7\u3001\u30d4\u30c3\u30c8\u3001\u304a\u3088\u3073\u305d\u306e\u4ed6\u306e\u8868\u9762\u6b20\u9665\u3092\u9ad8\u611f\u5ea6\u3067\u691c\u51fa\u3057\u3066\u30de\u30c3\u30d4\u30f3\u30b0\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u7279\u5b9a\u306eRBSiC\u3001SiSiC\u88fd\u54c1\u304a\u3088\u3073\u5730\u5143\u306e\u6ff0\u574a\u88fd\u9020\u80fd\u529b\u306e\u305f\u3081\u306e\u30d7\u30ec\u30b9\u9078\u629e\u306b\u95a2\u3059\u308b\u30a2\u30c9\u30d0\u30a4\u30b9\u3002<\/strong> \u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u3067\u306e\u8868\u9762\u7c97\u3055\u3092\u5b9a\u91cf\u5316\u3057\u3001\u8868\u9762\u5f62\u614b\u3092\u753b\u50cf\u5316\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<li><strong>X\u7dda\u56de\u6298\uff08XRD\uff09\/ X\u7dda\u30c8\u30dd\u30b0\u30e9\u30d5\u30a3\uff08XRT\uff09\uff1a<\/strong> \u7d50\u6676\u914d\u5411\u3001\u30aa\u30d5\u30ab\u30c3\u30c8\u89d2\u3092\u691c\u8a3c\u3057\u3001\u7d50\u6676\u54c1\u8cea\uff08\u4f8b\uff1a\u6b20\u9665\u5bc6\u5ea6\u3001\u6b6a\u307f\uff09\u3092\u8a55\u4fa1\u3059\u308b\u305f\u3081\u3002<\/li>\n<li><strong>\u5149\u5b66\u9855\u5fae\u93e1\uff1a<\/strong> \u6b20\u9665\u3001\u30a8\u30c3\u30b8\u54c1\u8cea\u3001\u30ec\u30fc\u30b6\u30fc\u30de\u30fc\u30af\u306e\u76ee\u8996\u691c\u67fb\u7528\u3002<\/li>\n<li><strong>\u539a\u3055\u3001TTV\u3001\u53cd\u308a\u3001\u30ef\u30fc\u30d7\u6e2c\u5b9a\u30b7\u30b9\u30c6\u30e0\uff1a<\/strong> \u5bf8\u6cd5\u30d1\u30e9\u30e1\u30fc\u30bf\u304c\u4ed5\u69d8\u5185\u306b\u3042\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3059\u308b\u305f\u3081\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u88cf\u9762\u51e6\u7406\uff08\u30aa\u30d7\u30b7\u30e7\u30f3\u3067\u3059\u304c\u4e00\u822c\u7684\uff09\uff1a<\/strong>\n<ul>\n<li>\u6b63\u9762\uff08Si\u9762\uff09\u304c\u6700\u3082\u6ce8\u76ee\u3092\u96c6\u3081\u307e\u3059\u304c\u3001\u88cf\u9762\uff08C\u9762\uff09\u3082\u7279\u5b9a\u306e\u51e6\u7406\u3092\u53d7\u3051\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u88cf\u9762\u7814\u524a\/\u30e9\u30c3\u30d4\u30f3\u30b0\uff1a<\/strong> \u76ee\u6a19\u306e\u539a\u3055\u3092\u9054\u6210\u3057\u3001\u88cf\u9762\u306e\u5e73\u884c\u5ea6\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u3002<\/li>\n<li><strong>\u88cf\u9762\u7814\u78e8\uff1a<\/strong> \u4e21\u9762\u7814\u78e8\uff08DSP\uff09\u30a6\u30a7\u30fc\u30cf\u3001\u307e\u305f\u306f\u71b1\u63a5\u89e6\u306e\u6539\u5584\u3092\u5fc5\u8981\u3068\u3059\u308b\u7528\u9014\u5411\u3051\u3002<\/li>\n<li><strong>\u88cf\u9762\u91d1\u5c5e\u5316\uff1a<\/strong> 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