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SiC\u306e\u56fa\u6709\u306e\u786c\u5ea6\u3068\u5f37\u5ea6\u306b\u3088\u308a\u3001SiC\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u5909\u5f62\u3084\u7834\u640d\u3059\u308b\u3053\u3068\u306a\u304f\u3001\u9ad8\u3044\u5dee\u5727\u3068\u7814\u78e8\u7c92\u5b50\u306b\u8010\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u306f\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u5bff\u547d\u304c\u9577\u304f\u3001\u4ea4\u63db\u983b\u5ea6\u304c\u5c11\u306a\u3044\u3053\u3068\u3092\u610f\u5473\u3057\u307e\u3059\u3002<\/li>\n<li><strong>\u8010\u6469\u8017\u6027\uff1a<\/strong> 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\u9ad8\u5ea6\u306a\u88fd\u9020\u6280\u8853\u306b\u3088\u308a\u3001SiC\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u7d30\u5b54\u30b5\u30a4\u30ba\u3001\u7d30\u5b54\u5206\u5e03\u3001\u304a\u3088\u3073\u5168\u4f53\u7684\u306a\u591a\u5b54\u6027\u3092\u6b63\u78ba\u306b\u5236\u5fa1\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u3055\u307e\u3056\u307e\u306a\u7523\u696d\u7528\u9014\u306e\u7279\u5b9a\u306e\u7c92\u5b50\u4fdd\u6301\u8981\u4ef6\u306b\u5408\u308f\u305b\u3066\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<p>\u3053\u308c\u3089\u306e\u56fa\u6709\u306e\u7279\u6027\u306b\u3088\u308a\u3001SiC\u306f\u3001\u30bb\u30e9\u30df\u30c3\u30af\u30d5\u30a9\u30fc\u30e0\u30d5\u30a3\u30eb\u30bf\u30fc\u3001\u591a\u5b54\u8cea\u30c1\u30e5\u30fc\u30d6\u3001\u304a\u3088\u3073\u30e1\u30f3\u30d6\u30ec\u30f3\u30b5\u30dd\u30fc\u30c8\u306a\u3069\u3001\u8010\u4e45\u6027\u3001\u4fe1\u983c\u6027\u3001\u52b9\u7387\u7684\u306a\u30d5\u30a3\u30eb\u30bf\u30fc\u30a8\u30ec\u30e1\u30f3\u30c8\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306e\u7406\u60f3\u7684\u306a\u6750\u6599\u3067\u3042\u308a\u3001\u7523\u696d\u6d44\u5316\u306e\u9650\u754c\u3092\u62bc\u3057\u5e83\u3052\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n<h2>SiC\u308d\u904e\u6280\u8853\u3092\u6d3b\u7528\u3057\u305f\u91cd\u8981\u306a\u7523\u696d\u7528\u9014<\/h2>\n<p>\u70ad\u5316\u30b1\u30a4\u7d20\u30d5\u30a3\u30eb\u30bf\u30fc\u304c\u63d0\u4f9b\u3059\u308b\u72ec\u81ea\u306e\u7279\u6027\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u308a\u3001\u3055\u307e\u3056\u307e\u306a\u8981\u6c42\u306e\u53b3\u3057\u3044\u7523\u696d\u90e8\u9580\u3067\u4e0d\u53ef\u6b20\u306a\u3082\u306e\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u5f93\u6765\u306e\u30d5\u30a3\u30eb\u30bf\u30fc\u304c\u53ca\u3070\u306a\u3044\u6975\u7aef\u306a\u6761\u4ef6\u4e0b\u3067\u6027\u80fd\u3092\u767a\u63ee\u3067\u304d\u308b\u80fd\u529b\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u6700\u9069\u5316\u3068\u74b0\u5883\u4fdd\u8b77\u306e\u65b0\u305f\u306a\u53ef\u80fd\u6027\u3092\u5207\u308a\u958b\u304d\u307e\u3059\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>\u91d1\u578b\u306f\u3001SiC\u6210\u5f62\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u91cd\u8981\u306a\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9\u3067\u3059\u3002<\/th>\n<th>SiC\u308d\u904e\u306e\u5177\u4f53\u7684\u306a\u7528\u9014<\/th>\n<th>\u4e3b\u306a\u30e1\u30ea\u30c3\u30c8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>\u534a\u5c0e\u4f53\u88fd\u9020<\/strong><\/td>\n<td>\u8d85\u7d14\u6c34\u308d\u904e\u3001\u5316\u5b66\u6a5f\u68b0\u7684\u5e73\u5766\u5316\uff08CMP\uff09\u30b9\u30e9\u30ea\u30fc\u308d\u904e\u3001\u6392\u30ac\u30b9\u30b9\u30af\u30e9\u30d3\u30f3\u30b0\u3002<\/td>\n<td>\u9ad8\u7d14\u5ea6\u3001\u512a\u308c\u305f\u8010\u85ac\u54c1\u6027\u3001\u7c92\u5b50\u653e\u51fa\u306e\u4f4e\u6e1b\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u81ea\u52d5\u8eca\u30fb\u904b\u8f38<\/strong><\/td>\n<td>\u30c7\u30a3\u30fc\u30bc\u30eb\u5fae\u7c92\u5b50\u30d5\u30a3\u30eb\u30bf\u30fc\uff08DPF\uff09\u3001\u30ac\u30bd\u30ea\u30f3\u5fae\u7c92\u5b50\u30d5\u30a3\u30eb\u30bf\u30fc\uff08GPF\uff09\u3001\u6392\u6c17\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u9ad8\u6e29\u30ac\u30b9\u308d\u904e\u3001\u30a8\u30f3\u30b8\u30f3\u90e8\u54c1\u7528\u6eb6\u878d\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u308d\u904e\u3002<\/td>\n<td>\u9ad8\u6e29\u5b89\u5b9a\u6027\u3001\u512a\u308c\u305f\u3059\u3059\u6355\u96c6\u52b9\u7387\u3001\u6a5f\u68b0\u7684\u5805\u7262\u6027\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u822a\u7a7a\u5b87\u5b99\u30fb\u9632\u885b<\/strong><\/td>\n<td>\u6cb9\u5727\u4f5c\u52d5\u6cb9\u308d\u904e\u3001\u71c3\u6599\u308d\u904e\u3001\u63a8\u9032\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u9ad8\u6e29\u30ac\u30b9\u308d\u904e\u3001\u89e6\u5a92\u62c5\u4f53\u3002<\/td>\n<td>\u9ad8\u3044\u5f37\u5ea6\u5bfe\u91cd\u91cf\u6bd4\u3001\u8010\u71b1\u885d\u6483\u6027\u3001\u6975\u7aef\u306a\u6761\u4ef6\u4e0b\u3067\u306e\u4fe1\u983c\u6027\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\uff06\u30a8\u30cd\u30eb\u30ae\u30fc<\/strong><\/td>\n<td>\u9ad8\u51fa\u529b\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u30af\u30fc\u30e9\u30f3\u30c8\u308d\u904e\u3001\u6392\u7159\u8131\u786b\uff08FGD\uff09\u3001\u539f\u5b50\u529b\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u308d\u904e\u3001\u5730\u71b1\u6d41\u4f53\u308d\u904e\u3002<\/td>\n<td>\u71b1\u4f1d\u5c0e\u7387\u3001\u8010\u98df\u6027\u3001\u9577\u3044\u52d5\u4f5c\u5bff\u547d\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u5316\u5b66\u51e6\u7406<\/strong><\/td>\n<td>\u89e6\u5a92\u56de\u53ce\u3001\u8150\u98df\u6027\u5316\u5b66\u7269\u8cea\u308d\u904e\u3001\u30d6\u30e9\u30a4\u30f3\u308d\u904e\u3001\u9ad8\u6e29\u30ac\u30b9\u5206\u96e2\u3002<\/td>\n<td>\u512a\u308c\u305f\u5316\u5b66\u7684\u6163\u6027\u3001\u9ad8\u6e29\u5b89\u5b9a\u6027\u3001\u8010\u6469\u8017\u6027\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u51b6\u91d1<\/strong><\/td>\n<td>\u6eb6\u878d\u91d1\u5c5e\u308d\u904e\uff08\u4f8b\uff1a\u9244\u3001\u92fc\u3001\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3001\u9285\u5408\u91d1\uff09\u3001\u7089\u6392\u30ac\u30b9\u6d44\u5316\u3002<\/td>\n<td>\u9ad8\u6e29\u5f37\u5ea6\u3001\u8010\u71b1\u885d\u6483\u6027\u3001\u91d1\u5c5e\u54c1\u8cea\u306e\u5411\u4e0a\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc<\/strong><\/td>\n<td>\u30d0\u30a4\u30aa\u30ac\u30b9\u751f\u6210\u306b\u304a\u3051\u308b\u308d\u904e\u3001\u30d0\u30a4\u30aa\u30de\u30b9\u30ac\u30b9\u5316\u306b\u304a\u3051\u308b\u9ad8\u6e29\u30ac\u30b9\u308d\u904e\u3001\u30bd\u30fc\u30e9\u30fc\u30d1\u30cd\u30eb\u88fd\u9020\u7528\u6d44\u6c34\u3002<\/td>\n<td>\u8010\u4e45\u6027\u3001\u8010\u85ac\u54c1\u6027\u3001\u9ad8\u6e29\u5bfe\u5fdc\u80fd\u529b\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>LED\u88fd\u9020<\/strong><\/td>\n<td>\u524d\u99c6\u4f53\u6750\u6599\u306e\u7cbe\u88fd\u3001\u6392\u30ac\u30b9\u51e6\u7406\u3002<\/td>\n<td>\u9ad8\u7d14\u5ea6\u3001\u5316\u5b66\u7684\u9069\u5408\u6027\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u7523\u696d\u6a5f\u68b0<\/strong><\/td>\n<td>\u6cb9\u5727\u304a\u3088\u3073\u6f64\u6ed1\u6cb9\u308d\u904e\u3001\u30af\u30fc\u30e9\u30f3\u30c8\u308d\u904e\u3001\u96c6\u5875\u30b7\u30b9\u30c6\u30e0\u3002<\/td>\n<td>\u8010\u4e45\u6027\u3001\u9577\u3044\u30d5\u30a3\u30eb\u30bf\u30fc\u5bff\u547d\u3001\u7814\u78e8\u7c92\u5b50\u306b\u5bfe\u3059\u308b\u8010\u6027\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u77f3\u6cb9\u304a\u3088\u3073\u30ac\u30b9<\/strong><\/td>\n<td>\u751f\u6210\u6c34\u306e\u51e6\u7406\u3001\u9178\u6027\u30ac\u30b9\u308d\u904e\u3001\u5751\u4e95\u5185\u308d\u904e\u3001\u88fd\u6cb9\u6240\u306b\u304a\u3051\u308b\u89e6\u5a92\u4fdd\u8b77\u3002<\/td>\n<td>\u8010\u98df\u6027\uff08H2S\u3001CO2\uff09\u3001\u9ad8\u5727\u304a\u3088\u3073\u9ad8\u6e29\u8010\u6027\u3002<\/td>\n<\/tr>\n<tr>\n<td><strong>\u533b\u7642\u6a5f\u5668\u30fb\u533b\u85ac\u54c1<\/strong><\/td>\n<td>\u9ad8\u7d14\u5ea6\u3068\u5316\u5b66\u7684\u6163\u6027\u304c\u91cd\u8981\u306a\u7279\u6b8a\u306a\u6db2\u4f53\u304a\u3088\u3073\u30ac\u30b9\u308d\u904e\u3067\u3059\u304c\u3001\u91cd\u5de5\u696d\u307b\u3069\u4e00\u822c\u7684\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/td>\n<td>\u751f\u4f53\u9069\u5408\u6027\uff08\u7279\u5b9a\u306e\u30b0\u30ec\u30fc\u30c9\uff09\u3001\u6e05\u6d44\u6027\u3001\u5316\u5b66\u7684\u6163\u6027\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>SiC\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u6c4e\u7528\u6027\u306f\u3001\u7523\u696d\u304c\u91cd\u8981\u306a\u308d\u904e\u30cb\u30fc\u30ba\u306b\u5bfe\u3057\u3066\u3088\u308a\u5f3e\u529b\u7684\u3067\u52b9\u7387\u7684\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u6c42\u3081\u3066\u3044\u308b\u4e2d\u3067\u3001\u305d\u306e\u91cd\u8981\u6027\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b\u3053\u3068\u3092\u5f37\u8abf\u3057\u3066\u304a\u308a\u3001\u88fd\u54c1\u54c1\u8cea\u306e\u5411\u4e0a\u3001\u6392\u51fa\u91cf\u306e\u524a\u6e1b\u3001\u304a\u3088\u3073\u904b\u7528\u52b9\u7387\u306e\u5411\u4e0a\u306b\u8ca2\u732e\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<h2>\u306a\u305c\u30ab\u30b9\u30bf\u30e0SiC\u30d5\u30a3\u30eb\u30bf\u30fc\u304c\u5f93\u6765\u306e\u308d\u904e\u5a92\u4f53\u3088\u308a\u3082\u512a\u308c\u3066\u3044\u308b\u306e\u304b<\/h2>\n<p>\u30bb\u30eb\u30ed\u30fc\u30b9\u3001\u30dd\u30ea\u30de\u30fc\u3001\u307e\u305f\u306f\u4e00\u90e8\u306e\u91d1\u5c5e\u30d5\u30a3\u30eb\u30bf\u30fc\u306a\u3069\u306e\u5f93\u6765\u306e\u308d\u904e\u5a92\u4f53\u306b\u306f\u305d\u308c\u306a\u308a\u306e\u5f79\u5272\u304c\u3042\u308a\u307e\u3059\u304c\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u904e\u9177\u306a\u7523\u696d\u74b0\u5883\u306b\u76f4\u9762\u3059\u308b\u3068\u91cd\u5927\u306a\u5236\u9650\u306b\u906d\u9047\u3057\u307e\u3059\u3002\u30ab\u30b9\u30bf\u30e0\u70ad\u5316\u30b1\u30a4\u7d20\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u6027\u80fd\u3001\u8010\u4e45\u6027\u3001\u304a\u3088\u3073\u904b\u7528\u52b9\u7387\u306b\u304a\u3044\u3066\u98db\u8e8d\u7684\u306a\u9032\u6b69\u3092\u9042\u3052\u3066\u304a\u308a\u3001\u6280\u8853\u7684\u306a\u30d0\u30a4\u30e4\u30fc\u3084\u30a8\u30f3\u30b8\u30cb\u30a2\u306b\u9b45\u529b\u7684\u306a\u5229\u70b9\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002<\/p>\n<p>\u30ab\u30b9\u30bf\u30e0SiC\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u5229\u70b9\u3092\u6bd4\u8f03\u3057\u3066\u898b\u3066\u307f\u307e\u3057\u3087\u3046\u3002<\/p>\n<ul>\n<li><strong>\u512a\u308c\u305f\u8010\u71b1\u6027\uff1a<\/strong>\n<ul>\n<li><em>\u5f93\u6765\u578b\uff1a<\/em> \u30dd\u30ea\u30de\u30fc\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u6bd4\u8f03\u7684\u4f4e\u6e29\uff08\u901a\u5e38150\uff5e200\u2103\u672a\u6e80\uff09\u3067\u6eb6\u878d\u307e\u305f\u306f\u5206\u89e3\u3059\u308b\u3002\u91d1\u5c5e\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u975e\u5e38\u306b\u9ad8\u6e29\u306b\u306a\u308b\u3068\u9178\u5316\u3057\u305f\u308a\u5f37\u5ea6\u304c\u4f4e\u4e0b\u3057\u305f\u308a\u3059\u308b\u3002<\/li>\n<li><em>SiC\u30d5\u30a3\u30eb\u30bf\u30fc\uff1a<\/em> 1000\u2103\u3092\u8d85\u3048\u308b\u6e29\u5ea6\u3067\u9023\u7d9a\u7684\u306b\u52d5\u4f5c\u3067\u304d\u3001\u4e00\u90e8\u306e\u30b0\u30ec\u30fc\u30c9\u306f1600\u2103\u4ee5\u4e0a\u3067\u6027\u80fd\u3092\u767a\u63ee\u3057\u3001\u9ad8\u6e29\u30ac\u30b9\u308d\u904e\u3001\u6eb6\u878d\u91d1\u5c5e\u3001\u304a\u3088\u3073\u9ad8\u6e29\u5316\u5b66\u53cd\u5fdc\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6bd4\u985e\u306e\u306a\u3044\u5316\u5b66\u7684\u6163\u6027\uff1a<\/strong>\n<ul>\n<li><em>\u5f93\u6765\u578b\uff1a<\/em> \u591a\u304f\u306e\u6750\u6599\u306f\u3001\u5f37\u9178\u3001\u5869\u57fa\u3001\u307e\u305f\u306f\u6709\u6a5f\u6eb6\u5264\u306b\u3088\u308b\u653b\u6483\u3092\u53d7\u3051\u3084\u3059\u304f\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u52a3\u5316\u3084\u30d7\u30ed\u30bb\u30b9\u306e\u6c5a\u67d3\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002<\/li>\n<li><em>SiC\u30d5\u30a3\u30eb\u30bf\u30fc\uff1a<\/em> \u5e83\u7bc4\u56f2\u306epH\u7bc4\u56f2\u3068\u307b\u3068\u3093\u3069\u306e\u8150\u98df\u6027\u5316\u5b66\u7269\u8cea\u306b\u5bfe\u3057\u3066\u512a\u308c\u305f\u8010\u6027\u3092\u793a\u3057\u3001\u904e\u9177\u306a\u5316\u5b66\u51e6\u7406\u306b\u304a\u3044\u3066\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u5b8c\u5168\u6027\u3068\u7d14\u5ea6\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6a5f\u68b0\u7684\u5f37\u5ea6\u3068\u8010\u6469\u8017\u6027\u306e\u5411\u4e0a\uff1a<\/strong>\n<ul>\n<li><em>\u5f93\u6765\u578b\uff1a<\/em> \u9ad8\u5727\u4e0b\u3067\u5909\u5f62\u3057\u305f\u308a\u3001\u7834\u308c\u3084\u3059\u304b\u3063\u305f\u308a\u3001\u7814\u78e8\u7c92\u5b50\u3092\u308d\u904e\u3059\u308b\u3068\u3059\u3050\u306b\u4fb5\u98df\u3055\u308c\u305f\u308a\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><em>SiC\u30d5\u30a3\u30eb\u30bf\u30fc\uff1a<\/em> \u9ad8\u3044\u5727\u7e2e\u5f37\u5ea6\u3068\u66f2\u3052\u5f37\u5ea6\u3092\u5099\u3048\u3001\u5909\u5f62\u306b\u62b5\u6297\u3057\u307e\u3059\u3002\u305d\u306e\u6975\u5ea6\u306e\u786c\u5ea6\u306f\u3001\u7814\u78e8\u306b\u5bfe\u3059\u308b\u512a\u308c\u305f\u8010\u6027\u3092\u63d0\u4f9b\u3057\u3001\u30b9\u30e9\u30ea\u30fc\u308d\u904e\u306a\u3069\u306e\u8981\u6c42\u306e\u53b3\u3057\u3044\u7528\u9014\u3067\u306e\u8010\u7528\u5e74\u6570\u3092\u5927\u5e45\u306b\u5ef6\u9577\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u30d5\u30a3\u30eb\u30bf\u30fc\u5bff\u547d\u306e\u5ef6\u9577\u3068\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u306e\u524a\u6e1b\uff1a<\/strong>\n<ul>\n<li><em>\u5f93\u6765\u578b\uff1a<\/em> \u52a3\u5316\u3001\u76ee\u8a70\u307e\u308a\u3001\u307e\u305f\u306f\u640d\u50b7\u306b\u3088\u308b\u983b\u7e41\u306a\u4ea4\u63db\u306f\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u30b3\u30b9\u30c8\u306e\u5897\u52a0\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u306b\u3064\u306a\u304c\u308a\u307e\u3059\u3002<\/li>\n<li><em>SiC\u30d5\u30a3\u30eb\u30bf\u30fc\uff1a<\/em> \u305d\u308c\u3089\u306e\u5805\u7262\u6027\u3068\u904e\u9177\u306a\u6761\u4ef6\u306b\u5bfe\u3059\u308b\u8010\u6027\u306f\u3001\u306f\u308b\u304b\u306b\u9577\u3044\u52d5\u4f5c\u5bff\u547d\u306b\u3064\u306a\u304c\u308a\u3001\u7dcf\u6240\u6709\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3057\u3001\u751f\u7523\u306e\u4e2d\u65ad\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u3088\u308a\u9ad8\u3044\u6d41\u91cf\u3068\u3088\u308a\u4f4e\u3044\u5727\u529b\u640d\u5931\uff08\u6700\u9069\u5316\u3055\u308c\u305f\u8a2d\u8a08\uff09\uff1a<\/strong>\n<ul>\n<li><em>\u5f93\u6765\u578b\uff1a<\/em> \u76ee\u7684\u306e\u308d\u904e\u52b9\u7387\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u3001\u3088\u308a\u5927\u304d\u306a\u30d5\u30a3\u30eb\u30bf\u30fc\u9762\u7a4d\u304c\u5fc5\u8981\u306b\u306a\u3063\u305f\u308a\u3001\u3088\u308a\u9ad8\u3044\u5727\u529b\u640d\u5931\u306b\u60a9\u307e\u3055\u308c\u305f\u308a\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u306b\u5f71\u97ff\u3057\u307e\u3059\u3002<\/li>\n<li><em>SiC\u30d5\u30a3\u30eb\u30bf\u30fc\uff1a<\/em> \u6700\u9069\u5316\u3055\u308c\u305f\u7d30\u5b54\u69cb\u9020\u3068\u9ad8\u3044\u958b\u653e\u591a\u5b54\u6027\uff08\u4f8b\uff1aSiC\u30d5\u30a9\u30fc\u30e0\u30d5\u30a3\u30eb\u30bf\u30fc\uff09\u3067\u8a2d\u8a08\u3067\u304d\u308b\u305f\u3081\u3001\u3088\u308a\u4f4e\u3044\u5727\u529b\u640d\u5931\u3067\u9ad8\u3044\u6d41\u91cf\u3092\u53ef\u80fd\u306b\u3057\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u7bc0\u7d04\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u518d\u751f\u6027\u3068\u6e05\u6d44\u6027\uff1a<\/strong>\n<ul>\n<li><em>\u5f93\u6765\u578b\uff1a<\/em> \u591a\u304f\u306e\u4f7f\u3044\u6368\u3066\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u5ec3\u68c4\u7269\u306b\u8ca2\u732e\u3057\u307e\u3059\u3002\u4e00\u90e8\u306e\u518d\u5229\u7528\u53ef\u80fd\u306a\u3082\u306e\u306f\u3001\u7279\u306b\u904e\u9177\u306a\u6c5a\u67d3\u7269\u8cea\u306b\u3055\u3089\u3055\u308c\u305f\u5f8c\u3001\u6e05\u6d44\u52b9\u679c\u306b\u5236\u9650\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><em>SiC\u30d5\u30a3\u30eb\u30bf\u30fc\uff1a<\/em> \u71b1\u7684\u304a\u3088\u3073\u5316\u5b66\u7684\u5f3e\u529b\u6027\u304c\u3042\u308b\u305f\u3081\u3001\u30d0\u30c3\u30af\u30d5\u30e9\u30c3\u30b7\u30f3\u30b0\u3001\u5316\u5b66\u6d17\u6d44\u3001\u307e\u305f\u306f\u71b1\u518d\u751f\u306a\u3069\u306e\u3055\u307e\u3056\u307e\u306a\u65b9\u6cd5\u3067\u52b9\u679c\u7684\u306b\u6d17\u6d44\u304a\u3088\u3073\u518d\u751f\u3067\u304d\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u4f7f\u7528\u53ef\u80fd\u306a\u5bff\u547d\u304c\u3055\u3089\u306b\u5ef6\u9577\u3055\u308c\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u7d4c\u6e08\u6027\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u7279\u5b9a\u306e\u30cb\u30fc\u30ba\u306b\u5408\u308f\u305b\u305f\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\uff1a<\/strong>\n<ul>\n<li><em>\u5f93\u6765\u578b\uff1a<\/em> \u6a19\u6e96\u30b5\u30a4\u30ba\u3068\u9650\u3089\u308c\u305f\u6750\u6599\u30b0\u30ec\u30fc\u30c9\u3067\u5229\u7528\u3067\u304d\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><em>SiC\u30d5\u30a3\u30eb\u30bf\u30fc\uff1a<\/em> \u7d30\u5b54\u30b5\u30a4\u30ba\uff08\u30df\u30af\u30ed\u30f3\u304b\u3089\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u30ec\u30d9\u30eb\uff09\u3001\u591a\u5b54\u6027\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u5f62\u72b6\uff08\u30c1\u30e5\u30fc\u30d6\u3001\u30c7\u30a3\u30b9\u30af\u3001\u30d7\u30ec\u30fc\u30c8\u3001\u8907\u96d1\u306a\u5f62\u72b6\uff09\u3001\u304a\u3088\u3073\u6750\u6599\u7d44\u6210\uff08\u4f8b\uff1aRSiC\u3001SSiC\uff09\u306b\u95a2\u3057\u3066\u3001\u7279\u5b9a\u306e\u7528\u9014\u8981\u4ef6\u3092\u6e80\u305f\u3059\u305f\u3081\u306e\u5e83\u7bc4\u306a\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u306e\u53ef\u80fd\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\u30ab\u30b9\u30bf\u30e0SiC\u308d\u904e\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u696d\u754c\u306f\u53e4\u3044\u6280\u8853\u306e\u5236\u9650\u3092\u514b\u670d\u3057\u3001\u3088\u308a\u30af\u30ea\u30fc\u30f3\u306a\u30d7\u30ed\u30bb\u30b9\u3001\u3088\u308a\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u904b\u7528\u3001\u304a\u3088\u3073\u3088\u308a\u826f\u3044\u6295\u8cc7\u53ce\u76ca\u7387\u3092\u9054\u6210\u3067\u304d\u307e\u3059\u3002\u7279\u306b\u3001\u5f93\u6765\u306e\u5a92\u4f53\u3067\u306f\u6761\u4ef6\u304c\u904e\u9177\u3059\u304e\u308b\u7528\u9014\u306b\u304a\u3044\u3066\u3002<\/p>\n<h2>\u8981\u6c42\u306e\u53b3\u3057\u3044\u308d\u904e\u30bf\u30b9\u30af\u306b\u6700\u9069\u306aSiC\u30b0\u30ec\u30fc\u30c9\u306e\u9078\u629e<\/h2>\n<p>\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u3001\u4e07\u80fd\u306e\u6750\u6599\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u3055\u307e\u3056\u307e\u306a\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u3055\u307e\u3056\u307e\u306aSiC\u30b0\u30ec\u30fc\u30c9\u304c\u751f\u6210\u3055\u308c\u3001\u305d\u308c\u305e\u308c\u304c\u7279\u5b9a\u306e\u308d\u904e\u7528\u9014\u306b\u9069\u3057\u305f\u72ec\u81ea\u306e\u7279\u6027\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u30b0\u30ec\u30fc\u30c9\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u306f\u3001\u30cb\u30fc\u30ba\u306b\u6700\u9069\u306a\u3001\u8cbb\u7528\u5bfe\u52b9\u679c\u306e\u9ad8\u3044\u30d5\u30a3\u30eb\u30bf\u30fc\u3092\u9078\u629e\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n<p>\u308d\u904e\u306b\u4f7f\u7528\u3055\u308c\u308b\u4e3b\u8981\u306aSiC\u30b0\u30ec\u30fc\u30c9\u306b\u306f\u3001\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p>\n<ul>\n<li><strong>\u53cd\u5fdc\u7d50\u5408\u70ad\u5316\u30b1\u30a4\u7d20\uff08RBSiC\u307e\u305f\u306fSiSiC\uff09\uff1a<\/strong>\n<ul>\n<li><em>\u88fd\u9020\uff1a<\/em> \u591a\u5b54\u8cea\u70ad\u7d20\u307e\u305f\u306fSiC\u30d7\u30ea\u30d5\u30a9\u30fc\u30e0\u306b\u6eb6\u878d\u30b7\u30ea\u30b3\u30f3\u3092\u6d78\u900f\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u751f\u6210\u3055\u308c\u307e\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u306f\u70ad\u7d20\u3068\u53cd\u5fdc\u3057\u3066SiC\u3092\u5f62\u6210\u3057\u3001\u65e2\u5b58\u306eSiC\u7c92\u5b50\u3092\u7d50\u5408\u3055\u305b\u307e\u3059\u3002\u901a\u5e38\u300115\uff05\u306e\u904a\u96e2\u30b7\u30ea\u30b3\u30f3\u304c\u542b\u307e\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n<li><em>\u30d7\u30ed\u30d1\u30c6\u30a3<\/em> \u6a5f\u68b0\u7684\u5f37\u5ea6\u304c\u9ad8\u304f\u3001\u8010\u6469\u8017\u6027\u306b\u512a\u308c\u3001\u71b1\u4f1d\u5c0e\u7387\u304c\u9ad8\u304f\u3001\u8010\u71b1\u885d\u6483\u6027\u306b\u512a\u308c\u3066\u3044\u308b\u3002SSiC\u306b\u6bd4\u3079\u3066\u88fd\u9020\u30b3\u30b9\u30c8\u304c\u6bd4\u8f03\u7684\u4f4e\u3044\u3002\u904a\u96e2\u30b7\u30ea\u30b3\u30f3\u306e\u5b58\u5728\u306b\u3088\u308a\u3001\u7279\u5b9a\u306e\u8150\u98df\u6027\u306e\u9ad8\u3044\u74b0\u5883\uff08\u5f37\u30a2\u30eb\u30ab\u30ea\u3084\u30d5\u30c3\u5316\u6c34\u7d20\u9178\u306a\u3069\uff09\u3084\u8d85\u9ad8\u6e29\uff081350\u2103\u4ee5\u4e0a\uff09\u3067\u306e\u4f7f\u7528\u304c\u5236\u9650\u3055\u308c\u308b\u3002<\/li>\n<li><em>\u308d\u904e\u7528\u9014\uff1a<\/em> \u30c7\u30a3\u30fc\u30bc\u30eb\u5fae\u7c92\u5b50\u30d5\u30a3\u30eb\u30bf\u30fc\uff08DPF\uff09\u3001\u8010\u6469\u8017\u6027\u90e8\u54c1\u3001\u6975\u5ea6\u306e\u8010\u85ac\u54c1\u6027\u3084\u8d85\u9ad8\u6e29\u304c\u4e3b\u306a\u95a2\u5fc3\u4e8b\u3067\u306f\u306a\u3044\u4e00\u822c\u7684\u306a\u5de5\u696d\u7528\u308d\u904e\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u6eb6\u878d\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u308d\u904e\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u713c\u7d50\u70ad\u5316\u30b1\u30a4\u7d20\uff08SSiC\u307e\u305f\u306fS-SiC\uff09\uff1a<\/strong>\n<ul>\n<li><em>\u88fd\u9020\uff1a<\/em> \u7d14\u7c8b\u306aSiC\u7c89\u672b\u306b\u975e\u9178\u5316\u7269\u306e\u713c\u7d50\u52a9\u5264\uff08\u30db\u30a6\u7d20\u3084\u70ad\u7d20\u306a\u3069\uff09\u3092\u6df7\u305c\u305f\u3082\u306e\u3002\u4e0d\u6d3b\u6027\u96f0\u56f2\u6c17\u4e2d\u3001\u8d85\u9ad8\u6e29\uff08\u901a\u5e382000\u2103\u4ee5\u4e0a\uff09\u3067\u713c\u6210\u3057\u3001SiC\u7c92\u5b50\u3092\u76f4\u63a5\u7d50\u5408\u3055\u305b\u308b\u3002<\/li>\n<li><em>\u30d7\u30ed\u30d1\u30c6\u30a3<\/em> \u6975\u3081\u3066\u9ad8\u7d14\u5ea6\uff08\u4e00\u822c\u7684\u306b&gt;99% SiC\uff09\u3067\u3001\u512a\u308c\u305f\u8010\u85ac\u54c1\u6027\uff08\u5f37\u9178\u3001\u5f37\u30a2\u30eb\u30ab\u30ea\u3092\u542b\u3080\uff09\u3001\u512a\u308c\u305f\u9ad8\u6e29\u5f37\u5ea6\uff081600\u2103\u4ee5\u4e0a\u307e\u3067\uff09\u3001\u9ad8\u786c\u5ea6\u3001\u512a\u308c\u305f\u8010\u6469\u8017\u6027\u3092\u6709\u3059\u308b\u3002\u4e00\u822c\u7684\u306bRBSiC\u3088\u308a\u9ad8\u4fa1\u3002<\/li>\n<li><em>\u308d\u904e\u7528\u9014\uff1a<\/em> \u9ad8\u8150\u98df\u6027\u5316\u5b66\u308d\u904e\u3001\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u6d41\u4f53\u3001\u533b\u85ac\u54c1\u3001\u6392\u7159\u8131\u786b\u3001\u305d\u306e\u4ed6\u306e\u6975\u9650\u6761\u4ef6\u4e0b\u3067\u6700\u9ad8\u306e\u7d14\u5ea6\u3068\u6027\u80fd\u304c\u6c42\u3081\u3089\u308c\u308b\u7528\u9014\u306b\u6700\u9069\u3067\u3059\u3002\u5fae\u7d30\u5b54\u819c\u3084\u652f\u6301\u4f53\u306b\u3088\u304f\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u518d\u7d50\u6676\u70ad\u5316\u30b1\u30a4\u7d20\uff08RSiC\uff09\uff1a<\/strong>\n<ul>\n<li><em>\u88fd\u9020\uff1a<\/em> SiC\u7c92\u5b50\u3092\u975e\u5e38\u306b\u9ad8\u6e29\uff08\u7d042500\u2103\uff09\u3067\u5145\u586b\u3057\u713c\u6210\u3057\u3001\u84b8\u767a\u51dd\u7e2e\u3068\u7c92\u6210\u9577\u306b\u3088\u308a\u53ce\u7e2e\u306a\u3057\u3067\u7d50\u5408\u3055\u305b\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u591a\u5b54\u8cea\u306e\u69cb\u9020\u304c\u5f97\u3089\u308c\u307e\u3059\u3002<\/li>\n<li><em>\u30d7\u30ed\u30d1\u30c6\u30a3<\/em> \u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027\u3001\u9ad8\u3044\u591a\u5b54\u5ea6\uff08\u901a\u5e3815\uff5e40\uff05\uff09\u3001\u975e\u5e38\u306b\u9ad8\u6e29\u3067\u306e\u512a\u308c\u305f\u5f37\u5ea6\u3092\u5099\u3048\u3066\u3044\u307e\u3059\u3002\u7d30\u5b54\u5f84\u306f\u3001\u4e00\u822c\u7684\u306bSSiC\u3084\u4e00\u90e8\u306eRBSiC\u30d5\u30a3\u30eb\u30bf\u30fc\u3088\u308a\u3082\u5927\u304d\u3044\u3067\u3059\u3002<\/li>\n<li><em>\u308d\u904e\u7528\u9014\uff1a<\/em> \u4e3b\u306b\u9ad8\u6e29\u30ac\u30b9\u308d\u904e\u3001\u7aaf\u9053\u5177\u3001\u89e6\u5a92\u62c5\u4f53\u3001\u9ad8\u3044\u591a\u5b54\u5ea6\u3068\u6975\u5ea6\u306e\u8010\u71b1\u885d\u6483\u6027\u304c\u91cd\u8981\u306a\u7528\u9014\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u9ad8\u6e29\u3067\u306e\u7c97\u3044\u7c92\u5b50\u308d\u904e\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u7a92\u5316\u7269\u7d50\u5408\u70ad\u5316\u30b1\u30a4\u7d20\uff08NBSiC\uff09\uff1a<\/strong>\n<ul>\n<li><em>\u88fd\u9020\uff1a<\/em> SiC\u7c92\u5b50\u306f\u7a92\u5316\u30b1\u30a4\u7d20\uff08Si3N4\uff09\u76f8\u306b\u3088\u3063\u3066\u7d50\u5408\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/li>\n<li><em>\u30d7\u30ed\u30d1\u30c6\u30a3<\/em> \u512a\u308c\u305f\u6a5f\u68b0\u7684\u5f37\u5ea6\u3001\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027\u3001\u6eb6\u878d\u975e\u9244\u91d1\u5c5e\u306b\u3088\u308b\u6fe1\u308c\u306b\u5bfe\u3059\u308b\u8010\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u4e00\u90e8\u306e\u74b0\u5883\u3067\u306f\u3001SSiC\u307b\u3069\u8010\u85ac\u54c1\u6027\u306f\u3042\u308a\u307e\u305b\u3093\u3002<\/li>\n<li><em>\u308d\u904e\u7528\u9014\uff1a<\/em> \u975e\u9244\u6eb6\u878d\u91d1\u5c5e\u306e\u53d6\u308a\u6271\u3044\u3068\u308d\u904e\uff08\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3001\u4e9c\u925b\u306a\u3069\uff09\u3084\u3001\u4e00\u90e8\u306e\u7aaf\u9053\u5177\u7528\u9014\u3067\u3088\u304f\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u591a\u5b54\u8ceaSiC \/ SiC\u30d5\u30a9\u30fc\u30e0 \/ SiC\u819c\uff1a<\/strong>\n<ul>\n<li><em>\u6ce8\uff1a<\/em> \u3053\u308c\u3089\u306f\u3001\u4e0a\u8a18\u306eSiC\u30b0\u30ec\u30fc\u30c9\u306e\u3044\u305a\u308c\u304b\uff08\u819c\u306e\u5834\u5408\u306f\u4e00\u822c\u7684\u306bRBSiC\u307e\u305f\u306fSSiC\u3001\u30d5\u30a9\u30fc\u30e0\u306e\u5834\u5408\u306fRSiC\uff09\u3092\u4f7f\u7528\u3057\u3066\u4f5c\u3089\u308c\u305f\u5f62\u72b6\u307e\u305f\u306f\u69cb\u9020\u3067\u3042\u308b\u3053\u3068\u304c\u3088\u304f\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><em>\u30d7\u30ed\u30d1\u30c6\u30a3<\/em> SiC\u30d5\u30a9\u30fc\u30e0\u306f\u3001\u9ad8\u3044\u6d41\u91cf\u3068\u6df1\u3055\u308d\u904e\u306e\u305f\u3081\u306b\u975e\u5e38\u306b\u9ad8\u3044\u591a\u5b54\u5ea6\uff08\u6700\u592780\uff5e90\uff05\uff09\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002SiC\u819c\u306f\u3001\u7cbe\u5bc6\u306a\u7d30\u5b54\u5f84\u3092\u30de\u30a4\u30af\u30ed\u308d\u904e\uff08MF\uff09\u304a\u3088\u3073\u30a6\u30eb\u30c8\u30e9\u308d\u904e\uff08UF\uff09\u306b\u63d0\u4f9b\u3057\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u3088\u308a\u591a\u5b54\u8cea\u306eSiC\u652f\u6301\u4f53\u4e0a\u306bSSiC\u306e\u6d3b\u6027\u5c64\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><em>\u308d\u904e\u7528\u9014\uff1a<\/em> \u30d5\u30a9\u30fc\u30e0\u306f\u3001\u6eb6\u878d\u91d1\u5c5e\u308d\u904e\u304a\u3088\u3073\u9ad8\u6e29\u30ac\u30b9\u96c6\u5875\u306b\u512a\u308c\u3066\u3044\u307e\u3059\u3002\u819c\u306f\u3001\u5fae\u7d30\u306a\u6db2\u4f53\u304a\u3088\u3073\u30ac\u30b9\u306e\u7cbe\u88fd\u3001\u6c34\u51e6\u7406\u3001\u6cb9\u6c34\u5206\u96e2\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n<p>\u6b21\u306e\u8868\u306f\u3001\u4e3b\u306a\u7279\u6027\u3092\u307e\u3068\u3081\u305f\u3082\u306e\u3067\u3059\u3002<\/p>\n<table>\n<thead>\n<tr>\n<th>SiC\u30b0\u30ec\u30fc\u30c9<\/th>\n<th>\u5178\u578b\u7684\u306a\u7d14\u5ea6<\/th>\n<th>\u6700\u5927\u4f7f\u7528\u6e29\u5ea6<\/th>\n<th>\u8010\u85ac\u54c1\u6027<\/th>\n<th>\u4e3b\u306a\u5f37\u307f<\/th>\n<th>\u4e00\u822c\u7684\u306a\u308d\u904e\u7528\u9014<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>RBSiC (SiSiC)<\/td>\n<td>85\uff5e92\uff05SiC\uff08\u904a\u96e2Si\u3092\u542b\u3080\uff09<\/td>\n<td>\uff5e1350\u2103<\/td>\n<td>\u826f\u3044\uff08\u30d5\u30ea\u30fc\u306eSi\u306b\u3088\u3063\u3066\u5236\u9650\u3055\u308c\u308b\uff09<\/td>\n<td>\u512a\u308c\u305f\u5f37\u5ea6\u3001\u8010\u6469\u8017\u6027\u3001\u8cbb\u7528\u5bfe\u52b9\u679c<\/td>\n<td>DPF\u3001\u6eb6\u878d\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3001\u4e00\u822c\u7523\u696d\u7528<\/td>\n<\/tr>\n<tr>\n<td>SSiC<\/td>\n<td>&gt;99% SiC<\/td>\n<td>&gt;1600\u00b0C<\/td>\n<td>\u7d20\u6674\u3089\u3057\u3044<\/td>\n<td>\u6700\u9ad8\u7d14\u5ea6\u3001\u6700\u9ad8\u306e\u8010\u85ac\u54c1\u6027\/\u8010\u71b1\u6027<\/td>\n<td>\u8150\u98df\u6027\u5316\u5b66\u7269\u8cea\u3001\u533b\u85ac\u54c1\u3001\u534a\u5c0e\u4f53\u3001\u5fae\u7d30\u308d\u904e<\/td>\n<\/tr>\n<tr>\n<td>\u30a2\u30fc\u30eb\u30a8\u30b9\u30a2\u30a4\u30b7\u30fc<\/td>\n<td>\u9ad8SiC<\/td>\n<td>\uff5e1650\u2103<\/td>\n<td>\u975e\u5e38\u306b\u826f\u3044<\/td>\n<td>\u512a\u308c\u305f\u8010\u71b1\u885d\u6483\u6027\u3001\u9ad8\u3044\u591a\u5b54\u5ea6<\/td>\n<td>\u9ad8\u6e29\u30ac\u30b9\u308d\u904e\u3001\u7c97\u3044\u7c92\u5b50\u3001\u89e6\u5a92\u62c5\u4f53<\/td>\n<\/tr>\n<tr>\n<td>NBSiC<\/td>\n<td>Si3N4\u30d0\u30a4\u30f3\u30c0\u30fc\u4ed8\u304dSiC<\/td>\n<td>\uff5e1400\u2103<\/td>\n<td>\u826f\u597d\uff08\u7279\u306b\u6eb6\u878d\u975e\u9244\u91d1\u5c5e\u306b\u5bfe\u3057\u3066\uff09<\/td>\n<td>\u512a\u308c\u305f\u5f37\u5ea6\u3001\u4e00\u90e8\u306e\u91d1\u5c5e\u306b\u3088\u308b\u975e\u6fe1\u308c\u6027<\/td>\n<td>\u6eb6\u878d\u975e\u9244\u91d1\u5c5e<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>\u9069\u5207\u306a\u30b0\u30ec\u30fc\u30c9\u306e\u9078\u629e\u306b\u306f\u3001\u52d5\u4f5c\u6e29\u5ea6\u3001\u5316\u5b66\u74b0\u5883\u3001\u5fc5\u8981\u306a\u7c92\u5b50\u4fdd\u6301\u30b5\u30a4\u30ba\u3001\u6a5f\u68b0\u7684\u5fdc\u529b\u3001\u4e88\u7b97\u306e\u614e\u91cd\u306a\u8a55\u4fa1\u304c\u5fc5\u8981\u3067\u3059\u3002\u60c5\u5831\u306b\u57fa\u3065\u3044\u305f\u610f\u601d\u6c7a\u5b9a\u3092\u884c\u3046\u306b\u306f\u3001\u7d4c\u9a13\u8c4a\u5bcc\u306aSiC\u88fd\u54c1\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u306b\u76f8\u8ac7\u3059\u308b\u3053\u3068\u304c\u4e0d\u53ef\u6b20\u3067\u3059\u3002<\/p>\n<h2>\u30ab\u30b9\u30bf\u30e0SiC\u308d\u904e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u4e3b\u8981\u306a\u8a2d\u8a08\u4e0a\u306e\u8003\u616e\u4e8b\u9805<\/h2>\n<p>\u52b9\u679c\u7684\u306aSiC\u308d\u904e\u30b7\u30b9\u30c6\u30e0\u306e\u958b\u767a\u306f\u3001\u9069\u5207\u306a\u6750\u6599\u30b0\u30ec\u30fc\u30c9\u3092\u9078\u629e\u3059\u308b\u3060\u3051\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002\u6700\u9069\u306a\u6027\u80fd\u3001\u88fd\u9020\u53ef\u80fd\u6027\u3001\u304a\u3088\u3073\u9577\u5bff\u547d\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306b\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u8a2d\u8a08\u3092\u614e\u91cd\u306b\u691c\u8a0e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u306b\u3088\u308a\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u306fSiC\u30d5\u30a3\u30eb\u30bf\u30fc\u3092\u7279\u5b9a\u306e\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u5408\u308f\u305b\u3066\u8abf\u6574\u3067\u304d\u307e\u3059\u304c\u3001\u3053\u308c\u306b\u306f\u30e6\u30fc\u30b6\u30fc\u3068SiC\u30e1\u30fc\u30ab\u30fc\u9593\u306e\u5354\u8abf\u7684\u306a\u30a2\u30d7\u30ed\u30fc\u30c1\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n<p>\u91cd\u8981\u306a\u8a2d\u8a08\u4e0a\u306e\u8003\u616e\u4e8b\u9805\u306b\u306f\u3001\u4ee5\u4e0b\u304c\u542b\u307e\u308c\u307e\u3059\u3002<\/p>\n<ul>\n<li><strong>\u30d5\u30a3\u30eb\u30bf\u30fc\u306e\u5f62\u72b6\u3068\u69cb\u6210\uff1a<\/strong>\n<ul>\n<li><em>\u30aa\u30d7\u30b7\u30e7\u30f3\uff1a<\/em> SiC\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u30c1\u30e5\u30fc\u30d6\u3001\u30ad\u30e3\u30f3\u30c9\u30eb\u3001\u30c7\u30a3\u30b9\u30af\u3001\u30d7\u30ec\u30fc\u30c8\u3001\u30cf\u30cb\u30ab\u30e0\u3001\u30d5\u30a9\u30fc\u30e0\u3001\u8907\u96d1\u306a\u30de\u30eb\u30c1\u30c1\u30e3\u30cd\u30eb\u30a8\u30ec\u30e1\u30f3\u30c8\u306a\u3069\u3001\u3055\u307e\u3056\u307e\u306a\u5f62\u72b6\u3067\u88fd\u9020\u3067\u304d\u307e\u3059\u3002<\/li>\n<li><em>\u691c\u8a0e\u3059\u308b\uff1a<\/em> \u9078\u629e\u306f\u3001\u5229\u7528\u53ef\u80fd\u306a\u30b9\u30da\u30fc\u30b9\u3001\u6d41\u308c\u306e\u65b9\u5411\u3001\u5fc5\u8981\u306a\u8868\u9762\u7a4d\u3001\u304a\u3088\u3073\u6e05\u6383\u307e\u305f\u306f\u4ea4\u63db\u306e\u305f\u3081\u306e\u7d44\u307f\u7acb\u3066\/\u5206\u89e3\u306e\u5bb9\u6613\u3055\u306b\u3088\u3063\u3066\u7570\u306a\u308a\u307e\u3059\u3002\u305f\u3068\u3048\u3070\u3001\u7ba1\u72b6\u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u30af\u30ed\u30b9\u30d5\u30ed\u30fc\u308d\u904e\u306b\u4e00\u822c\u7684\u3067\u3042\u308a\u3001\u30c7\u30a3\u30b9\u30af\u306f\u30d0\u30c3\u30c1\u308d\u904e\u8a2d\u5b9a\u3067\u4f7f\u7528\u3055\u308c\u308b\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u7d30\u5b54\u5f84\u3001\u591a\u5b54\u5ea6\u3001\u304a\u3088\u3073\u900f\u904e\u6027\uff1a<\/strong>\n<ul>\n<li><em>\u7d30\u5b54\u30b5\u30a4\u30ba\uff08\u03bcm\uff09\uff1a<\/em> \u52b9\u679c\u7684\u306b\u4fdd\u6301\u3067\u304d\u308b\u6700\u5c0f\u7c92\u5b50\u30b5\u30a4\u30ba\u3092\u5b9a\u7fa9\u3057\u307e\u3059\u3002\u9664\u53bb\u3059\u308b\u6c5a\u67d3\u7269\u8cea\u3068\u4e00\u81f4\u3055\u305b\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><em>\u591a\u5b54\u6027\uff08\uff05\uff09\uff1a<\/em> \u30d5\u30a3\u30eb\u30bf\u30fc\u5a92\u4f53\u306e\u7a7a\u9699\u7387\u3002\u591a\u5b54\u5ea6\u304c\u9ad8\u3044\u307b\u3069\u3001\u4e00\u822c\u7684\u306b\u900f\u904e\u6027\u304c\u9ad8\u304f\u306a\u308a\u3001\u5727\u529b\u640d\u5931\u304c\u4f4e\u304f\u306a\u308a\u307e\u3059\u304c\u3001\u6a5f\u68b0\u7684\u5f37\u5ea6\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><em>\u900f\u904e\u6027\uff1a<\/em> \u591a\u5b54\u8cea\u5a92\u4f53\u3092\u6d41\u4f53\u304c\u901a\u904e\u3059\u308b\u5bb9\u6613\u3055\u306e\u5c3a\u5ea6\u3002\u6d41\u91cf\u3068\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u306b\u76f4\u63a5\u5f71\u97ff\u3057\u307e\u3059\u3002<\/li>\n<li><em>\u691c\u8a0e\u3059\u308b\uff1a<\/em> \u5fae\u7d30\u306a\u7c92\u5b50\u4fdd\u6301\u3001\u8a31\u5bb9\u53ef\u80fd\u306a\u6d41\u91cf\u3001\u304a\u3088\u3073\u5727\u529b\u640d\u5931\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u3068\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u7d30\u5b54\u69cb\u9020\uff08\u305f\u3068\u3048\u3070\u3001\u958b\u653e\u30bb\u30eb\u30d5\u30a9\u30fc\u30e0\u5bfe\u5c48\u66f2\u7d4c\u8def\u30bb\u30e9\u30df\u30c3\u30af\uff09\u3082\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u308d\u904e\u9762\u7a4d\uff1a<\/strong>\n<ul>\n<li><em>\u691c\u8a0e\u3059\u308b\uff1a<\/em> \u6709\u52b9\u308d\u904e\u9762\u7a4d\u304c\u5927\u304d\u3044\u307b\u3069\u3001\u30d5\u30e9\u30c3\u30af\u30b9\uff08\u5358\u4f4d\u9762\u7a4d\u3042\u305f\u308a\u306e\u6d41\u91cf\uff09\u304c\u6e1b\u5c11\u3057\u3001\u6c5a\u640d\u7387\u304c\u4f4e\u4e0b\u3057\u3001\u5727\u529b\u640d\u5931\u304c\u4f4e\u6e1b\u3055\u308c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u5229\u7528\u53ef\u80fd\u306a\u30d5\u30c3\u30c8\u30d7\u30ea\u30f3\u30c8\u3068\u30b3\u30b9\u30c8\u3078\u306e\u5f71\u97ff\u306f\u3001\u9054\u6210\u53ef\u80fd\u306a\u6700\u5927\u9762\u7a4d\u306b\u5f71\u97ff\u3057\u307e\u3059\u3002\u30d7\u30ea\u30fc\u30c4\u307e\u305f\u306f\u30de\u30eb\u30c1\u30c1\u30e3\u30cd\u30eb\u30a8\u30ec\u30e1\u30f3\u30c8\u306a\u3069\u306e\u8907\u96d1\u306a\u5f62\u72b6\u306f\u3001\u7279\u5b9a\u306e\u4f53\u7a4d\u5185\u306e\u8868\u9762\u7a4d\u3092\u5897\u3084\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6a5f\u68b0\u7684\u5f37\u5ea6\u3068\u69cb\u9020\u7684\u5b8c\u5168\u6027\uff1a<\/strong>\n<ul>\n<li><em>\u691c\u8a0e\u3059\u308b\uff1a<\/em> \u30d5\u30a3\u30eb\u30bf\u30fc\u306f\u3001\u52d5\u4f5c\u5727\u529b\uff08\u52d5\u4f5c\u4e2d\u304a\u3088\u3073\u9006\u6d17\u4e2d\u306e\u5dee\u5727\u3092\u542b\u3080\uff09\u3001\u71b1\u5fdc\u529b\uff08\u6e29\u5ea6\u30b5\u30a4\u30af\u30eb\u306b\u3088\u308b\uff09\u3001\u632f\u52d5\u3001\u304a\u3088\u3073\u8a2d\u7f6e\u304a\u3088\u3073\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u4e2d\u306e\u53d6\u308a\u6271\u3044\u306b\u8010\u3048\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002\u58c1\u306e\u539a\u3055\u3001\u88dc\u5f37\u6a5f\u80fd\uff08\u30ea\u30d6\u306a\u3069\uff09\u3001\u304a\u3088\u3073\u53d6\u308a\u4ed8\u3051\u30e1\u30ab\u30cb\u30ba\u30e0\u3092\u305d\u308c\u306b\u5fdc\u3058\u3066\u8a2d\u8a08\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u92ed\u3044\u89d2\u3068\u5fdc\u529b\u96c6\u4e2d\u70b9\u306f\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u30b7\u30fc\u30ea\u30f3\u30b0\u3068\u30cf\u30a6\u30b8\u30f3\u30b0\u306e\u7d71\u5408\uff1a<\/strong>\n<ul>\n<li><em>\u691c\u8a0e\u3059\u308b\uff1a<\/em> SiC\u30d5\u30a3\u30eb\u30bf\u30fc\u30a8\u30ec\u30e1\u30f3\u30c8\u3068\u305d\u306e\u30cf\u30a6\u30b8\u30f3\u30b0\u9593\u306e\u6f0f\u308c\u306e\u306a\u3044\u30b7\u30fc\u30eb\u3092\u78ba\u4fdd\u3059\u308b\u3053\u3068\u306f\u3001\u30d0\u30a4\u30d1\u30b9\u3092\u9632\u3050\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002\u8a2d\u8a08\u306f\u3001\u9069\u5207\u306a\u30b7\u30fc\u30ea\u30f3\u30b0\u30e1\u30ab\u30cb\u30ba\u30e0\uff08\u30ac\u30b9\u30b1\u30c3\u30c8\u3001O\u30ea\u30f3\u30b0\u3001\u5727\u7e2e\u7d99\u624b\u306a\u3069\uff09\u306b\u5bfe\u5fdc\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002SiC\u30d5\u30a3\u30eb\u30bf\u30fc\u3068\u30cf\u30a6\u30b8\u30f3\u30b0\u6750\u6599\uff08\u591a\u304f\u306e\u5834\u5408\u91d1\u5c5e\uff09\u9593\u306e\u5dee\u71b1\u81a8\u5f35\u306f\u3001\u7279\u306b\u9ad8\u6e29\u7528\u9014\u3067\u306f\u614e\u91cd\u306b\u7ba1\u7406\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6d41\u308c\u529b\u5b66\u3068\u5206\u5e03\uff1a<\/strong>\n<ul>\n<li><em>\u691c\u8a0e\u3059\u308b\uff1a<\/em> 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Tech\u306e\u3088\u3046\u306a\u77e5\u8b58\u8c4a\u5bcc\u306aSiC\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3068\u8a2d\u8a08\u6bb5\u968e\u306e\u65e9\u3044\u6bb5\u968e\u3067\u5354\u529b\u3059\u308b\u3053\u3068\u304c\u6700\u3082\u91cd\u8981\u3067\u3059\u3002\u5e45\u5e83\u3044\u30ab\u30b9\u30bf\u30e0SiC\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u88fd\u9020\u7d4c\u9a13\u3092\u6301\u3064\u5f53\u793e\u306f\u3001\u88fd\u9020\u53ef\u80fd\u306a\u8a2d\u8a08\u3001\u6750\u6599\u306e\u9078\u629e\u3001\u6027\u80fd\u306e\u6700\u9069\u5316\u306b\u95a2\u3059\u308b\u8cb4\u91cd\u306a\u6d1e\u5bdf\u3092\u63d0\u4f9b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u5f53\u793e\u306e <a href=\"https:\/\/sicarbtech.com\/ja\/customizing-support\/\">\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u30fb\u30b5\u30dd\u30fc\u30c8<\/a> 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mm\uff08\u00b10.001&#8243;\u304b\u3089\u00b10.004&#8243;\uff09\u306e\u7bc4\u56f2\u306b\u306a\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n<li><strong>\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u516c\u5dee\uff1a<\/strong> \u9ad8\u5ea6\u306a\u7814\u524a\u304a\u3088\u3073\u30e9\u30c3\u30d4\u30f3\u30b0\u6280\u8853\u306b\u3088\u308a\u3001\u3088\u308a\u5c0f\u3055\u3044\u3001\u8907\u96d1\u3055\u306e\u5c11\u306a\u3044\u6a5f\u80fd\u306e\u91cd\u8981\u306a\u5bf8\u6cd5\u306b\u5bfe\u3057\u3066\u3001\u00b10.005 mm\uff08\u00b10.0002&#8243;\uff09\u4ee5\u4e0b\u3068\u3044\u3046\u3055\u3089\u306b\u53b3\u3057\u3044\u516c\u5dee\u3092\u9054\u6210\u3067\u304d\u307e\u3059\u3002<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u5e7e\u4f55\u516c\u5dee\uff1a<\/strong> 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